Quasi-volatile memory with enhanced sense amplifier operation

    公开(公告)号:US11848056B2

    公开(公告)日:2023-12-19

    申请号:US17529083

    申请日:2021-11-17

    CPC classification number: G11C16/26 G11C16/08 G11C16/24

    Abstract: A semiconductor memory device is implemented as a string of storage transistors with sense amplifier connected drain terminals and floating source terminals. In some embodiments, a method in the semiconductor memory device applies a bit line control (BLC) voltage with a voltage step down to the bias device during the read operation to reduce the settling time on the bit line, thereby shortening the access time for data read out from the storage transistors. In other embodiments, a method in the semiconductor memory device including an array of strings of storage transistors uses a current from a biased but unselected bit line as the sense amplifier reference current for reading stored data from a selected bit line. In one embodiment, the sense amplifier reference current is provided to a referenced sense amplifier to generate a sense amplifier data latch signal.

    Process for preparing a channel region of a thin-film transistor in a 3-dimensional thin-film transistor array

    公开(公告)号:US11844204B2

    公开(公告)日:2023-12-12

    申请号:US18050937

    申请日:2022-10-28

    Abstract: A process includes (a) providing a semiconductor substrate having a planar surface; (b) forming a plurality of thin-film layers above the planar surface of the semiconductor substrate, one on top of another, including among the thin-film layers first and second isolation layers, wherein a significantly greater concentration of a first dopant specie is provided in the first isolation layer than in the second isolation layer; (c) etching along a direction substantially orthogonal to the planar surface through the thin-films to create a trench having sidewalls that expose the thin-film layers; (d) depositing conformally a semiconductor material on the sidewalls of the trench; (e) annealing the first isolation layer at a predetermined temperature and a predetermined duration such that the first isolation layer act as a source of the first dopant specie which dopes a portion of the semiconductor material adjacent the first isolation layer; and (f) selectively etching the semiconductor material to remove the doped portion of the semiconductor material without removing the remainder of the semiconductor material.

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