公开(公告)号：US06309554B1

公开(公告)日：2001-10-30

申请号：US09276908

申请日：1999-03-26

Applicant: Akira Fujishima ,  Hideki Masuda

Inventor： Akira Fujishima ,  Hideki Masuda

IPC: B81B704

CPC classification number: H01J9/025 ,  H01J2201/30457

Abstract: A method of producing a needle-like diamond structure including the steps of forming a layer of anodized alumina on a diamond substrate, the anodized alumina having a plurality of through holes; vapor-depositing a substance resistant to plasma etching by a vacuum vapor-depositing method to form dots on said diamond substrate, wherein the layer of anodized alumina acts as a mask for the vapor deposition; removing the anodized alumina; and performing a plasma etching treatment while using the dots as a mask, thereby forming regularly-arranged, needle-like diamond columns.

Abstract translation: 一种制造针状金刚石结构的方法，包括以下步骤：在金刚石基底上形成阳极化氧化铝层，所述阳极化氧化铝具有多个通孔; 通过真空气相沉积方法气相沉积耐等离子体蚀刻的物质，以在所述金刚石基底上形成点，其中阳极氧化的氧化铝层用作气相沉积的掩模; 去除阳极氧化的氧化铝; 并且在使用点作为掩模的同时进行等离子体蚀刻处理，从而形成规则排列的针状菱形柱。

公开(公告)号：US06307323B1

公开(公告)日：2001-10-23

申请号：US09474528

申请日：1999-12-29

Applicant: Yoon Ho Song ,  Jin Ho Lee ,  Seung Youl Kang ,  Kyoung Ik Cho

Inventor： Yoon Ho Song ,  Jin Ho Lee ,  Seung Youl Kang ,  Kyoung Ik Cho

IPC: G05G310

CPC classification number: B82Y10/00 ,  G09G3/22 ,  H01J31/126 ,  H01J2201/30457 ,  H01J2201/30469 ,  H01J2201/319

Abstract: A field emission display in which field emission devices are applied to a flat panel display. A field emission display with diode-type field emitters includes an upper plate and a lower plate, the upper plate and the lower plate are vacuum-packaged in parallel. The lower plate includes a plurality of column signal buses and a plurality of row signal buses, film type field emitters, and switching devices. The column signal buses and the row signal buses are made of metallic material. Pixels are defined by the column signal buses and the row signal buses. A film type field emitter and a switching device are formed inside each pixel. The switching device controls the field emitter on the basis of scan signals and data signals. The scan signals and data signals are loaded to the switching devices through the column signal buses and the row signal buses. The switching device includes at least three electrodes for connection with the column signal bus, the row signal bus, and the field emitter.

Abstract translation: 场发射装置用于平板显示器的场致发射显示器。 具有二极管型场致发射体的场发射显示器包括上板和下板，上板和下板被并联真空包装。 下板包括多个列信号总线和多个行信号总线，薄膜型场发射器和开关装置。 列信号总线和行信号总线由金属材料制成。 像素由列信号总线和行信号总线定义。 在每个像素内部形成有膜型场发射器和开关器件。 开关装置根据扫描信号和数据信号控制场发射器。 扫描信号和数据信号通过列信号总线和行信号总线加载到开关装置。 开关装置包括用于与列信号总线，行信号总线和场发射器连接的至少三个电极。

公开(公告)号：US20010015604A1

公开(公告)日：2001-08-23

申请号：US09748437

申请日：2000-12-27

Applicant: MEDTRONIC AVE, INC.

Inventor： Graham Steven Kerslick ,  Victor Ivan Chornenky

IPC: H01J017/24

CPC classification number: H01J35/065 ,  H01J1/304 ,  H01J7/18 ,  H01J35/20 ,  H01J2201/30457 ,  H01J2235/205

Abstract: A cathode structure comprising a getter material provided with a diamond film. The getter material may include zirconium, vanadium and iron. Cathode structures may have a substantially rounded configuration including a substantially straight portion. Other cathode structures may have a substantially flat portion, with the diamond film covering essentially the entire flat surface. Methods of manufacturing cathode structures may include conditioning the cathode structure by applying a voltage.

