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公开(公告)号：US20140339424A1
公开(公告)日：2014-11-20
申请号：US14277933
申请日：2014-05-15
IPC分类号： H01J37/05 , H01J37/252 , H01J37/244
CPC分类号： H01J37/05 , H01J37/244 , H01J37/252 , H01J49/022 , H01J49/027 , H01J49/424 , H01J2237/028 , H01J2237/057
摘要： A device for mass selective determination of at least one ion or of a plurality of ions is used, for example, in a measuring apparatus having an ion trap. The ion trap has a ring electrode having a first opening. A first electrode is arranged at the first opening. Furthermore, an amplifier for providing a radio-frequency storage signal for the ion trap and a first transformer are provided, said first transformer being connected to the amplifier and the first electrode in such a way that the radio-frequency storage signal is coupled into the first electrode via the first transformer.
摘要翻译： 例如，在具有离子阱的测量装置中使用用于质量选择性测定至少一种离子或多种离子的装置。 离子阱具有具有第一开口的环形电极。 第一电极布置在第一开口处。 此外，提供了一种用于提供用于离子阱的射频存储信号和第一变压器的放大器，所述第一变压器以这样的方式连接到放大器和第一电极，使得射频存储信号耦合到 第一电极经由第一变压器。
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2.发明授权公开(公告)号：US10304672B2
公开(公告)日：2019-05-28
申请号：US14967699
申请日：2015-12-14
摘要： The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage and mass spectrometric examination of the gas mixture. In one aspect of the disclosure, the ionization device is embodied for supplying ions and/or metastable particles of an ionization gas and/or for supplying electrons to the ion trap for ionizing the gas mixture to be examined and the mass spectrometer is embodied to determine the number of ions and/or metastable particles of the ionization gas present in the ion trap and/or the number of ions of a residual gas present in the ion trap prior to examining the gas mixture. The disclosure also relates to the use of such a mass spectrometer and a method for mass spectrometric examination of a gas mixture.
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3.发明申请MASS SPECTROMETER, USE THEREOF, AND METHOD FOR THE MASS SPECTROMETRIC EXAMINATION OF A GAS MIXTURE 审中-公开质谱仪，其使用方法和气体混合物质谱检测方法公开(公告)号：US20160111269A1
公开(公告)日：2016-04-21
申请号：US14967699
申请日：2015-12-14
CPC分类号： H01J49/04 , H01J49/0027 , H01J49/105 , H01J49/14 , H01J49/145 , H01J49/147
摘要： The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage and mass spectrometric examination of the gas mixture. In one aspect of the disclosure, the ionization device is embodied for supplying ions and/or metastable particles of an ionization gas and/or for supplying electrons to the ion trap for ionizing the gas mixture to be examined and the mass spectrometer is embodied to determine the number of ions and/or metastable particles of the ionization gas present in the ion trap and/or the number of ions of a residual gas present in the ion trap prior to examining the gas mixture. The disclosure also relates to the use of such a mass spectrometer and a method for mass spectrometric examination of a gas mixture.
摘要翻译： 本公开涉及用于气体混合物质谱检测的质谱仪，包括：用于气体混合物的存储和质谱检查的离子阱和离子阱。 在本公开的一个方面，电离装置被实施用于提供电离气体的离子和/或亚稳颗粒和/或用于向离子阱提供电子以电离待检查的气体混合物，并且体现质谱仪以确定 存在于离子阱中的离子和/或亚稳颗粒的数量和/或在检查气体混合物之前存在于离子阱中的残留气体的离子数。 本公开还涉及使用这种质谱仪和气体混合物的质谱检测方法。
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公开(公告)号：US09947504B2
公开(公告)日：2018-04-17
申请号：US15180735
申请日：2016-06-13
发明人： Klaus Hegele , Edgar Fichter , Michel Aliman , Dirk Preikszas , Christian Hendrich , Momme Mommsen , Michael Schnell , Kai Schubert
IPC分类号： H01J37/24 , H01J37/28 , H01J37/147 , H01J37/30 , H01J37/141 , H01J37/21 , H01J37/26
CPC分类号： H01J37/1477 , H01J37/141 , H01J37/147 , H01J37/21 , H01J37/24 , H01J37/265 , H01J37/28 , H01J37/3007 , H01J2237/103 , H01J2237/1504 , H01J2237/151 , H01J2237/152
摘要： The system described herein relates to a particle beam apparatus for analyzing and/or for processing an object and to a method for operating a particle beam apparatus. The particle beam apparatus is designed for example as an electron beam apparatus and/or an ion beam apparatus. The particle beam apparatus comprises a beam deflection device, for example an objective lens, which is provided with a first coil and a second coil. The first coil is operated with a first coil current. The second coil is operated with a second coil current. The first coil current and/or the second coil current may always be controlled in such a way that the sum of the first coil current and the second coil current (the summation current) or the difference between the first coil current and the second coil current (the difference current) is controlled to a setpoint value.
