Abstract:
A hybrid type semiconductor integrated circuit includes a semiconductor active region provided in a first area of a substrate; an insulating region surrounding side surfaces of the semiconductor active region; a mechanical electrode provided in a second area adjacent to the first area and surrounded by a part of the insulating region and a trench; and a interconnection layer one end of which is connected to the mechanical electrode and of which the other end extends to the semiconductor active region via a part of the insulating region.
Abstract:
A micromechanical switch comprises a substrate, at least one pair of support members fixed to the substrate, at least one pair of beam members placed in proximity and parallel to each other above the substrate, and connected to one of the support members, respectively, each of the beam members having a moving portion which is movable with a gap with respect to the substrate, and a contact portion provided on the moving portion, and a driving electrode placed on the substrate between the pair of beam members to attract the moving portions of the beam members in a direction parallel to the substrate with electrostatic force so that the contact portions of the beam members which are opposed to each other are short-circuited.
Abstract:
A micromechanical switch comprises a substrate, at least one pair of support members fixed to the substrate, at least one pair of beam members placed in proximity and parallel to each other above the substrate, and connected to one of the support members, respectively, each of the beam members having a moving portion which is movable with a gap with respect to the substrate, and a contact portion provided on the moving portion, and a driving electrode placed on the substrate between the pair of beam members to attract the moving portions of the beam members in a direction parallel to the substrate with electrostatic force so that the contact portions of the beam members which are opposed to each other are short-circuited.
Abstract:
The present invention includes a plurality of working electrodes on which the same type of nucleic acid probes each having a nucleic acid complementary to a target nucleic acid are immobilized and which have different sensor areas and a normalization circuit which normalizes detection signals obtained by the working electrodes with respect to the respective sensor areas.
Abstract:
An n-type buffer layer and a p-type base layer are formed in the surface of the n.sup.- -type drift layer. A p.sup.+ -type drain layer is formed in the surface of the n-type buffer layer. An n.sup.+ -type source layer and a p.sup.+ -type contact layer are formed in the surface of the p-type base layer. A main gate electrode is arranged to face, through a gate oxide film, a surface of the p-type base layer which is interposed between the n.sup.+ -type source layer and the n.sup.- -type drift layer. An n-type relay layer is formed in the surface of the n.sup.- -type drift layer to face the n.sup.+ -type source layer through the p-type base layer under the main gate electrode. The n-type relay layer extends from the n.sup.- -type drift layer into the p-type base layer. The n-type relay layer decreases the channel resistance.
Abstract:
A lateral Hall element includes a substrate, a first-conductivity type active layer formed on the substrate, a first second-conductivity type semiconductor layer formed to surround the first-conductivity type active layer and formed to a depth to reach the substrate, a pair of first first-conductivity type semiconductor layers of high impurity concentration selectively formed with a preset distance apart from each other on the surface of the first-conductivity type active layer, current supply electrodes respectively formed on the pair of first first-conductivity type semiconductor layers, a pair of second first-conductivity type semiconductor layers of high impurity concentration formed with a preset distance apart from each other on the surface of the first-conductivity type active layer in position different from the first first-conductivity type semiconductor layers, sensor electrodes respectively formed on the pair of second first-conductivity type semiconductor layers, and a plurality of second second-conductivity type semiconductor layers formed on the surface of the first-conductivity type active layer in position different from the first and second first-conductivity type semiconductor layers.
Abstract:
A high breakdown voltage semiconductor device comprising a semiconductor substrate, an insulating layer formed on the semiconductor substrate, an active layer formed on the insulating layer and made of a high resistance semiconductor of a first conductivity type, a first impurity region of the first conductivity type formed in the active layer, and a second impurity region of a second conductivity type formed in the active layer and spaced apart from the first impurity region by a predetermined distance. The first impurity region is formed of diffusion layers. The diffusion layers are superimposed one upon another and differ in diffusion depth or diffusion window width, or both.
Abstract:
A high breakdown voltage semiconductor apparatus comprises a substrate having an insulating layer formed thereon, a high resistance semiconductor layer of a first conductivity type formed on said insulating layer, a base region of the first conductivity type formed selectively in a surface region of the high resistance semiconductor layer, a drift region of a second conductivity type formed selectively in the surface region of the high resistance semiconductor layer so as not to reach the insulating layer, a source region of the second conductivity type formed in the base region, a drain region formed in the drift region, a gate electrode formed on a region between the source region and the drift region, with a gate insulating film interposed between the gate electrode and the region between the source region and the drift region, a source electrode provided in contact with the base region and the source region, a drain electrode provided in contact with the drain region. The dosage of impurities in the high resistance semiconductor layer is 2.times.10.sup.12 cm.sup.-2 to 3.times.10.sup.12 cm.sup.-2 and the dosage of impurities in the drift layer is 1.times.10.sup.12 cm.sup.-2 to 2.times.10.sup.12 cm.sup.-2.
Abstract translation:一种高耐压电压半导体装置,包括:在其上形成有绝缘层的基板,形成在所述绝缘层上的第一导电类型的高电阻半导体层,所述第一导电类型的基极区选择性地形成在所述高电阻的表面区域中 半导体层,选择性地形成在高电阻半导体层的表面区域中以便不到达绝缘层的第二导电类型的漂移区域,形成在基极区域中的第二导电类型的源极区域,形成的漏极区域 在漂移区域中,形成在源极区域和漂移区域之间的区域上的栅电极,栅极绝缘膜插入在栅极电极和源极区域与漂移区域之间的区域中,源极电极与 所述基极区域和所述源极区域,设置成与所述漏极区域接触的漏极电极。 高电阻半导体层中的杂质用量为2×10 12 cm -2至3×10 12 cm -2,漂移层中的杂质用量为1×10 12 cm -2至2×10 12 cm -2。
Abstract:
In a Hall element, a semiconductor layer is surrounded by a first trench filled with an insulator. A first current supply portion of an n+-type semiconductor is disposed adjacent the semiconductor layer and the first trench. Second current supply portions are also disposed adjacent the semiconductor layer and the first trench and symmetrical with respect to the first current supply portion. Sensor portions of an n+-type semiconductor are disposed adjacent the semiconductor layer and the first trench at about the center between the first and second current supply portions, respectively. A magnetic flux perpendicular to the upper surface of the semiconductor layer can be detected by the foregoing arrangement.
Abstract translation:在霍尔元件中,半导体层由填充有绝缘体的第一沟槽围绕。 n +型半导体的第一电流供应部分邻近半导体层和第一沟槽设置。 第二电流供应部分也邻近半导体层和第一沟槽设置并相对于第一电流供应部分对称。 n +型半导体的传感器部分分别在第一和第二电流供应部分之间的大约中心附近设置在半导体层和第一沟槽附近。 可以通过上述配置来检测垂直于半导体层的上表面的磁通量。
Abstract:
According to one embodiment, a solid state imaging device includes a sensor substrate curved such that an upper face having a plurality of pixels formed is recessed and an imaging lens provided on the upper face side.