Micromechanical device and method of manufacture thereof
    93.
    发明授权
    Micromechanical device and method of manufacture thereof 失效
    微机械装置及其制造方法

    公开(公告)号:US06940139B2

    公开(公告)日:2005-09-06

    申请号:US10806405

    申请日:2004-03-23

    Inventor: Hideyuki Funaki

    Abstract: A micromechanical switch comprises a substrate, at least one pair of support members fixed to the substrate, at least one pair of beam members placed in proximity and parallel to each other above the substrate, and connected to one of the support members, respectively, each of the beam members having a moving portion which is movable with a gap with respect to the substrate, and a contact portion provided on the moving portion, and a driving electrode placed on the substrate between the pair of beam members to attract the moving portions of the beam members in a direction parallel to the substrate with electrostatic force so that the contact portions of the beam members which are opposed to each other are short-circuited.

    Abstract translation: 微机械开关包括基板,固定到基板的至少一对支撑构件,至少一对梁构件,其彼此靠近并平行放置在基板上方并分别连接到支撑构件之一 所述梁构件具有可相对于所述基板间隙移动的移动部分和设置在所述移动部分上的接触部分,以及设置在所述一对梁构件之间的所述基板上的驱动电极,以吸引所述移动部分的移动部分 梁构件在与静电力平行的方向上使得梁构件彼此相对的接触部分短路。

    Semiconductor device having lateral IGBT
    95.
    发明授权
    Semiconductor device having lateral IGBT 失效
    具有横向IGBT的半导体器件

    公开(公告)号:US6064086A

    公开(公告)日:2000-05-16

    申请号:US72460

    申请日:1998-05-05

    CPC classification number: H01L29/66325 H01L29/0696 H01L29/7394 H01L29/7398

    Abstract: An n-type buffer layer and a p-type base layer are formed in the surface of the n.sup.- -type drift layer. A p.sup.+ -type drain layer is formed in the surface of the n-type buffer layer. An n.sup.+ -type source layer and a p.sup.+ -type contact layer are formed in the surface of the p-type base layer. A main gate electrode is arranged to face, through a gate oxide film, a surface of the p-type base layer which is interposed between the n.sup.+ -type source layer and the n.sup.- -type drift layer. An n-type relay layer is formed in the surface of the n.sup.- -type drift layer to face the n.sup.+ -type source layer through the p-type base layer under the main gate electrode. The n-type relay layer extends from the n.sup.- -type drift layer into the p-type base layer. The n-type relay layer decreases the channel resistance.

    Abstract translation: 在n型漂移层的表面形成n型缓冲层和p型基底层。 在n型缓冲层的表面形成p +型漏极层。 在p型基底层的表面形成n +型源极层和p +型接触层。 主栅极布置成通过栅极氧化膜面对介于n +型源极层和n型漂移层之间的p型基极层的表面。 在n型漂移层的表面形成n型继电器层,通过主栅电极下方的p型基极层面对n +型源极层。 n型继电器层从n型漂移层延伸到p型基极层。 n型继电器层降低了通道电阻。

    Lateral hall element
    96.
    发明授权
    Lateral hall element 失效
    横向厅元素

    公开(公告)号:US5679973A

    公开(公告)日:1997-10-21

    申请号:US624103

    申请日:1996-03-29

    CPC classification number: H01L43/06 Y10S73/03

    Abstract: A lateral Hall element includes a substrate, a first-conductivity type active layer formed on the substrate, a first second-conductivity type semiconductor layer formed to surround the first-conductivity type active layer and formed to a depth to reach the substrate, a pair of first first-conductivity type semiconductor layers of high impurity concentration selectively formed with a preset distance apart from each other on the surface of the first-conductivity type active layer, current supply electrodes respectively formed on the pair of first first-conductivity type semiconductor layers, a pair of second first-conductivity type semiconductor layers of high impurity concentration formed with a preset distance apart from each other on the surface of the first-conductivity type active layer in position different from the first first-conductivity type semiconductor layers, sensor electrodes respectively formed on the pair of second first-conductivity type semiconductor layers, and a plurality of second second-conductivity type semiconductor layers formed on the surface of the first-conductivity type active layer in position different from the first and second first-conductivity type semiconductor layers.

    Abstract translation: 横向霍尔元件包括衬底,形成在衬底上的第一导电型有源层,形成为围绕第一导电类型有源层并形成为深度到达衬底的第一第二导电类型半导体层,一对 在所述第一导电型有源层的表面上选择性地形成为彼此相隔预定距离的高杂质浓度的第一第一导电型半导体层,分别形成在所述一对第一第一导电类型半导体层 在与第一第一导电类型半导体层不同的位置处的第一导电类型有源层的表面上彼此隔开预定距离形成有高杂质浓度的一对第二第一导电型半导体层,传感器电极 分别形成在所述一对第二第一导电型半导体层和多个第一导电型半导体层上 形成在与第一和第二第一导电类型半导体层不同的位置的第一导电类型有源层的表面上的第二第二导电类型半导体层的等离子体。

    Hall element for detecting a magnetic field perpendicular to a substrate
    99.
    发明授权
    Hall element for detecting a magnetic field perpendicular to a substrate 失效
    用于检测垂直于衬底的磁场的霍尔元件

    公开(公告)号:US5548151A

    公开(公告)日:1996-08-20

    申请号:US385058

    申请日:1995-02-07

    CPC classification number: H01L43/065

    Abstract: In a Hall element, a semiconductor layer is surrounded by a first trench filled with an insulator. A first current supply portion of an n+-type semiconductor is disposed adjacent the semiconductor layer and the first trench. Second current supply portions are also disposed adjacent the semiconductor layer and the first trench and symmetrical with respect to the first current supply portion. Sensor portions of an n+-type semiconductor are disposed adjacent the semiconductor layer and the first trench at about the center between the first and second current supply portions, respectively. A magnetic flux perpendicular to the upper surface of the semiconductor layer can be detected by the foregoing arrangement.

    Abstract translation: 在霍尔元件中,半导体层由填充有绝缘体的第一沟槽围绕。 n +型半导体的第一电流供应部分邻近半导体层和第一沟槽设置。 第二电流供应部分也邻近半导体层和第一沟槽设置并相对于第一电流供应部分对称。 n +型半导体的传感器部分分别在第一和第二电流供应部分之间的大约中心附近设置在半导体层和第一沟槽附近。 可以通过上述配置来检测垂直于半导体层的上表面的磁通量。

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