公开(公告)号：US07816782B2

公开(公告)日：2010-10-19

申请号：US11174526

申请日：2005-07-06

申请人： Hideya Murai ,  Tadanori Shimoto ,  Takuo Funaya ,  Katsumi Kikuchi ,  Shintaro Yamamichi ,  Kazuhiro Baba ,  Hirokazu Honda ,  Keiichiro Kata ,  Kouji Matsui ,  Shinichi Miyazaki

发明人： Hideya Murai ,  Tadanori Shimoto ,  Takuo Funaya ,  Katsumi Kikuchi ,  Shintaro Yamamichi ,  Kazuhiro Baba ,  Hirokazu Honda ,  Keiichiro Kata ,  Kouji Matsui ,  Shinichi Miyazaki

IPC分类号： H01L23/14 ,  H01L23/12

CPC分类号： H01L21/4857 ,  H01L23/49822 ,  H01L23/49833 ,  H01L23/5383 ,  H01L24/45 ,  H01L24/48 ,  H01L25/0657 ,  H01L2221/68345 ,  H01L2224/16225 ,  H01L2224/45144 ,  H01L2224/48227 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/15311 ,  H01L2924/15312 ,  H01L2924/1532 ,  H01L2924/181 ,  H05K3/007 ,  H05K3/205 ,  H05K3/28 ,  H05K3/4614 ,  H05K3/4682 ,  H05K2201/0376 ,  H05K2203/0152 ,  H05K2203/061 ,  H01L2224/05599 ,  H01L2924/00012

摘要： A wiring substrate for mounting semiconductors is provided with an insulation film, wires formed in the insulation film, and a plurality of electrode pads that electrically connect to the wires through vias. The electrode pads are provided to have their surfaces exposed to both of the front surface and the rear surface of the insulation film, and at least a part of the side surface of the electrode pads is buried in the insulation film. The insulation film is formed by forming electrode pads on the respective two metallic plates, thereafter, laminating an insulation layer and wires on the respective metallic plates to cover the electrode pad, and adhering the insulation layers to each other for integration, and thereafter, removing the metallic plates.

摘要翻译： 用于安装半导体的布线基板设置有绝缘膜，形成在绝缘膜中的布线以及通过通孔电连接到导线的多个电极垫。 电极焊盘被设置为使其表面暴露于绝缘膜的前表面和后表面，并且电极焊盘的侧表面的至少一部分被埋在绝缘膜中。 绝缘膜通过在相应的两个金属板上形成电极焊盘而形成，然后在相应的金属板上层叠绝缘层和电线以覆盖电极焊盘，并将绝缘层彼此粘合在一起，然后除去 金属板。

公开(公告)号：US08035217B2

公开(公告)日：2011-10-11

申请号：US12135355

申请日：2008-06-09

申请人： Kentaro Mori ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Masaya Kawano ,  Takehiko Maeda ,  Kouji Soejima

发明人： Kentaro Mori ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Masaya Kawano ,  Takehiko Maeda ,  Kouji Soejima

IPC分类号： H01L23/12

CPC分类号： H01L21/6835 ,  H01L23/5389 ,  H01L23/544 ,  H01L24/19 ,  H01L24/24 ,  H01L2221/68345 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54473 ,  H01L2223/54486 ,  H01L2224/04105 ,  H01L2224/24226 ,  H01L2224/32225 ,  H01L2224/73267 ,  H01L2224/82039 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01038 ,  H01L2924/0104 ,  H01L2924/01041 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01056 ,  H01L2924/01057 ,  H01L2924/01073 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/12044 ,  H01L2924/15174 ,  H01L2924/15788 ,  H01L2924/181 ,  H01L2924/18162 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/3011 ,  Y10S438/977 ,  H01L2924/00

摘要： A transparent board is positioned on a support board provided with a positioning mark, and a release material is provided. A semiconductor element is then positioned so that the electrode element faces upward, and the support board is then removed. An insulating resin is then formed on the release material so as to cover the semiconductor element; and a via, a wiring layer, an insulation layer, an external terminal, and a solder resist are then formed. The transparent board is then peeled from the semiconductor device through the use of the release material. A chip can thereby be mounted with high precision, there is no need to provide a positioning mark during mounting of the chip on the substrate in the manufacturing process, and the substrate can easily be removed. As a result, a semiconductor device having high density and a thin profile can be manufactured at low cost.

