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    High resolution scanning thermal probe and method of manufacturing thereof
    11.
    发明授权
    High resolution scanning thermal probe and method of manufacturing thereof 失效
    高分辨率扫描热探针及其制造方法

    公开(公告)号：US06518872B1

    公开(公告)日：2003-02-11

    申请号：US09951620

    申请日：2001-09-14

    Applicant: Klaus Edinger ,  Ivaylo Rangelow

    Inventor： Klaus Edinger ,  Ivaylo Rangelow

    IPC: H01L304

    CPC classification number: G01Q60/58 ,  Y10S977/867 ,  Y10S977/873

    Abstract: A resistant based thermal probe including a nanometer sized four-leg filament integrated with a piezoresistive AFM type cantilever is created by depositing the filament structure onto the cantilever by a chemical vapor deposition technique where the cantilever is exposed to the flux of precursor gas. An incident electron beam causes a fragmentation of the gas molecules leaving a deposit behind which leads to a conductive deposit shaped as a multi-leg filament structure for thermal measurements of a sample. A deposited four leg filament structure has a mechanical rigidity, high spatial resolution, low thermal conductivity and thermal capacitance, fast response time, and in combination with a four point resistant measurement and lock-in technique, eliminates resistivity for increasing both the temperature sensitivity and the signal-to-noise ratio of the thermal probe.

    Abstract translation: 通过使用化学气相沉积技术将悬臂梁暴露于前体气体的通量的化学气相沉积技术，将长丝结构沉积到悬臂上，形成包括与压阻AFM型悬臂结合的纳米尺寸的四条腿细丝的基于电阻的热探针。 入射的电子束导致气体分子的断裂，留下沉积物，导致沉积物形成为多腿细丝结构的导电沉积物，用于样品的热测量。 沉积的四腿细丝结构具有机械刚性，高空间分辨率，低热导率和热电容，响应时间快，并结合四点电阻测量和锁定技术，消除了电阻率，提高温度灵敏度和 热探头的信噪比。

    Laser based electron beam gun
    18.
    发明授权
    Laser based electron beam gun 有权
    基于激光的电子束枪

    公开(公告)号：US06781300B1

    公开(公告)日：2004-08-24

    申请号：US09369522

    申请日：1999-08-06

    Applicant: Ralf Klaus Edinger

    Inventor： Ralf Klaus Edinger

    IPC: H01J6304

    CPC classification number: H01J3/024 ,  H01J1/135

    Abstract: This invention relates to electron guns, each comprising of an indirectly heated cathode, a gate electrode and an anode, for generating electron beams of various shapes and power that are preferably used to machine workpieces. Thus cathodes can be used with various geometric designs. Thus cathodes of the most varied geometrical shapes can be used. Along with band cathodes and band cathodes with bodies attached to them, massive cathodes such as bolt-type cathodes can also be applied. Using massive bodies results in a longer service life of the cathode as compared to band cathodes. Another benefit is that the service life of the heat source for the cathode is identical to the service life of the laser used. It is particularly advantageous to place the laser outside the housing, which ensures a very long service life of this source of heat. At the same time, the solution according to the invention is distinguished by an indirect temperature measurement of the cathode. This allows the radiation property to be controlled and improved. There is thus a type of compensation for the effects of the craters that may occur on the emission surface of the cathode.

    Abstract translation: 本发明涉及电子枪，每个电子枪包括间接加热的阴极，栅电极和阳极，用于产生用于加工工件的各种形状和功率的电子束。 因此，阴极可以用于各种几何设计。 因此，可以使用最差的几何形状的阴极。 随着具有连接到它们的体的带阴极和带阴极，也可以应用诸如螺栓型阴极的大量阴极。 与带阴极相比，使用大块体导致阴极的使用寿命更长。 另一个好处是阴极热源的使用寿命与使用的激光器的使用寿命相同。 将激光放置在壳体外部是特别有利的，这确保了该热源的非常长的使用寿命。 同时，根据本发明的解决方案通过阴极的间接温度测量来区分。 这允许控制和改善辐射特性。 因此，对于可能在阴极的发射表面上可能发生的凹坑的影响，存在一种类型的补偿。

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