Galvanoscanner and Laser Processing Machine
    121.
    发明申请
    Galvanoscanner and Laser Processing Machine 有权
    电镀和激光加工机

    公开(公告)号:US20120105930A1

    公开(公告)日:2012-05-03

    申请号:US13282837

    申请日:2011-10-27

    IPC分类号: G02B26/10 H02K33/00

    摘要: A galvanoscanner including: a rotor including a shaft as a rotational center, and permanent magnets disposed around the shaft and polarized to a plurality of poles in a circumferential direction of the shaft; and a stator disposed in the outside of the rotor through a clearance and including coils, a yoke, and an outer casing so that the rotor swings in a predetermined angle range; wherein: the permanent magnets are provided with grooves which are formed in a direction of the rotation shaft so as to straddle circumferentially adjacent magnetic poles of the permanent magnets; and the permanent magnets are parted into at least two parts per pole by parting lines. Thus, the ratio of the torque constant to the moment of inertia can be improved so that the current required for driving can be reduced and reduction of power consumption at driving time can be attained.

    摘要翻译: 一种电流扫描器,包括:转子,其包括作为旋转中心的轴,以及设置在所述轴周围并沿着所述轴的圆周方向偏振到多个极的永磁体; 以及定子,其通过间隙设置在转子的外侧,并且包括线圈,轭和外壳,使得转子在预定角度范围内摆动; 其特征在于,所述永久磁铁具有沿着所述旋转轴的方向形成为沿所述永久磁铁的周向相邻的磁极跨越的槽; 并且通过分离线将永磁体分成每个极点至少两个部分。 因此,能够提高转矩常数与转动惯量的比例,能够降低驱动所需的电流,并且能够实现驱动时的功耗的降低。

    Laser machining method and laser machining apparatus
    123.
    发明授权
    Laser machining method and laser machining apparatus 有权
    激光加工方法和激光加工设备

    公开(公告)号:US07923659B2

    公开(公告)日:2011-04-12

    申请号:US11843274

    申请日:2007-08-22

    IPC分类号: B23K26/06 B23K26/073

    摘要: A laser machining method and a laser machining apparatus by which holes excelling in form accuracy can be machined efficiently are to be provided. A first cylindrical lens and/or a second cylindrical lens to correct any deformation of reflective face of a first mirror and/or a second mirror is arranged on an optical axis of a laser beam, and converging positions of the laser beam for an X-component and for a Y-component are coincident with a point on the optical axis.

    摘要翻译: 可以提供激光加工方法和激光加工装置,通过该激光加工方法可以有效地加工成形精度优异的孔。 用于校正第一反射镜和/或第二反射镜的反射面的任何变形的第一柱面透镜和/或第二柱面透镜布置在激光束的光轴上,并且用于X射线的激光束的会聚位置, 分量和Y分量与光轴上的点重合。

    Servo control system for movable body, and laser drilling machine
    124.
    发明授权
    Servo control system for movable body, and laser drilling machine 有权
    移动体伺服控制系统,激光钻孔机

    公开(公告)号:US07768225B2

    公开(公告)日:2010-08-03

    申请号:US11049706

    申请日:2005-02-04

    IPC分类号: G06F19/00 B23K26/04

    摘要: A difference between each position command data outputted in a form of a step signal from a high-level controller and its corresponding detected position data of a movable body is integrated by an integral compensator to position the movable body. Assuming, for example, that the movable body is a steerable mirror, digital filters are arranged to compensate the value of an initial state of an angular displacement and the value of an initial state of an angular velocity, respectively, and respective impulse responses of the digital filters as additional input elements are added to an output terminal of the integral compensator. For higher effectiveness, internal state variables of the digital filters can desirably be cleared to zero whenever an angle (position) command data is received.

    摘要翻译: 通过积分补偿器将来自高级别控制器的步进信号输出的每个位置指令数据和可移动体的对应检测位置数据之间的差积分在一起,以定位移动体。 假设例如可移动体是可转向反射镜,数字滤波器被布置成分别补偿角位移的初始状态的值和角速度的初始状态的值以及相应的脉冲响应 作为附加输入元件的数字滤波器被添加到积分补偿器的输出端子。 为了更高的有效性,每当接收到角度(位置)命令数据时,数字滤波器的内部状态变量可期望地被清除为零。

    Pattern Formation Method
    126.
    发明申请
    Pattern Formation Method 审中-公开
    图案形成方法

