公开(公告)号：US11798775B2

公开(公告)日：2023-10-24

申请号：US17491084

申请日：2021-09-30

申请人： Axcelis Technologies, Inc.

发明人： Wilhelm Platow ,  Neil Bassom ,  Jonathan David

IPC分类号： H01J27/00 ,  H01J37/08 ,  H01J37/075 ,  H01J37/317

CPC分类号： H01J37/08 ,  H01J37/075 ,  H01J37/3171

摘要： An ion source has an arc chamber with a first end and a second end. A first cathode at the first end of the arc chamber has a first cathode body and a first filament disposed within the first cathode body. A second cathode at the second end of the arc chamber has a second cathode body and a second filament disposed within the second cathode body. A filament switch selectively electrically couples a filament power supply to each of the first filament and the second filament, respectively, based on a position of the filament switch. A controller controls the position of the filament switch to alternate the electrical coupling of the filament power supply between the first filament and the second filament for a plurality of switching cycles based on predetermined criteria. The predetermined criteria can be a duration of operation of the first filament and second filament.

公开(公告)号：US10204758B1

公开(公告)日：2019-02-12

申请号：US15725045

申请日：2017-10-04

申请人： Dalian University of Technology

发明人： Fei Gao ,  Younian Wang

IPC分类号： H01J27/00 ,  H01J49/10 ,  H01J27/20 ,  H01J37/08 ,  H01J37/24 ,  H01J37/05 ,  H01J37/32

摘要： The present invention discloses a positive and negative ion source based on radio-frequency inductively coupled discharge, comprising a tube, a middle portion of which is communicated with an intake pipe; discharge coils electrically connected to a matched network and a radio-frequency power supply successively are wound on the tube; one end of the tube is connected to a first cover plate in a sealed manner, and the first cover plate is connected with a positive ion extraction gate via an insulating medium; the positive ion extraction gate is electrically connected to a negative pole of a DC power supply; the other end of the tube is connected to a second cover plate in a sealed manner, the second cover plate is connected to a third cover plate in a sealed manner via a sidewall, and the third cover plate is connected with a negative ion extraction gate via an insulating medium; and the negative ion extraction gate is electrically connected to a positive pole of the DC power supply. In the present invention, the positive ions and the electrons and negative ions can be extracted simultaneously, and the problems of contamination of the ion source by particles sputtered from the backplane and overheating of the backplane are thus solved.

公开(公告)号：US09952179B2

公开(公告)日：2018-04-24

申请号：US14666856

申请日：2015-03-24

申请人： Rapsican Systems, Inc.

发明人： Andrey N. Vilkov ,  Jack A. Syage

IPC分类号： H01J27/00 ,  G01N27/62 ,  H01J37/08 ,  H01J49/10 ,  G01N33/22 ,  G01N33/00

CPC分类号： G01N27/622 ,  G01N33/0036 ,  G01N33/227 ,  H01J37/08 ,  H01J49/107

摘要： A dual source ionizer includes a first ionization source and a second ionization source. The first ionization source is configured to generate a first electric field. The first electric field has a first field strength that is insufficient to form NOx− ions. The second ionization source is configured to generate a second electric field. The second electric field has a second field strength that is sufficient to form ozone and the NOx− ions.

公开(公告)号：US09588004B2

公开(公告)日：2017-03-07

申请号：US14536102

申请日：2014-11-07

申请人： MKS Instruments, Inc.

发明人： Gerardo A. Brucker ,  Scott C. Heinbuch

IPC分类号： G01L21/34 ,  G01L21/32 ,  G01L21/30 ,  H05B31/26 ,  H01J37/04 ,  H01J41/02 ,  H01J41/06 ,  H01J41/00 ,  H01J37/08 ,  H01J27/00 ,  H01J27/02

CPC分类号： G01L21/34 ,  G01L21/30 ,  G01L21/32 ,  H01J27/00 ,  H01J27/02 ,  H01J37/04 ,  H01J37/08 ,  H01J41/00 ,  H01J41/02 ,  H01J41/06

摘要： A Long Lifetime Cold Cathode Ionization Vacuum Gauge Design with an extended anode electrode having an axially directed tip, a cathode electrode, and a baffle structure. The axially directed tip of the anode electrode can have a rounded exterior with a diameter at least 10% greater than the diameter of the anode electrode.

