公开(公告)号：US20110163229A1

公开(公告)日：2011-07-07

申请号：US12528306

申请日：2008-02-22

申请人： Juergen Frosien ,  Helmut Banzhof ,  Pavel Adamec

发明人： Juergen Frosien ,  Helmut Banzhof ,  Pavel Adamec

IPC分类号： G01N23/225 ,  G01N23/227 ,  G01N23/22 ,  G01N23/203 ,  H01J1/50

CPC分类号： H01J37/05 ,  H01J37/10 ,  H01J37/147 ,  H01J37/28 ,  H01J2237/0635 ,  H01J2237/1508 ,  H01J2237/2449 ,  H01J2237/2817

摘要： A scanning charged particle beam device (100) is described. The scanning charged particle beam device includes a beam emitter (102) for emitting a primary electron beam, a first scan stage for scanning the beam over a specimen, an achromatic beam separator (130) adapted for separating a signal electron beam from the primary electron beam, and a detection unit (172,174,178) for detecting signal electrons.

摘要翻译： 描述扫描带电粒子束装置（100）。 扫描带电粒子束装置包括用于发射一次电子束的射束发射器（102），用于扫描试样上的束的第一扫描级，适于从一次电子分离信号电子束的消色束分离器（130） 以及用于检测信号电子的检测单元（172,174,178）。

公开(公告)号：US07872239B2

公开(公告)日：2011-01-18

申请号：US12181171

申请日：2008-07-28

申请人： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

发明人： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

IPC分类号： H01J37/28 ,  H01J37/244 ,  G01R31/305

CPC分类号： H01J37/12 ,  H01J37/145 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/28

摘要： A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.

摘要翻译： 提供一种具有用于带电粒子束系统的静电透镜部件的透镜组件。 组件包括：具有锥形部分的第一电极，具有锥形部分的第二电极和具有锥形部分的第一绝缘体，其中第一绝缘体包括朝向其每个端部的两个延伸部分，并且其中两个 形成延伸部分以在绝缘体和每个相邻电极之间产生间隙。

公开(公告)号：US20100320382A1

公开(公告)日：2010-12-23

申请号：US12528307

申请日：2008-02-22

申请人： Gilad Almogy ,  Avishai Bartov ,  Jürgen Frosien ,  Pavel Adamec ,  Helmut Banzhof

发明人： Gilad Almogy ,  Avishai Bartov ,  Jürgen Frosien ,  Pavel Adamec ,  Helmut Banzhof

IPC分类号： G01N23/00 ,  H01J37/147

CPC分类号： H01J37/05 ,  H01J37/10 ,  H01J37/147 ,  H01J37/28 ,  H01J2237/0635 ,  H01J2237/1508 ,  H01J2237/2449 ,  H01J2237/2817

摘要： A multi-beam scanning electron beam device (100) is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter (110) for emitting a plurality of electron beams (12,13,14), at least one common electron beam optical element (130) having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element (140) for individually influencing the plurality of electron beams, a common objective lens assembly (150) for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen (20) for generation of a plurality of signal beams (121, 131,141), and a detection assembly (170) for individually detecting each signal beam on a corresponding detection element.

摘要翻译： 描述了多光束扫描电子束装置（100）。 具有列的多头扫描电子束装置包括用于发射多个电子束（12,13,14）的多光束发射器（110），至少一个共同的电子束光学元件（130） 用于多个电子束中的至少两个的开口，并适用于共同影响多个电子束中的至少两个，用于单独影响多个电子束的至少一个单独的电子束光学元件（140），共同的目标 透镜组件（150），用于聚焦具有用于聚焦多个电子束中的至少两个的共同激发的多个电子束，并且适于将多个电子束聚焦到样本（20）上以产生多个信号 光束（121,131,141）和检测组件（170），用于分别检测相应检测元件上的每个信号光束。

公开(公告)号：US07595490B2

公开(公告)日：2009-09-29

申请号：US11469728

申请日：2006-09-01

申请人： Fang Zhou ,  Pavel Adamec ,  Jürgen Frosien ,  Jimmy Vishnipolsky

发明人： Fang Zhou ,  Pavel Adamec ,  Jürgen Frosien ,  Jimmy Vishnipolsky

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/073 ,  H01J2237/022 ,  H01J2237/06325