    公开(公告)号:US20090111062A1

    公开(公告)日:2009-04-30

    申请号:US12260546

    申请日:2008-10-29

    IPC分类号: G03F7/20

    摘要: The present invention provides a pattern formation method comprising a step of forming on a substrate a film of a first photosensitive material having low sensitivity to a light beam with a main wavelength at h-line emitted from a mask-less drawing exposure apparatus but having high sensitivity to an energy light beam containing ultraviolet light; a step of forming on the first photosensitive material a film of a second photosensitive material having higher sensitivity to a light beam with the main wavelength at h-line; a step of drawing a second pattern on the second photosensitive material with the mask-less direct drawing exposure apparatus; a step of developing the second photosensitive material; and a step of exposing to a light beam the second photosensitive material with the second pattern formed thereon and the first photosensitive material in batch to form a target first pattern on the first photosensitive material.

    摘要翻译: 本发明提供了一种图案形成方法,包括以下步骤:在基板上形成具有低光敏性的第一感光材料的膜,所述第一感光材料具有从无掩模拉制曝光装置发射的h线处的主波长的光束,但是具有高的 对含有紫外光的能量光束的敏感性; 在第一感光材料上形成对具有主要波长为h线的光束具有较高灵敏度的第二感光材料的膜; 用无掩模直接拉伸曝光装置在第二感光材料上绘制第二图案的步骤; 显影第二感光材料的步骤; 以及将第二感光材料以第二图案形成在第一感光材料上并分批照射第一感光材料以在第一感光材料上形成目标第一图案的步骤。

    Laser Direct Imaging Apparatus and Imaging Method
    127.
    发明申请
    Laser Direct Imaging Apparatus and Imaging Method 有权
    激光直接成像设备和成像方法

    公开(公告)号:US20090086009A1

    公开(公告)日:2009-04-02

    申请号:US12191901

    申请日:2008-08-14

    IPC分类号: B41J2/47

    摘要: A laser beam direct imaging apparatus and an imaging method which can precisely determine a back-surface-side position with respect to a front-surface-side position even if any kind of photosensitive material is used. In the laser direct imaging apparatus, a laser beam is deflected toward a main scanning direction (X-axis direction) while a workpiece mounted on a table is moved in a sub-scanning direction (Y-axis direction) so that a pattern is imaged on the surface of the workpiece. Hollow pins are disposed on the table so that the tips of the hollow pins 20 project over the surface of the table by a predetermined distance. The workpiece is sucked onto the table so that indentations (indentations by the tips of the hollow pins) are formed on the back surface of the workpiece. When a pattern is imaged on the back surface, imaging is performed with reference to the indentations.

    摘要翻译: 即使使用任何种类的感光材料,也可以精确地确定相对于前表面侧位置的背面侧位置的激光束直接成像装置和成像方法。 在激光直接成像装置中,激光束朝向主扫描方向(X轴方向)偏转,同时安装在工作台上的工件沿副扫描方向(Y轴方向)移动,使得图案被成像 在工件表面。 空心销设置在桌子上,使得中空销20的尖端在桌子的表面上突出预定距离。 工件被吸入工作台上,使得在工件的后表面上形成有凹陷(由中空销的顶端压入)。 当在背面上成像图案时,参考凹痕进行成像。

    Beam shaping prior to harmonic generation for increased stability of laser beam shaping post harmonic generation with integrated automatic displacement and thermal beam drift compensation
    128.
    发明授权
    Beam shaping prior to harmonic generation for increased stability of laser beam shaping post harmonic generation with integrated automatic displacement and thermal beam drift compensation 失效
    谐波产生之前的光束成形,以提高激光束成形后谐波发生的稳定性,并具有集成的自动位移和热束偏移补偿

    公开(公告)号:US07499207B2

    公开(公告)日:2009-03-03

    申请号:US11517923

    申请日:2006-09-07

    申请人: Todd E. Lizotte

    发明人: Todd E. Lizotte

    IPC分类号: G02F1/35

    摘要: A harmonic generation/beam shaping system to generate a shaped beam having a harmonic relationship with a beam generated by a laser, including a first harmonic generation element and a second harmonic generation element arranged sequentially along an axial beam path extending between an input from the laser and an output of the harmonic generation/beam shaping system and at least two beam shaping elements located along the axial beam path. At least one of the least two beam shaping elements is located between the second harmonic generation element and the laser to transform the beam energy profile into a preferred profile to distribute the beam energy across a larger cross sectional area of at least one harmonic generation element or to reduce peaks in the energy distribution profile of the beam, or both, wherein the preferred profile may be a flat-top profile or a Bessel function profile.

