公开(公告)号：US10317291B2

公开(公告)日：2019-06-11

申请号：US15228790

申请日：2016-08-04

Applicant: Brewer Science Inc.

Inventor： Jonathan Fury ,  Nicholas Anthony ,  Ryan Giedd

IPC: G01K1/18 ,  G01K3/10 ,  G01K7/16 ,  G01K7/20

Abstract: A sensor system comprises a first sensor, a second sensor, a high pass filter, and a summation unit. The first sensor senses an environmental parameter and outputs a first electronic signal with a response having a first time constant. The second sensor senses the environmental parameter and outputs a second electronic signal with a response having a second time constant greater than the first time constant. The high pass filter has a filter time constant roughly equal to the second time constant and filters the first electronic signal, outputting a filtered first electronic signal in which changes in a level or value of the first electronic signal with transition times that are less than the filter time constant are passed. The summation unit receives the filtered first electronic signal and the second electronic signal and outputs a sum of the filtered first electronic signal and the second electronic signal.

公开(公告)号：US20180096838A1

公开(公告)日：2018-04-05

申请号：US15724662

申请日：2017-10-04

Applicant: Brewer Science Inc.

Inventor： Jinhua Dai ,  Joyce Lowes

IPC: H01L21/027 ,  C08F120/68 ,  C08F120/18 ,  B05D1/00 ,  H01L21/02

CPC classification number: H01L21/0271 ,  B05D1/005 ,  C08F120/18 ,  C08F120/68 ,  C08F220/18 ,  C08L53/00 ,  C09D133/10 ,  G03F7/0002 ,  H01L21/02118 ,  H01L21/02282 ,  H01L21/02304 ,  H01L21/02345 ,  H01L21/0337 ,  C08F2220/1858 ,  C08F2220/325 ,  C08F220/06

Abstract: The present invention is broadly concerned with materials, processes, and structures that allow an underlayer to be imaged directly using conventional lithography, thus avoiding the photoresist processing steps required by prior art directed self-assembly (DSA) processes. The underlayers can be tailored to favor a selected block of the DSA block co-polymers (BCP), depending on the pattern, and can be formulated either to initially be neutral to the BCP and switch to non-neutral after photoexposure, or can initially be non-neutral to the BCP and switch to neutral after exposure. These materials allow fast crosslinking to achieve solvent resistance and possess good thermal stability.

公开(公告)号：US20180067066A1

公开(公告)日：2018-03-08

申请号：US15695557

申请日：2017-09-05

Applicant: Brewer Science Inc.

Inventor： Ryan E. Giedd ,  Jonathan J. Fury ,  Erik Harker ,  Christopher Landorf

IPC: G01N27/14 ,  G01N33/00

CPC classification number: G01N27/14 ,  G01N27/124 ,  G01N33/0031 ,  G01N33/0036

Abstract: A process and electronic hardware and software system for rapidly heating and cooling an active sensing layer of a gas sensor is provided. A series of high-energy pulses is run through a CNT electrically-active layer, heating the layer to varying temperatures. The influence by various gases on the electrical conductivity of the layer can be used to identify gases (e.g., water vapor, alcohol, methane, O2, CO2, and CO). Advantageously, the same structure can also be used as a nanoheater, either within or outside the context of the gas sensor. The device can acquire a unique gas spectra in seconds, and thus accurately determine gas type and mixtures of gases based on a library of known spectra.

公开(公告)号：US20180019156A1

公开(公告)日：2018-01-18

申请号：US15650535

申请日：2017-07-14

Applicant: Brewer Science Inc.

Inventor： Cristina R. Matos-Perez ,  Tony D. Flaim ,  Arthur O. Southard ,  Lisa M. Kirchner ,  Deborah Blumenshine

IPC: H01L21/762 ,  C07C65/30 ,  B41C1/10 ,  C07C65/21 ,  C08G69/38 ,  C07C243/12

CPC classification number: H01L21/762 ,  B41C1/1033 ,  C07C65/21 ,  C07C65/30 ,  C07C243/12 ,  C08G12/06 ,  C08G18/3872 ,  C08G18/7671 ,  C08G69/38 ,  C08G73/02

Abstract: Dielectric materials with optimal mechanical properties for use in laser ablation patterning are proposed. These materials include a polymer selected from the group consisting of polyureas, polyurethane, and polyacylhydrazones. New methods to prepare suitable polyacylhydrazones are also provided. Those methods involve mild conditions and result in a soluble polymer that is stable at room temperature and can be incorporated into formulations that can be coated onto microelectronic substrates. The dielectric materials exhibit high elongation, low CTE, low cure temperature, and leave little to no debris post-ablation.

公开(公告)号：US09738805B2

公开(公告)日：2017-08-22

申请号：US14164156

申请日：2014-01-25

Applicant: Brewer Science Inc.

