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34 条记录 (耗时 0.039 秒)

    Systems and methods for fabricating displacement scales
    11.
    发明授权
    Systems and methods for fabricating displacement scales 有权
    用于制造位移尺度的系统和方法

    公开(公告)号：US09513412B2

    公开(公告)日：2016-12-06

    申请号：US12664561

    申请日：2008-06-18

    申请人： Daniel H. Carlson ,  Dale L. Ehnes ,  Daniel S. Wertz ,  Luis A. Aguirre ,  Levent Biyikli ,  Alan B. Campbell

    发明人： Daniel H. Carlson ,  Dale L. Ehnes ,  Daniel S. Wertz ,  Luis A. Aguirre ,  Levent Biyikli ,  Alan B. Campbell

    IPC分类号： B05D3/12 ,  G02B5/124 ,  G01D5/347 ,  G03F7/00

    CPC分类号： G02B5/124 ,  G01D5/34707 ,  G03F7/0005

    摘要： Methods and systems for forming a displacement scale comprising TIR prisms on a substrate are described. A system for forming the displacement scale includes one or more rollers having a pattern of total internal reflection (TIR) prism features in negative relief. As the rollers are rotated, the scale is formed on the substrate. The rollers may also include pattern features in negative relief. Rotation of the rollers simultaneously forms the displacement scale and the pattern features on the substrate. The TIR prism features of the displacement scale may be oriented to provide measurement of one or more of lateral displacement, longitudinal displacement and angular displacement.

    摘要翻译： 描述了在衬底上形成包括TIR棱镜的位移标尺的方法和系统。 用于形成位移标尺的系统包括一个或多个具有负凸起的全内反射（TIR）棱镜特征图案的辊。 当辊旋转时，刻度尺形成在基板上。 辊也可以包括负浮雕的图案特征。 辊的旋转同时形成基板上的位移标尺和图案特征。 位移标尺的TIR棱镜特征可以被定向以提供横向位移，纵向位移和角位移中的一个或多个的测量。

    Phase-locked Web Position Signal Using Web Fiducials
    13.
    发明申请
    Phase-locked Web Position Signal Using Web Fiducials 有权
    使用Web基准信号的锁相位置信号

    公开(公告)号：US20110257779A1

    公开(公告)日：2011-10-20

    申请号：US13130592

    申请日：2009-12-07

    申请人： Daniel J. Theis ,  Daniel H. Carlson ,  Brian K. Nelson

    发明人： Daniel J. Theis ,  Daniel H. Carlson ,  Brian K. Nelson

    IPC分类号： G06F19/00 ,  G01R25/00

    CPC分类号： B65H23/046 ,  B65H23/1882 ,  B65H2511/512 ,  G01C15/00 ,  G01R25/005 ,  G05B19/404

    摘要： Approaches for enhancing web position determination involve phase locking a web movement encoder signal to a sensed web fiducial signal. Fiducials disposed along a longitudinal axis of a substrate are sensed and corresponding sensor signals are generated. An estimated web position is provided by one or more encoder signals. The phase difference between the sensor signals and the encoder signals is calculated and the web position error is determined based on the phase difference. The web position error signal can be fed back to adjust the encoder signals which improves the accuracy of the web position determination.

    摘要翻译： 用于增强网络位置确定的方法包括将网络移动编码器信号相位锁定到感测到的网络基准信号。 感测沿基板的纵向轴线布置的基准，并产生相应的传感器信号。 估计的网页位置由一个或多个编码器信号提供。 计算传感器信号和编码器信号之间的相位差，并根据相位差确定卷筒纸位置误差。 纸幅位置误差信号可以反馈，以调整编码器信号，提高纸幅位置确定的精度。

    APPARATUS AND METHODS FOR CONTINUOUSLY DEPOSITING A PATTERN OF MATERIAL ONTO A SUBSTRATE
    17.
    发明申请
    APPARATUS AND METHODS FOR CONTINUOUSLY DEPOSITING A PATTERN OF MATERIAL ONTO A SUBSTRATE 审中-公开
    将材料图案连续沉积到基材上的装置和方法

    公开(公告)号：US20080011225A1

    公开(公告)日：2008-01-17

    申请号：US11456687

    申请日：2006-07-11

    申请人： Donald J. McClure ,  Jeffrey H. Tokie ,  Daniel H. Carlson ,  James N. Dobbs ,  John T. Strand ,  Ronald P. Swanson

    发明人： Donald J. McClure ,  Jeffrey H. Tokie ,  Daniel H. Carlson ,  James N. Dobbs ,  John T. Strand ,  Ronald P. Swanson

    IPC分类号： B05C1/00 ,  B05C11/11

    CPC分类号： H05K3/143 ,  C23C14/042 ,  C23C14/54 ,  C23C14/562 ,  H05K1/0393 ,  H05K3/0008 ,  H05K2201/09918 ,  H05K2203/0134 ,  H05K2203/0143 ,  H05K2203/1545

    摘要： A pattern of material is continuously deposited onto a substrate. The substrate and a mask are continuously brought together over a portion of a drum where a deposition source emits material. The mask includes apertures that form a pattern, and the material from the deposition source passes through the pattern of the mask and collects onto the substrate to form the pattern of material. The elongation and the transverse position of the substrate and the mask may be controlled. Pattern elements of the substrate and of the mask may be sensed in order to adjust the elongation and/or the transverse position of the substrate and/or mask to maintain a precise registration. Furthermore, the apertures may have a least dimension on the order of 100 microns or less to thereby create features on the substrate having least dimensions on the order of 100 microns or less.