摘要翻译： 透明板位于设置有定位标记的支撑板上，并且设置有释放材料。 然后将半导体元件定位成使得电极元件面向上，然后移除支撑板。 然后在剥离材料上形成绝缘树脂以覆盖半导体元件; 然后形成通孔，布线层，绝缘层，外部端子和阻焊剂。 然后透明板通过使用释放材料从半导体器件剥离。 因此，可以高精度地安装芯片，在制造过程中不需要在将芯片安装在基板上时提供定位标记，并且可以容易地去除基板。 结果，可以以低成本制造具有高密度和薄型的半导体器件。

公开(公告)号：US07838779B2

公开(公告)日：2010-11-23

申请号：US11452933

申请日：2006-06-15

申请人： Shintaro Yamamichi ,  Katsumi Kikuchi ,  Hideya Murai ,  Takuo Funaya ,  Takehiko Maeda ,  Kenta Ogawa ,  Jun Tsukano ,  Hirokazu Honda

发明人： Shintaro Yamamichi ,  Katsumi Kikuchi ,  Hideya Murai ,  Takuo Funaya ,  Takehiko Maeda ,  Kenta Ogawa ,  Jun Tsukano ,  Hirokazu Honda

IPC分类号： H01R12/04 ,  H05K1/11

CPC分类号： H01L23/49827 ,  H01L21/486 ,  H01L21/6835 ,  H01L23/49811 ,  H01L23/49822 ,  H01L24/32 ,  H01L24/48 ,  H01L24/73 ,  H01L25/0657 ,  H01L2221/68345 ,  H01L2224/16225 ,  H01L2224/16235 ,  H01L2224/32057 ,  H01L2224/32225 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2224/83385 ,  H01L2224/92125 ,  H01L2225/06517 ,  H01L2225/06524 ,  H01L2225/06541 ,  H01L2225/06572 ,  H01L2225/06586 ,  H01L2924/00011 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01046 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/12041 ,  H01L2924/14 ,  H01L2924/15183 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/30107 ,  H01L2924/3011 ,  H01L2924/351 ,  H05K3/0055 ,  H05K3/20 ,  H05K3/421 ,  H05K3/4644 ,  H05K2201/09563 ,  H05K2201/09863 ,  H05K2203/0796 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/0401 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： A wiring board in which lower-layer wiring composed of a wiring body and an etching barrier layer is formed in a concave portion formed on one face of a board-insulating film, upper-layer wiring is formed on the other face of the board-insulating film, and the upper-layer wiring and the wiring body of the lower-layer wiring are connected to each other through a via hole formed in the board-insulating film. The via hole is barrel-shaped, bell-shaped, or bellows-shaped.

摘要翻译： 在由板状绝缘膜的一面形成的凹部形成有由布线体和蚀刻阻挡层构成的下层布线的布线基板，在基板绝缘膜的另一面形成有上层布线， 绝缘膜，上层布线和下层布线的布线体通过形成在基板绝缘膜上的通孔相互连接。 通孔为桶形，钟形或波纹管状。

公开(公告)号：US20060283625A1

公开(公告)日：2006-12-21

申请号：US11452933

申请日：2006-06-15

申请人： Shintaro Yamamichi ,  Katsumi Kikuchi ,  Hideya Murai ,  Takuo Funaya ,  Takehiko Maeda ,  Kenta Ogawa ,  Jun Tsukano ,  Hirokazu Honda

发明人： Shintaro Yamamichi ,  Katsumi Kikuchi ,  Hideya Murai ,  Takuo Funaya ,  Takehiko Maeda ,  Kenta Ogawa ,  Jun Tsukano ,  Hirokazu Honda

IPC分类号： H05K1/11 ,  H05K1/03

CPC分类号： H01L23/49827 ,  H01L21/486 ,  H01L21/6835 ,  H01L23/49811 ,  H01L23/49822 ,  H01L24/32 ,  H01L24/48 ,  H01L24/73 ,  H01L25/0657 ,  H01L2221/68345 ,  H01L2224/16225 ,  H01L2224/16235 ,  H01L2224/32057 ,  H01L2224/32225 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2224/83385 ,  H01L2224/92125 ,  H01L2225/06517 ,  H01L2225/06524 ,  H01L2225/06541 ,  H01L2225/06572 ,  H01L2225/06586 ,  H01L2924/00011 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01046 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/12041 ,  H01L2924/14 ,  H01L2924/15183 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/30107 ,  H01L2924/3011 ,  H01L2924/351 ,  H05K3/0055 ,  H05K3/20 ,  H05K3/421 ,  H05K3/4644 ,  H05K2201/09563 ,  H05K2201/09863 ,  H05K2203/0796 ,  H01L2924/00 ,  H01L2924/00012 ,  H01L2224/0401 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： A wiring board in which lower-layer wiring composed of a wiring body and an etching barrier layer is formed in a concave portion formed on one face of a board-insulating film, upper-layer wiring is formed on the other face of the board-insulating film, and the upper-layer wiring and the wiring body of the lower-layer wiring are connected to each other through a via hole formed in the board-insulating film. The via hole is barrel-shaped, bell-shaped, or bellows-shaped.

