公开(公告)号：US20220285278A1

公开(公告)日：2022-09-08

申请号：US17752717

申请日：2022-05-24

Applicant: Intel Corporation

Inventor： Jeremy D. ECTON ,  Hiroki TANAKA ,  Oscar OJEDA ,  Arnab ROY ,  Vahidreza PARICHEHREH ,  Leonel R. ARANA ,  Chung Kwang TAN ,  Robert A. MAY

IPC: H01L23/538 ,  H01L21/48

Abstract: Embodiments include a package structure with one or more layers of dielectric material, where an interconnect bridge substrate is embedded within the dielectric material. One or more via structures are on a first surface of the embedded substrate, where individual ones of the via structures comprise a conductive material and have a tapered profile. The conductive material is also on a sidewall of the embedded substrate.

公开(公告)号：US20240105571A1

公开(公告)日：2024-03-28

申请号：US17954288

申请日：2022-09-27

Applicant: Intel Corporation

Inventor： Brandon C. MARIN ,  Haobo CHEN ,  Bai NIE ,  Srinivas V. PIETAMBARAM ,  Gang DUAN ,  Jeremy D. ECTON ,  Suddhasattwa NAD

IPC: H01L23/498 ,  H01L21/48

CPC classification number: H01L23/49827 ,  H01L21/486 ,  H01L23/49894 ,  H01L23/15

Abstract: Embodiments disclosed herein include glass cores and methods of forming glass cores. In an embodiment, a core for an electronic package comprises a substrate with a first surface and a second surface opposite from the first surface, where the substrate comprises glass, In an embodiment, a via opening is provided through the substrate, and a diffusion layer is along the first surface, the second surface, and the via opening.

公开(公告)号：US20240097079A1

公开(公告)日：2024-03-21

申请号：US17949857

申请日：2022-09-21

Applicant: Intel Corporation

Inventor： Brandon C. MARIN ,  Khaled AHMED ,  Srinivas V. PIETAMBARAM ,  Hiroki TANAKA ,  Paul WEST ,  Kristof DARMAWIKARTA ,  Gang DUAN ,  Jeremy D. ECTON ,  Suddhasattwa NAD

IPC: H01L33/48 ,  H01L25/075 ,  H01L33/00 ,  H01L33/32 ,  H01L33/62

CPC classification number: H01L33/486 ,  H01L25/0753 ,  H01L33/0075 ,  H01L33/32 ,  H01L33/62 ,  H01L2933/0066

Abstract: Integrated circuit (IC) packages are disclosed. In some embodiments, an IC package includes a glass substrate, a micro light emitting diode (LED), a semiconductor die, one or more through glass vias (TGVs) and a package substrate. The micro LED is positioned over the glass substrate. The TGVs are integrated into the glass substrate and connect the micro LED to the semiconductor die. The semiconductor die is connected to the package substrate to receive external signals when connected to a motherboard.

公开(公告)号：US20240087971A1

公开(公告)日：2024-03-14

申请号：US17943915

申请日：2022-09-13

Applicant: Intel Corporation

Inventor： Brandon C. MARIN ,  Gang DUAN ,  Srinivas V. PIETAMBARAM ,  Kristof DARMAWIKARTA ,  Jeremy D. ECTON ,  Suddhasattwa NAD ,  Hiroki TANAKA ,  Pooya TADAYON

IPC: H01L23/15 ,  H01L23/00 ,  H01L23/538

CPC classification number: H01L23/15 ,  H01L23/5381 ,  H01L23/5384 ,  H01L24/16 ,  H01L2224/16225

Abstract: Embodiments disclosed herein include interposers and methods of forming interposers. In an embodiment, an interposer comprises a substrate with a first surface and a second surface opposite from the first surface, where the substrate comprises glass. In an embodiment, the interposer further comprises a cavity into the first surface of the substrate, a via through the substrate below the cavity, a first pad in the cavity over the via, and a second pad on the second surface of the substrate under the via.

公开(公告)号：US20240063100A1

公开(公告)日：2024-02-22

申请号：US17889229

申请日：2022-08-16

Applicant: Intel Corporation

Inventor： Brandon C. MARIN ,  Mohammad Mamunur RAHMAN ,  Jeremy D. ECTON ,  Gang DUAN ,  Suddhasattwa NAD ,  Srinivas V. PIETAMBARAM ,  Kemal AYGÜN ,  Cemil GEYIK

IPC: H01L23/498

CPC classification number: H01L23/49822 ,  H01L23/49838 ,  H01L23/49811

Abstract: Embodiments disclosed herein include electronic packages. In an embodiment, the electronic package comprises a first layer, where the first layer comprises glass, a second layer over the first layer, where the second layer comprises glass, and a third layer over the second layer, where the third layer comprises glass. In an embodiment, a pair of traces are in the second layer, and a first gap is below the pair of traces, where the first gap is in the first layer and the second layer. In an embodiment, a second gap is above the pair of traces, where the second gap is in the second layer and the third layer.