    摘要翻译： 材料的图案被连续沉积到基底上。 衬底和掩模在沉积源发射材料的鼓的一部分上连续地接合在一起。 掩模包括形成图案的孔，并且来自沉积源的材料穿过掩模的图案并收集到基底上以形成材料图案。 可以控制衬底和掩模的伸长率和横向位置。 可以感测衬底和掩模的图案元件以调节衬底和/或掩模的伸长率和/或横向位置以保持精确的配准。 此外，孔可以具有大约100微米或更小的最小尺寸，从而在基底上产生具有小于或等于100微米的最小尺寸的特征。

    Apparatus and method for making fiducials on a substrate
    18.
    发明授权
    Apparatus and method for making fiducials on a substrate 有权
    在基板上制作基准的装置和方法

    公开(公告)号：US08992104B2

    公开(公告)日：2015-03-31

    申请号：US13130610

    申请日：2009-12-09

    申请人： Daniel H. Carlson ,  Daniel J. Theis ,  Brian K. Nelson

    发明人： Daniel H. Carlson ,  Daniel J. Theis ,  Brian K. Nelson

    IPC分类号： B41J11/46 ,  H05K1/02 ,  B41J3/54 ,  H05K3/00

    CPC分类号： H05K1/0269 ,  B41J3/543 ,  B41J11/46 ,  H05K3/0082 ,  H05K2201/09918 ,  H05K2203/013 ,  H05K2203/107 ,  H05K2203/1545 ,  Y10T83/02 ,  Y10T83/0333

    摘要： Fiducials having substantially continuous portions made on a substrate allow the position of the substrate to be determined. An approach for making fiducials involves moving first and second fiducial devices together back and forth across the substrate along a trajectory having a component along the lateral axis of the substrate while the substrate and the first and second fiducial devices are in relative motion along the longitudinal axis of the substrate. The first fiducial device operates to make one fiducial on the substrate during the movement along the trajectory and the relative motion. The second fiducial device operates to make another fiducial on the substrate during the movement along the trajectory and the relative motion. The fiducials may be formed so that they have a constant spatial frequency with the first fiducial being out of phase with respect to the second fiducial.

    摘要翻译： 在基板上具有基本上连续的部分的基准允许确定基板的位置。 用于制造基准的方法涉及使第一和第二基准装置沿着具有沿着基板的横向轴线的分量的轨迹穿过基板一起来回移动，同时基板和第一和第二基准装置沿着纵向轴线相对运动 的基底。 第一个基准装置用于在轨迹和相对运动的运动过程中在基板上形成一个基准点。 第二基准装置在沿着轨迹和相对运动的运动期间操作以在基底上形成另一基准。 基准可以被形成为使得它们具有恒定的空间频率，其中第一基准相对于第二基准是异相的。

    Apparatus and Method for Making Fiducials on a Substrate
    20.
    发明申请
    Apparatus and Method for Making Fiducials on a Substrate 有权
    在基板上制作基准的装置和方法

    公开(公告)号：US20110247511A1

    公开(公告)日：2011-10-13

    申请号：US13130610

    申请日：2009-12-09

    申请人： Daniel H. Carlson ,  Daniel J. Theis ,  Brian K. Nelson

    发明人： Daniel H. Carlson ,  Daniel J. Theis ,  Brian K. Nelson

    IPC分类号： B41J2/01 ,  B26D3/00 ,  G03B27/00 ,  B26D3/08

    CPC分类号： H05K1/0269 ,  B41J3/543 ,  B41J11/46 ,  H05K3/0082 ,  H05K2201/09918 ,  H05K2203/013 ,  H05K2203/107 ,  H05K2203/1545 ,  Y10T83/02 ,  Y10T83/0333

    摘要： Fiducials having substantially continuous portions made on a substrate allow the position of the substrate to be determined. An approach for making fiducials involves moving first and second fiducial devices together back and forth across the substrate along a trajectory having a component along the lateral axis of the substrate while the substrate and the first and second fiducial devices are in relative motion along the longitudinal axis of the substrate. The first fiducial device operates to make one fiducial on the substrate during the movement along the trajectory and the relative motion. The second fiducial device operates to make another fiducial on the substrate during the movement along the trajectory and the relative motion. The fiducials may be formed so that they have a constant spatial frequency with the first fiducial being out of phase with respect to the second fiducial.

    摘要翻译： 在基板上具有基本上连续的部分的基准允许确定基板的位置。 用于制造基准的方法涉及使第一和第二基准装置沿着具有沿着基板的横向轴线的分量的轨迹穿过基板一起来回移动，同时基板和第一和第二基准装置沿着纵向轴线相对运动 的基底。 第一个基准装置用于在轨迹和相对运动的运动过程中在基板上形成一个基准点。 第二基准装置在沿着轨迹和相对运动的运动期间操作以在基底上形成另一基准。 基准可以被形成为使得它们具有恒定的空间频率，其中第一基准相对于第二基准是异相的。