Inventor： Christopher Landorf ,  Carissa Jones ,  Marriana Nelson

IPC: C01B31/02 ,  C09D11/52 ,  B82Y30/00 ,  B82Y40/00 ,  H01B1/24

CPC classification number: C09D11/52 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/174 ,  H01B1/24

Abstract: New methods for preparing carbon nanotube films having enhanced properties are provided. The method broadly provides reacting carbon nanotubes (CNTs) and compounds comprising a polyaromatic moieties in the presence a strong acid. During the reaction process, the polyaromatic moieties noncovalently bond with the carbon nanotubes. Additionally, the functionalizing moieties are further functionalized by the strong acid. This dual functionalization allows the CNTs to be dispersed at concentrations greater than 0.5 g/L in solution without damaging their desirable electronic and physical properties. The resulting solutions are stable on the shelf for months without observable bundling, and can be incorporated into solutions for printing conductive traces by a variety of means, including inkjet, screen, flexographic, gravure printing, or spin and spray coating.

公开(公告)号：US20170038263A1

公开(公告)日：2017-02-09

申请号：US15228790

申请日：2016-08-04

Applicant: Brewer Science Inc.

Inventor： Jonathan Fury ,  Nicholas Anthony ,  Ryan Giedd

IPC: G01K7/16

CPC classification number: G01K7/16 ,  G01K1/18 ,  G01K3/10 ,  G01K7/20

Abstract: A sensor system comprises a first sensor, a second sensor, a high pass filter, and a summation unit. The first sensor senses an environmental parameter and outputs a first electronic signal with a response having a first time constant. The second sensor senses the environmental parameter and outputs a second electronic signal with a response having a second time constant greater than the first time constant. The high pass filter has a filter time constant roughly equal to the second time constant and filters the first electronic signal, outputting a filtered first electronic signal in which changes in a level or value of the first electronic signal with transition times that are less than the filter time constant are passed. The summation unit receives the filtered first electronic signal and the second electronic signal and outputs a sum of the filtered first electronic signal and the second electronic signal.

Abstract translation: 传感器系统包括第一传感器，第二传感器，高通滤波器和求和单元。 第一传感器感测环境参数并输出具有第一时间常数的响应的第一电子信号。 第二传感器感测环境参数，并输出具有大于第一时间常数的第二时间常数的响应的第二电子信号。 高通滤波器具有大致等于第二时间常数的滤波器时间常数，并对第一电子信号进行滤波，输出滤波后的第一电子信号，其中第一电子信号的电平或值的变化具有小于 过滤器时间常数通过。 求和单元接收经滤波的第一电子信号和第二电子信号，并输出滤波的第一电子信号和第二电子信号的和。

公开(公告)号：US09328246B2

公开(公告)日：2016-05-03

申请号：US13743965

申请日：2013-01-17

Applicant: Brewer Science Inc.

Inventor： Daniel M. Sullivan ,  Charlyn Stroud ,  Jinhua Dai

IPC: G03F7/11 ,  G03F7/40 ,  C09D5/00 ,  G03F7/30 ,  G03F7/09 ,  C07D303/23 ,  C07C69/76 ,  C07C69/94 ,  H01L21/027

CPC classification number: C09D5/006 ,  C07C69/76 ,  C07C69/94 ,  C07C2603/24 ,  C07C2603/74 ,  C07D303/23 ,  G03F7/091 ,  G03F7/094 ,  G03F7/30 ,  G03F7/40 ,  H01L21/0276 ,  Y10T428/265 ,  Y10T428/31511 ,  Y10T428/31525 ,  Y10T428/31529

Abstract: Nonpolymeric compounds, compositions, and methods for forming microelectronic structures, and the structures formed therefrom are provided. The nonpolymeric compounds are ring-opened, epoxide-adamantane derivatives that comprise at least two epoxy moieties and at least one adamantyl group, along with at least one chemical modification group, such as a chromophore, bonded to a respective epoxy moiety. Anti-reflective and/or planarization compositions can be formed using these compounds and used in lithographic processes, including fabrication of microelectronic structures.

Abstract translation: 提供用于形成微电子结构的非聚合物，组合物和方法以及由其形成的结构。 非聚合化合物是包含至少两个环氧部分和至少一个金刚烷基的开环环氧金刚烷衍生物，以及与相应环氧部分键合的至少一个化学修饰基团，例如发色团。 抗反射和/或平面化组合物可以使用这些化合物形成并用于光刻工艺，包括微电子结构的制造。

公开(公告)号：US09249013B2

公开(公告)日：2016-02-02

申请号：US13862720

申请日：2013-04-15

Applicant: Brewer Science Inc.