摘要翻译： 在由板状绝缘膜的一面形成的凹部形成有由布线体和蚀刻阻挡层构成的下层布线的布线基板，在基板绝缘膜的另一面形成有上层布线， 绝缘膜，上层布线和下层布线的布线体通过形成在基板绝缘膜上的通孔相互连接。 通孔为桶形，钟形或波纹管状。

公开(公告)号：US07674989B2

公开(公告)日：2010-03-09

申请号：US11449673

申请日：2006-06-09

申请人： Katsumi Kikuchi ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Takehiko Maeda ,  Hirokazu Honda ,  Kenta Ogawa ,  Jun Tsukano

发明人： Katsumi Kikuchi ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Takehiko Maeda ,  Hirokazu Honda ,  Kenta Ogawa ,  Jun Tsukano

IPC分类号： H01R12/04

CPC分类号： H05K1/115 ,  H05K3/0035 ,  H05K3/4069 ,  H05K3/421 ,  H05K3/4644 ,  H05K2201/09509 ,  H05K2201/09854 ,  H05K2203/1476 ,  Y10T29/49165

摘要： A wiring board for mounting a semiconductor element or electronic component having a plurality of wiring layers, an insulating layer provided between these wiring layers, and a via which is provided to the insulating layer and which electrically connects the wiring layers. In this wiring board, the cross-sectional shape of the via in the plane parallel to the wiring layers is obtained by the partial overlapping of a plurality of similar shapes (circles). Stable operation can be obtained in a semiconductor element by minimizing obstacles to increased density, effectively increasing the cross-sectional area of the via, and preventing the wiring resistance from increasing by making the cross-sectional shape of the via into a shape obtained by the partial overlapping of a plurality of similar shapes.

摘要翻译： 一种用于安装具有多个布线层的半导体元件或电子元件的布线板，设置在这些布线层之间的绝缘层，以及设置在绝缘层上并将布线层电连接的通孔。 在该布线板中，通过多个相似形状（圆圈）的部分重叠，获得与布线层平行的平面中的通孔的截面形状。 通过最小化增加密度的障碍物，有效地增加通孔的横截面积，并且通过使通孔的横截面形状成为由通孔形成的形状来防止布线电阻增加，可以在半导体元件中获得稳定的操作 多个类似形状的部分重叠。

公开(公告)号：US20060283629A1

公开(公告)日：2006-12-21

申请号：US11449673

申请日：2006-06-09

申请人： Katsumi Kikuchi ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Takehiko Maeda ,  Hirokazu Honda ,  Kenta Ogawa ,  Jun Tsukano

发明人： Katsumi Kikuchi ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Takehiko Maeda ,  Hirokazu Honda ,  Kenta Ogawa ,  Jun Tsukano

IPC分类号： H05K1/11 ,  H05K3/42

CPC分类号： H05K1/115 ,  H05K3/0035 ,  H05K3/4069 ,  H05K3/421 ,  H05K3/4644 ,  H05K2201/09509 ,  H05K2201/09854 ,  H05K2203/1476 ,  Y10T29/49165

摘要： A wiring board for mounting a semiconductor element or electronic component having a plurality of wiring layers, an insulating layer provided between these wiring layers, and a via which is provided to the insulating layer and which electrically connects the wiring layers. In this wiring board, the cross-sectional shape of the via in the plane parallel to the wiring layers is obtained by the partial overlapping of a plurality of similar shapes (circles). Stable operation can be obtained in a semiconductor element by minimizing obstacles to increased density, effectively increasing the cross-sectional area of the via, and preventing the wiring resistance from increasing by making the cross-sectional shape of the via into a shape obtained by the partial overlapping of a plurality of similar shapes.