摘要翻译： 长寿命冷阴极电离真空计设计具有带有轴向引导尖端的延伸阳极电极，阴极电极和挡板结构。 阳极电极的轴向定向的尖端可以具有圆形的外部，其直径比阳极电极的直径大至少10％。

公开(公告)号：US09508521B2

公开(公告)日：2016-11-29

申请号：US14328754

申请日：2014-07-11

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Masahiro Yamaoka ,  Noriaki Arai

IPC分类号： H01J27/00 ,  H01J27/02 ,  H01J27/26 ,  H01J37/02 ,  H01J37/067 ,  H01J37/08 ,  H01J37/28 ,  H01J37/26

CPC分类号： H01J27/26 ,  H01J27/022 ,  H01J37/023 ,  H01J37/067 ,  H01J37/08 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/2803

摘要： An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.

摘要翻译： 根据本发明的离子束装置包括气体离子源（1），其包括由发射极基座（64）支撑的发射极尖端（21），包括引出电极（24）的电离室（15） 构造成围绕发射器尖端（21），以及气体供应管（25）。 引出电极（24）的中心轴线与离​​子照射光系统的中心轴线（14A）重叠或平行，通过发射极尖端（21）和发射极基座 （64）相对于所述电离室（15）的中心轴线是可倾斜的。 因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。

公开(公告)号：US09443634B2

公开(公告)日：2016-09-13

申请号：US12544290

申请日：2009-08-20

申请人： Thomas Edward Fairbairn

发明人： Thomas Edward Fairbairn

IPC分类号： H01J27/00 ,  G21K5/04 ,  F22B1/28

CPC分类号： G21K5/04 ,  F22B1/281

摘要： Provided is an atmospheric electron particle beam nozzle, with a nozzle body having a lumen disposed therethrough; an electrode that is disposed within the lumen, optionally concentrically with the nozzle body, to define an output chamber within the lumen that encompasses the electrode. Also provided is an atmospheric electron particle beam system that provides: a nozzle, that supplies a nozzle body having a lumen disposed therethrough; an electrode disposed within the lumen, optionally concentrically with the nozzle body, to define an output chamber; an RF generator that is in communication with a transformer having a number of turns and connected to a vacuum variable capacitor, and connected electrically to the electrode; and a fluid source that supplies the nozzle with a fluid. Also herein is a method of projecting an electron beam, by projecting an electron charged fluid sheath over a distance, and projecting the electron beam within the sheath.

摘要翻译： 本发明提供一种大气电子粒子束喷嘴，具有设置在其中的内腔的喷嘴体; 设置在所述内腔内的电极，可选地与所述喷嘴主体同心地限定在所述内腔内包围所述电极的输出室。 还提供了一种大气电子粒子束系统，其提供：喷嘴，其供应具有通过其设置的腔的喷嘴体; 设置在所述内腔内的电极，可选地与所述喷嘴主体同心地限定输出室; RF发生器，其与具有匝数的变压器连通并连接到真空可变电容器，并且与电极电连接; 以及向喷嘴供应流体的流体源。 此外，本文还是通过将电子束流体护套投射一定距离并且将电子束投射到护套内的方法来投射电子束。

公开(公告)号：US09196451B2

公开(公告)日：2015-11-24

申请号：US13353032

申请日：2012-01-18

申请人： Shouyin Zhang ,  Noel Smith ,  Walter Skoczylas

发明人： Shouyin Zhang ,  Noel Smith ,  Walter Skoczylas

IPC分类号： H01J27/00 ,  H01J37/08 ,  H01J27/16

CPC分类号： H01J37/08 ,  H01J27/16 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/026 ,  H01J2237/038 ,  H01J2237/0815 ,  H01J2237/31749

摘要： An inductively coupled plasma source for a focused charged particle beam system includes a dielectric liquid that insulates and cools the plasma chamber. A flow restrictor at an electrical potential that is a large fraction of the plasma potential reducing arcing because the voltage drop in the gas occurs primarily at relative high pressure.

