Silicon carbide interconnect for semiconductor components and method of fabrication
    103.
    发明授权
    Silicon carbide interconnect for semiconductor components and method of fabrication 失效
    用于半导体元件的碳化硅互连和制造方法

    公开(公告)号:US06563215B1

    公开(公告)日:2003-05-13

    申请号:US09480027

    申请日:2000-01-10

    IPC分类号: H01L2940

    摘要: An interconnect for semiconductor components includes a substrate, and interconnect contacts on the substrate for electrically engaging component contacts on the components. The interconnect contacts include silicon carbide conductive layers, and conductors in electrical communication with the silicon carbide conductive layers. The silicon carbide conductive layers provides a wear resistant surface, and improved heat transfer between the component contacts and the interconnect contacts. The silicon carbide conductive layers can comprise doped silicon carbide, or alternately thermally oxidized silicon carbide. The interconnect can be configured for use with a testing apparatus for testing discrete components such as dice or chip scale packages, or alternately for use with a testing apparatus for testing wafer sized components, such as wafers, panels and boards. In addition, the interconnect can be configured for constructing semiconductor packages and electronic assemblies such as multi chip modules.

    摘要翻译: 用于半导体部件的互连件包括衬底和衬底上的互连触点,用于电连接部件上的组件触点。 互连触点包括碳化硅导电层和与碳化硅导电层电连通的导体。 碳化硅导电层提供耐磨表面,并且改善部件触点和互连触点之间的热传递。 碳化硅导电层可以包括掺杂的碳化硅,或交替地热氧化的碳化硅。 互连可以被配置用于与用于测试分立元件(例如骰子或芯片尺寸封装)的测试设备一起使用,或者替代地与用于测试晶片尺寸的元件(例如晶片,面板和板)的测试设备一起使用。 此外,互连可以被配置用于构造半导体封装和诸如多芯片模块的电子组件。

    Test carrier with molded interconnect for testing semiconductor components
    104.
    发明授权
    Test carrier with molded interconnect for testing semiconductor components 失效
    带有模拟互连的测试载体,用于测试半导体元件

    公开(公告)号:US06544461B1

    公开(公告)日:2003-04-08

    申请号:US09677555

    申请日:2000-10-02

    IPC分类号: B29C4502

    CPC分类号: G01R1/0483

    摘要: A semiconductor carrier for testing semiconductor components, such as bare dice and chip scale packages, and a method for fabricating the carrier are provided. The carrier includes a molded plastic base, a lead frame, and an interconnect. The interconnect includes contacts for making temporary electrical connections with corresponding contacts (e.g., bond pads, solder balls) on the components. The carrier is fabricated by attaching the interconnect to the lead frame, and then molding the plastic base to the interconnect and lead frame. An alternate embodiment carrier includes a board to which multiple interconnects are molded or laminated. In addition, clip members retain the components on the board in electrical communication with the interconnects. A gasket may be used to protect the interconnect contacts during the molding step.

    摘要翻译: 提供了用于测试半导体部件的半导体载体,例如裸芯片和芯片级封装,以及制造载体的方法。 载体包括模制塑料基底,引线框架和互连件。 互连件包括用于与组件上的相应触点(例如,接合焊盘,焊球)进行临时电连接的触点。 通过将互连件附接到引线框架,然后将塑料基底模制到互连和引线框架来制造载体。 替代实施例的载体包括多个互连件模制或层压的板。 另外,夹子构件保持电路板上与组件电连通的组件。 可以在模制步骤期间使用垫圈来保护互连触点。

    Methods of semiconductor processing
    108.
    发明授权
    Methods of semiconductor processing 有权
    半导体加工方法

    公开(公告)号:US06472240B2

    公开(公告)日:2002-10-29

    申请号:US09835052

    申请日:2001-04-13

    IPC分类号: H01L2166

    摘要: The present invention includes electronic device workpieces, methods of semiconductor processing and methods of sensing temperature of an electronic device workpiece. In one aspect, the invention provides an electronic device workpiece including: a substrate having a surface; a temperature sensing device borne by the substrate; and an electrical interconnect formed upon the surface of the substrate, the electrical interconnect being electrically coupled with the temperature sensing device. In another aspect, a method of sensing temperature of an electronic device workpiece includes: providing an electronic device workpiece; supporting a temperature sensing device using the electronic device workpiece; providing an electrical interconnect upon a surface of the electronic device workpiece; electrically coupling the electrical interconnect with the temperature sensing device; and sensing temperature of the electronic device workpiece using the temperature sensing device.

    摘要翻译: 本发明包括电子设备工件,半导体处理方法和感测电子设备工件温度的方法。 一方面,本发明提供了一种电子设备工件,包括:具有表面的基板; 由基板承载的温度感测装置; 以及形成在所述基板的表面上的电互连,所述电互连件与所述温度感测装置电耦合。 另一方面,一种感测电子设备工件的温度的方法包括:提供电子设备工件; 支持使用电子设备工件的温度感测装置; 在所述电子设备工件的表面上提供电互连; 将电互连电气耦合到温度感测装置; 以及使用温度感测装置感测电子装置工件的温度。

    Apparatus for forming coaxial silicon interconnects
    109.
    发明授权
    Apparatus for forming coaxial silicon interconnects 失效
    用于形成同轴硅互连的装置

    公开(公告)号:US06469532B2

    公开(公告)日:2002-10-22

    申请号:US10068082

    申请日:2002-02-06

    IPC分类号: G01R3102

    CPC分类号: G01R31/2886 G01R1/0408

    摘要: An interconnect apparatus for testing bare semiconductor dice comprises raised contact members on a semiconductive substrate. The contact members are covered with an insulation layer an a conductive cap connected by a conductive trace to a testing circuit. The trace is covered with coaxial layers of a silicon-containing insulation an a metal for shielding the trace from “crosstalk” and other interference. An apparatus for simultaneous testing of multiple dies on a wafer has thermal expansion characteristic matching those of the semiconductor die or wafer and provides clean signals.

    摘要翻译: 用于测试裸半导体裸片的互连装置包括半导体衬底上的凸起接触构件。 接触构件被绝缘层覆盖,导电盖通过导电迹线连接到测试电路。 迹线覆盖有同轴层的硅含绝缘材料和金属,用于屏蔽“串扰”和其他干扰。 用于在晶片上同时测试多个管芯的装置具有与半导体管芯或晶片匹配的热膨胀特性,并提供干净的信号。