摘要： A method for operating a charged particle beam emitting device and, in particular, an electron beam emitting device including a cold field emitter is provided. The method includes the steps of placing the cold field emitter in a vacuum of a given pressure, the emitter exhibiting a high initial emission current I0 and a lower stable mean emission current IS under a given electric extraction field; applying the given electric extraction field to the emitter for emitting electrons from the emitter surface; performing a cleaning process by applying at least one heating pulse to the cold field emitter for heating the emitter surface, whereby the cleaning process is performed before the emission current of the cold field emitter has declined to the lower stable mean emission value IS; and repeating the cleaning process to keep the emission current of the emitter continuously above the substantially stable emission value IS.

摘要翻译： 提供了一种用于操作带电粒子束发射器件的方法，特别是包括冷场发射器的电子束发射器件。 该方法包括以下步骤：将冷场发射器置于给定压力的真空中，发射体在给定的电提取场下表现出高的初始发射电流I0和较低的稳定平均发射电流IS; 将给定的电提取场施加到发射器以从发射器表面发射电子; 通过向冷场发射器施加至少一个加热脉冲来加热发射体表面来执行清洁处理，由此在冷场发射器的发射电流已经下降到较低的稳定平均发射值IS之前进行清洁处理; 并重复清洁处理以将发射极的发射电流连续地保持在基本上稳定的发射值IS上。

公开(公告)号：US07928405B2

公开(公告)日：2011-04-19

申请号：US12181199

申请日：2008-07-28

申请人： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

发明人： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

IPC分类号： H01J1/50

CPC分类号： H01J37/141 ,  H01J2237/1405 ,  Y10T29/4902

摘要： A lens assembly having a magnetic lens assembly for a charged particle beam system is provided. The lens assembly includes: a first pole piece having a connecting portion of the first pole piece and a gap portion of the first pole piece, a second pole piece having a connecting portion of the second pole piece and a gap portion of the second pole piece, wherein the first pole piece and the second pole piece provide a gap at the respective gap portions, a coil for exciting the magnetic lens assembly, a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece, wherein the pole pieces are connected with each other at the respective connecting portions and have a centering element receiving portion towards the respective gap portion ends of the pole pieces.

摘要翻译： 提供了一种具有用于带电粒子束系统的磁性透镜组件的透镜组件。 透镜组件包括：第一极片，其具有第一极靴的连接部分和第一极靴的间隙部分，第二极靴具有第二极靴的连接部分和第二极靴的间隙部分 ，其中所述第一极靴和所述第二极靴在相应的间隙部分处提供间隙，用于激发所述磁性透镜组件的线圈;定心元件，包括具有比所述第一材料和材料的材料更小的杨氏模量的材料 所述极片在相应的连接部分处彼此连接并且具有朝向所述极片的相应间隙部分端部的定心元件接收部分。

公开(公告)号：US07919749B2

公开(公告)日：2011-04-05

申请号：US12234453

申请日：2008-09-19

申请人： Fang Zhou ,  Juergen Frosien ,  Pavel Adamec

发明人： Fang Zhou ,  Juergen Frosien ,  Pavel Adamec

IPC分类号： H01J37/244

CPC分类号： H01J37/05 ,  H01J37/073 ,  H01J37/153 ,  H01J2237/057 ,  H01J2237/06341 ,  H01J2237/1207 ,  H01J2237/1534 ,  H01J2237/28

摘要： An electron beam apparatus and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam having an asymmetric first energy distribution is generated by means of an electron source. The primary electron beam is high-pass energy filtered using a retarding lens.