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公开(公告)号：US20170236683A1
公开(公告)日：2017-08-17
申请号：US15180735
申请日：2016-06-13
发明人： Klaus Hegele , Edgar Fichter , Michel Aliman , Dirk Preikszas , Christian Hendrich , Momme Mommsen , Michael Schnell , Kai Schubert
IPC分类号： H01J37/147 , H01J37/30 , H01J37/24 , H01J37/28
CPC分类号： H01J37/1477 , H01J37/141 , H01J37/147 , H01J37/21 , H01J37/24 , H01J37/265 , H01J37/28 , H01J37/3007 , H01J2237/103 , H01J2237/1504 , H01J2237/151 , H01J2237/152
摘要： The system described herein relates to a particle beam apparatus for analyzing and/or for processing an object and to a method for operating a particle beam apparatus. The particle beam apparatus is designed for example as an electron beam apparatus and/or an ion beam apparatus. The particle beam apparatus comprises a beam deflection device, for example an objective lens, which is provided with a first coil and a second coil. The first coil is operated with a first coil current. The second coil is operated with a second coil current. The first coil current and/or the second coil current may always be controlled in such a way that the sum of the first coil current and the second coil current (the summation current) or the difference between the first coil current and the second coil current (the difference current) is controlled to a setpoint value.
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公开(公告)号：US09035245B2
公开(公告)日：2015-05-19
申请号：US14277933
申请日：2014-05-15
IPC分类号： H01J37/05 , H01J49/02 , H01J49/42 , H01J37/244 , H01J37/252
CPC分类号： H01J37/05 , H01J37/244 , H01J37/252 , H01J49/022 , H01J49/027 , H01J49/424 , H01J2237/028 , H01J2237/057
摘要： A device for mass selective determination of at least one ion or of a plurality of ions is used, for example, in a measuring apparatus having an ion trap. The ion trap has a ring electrode having a first opening. A first electrode is arranged at the first opening. Furthermore, an amplifier for providing a radio-frequency storage signal for the ion trap and a first transformer are provided, said first transformer being connected to the amplifier and the first electrode in such a way that the radio-frequency storage signal is coupled into the first electrode via the first transformer.
摘要翻译： 例如，在具有离子阱的测量装置中使用用于质量选择性测定至少一种离子或多种离子的装置。 离子阱具有具有第一开口的环形电极。 第一电极设置在第一开口处。 此外，提供了一种用于提供用于离子阱的射频存储信号和第一变压器的放大器，所述第一变压器以这样的方式连接到放大器和第一电极，使得射频存储信号耦合到 第一电极经由第一变压器。
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公开(公告)号：US08766219B2
公开(公告)日：2014-07-01
申请号：US14022875
申请日：2013-09-10
CPC分类号： H01J37/26 , H01J37/244 , H01J37/256 , H01J37/28 , H01J2237/22
摘要： A method of operating a particle beam microscopy. A particle beam is scanned across a scanning region of a surface of the object. Particles are detected by a detector system for a plurality of impingement locations of the primary beam within the scanning region. A detector system generates detector signals which represent for each of the impingement locations an intensity of the detected particles. Material data of the interaction regions are calculated depending on the detector signals and depending on topography data, which represent a topography of the object surface in the scanning region.