摘要翻译： 一种用于安装具有多个布线层的半导体元件或电子元件的布线板，设置在这些布线层之间的绝缘层，以及设置在绝缘层上并将布线层电连接的通孔。 在该布线板中，通过多个相似形状（圆圈）的部分重叠，获得与布线层平行的平面中的通孔的横截面形状。 通过最小化增加密度的障碍物，有效地增加通孔的横截面积，并且通过使通孔的横截面形状成为由通孔形成的形状来防止布线电阻增加，可以在半导体元件中获得稳定的操作 多个类似形状的部分重叠。

公开(公告)号：US20060012048A1

公开(公告)日：2006-01-19

申请号：US11174526

申请日：2005-07-06

申请人： Hideya Murai ,  Tadanori Shimoto ,  Takuo Funaya ,  Katsumi Kikuchi ,  Shintaro Yamamichi ,  Kazuhiro Baba ,  Hirokazu Honda ,  Keiichiro Kata ,  Kouji Matsui ,  Shinichi Miyazaki

发明人： Hideya Murai ,  Tadanori Shimoto ,  Takuo Funaya ,  Katsumi Kikuchi ,  Shintaro Yamamichi ,  Kazuhiro Baba ,  Hirokazu Honda ,  Keiichiro Kata ,  Kouji Matsui ,  Shinichi Miyazaki

IPC分类号： H01L23/48

CPC分类号： H01L21/4857 ,  H01L23/49822 ,  H01L23/49833 ,  H01L23/5383 ,  H01L24/45 ,  H01L24/48 ,  H01L25/0657 ,  H01L2221/68345 ,  H01L2224/16225 ,  H01L2224/45144 ,  H01L2224/48227 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/15311 ,  H01L2924/15312 ,  H01L2924/1532 ,  H01L2924/181 ,  H05K3/007 ,  H05K3/205 ,  H05K3/28 ,  H05K3/4614 ,  H05K3/4682 ,  H05K2201/0376 ,  H05K2203/0152 ,  H05K2203/061 ,  H01L2224/05599 ,  H01L2924/00012

摘要： A wiring substrate for mounting semiconductors is provided with an insulation film, wires formed in the insulation film, and a plurality of electrode pads that electrically connect to the wires through vias. The electrode pads are provided to have their surfaces exposed to both of the front surface and the rear surface of the insulation film, and at least a part of the side surface of the electrode pads is buried in the insulation film. The insulation film is formed by forming electrode pads on the respective two metallic plates, thereafter, laminating an insulation layer and wires on the respective metallic plates to cover the electrode pad, and adhering the insulation layers to each other for integration, and thereafter, removing the metallic plates.

摘要翻译： 用于安装半导体的布线基板设置有绝缘膜，形成在绝缘膜中的布线以及通过通孔电连接到导线的多个电极垫。 电极焊盘被设置为使其表面暴露于绝缘膜的前表面和后表面，并且电极焊盘的侧表面的至少一部分被埋在绝缘膜中。 绝缘膜通过在相应的两个金属板上形成电极焊盘而形成，然后在相应的金属板上层叠绝缘层和电线以覆盖电极焊盘，并将绝缘层彼此粘合在一起，然后除去 金属板。

公开(公告)号：US20080303136A1

公开(公告)日：2008-12-11

申请号：US12135355

申请日：2008-06-09

申请人： Kentaro Mori ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Masaya Kawano ,  Takehiko Maeda ,  Kouji Soejima

发明人： Kentaro Mori ,  Shintaro Yamamichi ,  Hideya Murai ,  Takuo Funaya ,  Masaya Kawano ,  Takehiko Maeda ,  Kouji Soejima

IPC分类号： H01L23/15 ,  H01L21/58

CPC分类号： H01L21/6835 ,  H01L23/5389 ,  H01L23/544 ,  H01L24/19 ,  H01L24/24 ,  H01L2221/68345 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54473 ,  H01L2223/54486 ,  H01L2224/04105 ,  H01L2224/24226 ,  H01L2224/32225 ,  H01L2224/73267 ,  H01L2224/82039 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01038 ,  H01L2924/0104 ,  H01L2924/01041 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01056 ,  H01L2924/01057 ,  H01L2924/01073 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/12044 ,  H01L2924/15174 ,  H01L2924/15788 ,  H01L2924/181 ,  H01L2924/18162 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/3011 ,  Y10S438/977 ,  H01L2924/00

摘要： A transparent board is positioned on a support board provided with a positioning mark, and a release material is provided. A semiconductor element is then positioned so that the electrode element faces upward, and the support board is then removed. An insulating resin is then formed on the release material so as to cover the semiconductor element; and a via, a wiring layer, an insulation layer, an external terminal, and a solder resist are then formed. The transparent board is then peeled from the semiconductor device through the use of the release material. A chip can thereby be mounted with high precision, there is no need to provide a positioning mark during mounting of the chip on the substrate in the manufacturing process, and the substrate can easily be removed. As a result, a semiconductor device having high density and a thin profile can be manufactured at low cost.