Abstract translation: 一种阴极结构，包括设置有金刚石膜的吸气材料。 吸气材料可以包括锆，钒和铁。 阴极结构可以具有基本上圆形的构造，其包括基本上直的部分。 其他阴极结构可以具有基本上平坦的部分，其中金刚石膜基本上覆盖整个平坦表面。 制造阴极结构的方法可以包括通过施加电压来调节阴极结构。

公开(公告)号：US06267637B1

公开(公告)日：2001-07-31

申请号：US09437092

申请日：1999-11-09

Applicant: Hirohisa Saito ,  Takashi Tsuno ,  Hiromu Shiomi ,  Yoshiaki Kumazawa ,  Takahiro Imai

Inventor： Hirohisa Saito ,  Takashi Tsuno ,  Hiromu Shiomi ,  Yoshiaki Kumazawa ,  Takahiro Imai

IPC: H01J924

CPC classification number: H01J1/3042 ,  H01J2201/30457

Abstract: An electron-emitting element comprises a diamond substrate, and a diamond protrusion grown on a surface of the diamond substrate so as to have a pointed portion in a form capable of emitting an electron. Since the diamond protrusion formed by growth has a sharply pointed tip portion, it can fully emit electrons. Preferably, the surface of the diamond substrate is a {100} face, and the diamond protrusion is surrounded by {111} faces.

Abstract translation: 电子发射元件包括金刚石衬底和在金刚石衬底的表面上生长的金刚石突起，以便具有能够发射电子的形式的尖端部分。 由于通过生长形成的金刚石突起具有尖锐的尖端部分，所以它可以完全发射电子。 优选地，金刚石基底的表面是{100}面，并且金刚石突起被{111}面包围。

公开(公告)号：US06200183B1

公开(公告)日：2001-03-13

申请号：US09357622

申请日：1999-07-20

Applicant: Andrzej R. Badzian ,  Rustum N. Roy ,  Theresa Badzian ,  William R. Drawl ,  Pravin Mistry ,  Manuel C. Turchan

Inventor： Andrzej R. Badzian ,  Rustum N. Roy ,  Theresa Badzian ,  William R. Drawl ,  Pravin Mistry ,  Manuel C. Turchan

IPC: H01J902

CPC classification number: C23C16/27 ,  C23C16/277 ,  C23C16/483 ,  H01J2201/30457

Abstract: The preparation and use of diamond as an electron emission material is disclosed. Satisfactory measurements were conducted on diamond coatings deposited on WC-Co alloy by a multiple pulsed laser process. The electron emission was measured in a diode configuration with a diamond surface-anode spacing of 20 and 50 &mgr;m in vacuum at P=10−7 Torr. Current densities of 6 mA/cm were calculated at an applied of voltage of 3000 V (for 20 &mgr;m). Analysis proved that electron field emission provided by a diamond grown by a multiple pulsed laser process proved to satisfactorily meet the specified demands.

Abstract translation: 公开了金刚石作为电子发射材料的制备和使用。 对通过多脉冲激光工艺沉积在WC-Co合金上的金刚石涂层进行了令人满意的测量。 在二极管配置中测量电子发射，金刚石表面 - 阳极间距为20和50微米，真空度为P = 10-7乇。 在施加的电压为3000V（20mum）下计算出6mA / cm 2的电流密度。 分析证明，通过多脉冲激光工艺生长的金刚石提供的电子场发射证明满足了特定的要求。

公开(公告)号：US6132278A

公开(公告)日：2000-10-17

申请号：US883417

申请日：1997-06-25

Applicant: Weng Poo Kang ,  Jimmy Lee Davidson ,  David V. Kerns, Jr.

Inventor： Weng Poo Kang ,  Jimmy Lee Davidson ,  David V. Kerns, Jr.