摘要翻译： 一种操作粒子束显微镜的方法。 在物体的表面的扫描区域上扫描粒子束。 用于扫描区域内主波束的多个冲击位置的检测器系统检测颗粒。 检测器系统产生检测器信号，其针对每个冲击位置表示检测到的颗粒的强度。 取决于检测器信号并且取决于表示扫描区域中的物体表面的形貌的地形数据来计算相互作用区域的材料数据。
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公开(公告)号：US20140299577A1
公开(公告)日：2014-10-09
申请号：US14312363
申请日：2014-06-23
CPC分类号： H01J37/32009 , C23C16/405 , C23C16/44 , C23C16/4401 , C23C16/4408 , C23C16/45525 , C23C16/52 , H01J37/32963 , H01J37/32981 , H01J37/3299 , H01J49/027
摘要： The invention relates to an apparatus for surface processing on a substrate, for example for applying a coating to the substrate or for removing a coating from the substrate, wherein the apparatus comprises: a chamber enclosing an interior and serving for arranging the substrate for the surface processing, a process gas analyser for detecting at least one gaseous constituent of a residual gas atmosphere formed in the interior, wherein the process gas analyser comprises an ion trap for storing the gaseous constituent to be detected, and an ionization device for ionizing the gaseous constituent. The invention also relates to an associated method for monitoring surface processing on a substrate.
摘要翻译： 本发明涉及一种用于在基底上进行表面处理的装置，例如用于将涂层施加到基底或用于从基底移除涂层，其中该装置包括：包围内部并用于布置基底用于表面的腔室 处理气体分析器，用于检测内部形成的残留气体气氛中的至少一种气体成分，其中处理气体分析仪包括用于存储要检测的气态成分的离子阱，以及用于使气态成分离子化的离子化装置 。 本发明还涉及用于监测衬底上的表面处理的相关方法。
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公开(公告)号：US20140070099A1
公开(公告)日：2014-03-13
申请号：US14022875
申请日：2013-09-10
IPC分类号： H01J37/26
CPC分类号： H01J37/26 , H01J37/244 , H01J37/256 , H01J37/28 , H01J2237/22
摘要： A method of operating a particle beam microscopy. A particle beam is scanned across a scanning region of a surface of the object. Particles are detected by a detector system for a plurality of impingement locations of the primary beam within the scanning region. A detector system generates detector signals which represent for each of the impingement locations an intensity of the detected particles. Material data of the interaction regions are calculated depending on the detector signals and depending on topography data, which represent a topography of the object surface in the scanning region.
摘要翻译： 一种操作粒子束显微镜的方法。 在物体的表面的扫描区域上扫描粒子束。 用于扫描区域内主波束的多个冲击位置的检测器系统检测颗粒。 检测器系统产生检测器信号，其针对每个冲击位置表示检测到的颗粒的强度。 取决于检测器信号并且取决于表示扫描区域中的物体表面的形貌的地形数据来计算相互作用区域的材料数据。
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10.发明申请公开(公告)号：US20160372310A1
公开(公告)日：2016-12-22
申请号：US15244720
申请日：2016-08-23
CPC分类号： H01J49/0031 , C23C16/4405 , C23C16/52 , H01J37/32862 , H01J49/009 , H01J49/10 , H01J49/105 , H01J49/107 , H01J49/145 , H01J49/424 , H01J2237/335
摘要： A method includes parallel or serial ionization of a gas mixture by activating at least two ionization devices operating using different ionization procedures, and/or by ionizing the gas mixture in a detector to which the gas mixture and ions and/or metastable particles of an ionization gas are fed. The method also includes detecting the ionized gas mixture in the detector for the mass spectrometric examination thereof. A mass spectrometer for mass spectrometric examination of gas mixtures includes an ionization unit for ionizing a gas mixture and a detector for detecting the ionized gas mixture.
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