    摘要翻译: 一种谐波发生/光束整形系统,用于产生与由激光器产生的光束具有谐波关系的成形光束,包括一个第一谐波发生元件和二次谐波产生元件,该元件沿着沿着激光输入端的轴向光束路径顺序排列 以及谐波产生/光束成形系统的输出和沿轴向光束路径定位的至少两个光束成形元件。 至少两个光束整形元件中的至少一个位于第二谐波产生元件和激光器之间,以将光束能量分布转换成优选的分布,以将光束能量分布在至少一个谐波产生元件的较大截面面积上,或 以减小光束或两者的能量分布轮廓中的峰值,其中优选的轮廓可以是平顶轮廓或贝塞尔函数轮廓。

    Printed board drilling method and printed board machining apparatus
    129.
    发明授权
    Printed board drilling method and printed board machining apparatus 失效
    印刷板钻孔方法和印刷板加工装置

    公开(公告)号:US07476065B2

    公开(公告)日:2009-01-13

    申请号:US11139588

    申请日:2005-05-31

    IPC分类号: B23B35/00

    摘要: A printed board drilling method and a printed board machining apparatus capable of improving machining quality, such as improving positional accuracy of holes and true roundness of machined holes, and improving work efficiency by minimizing a runout of the tip of a drill. An extension of the drill extending out of a spindle when the drill is held by the spindle is defined in advance per type or mode of use of each drill. One drill is selected among a plurality of drills corresponding to a shape of holes to be drilled in the printed board and the spindle holds the drill so that the selected drill extends out of the spindle by the extension corresponding to the selected drill. Then, the move of the spindle with respect to the printed board is controlled and the selected drill is rotationally driven by the spindle to drill the printed board.

    摘要翻译: 一种能够改善加工质量的印刷板钻孔方法和印刷板加工装置,例如提高孔的位置精度和加工孔的真实圆度,并且通过最小化钻头尖端的跳动来提高加工效率。 当钻头由主轴保持时,从主轴延伸出来的钻头的延伸部分是根据每个钻头的类型或使用方式进行预先确定的。 在对应于在印刷板中要钻孔的孔的形状的多个钻孔中选择一个钻头,并且主轴保持钻头,使得所选择的钻头通过对应于所选钻头的延伸而从主轴延伸出轴。 然后,控制主轴相对于印刷电路板的移动,所选择的钻头由主轴旋转驱动以钻出印刷电路板。

    Printed Circuit Board and Method of Manufacturing the Same
    130.
    发明申请
    Printed Circuit Board and Method of Manufacturing the Same 有权
    印刷电路板及其制造方法

    公开(公告)号:US20080314625A1

    公开(公告)日:2008-12-25

    申请号:US12143214

    申请日:2008-06-20

    IPC分类号: H05K3/46 H05K1/02

    摘要: The present invention relates to a method of manufacturing a printed circuit board and to a printed circuit board, the method comprising the steps of: preliminarily forming a plurality of test pattern layers 3 and 4 for detecting the depth of an inner layer in a multilayer printed circuit board such that at least a part of a lower test pattern layer is not overlaid with any upper test pattern layer when viewed from a drill entrance side, and preliminarily forming a surface conductor layer 2; applying a voltage between the surface conductor layer 2 and the test pattern layers 3 and 4; performing drilling toward one selected test pattern layer 3 by use of a drill 7 for drilling, and detecting a current produced when the drill comes into contact with the test pattern 3 to measure the depth of the layer (D1); performing drilling toward the other test pattern layer 4 by use of the drill 7, and measuring the depth of the layer (D2); and performing drilling by use of the drill 7 up to just before the conductor-wiring layer 10a with reference to a depth calculated from D1 and D2.

    摘要翻译: 本发明涉及一种制造印刷电路板和印刷电路板的方法,所述方法包括以下步骤:预先形成用于检测多层印刷中的内层的深度的多个测试图案层3和4 电路板,使得当从钻入口侧观察时,下测试图案层的至少一部分不与任何上测试图案层重叠,并且预先形成表面导体层2; 在表面导体层2和测试图案层3和4之间施加电压; 通过使用用于钻孔的钻头7对一个所选择的测试图案层3进行钻孔,并且检测当钻头与测试图案3接触以测量层(D1)的深度时产生的电流; 通过使用钻头7对另一测试图案层4进行钻孔,并测量层(D2)的深度; 并且参照从D1和D2计算的深度,使用钻头7直到刚好在导体布线层10a之前进行钻孔。