公开(公告)号：US20230420357A1

公开(公告)日：2023-12-28

申请号：US17848624

申请日：2022-06-24

Applicant: Intel Corporation

Inventor： Brandon C. MARIN ,  Suddhasattwa NAD ,  Srinivas V. PIETAMBARAM ,  Gang DUAN ,  Jeremy D. ECTON ,  Kristof DARMAWIKARTA ,  Sameer PAITAL

IPC: H01L23/498 ,  H01L21/02 ,  H01L21/48

CPC classification number: H01L23/49894 ,  H01L23/49811 ,  H01L23/49822 ,  H01L23/49838 ,  H01L21/0217 ,  H01L21/486 ,  H01L24/16

Abstract: Embodiments herein relate to systems, apparatuses, or processes directed to forming an LGA pad on a side of a substrate, with a layer of silicon nitride between the LGA pad and a dielectric layer of the substrate. The LGA pad may have a reduced footprint, or a reduced lateral dimension with respect to a plane of the substrate, as compared to legacy LGA pads to reduce insertion loss by reducing the resulting capacitance between the reduced LGA footprint and metal routings within the substrate. The layer of silicon nitride may provide additional mechanical support for the reduced footprint. Other embodiments may be described and/or claimed.

公开(公告)号：US20230093008A1

公开(公告)日：2023-03-23

申请号：US17482092

申请日：2021-09-22

Applicant: Intel Corporation

Inventor： Brandon C. MARIN ,  Aleksandar ALEKSOV ,  Jeremy D. ECTON

IPC: H01L23/498 ,  H01L21/48

Abstract: Techniques for self-assembly of regions in a dielectric layer with different electrical properties are described herein. In one example, a package includes a substrate, a layer of dielectric material over the substrate, the layer of dielectric material including a filler material. The package includes a plurality of conductive traces in the layer of dielectric material, and a filler-depleted radial region of the dielectric material around each of the plurality of conductive traces. The filler-depleted radial region has a lower volume-percentage of filler than other regions of the layer of dielectric material. In one example, the conductive traces, filler, or both include a coating to cause the filler and traces to have opposing surface chemistry.

公开(公告)号：US20210305668A1

公开(公告)日：2021-09-30

申请号：US17344715

申请日：2021-06-10

Applicant: Intel Corporation

Inventor： Brandon C. MARIN ,  Jeremy D. ECTON ,  Aleksandar ALEKSOV ,  Kristof DARMAWIKARTA ,  Yonggang LI ,  Dilan SENEVIRATNE

IPC: H01P1/208 ,  H01L23/66 ,  H01P7/10 ,  H01P3/16 ,  H01L21/768 ,  H01P11/00 ,  H01L21/288 ,  H01P1/20

Abstract: A method of fabricating an RF filter on a semiconductor package comprises forming a first dielectric buildup film. A second dielectric buildup film is formed over the first dielectric buildup film, the second dielectric buildup film comprising a dielectric material that contains a metallization catalyst, wherein the dielectric material comprises one of an epoxy-polymer blend dielectric material, silicon dioxide and silicon nitride, and a low-k dielectric. A trench is formed in the second dielectric buildup film with laser ablation, wherein the laser ablation selectively activates sidewalls of the trench for electroless metal deposition. A metal selectively is plated to sidewalls of the trench based at least in part on the metallization catalyst and immersion in an electroless solution. A low-loss buildup film is formed over the metal that substantially fills the trench.

公开(公告)号：US20240339381A1

公开(公告)日：2024-10-10

申请号：US18130582

申请日：2023-04-04

Applicant: Intel Corporation

Inventor： Hiroki TANAKA ,  Veronica STRONG ,  Henning BRAUNISCH ,  Haobo CHEN ,  Jeremy D. ECTON ,  Kristof DARMAWIKARTA ,  Brandon C. MARIN

IPC: H01L23/482 ,  H01L21/768 ,  H01L23/498

CPC classification number: H01L23/4821 ,  H01L21/76831 ,  H01L23/49827 ,  H01L23/49866 ,  H01L21/30604 ,  H05K2201/09218

Abstract: Embodiments disclosed herein include an interposer. In an embodiment, the interposer comprises a substrate, where the substrate comprises a glass layer. In an embodiment, a trace is on the substrate, where the trace has a bottom surface, sidewall surfaces, and a top surface. In an embodiment, the sidewall surfaces and the top surface are exposed to air. In an embodiment, a trench into the substrate is adjacent to at least one sidewall surface of the trace.

公开(公告)号：US20240071935A1

公开(公告)日：2024-02-29

申请号：US17895965

申请日：2022-08-25

Applicant: Intel Corporation

Inventor： Brandon C. MARIN ,  Ravindranath V. MAHAJAN ,  Srinivas V. PIETAMBARAM ,  Gang DUAN ,  Suddhasattwa NAD ,  Jeremy D. ECTON

IPC: H01L23/538 ,  H01L21/48 ,  H01L21/56 ,  H01L23/00 ,  H01L23/15 ,  H01L23/31 ,  H01L23/48

CPC classification number: H01L23/5381 ,  H01L21/4846 ,  H01L21/565 ,  H01L23/15 ,  H01L23/3121 ,  H01L23/481 ,  H01L23/5386 ,  H01L24/08 ,  H01L24/80 ,  H01L2224/08225 ,  H01L2224/80894 ,  H01L2224/80895

Abstract: Embodiments disclosed herein include electronic packages. In an embodiment, the electronic package comprises a first substrate, where the first substrate comprises glass, and a second substrate over the first substrate, where the second substrate comprises glass. In an embodiment, electrically conductive routing is provided in the second substrate. In an embodiment, a first die is over the second substrate, and a second die is over the second substrate. In an embodiment, the electrically conductive routing electrically couples the first die to the second die.