摘要翻译： 用于聚焦带电粒子束系统的电感耦合等离子体源包括绝缘和冷却等离子体室的电介质液体。 由于气体中的电压降主要发生在相对较高的压力下，电流下的流量限制器是等离子体电位降低电弧的大部分。

公开(公告)号：US09159534B2

公开(公告)日：2015-10-13

申请号：US14159227

申请日：2014-01-20

申请人： FEI Company

发明人： Anthony Graupera ,  Sean Kellogg ,  Mark W. Utlaut ,  N. William Parker

IPC分类号： H01J27/00 ,  H01J37/30 ,  H01J37/08 ,  H01J37/18

CPC分类号： H01J37/3002 ,  H01J37/08 ,  H01J37/18 ,  H01J2237/006 ,  H01J2237/08 ,  H01J2237/0827

摘要： An openable gas passage provides for rapid pumpout of process or bake out gases in an inductively coupled plasma source in a charged particle beam system. A valve, typically positioned in the source electrode or part of the gas inlet, increases the gas conductance when opened to pump out the plasma chamber and closes during operation of the plasma source.

摘要翻译： 可打开的气体通道提供在带电粒子束系统中的电感耦合等离子体源中快速抽出工艺或烘烤气体。 通常定位在源电极或气体入口的一部分中的阀在打开时增加气体导电性，以便在等离子体源的操作期间泵出等离子体室并关闭。

公开(公告)号：US09118795B2

公开(公告)日：2015-08-25

申请号：US12805723

申请日：2010-08-17

申请人： Ho-jung Kim ,  U-in Chung ,  Jai-kwang Shin ,  Sun-il Kim ,  I-hun Song ,  Chang-jung Kim ,  Sang-hun Jeon

发明人： Ho-jung Kim ,  U-in Chung ,  Jai-kwang Shin ,  Sun-il Kim ,  I-hun Song ,  Chang-jung Kim ,  Sang-hun Jeon

IPC分类号： H01J27/00 ,  H04N9/04 ,  H04N5/3745 ,  H01L27/146

CPC分类号： H04N9/045 ,  H01L27/14643 ,  H04N5/3745

摘要： Image sensors and methods of operating the same. An image sensor includes a pixel array including a plurality of pixels. Each of the plurality of pixels includes a photo sensor, the voltage-current characteristics of which vary according to energy of incident light, and that generates a sense current determined by the energy of the incident light; a reset unit that is activated to generate a reference current, according to a reset signal for resetting at least one of the plurality of pixels; and a conversion unit that converts the sense current and the reference current into a sense voltage and a reference voltage, respectively.

摘要翻译： 图像传感器及其操作方法。 图像传感器包括包括多个像素的像素阵列。 多个像素中的每一个包括光电传感器，其电压 - 电流特性根据入射光的能量而变化，并且产生由入射光的能量确定的感测电流; 根据用于复位所述多个像素中的至少一个的复位信号，被激活以产生参考电流的复位单元; 以及转换单元，其将感测电流和参考电流分别转换为感测电压和参考电压。

公开(公告)号：US09117619B2

公开(公告)日：2015-08-25

申请号：US14534076

申请日：2014-11-05

申请人： Electronics and Telecommunications Research Institute

发明人： Dong-Ho Shin ,  Moon-Youn Jung

IPC分类号： B05D3/06 ,  B05D3/04 ,  H01J27/02 ,  H01J27/00 ,  H01J27/24

CPC分类号： H01J27/24 ,  G21K1/003 ,  H05H6/00

摘要： There is provided a device for generating a heavy-ion beam. The device includes a laser beam generating unit configured to generate a laser beam; a target configured to generate a heavy-ion beam by the laser beam; a laser optical system configured to focus the laser beam on the front of the target; and a plasma treating unit disposed at a rear surface of the target and configured to remove impurities within the target by plasma surface treatment that is performed by radiating cationic plasma onto the rear surface of the target.

摘要翻译： 提供了一种用于产生重离子束的装置。 该装置包括被配置为产生激光束的激光束产生单元; 被配置为通过所述激光束产生重离子束的目标; 激光光学系统，其被配置为将所述激光束聚焦在所述目标的前面; 以及等离子体处理单元，其设置在所述靶的后表面，并且被配置为通过等离子体表面处理来除去所述靶内的杂质，所述等离子体表面处理通