摘要翻译： 描述了一种用于提供能量过滤的一次电子束的电子束装置和方法。 其中，通过电子源产生具有不对称的第一能量分布的一次电子束。 一次电子束是使用延迟透镜进行高通能量滤波。

公开(公告)号：US07847267B2

公开(公告)日：2010-12-07

申请号：US10502104

申请日：2003-10-22

申请人： Dror Shemesh ,  Pavel Adamec

发明人： Dror Shemesh ,  Pavel Adamec

IPC分类号： H01J37/244

CPC分类号： H01J37/244 ,  G01N23/2251 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2449 ,  H01J2237/24495 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

摘要： A system and method for multi detector detection of electrons, the method includes the steps of directing a primary electron beam, through a column, to interact with an inspected object, directing, by introducing a substantial electrostatic field, electrons reflected or scattered from the inspected objects towards multiple interior detectors, whereas at least some of the directed electrons are reflected or scattered at small angle in relation to the inspected object; and receiving detection signals from at least one interior detector.

摘要翻译： 一种用于电子的多检测器检测的系统和方法，该方法包括以下步骤：通过列引导一次电子束与检测对象相互作用，通过引入实质的静电场来引导从检查的反射或散射的电子 物体朝向多个内部检测器，而至少一些定向电子相对于被检查物体以小角度反射或散射; 以及从至少一个内部检测器接收检测信号。

公开(公告)号：US07800062B2

公开(公告)日：2010-09-21

申请号：US10912792

申请日：2004-08-06

申请人： Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas ,  Pavel Adamec ,  Yaron Gold

发明人： Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas ,  Pavel Adamec ,  Yaron Gold

IPC分类号： G01B15/04

CPC分类号： G01N23/22 ,  G01N23/203 ,  H01J37/1478 ,  H01J37/265 ,  H01J2237/202 ,  H01J2237/2611 ,  H01J2237/281

摘要： The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.

摘要翻译： 根据第一方面，本发明提供一种用带电粒子束检查样品的方法。 该方法提供了具有不同视角的样本的一个或多个图像，使得与样本的单个图像相比，可以访问大量关于样本的附加信息。 通过在两个图像之间倾斜光束并将样本移动到新位置来实现不同的视角（入射角），使得由光束的倾斜引起的光束的位移被补偿。 因此，当显示/记录第二图像时，在显示/记录第一图像的同时，光束扫描与其扫描的相同的区域。

公开(公告)号：US20080191134A1

公开(公告)日：2008-08-14

申请号：US11923421

申请日：2007-10-24

申请人： Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

发明人： Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

IPC分类号： G01N23/00 ,  G01T1/00

CPC分类号： H01J37/244 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2802 ,  H01J2237/2804

摘要： A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged particles and for generating a two-dimensional optical signal which correlates to the detected spatial distribution. Further, an image conduit has an input coupled to the particle sensitive region of the particle detector for transmitting the two-dimensional optical signal to at least one optical detector. Further, a selecting means is adapted for selecting at least a portion of the two-dimensional optical signal.

摘要翻译： 带电粒子检测器组件包括粒子检测器，该粒子检测器具有至少一个用于检测带电粒子的空间分布的至少一部分的粒子敏感区域，并用于产生与检测到的空间分布相关的二维光信号。 此外，图像导管具有耦合到粒子检测器的粒子敏感区域的输入端，用于将二维光信号传输到至少一个光学检测器。 此外，选择装置适于选择二维光信号的至少一部分。

公开(公告)号：US20060226753A1

公开(公告)日：2006-10-12

申请号：US11387090

申请日：2006-03-22

申请人： Pavel Adamec ,  Stefan Lanio

发明人： Pavel Adamec ,  Stefan Lanio

IPC分类号： H01J9/02

CPC分类号： H01J1/135 ,  H01J1/18 ,  H01J37/07 ,  H01J37/242 ,  H01J2237/06316

摘要： An emitter for a charged particle beam apparatus is provided, said emitter comprising a filament extending between and being attached to first and second supports, an emitter tip attached to the filament, and a stabilization element attached to a third support and to the filament, wherein the first, second and third supports define a triangle so that the stabilization element extends at least partially in a direction perpendicular to the direction in which the filament extends.

摘要翻译： 提供了一种用于带电粒子束装置的发射器，所述发射器包括在第一和第二支撑件之间延伸并连接到第一和第二支撑件的灯丝，连接到灯丝的发射极尖端以及连接到第三支撑件和灯丝的稳定元件，其中 第一，第二和第三支撑件限定三角形，使得稳定元件至少部分地沿垂直于灯丝延伸方向的方向延伸。