Inventor： Yubao Wang ,  Mary Ann Hockey ,  Douglas J. Guerrero ,  Vandana Krishnamurthy ,  Robert C. Cox

IPC: G03F7/26 ,  B81C1/00 ,  B81B1/00 ,  H01L21/02 ,  H01L21/033 ,  H01L21/311

CPC classification number: B81C1/0038 ,  B81B1/00 ,  B81C1/00031 ,  B81C2201/0149 ,  G03F7/0002 ,  G03F7/26 ,  H01L21/02126 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/31144 ,  Y10T428/24612 ,  Y10T428/24802

Abstract: Compositions for directed self-assembly patterning techniques are provided which avoid the need for separate anti-reflective coatings and brush neutral layers in the process. Methods for directed self-assembly are also provided in which a self-assembling material, such as a directed self-assembly block copolymer, can be applied directly to the silicon hardmask neutral layer and then self-assembled to form the desired pattern. Directed self-assembly patterned structures are also disclosed herein.

Abstract translation: 提供了用于定向自组装图案化技术的组合物，其避免在该过程中需要单独的抗反射涂层和刷中性层。 还提供了用于定向自组装的方法，其中诸如定向自组装嵌段共聚物的自组装材料可以直接施加到硅硬掩模中性层，然后自组装形成所需图案。 本文还公开了定向自组装图案结构。

公开(公告)号：US09123541B2

公开(公告)日：2015-09-01

申请号：US14242551

申请日：2014-04-01

Applicant: Brewer Science Inc.

Inventor： Kui Xu ,  Mary Ann Hockey ,  Douglas Guerrero

IPC: H01L21/302 ,  H01L21/308 ,  H01L21/033 ,  H01L21/311 ,  C08L33/12

CPC classification number: H01L21/0331 ,  B81C1/00031 ,  B81C2201/0149 ,  C08F212/08 ,  C08F212/32 ,  C08F293/005 ,  C08F2438/03 ,  C08L33/12 ,  C09D125/08 ,  C09D125/14 ,  C09D125/16 ,  C09D153/00 ,  G03F7/0002 ,  H01L21/0337 ,  H01L21/31133 ,  H01L21/31138

Abstract: Compositions for directed self-assembly (DSA) patterning techniques are provided. Methods for directed self-assembly are also provided in which a DSA composition comprising a block copolymer is applied to a substrate and then self-assembled to form the desired pattern. The block copolymer includes at least two blocks of differing etch rates, so that one block (e.g., polymethylmethacrylate) is selectively removed during etching. Because the slower etching block (e.g., polystyrene) is modified with an additive to further slow the etch rate of that block, more of the slow etching block remains behind to fully transfer the pattern to underlying layers.

Abstract translation: 提供了用于定向自组装（DSA）图案化技术的组合。 还提供了用于定向自组装的方法，其中将包含嵌段共聚物的DSA组合物施加到基材上，然后自组装形成所需图案。 嵌段共聚物包括至少两个不同蚀刻速率的嵌段，使得在蚀刻期间选择性地除去一个嵌段（例如聚甲基丙烯酸甲酯）。 因为较慢的蚀刻块（例如，聚苯乙烯）用添加剂进行修饰以进一步降低该块的蚀刻速率，所以较慢的蚀刻块保留在后面以将图案完全转移到下面的层。

公开(公告)号：US09117757B2

公开(公告)日：2015-08-25

申请号：US14055691

申请日：2013-10-16

Applicant: Brewer Science Inc.

Inventor： Jyoti K. Malhotra ,  Xing-Fu Zhong

IPC: H01L23/29 ,  H01L21/56 ,  C08K5/11 ,  H01L33/56 ,  C08L83/04

CPC classification number: H01L23/296 ,  C08G77/12 ,  C08G77/20 ,  C08K5/11 ,  C08K5/56 ,  C08L83/00 ,  C08L83/04 ,  H01L21/56 ,  H01L33/56 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Novel compositions and methods of using those compositions to form high refractive index coatings are provided. The compositions comprise a mixture of two silicone polymers, a catalyst, and an inhibitor for the catalyst. The preferred catalyst comprises platinum. Unlike prior art silicone systems, the inventive composition can be provided in a one-part form due to a substantially improved pot life. The compositions can be spin- or spray-applied, followed by baking to crosslink the polymers and form a cured layer. The inventive cured layers have high refractive indices and light transmissions.

Abstract translation: 提供了使用这些组合物形成高折射率涂层的新型组合物和方法。 组合物包含两种硅氧烷聚合物，催化剂和用于催化剂的抑制剂的混合物。 优选的催化剂包括铂。 与现有技术的有机硅系统不同，由于适用期大大提高，本发明组合物可以以一部分形式提供。 可以旋涂或喷涂组合物，然后烘烤以交联聚合物并形成固化层。 本发明的固化层具有高折射率和光透射。