摘要翻译： 透明板位于设置有定位标记的支撑板上，并且设置有释放材料。 然后将半导体元件定位成使得电极元件面向上，然后移除支撑板。 然后在剥离材料上形成绝缘树脂以覆盖半导体元件; 然后形成通孔，布线层，绝缘层，外部端子和阻焊剂。 然后透明板通过使用释放材料从半导体器件剥离。 因此，可以高精度地安装芯片，在制造过程中不需要在将芯片安装在基板上时提供定位标记，并且可以容易地去除基板。 结果，可以以低成本制造具有高密度和薄型的半导体器件。

公开(公告)号：US20090294951A1

公开(公告)日：2009-12-03

申请号：US12521936

申请日：2008-01-15

申请人： Hideya Murai ,  Yuji Kayashima ,  Takehiko Maeda ,  Shintaro Yamamichi ,  Takuo Funaya

发明人： Hideya Murai ,  Yuji Kayashima ,  Takehiko Maeda ,  Shintaro Yamamichi ,  Takuo Funaya

IPC分类号： H01L23/48 ,  H01L21/768

CPC分类号： H01L24/19 ,  B23K26/389 ,  H01L21/76802 ,  H01L23/5389 ,  H01L24/24 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/1134 ,  H01L2224/13099 ,  H01L2224/20 ,  H01L2224/211 ,  H01L2224/24227 ,  H01L2224/32225 ,  H01L2224/73267 ,  H01L2224/92244 ,  H01L2924/00013 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0106 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/1517 ,  H01L2924/3011 ,  H01L2924/00014

摘要： A semiconductor device that can be readily manufactured, can include a large number of pads, and can be thin, and a method for manufacturing the same are provided. The semiconductor device is characterized in that the semiconductor device includes an LSI chip, an insulating layer provided on the LSI chip and made of a nonphotosensitive resin, the insulating layer including a via hole in the position corresponding to an externally connected pad, and a wiring layer extending along the insulating layer through the via hole to the externally connected pad, and at least part of the via hole is formed by irradiating the insulating layer with laser light.

摘要翻译： 可以容易地制造的半导体器件可以包括大量的焊盘，并且可以是薄的，并且提供其制造方法。 半导体器件的特征在于，半导体器件包括LSI芯片，设置在LSI芯片上并由非感光树脂制成的绝缘层，所述绝缘层包括在与外部连接的焊盘相对应的位置中的通孔，以及布线 所述层通过所述通孔延伸到所述外部连接的焊盘，并且所述通孔的至少一部分通过用激光照射所述绝缘层而形成。

公开(公告)号：US08043953B2

公开(公告)日：2011-10-25

申请号：US12521936

申请日：2008-01-15

申请人： Hideya Murai ,  Yuji Kayashima ,  Takehiko Maeda ,  Shintaro Yamamichi ,  Takuo Funaya

发明人： Hideya Murai ,  Yuji Kayashima ,  Takehiko Maeda ,  Shintaro Yamamichi ,  Takuo Funaya

IPC分类号： H01L21/44 ,  H01L21/4763

CPC分类号： H01L24/19 ,  B23K26/389 ,  H01L21/76802 ,  H01L23/5389 ,  H01L24/24 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/1134 ,  H01L2224/13099 ,  H01L2224/20 ,  H01L2224/211 ,  H01L2224/24227 ,  H01L2224/32225 ,  H01L2224/73267 ,  H01L2224/92244 ,  H01L2924/00013 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0106 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/1517 ,  H01L2924/3011 ,  H01L2924/00014

摘要： A semiconductor device that can be readily manufactured, can include a large number of pads, and can be thin, and a method for manufacturing the same are provided. The semiconductor device is characterized in that the semiconductor device includes an LSI chip, an insulating layer provided on the LSI chip and made of a nonphotosensitive resin, the insulating layer including a via hole in the position corresponding to an externally connected pad, and a wiring layer extending along the insulating layer through the via hole to the externally connected pad, and at least part of the via hole is formed by irradiating the insulating layer with laser light.

摘要翻译： 可以容易地制造的半导体器件可以包括大量的焊盘，并且可以是薄的，并且提供其制造方法。 半导体器件的特征在于，半导体器件包括LSI芯片，设置在LSI芯片上并由非感光树脂制成的绝缘层，所述绝缘层包括在与外部连接的焊盘相对应的位置中的通孔，以及布线 所述层通过所述通孔延伸到所述外部连接的焊盘，并且所述通孔的至少一部分通过用激光照射所述绝缘层而形成。