IPC: G01L9/00 ,  G01P15/08 ,  H01J1/30 ,  H01J1/304 ,  H01J3/02 ,  H01J9/02 ,  H01J19/02 ,  H01J19/24 ,  H01J31/12 ,  H01J9/38

CPC classification number: H01J9/025 ,  B82Y10/00 ,  G01L9/0041 ,  G01L9/0047 ,  G01P15/0802 ,  G01P15/0894 ,  H01J1/3042 ,  H01J1/3044 ,  H01J3/022 ,  H01J31/127 ,  G01P2015/0828 ,  H01J2201/30407 ,  H01J2201/30457

Abstract: Diamond microtip field emitters are used in diode and triode vacuum microelectronic devices, sensors and displays. Diamond diode and triode devices having integral anode and grid structures can be fabricated. Ultra-sharp tips are formed on the emitters in a fabrication process in which diamond is deposited into mold cavities in a two-step deposition sequence. During deposition of the diamond, the carbon graphite content is carefully controlled to enhance emission performance. The tips or the emitters are treated by post-fabrication processes to further enhance performance.

Abstract translation: 金刚石微带场发射器用于二极管和三极管真空微电子器件，传感器和显示器。 可以制造具有整体阳极和栅格结构的金刚石二极管和三极管器件。 在制造工艺中在发射体上形成超尖尖，其中金刚石以两步沉积顺序沉积到模腔中。 在沉积金刚石期间，仔细控制碳石墨含量以增强排放性能。 尖端或发射器通过后制造处理来进一步提高性能。

公开(公告)号：US6097140A

公开(公告)日：2000-08-01

申请号：US29314

申请日：1998-02-12

Applicant: Arthur Miller ,  Dennis John Bechis ,  Steven Alan Lipp ,  Jeffrey Paul Johnson ,  Daniel Irwin Amey, Jr.

Inventor： Arthur Miller ,  Dennis John Bechis ,  Steven Alan Lipp ,  Jeffrey Paul Johnson ,  Daniel Irwin Amey, Jr.

IPC: H01J1/304 ,  H01J29/04 ,  H01J31/12 ,  H01J1/05

CPC classification number: B82Y10/00 ,  H01J1/304 ,  H01J29/04 ,  H01J31/126 ,  H01J2201/304 ,  H01J2201/30457 ,  H01J2329/00

Abstract: Display panels having at least one suspended fibrous cathode containing an electron field emitter are disclosed. The fibrous cathode is supported by a substrate (10) containing two sets of parallel rows of crests and valleys. The first set of parallel crests (11) and valleys (12) provide the valleys along which the fibrous cathode is aligned. The second set of parallel crests (13) and valleys (14) is perpendicular to the first set. The valleys (14) provide the means for suspending the fibrous cathode. The display panels can be produced in large sizes while still maintaining high quality and efficiency.

Abstract translation: PCT No.PCT / US96 / 12822 Sec。 371日期1998年2月12日 102（e）日期1998年2月12日PCT 1996年8月6日PCT PCT。 公开号WO97 / 07524 日期1997年2月27日公开了具有至少一个含有电子场发射体的悬浮纤维阴极的显示面板。 纤维阴极由包含两组平行的波峰和谷的衬底（10）支撑。 第一组平行波峰（11）和谷（12）提供了纤维阴极对齐的谷。 第二组平行波峰（13）和谷（14）垂直于第一组。 谷（14）提供悬挂纤维状阴极的装置。 显示面板可以大尺寸生产，同时仍然保持高质量和高效率。

公开(公告)号：US6084340A

公开(公告)日：2000-07-04

申请号：US253082

申请日：1999-02-19

Applicant: Peter Bachmann ,  Detlef Wiechert ,  Klaus Rademacher ,  Howard Wilson

Inventor： Peter Bachmann ,  Detlef Wiechert ,  Klaus Rademacher ,  Howard Wilson

IPC: H01J1/30 ,  H01J1/308 ,  H01J1/05 ,  H01J1/02 ,  H01J1/16 ,  H01J63/04

CPC classification number: H01J1/308 ,  H01J2201/30457

Abstract: In an electron-emitting component with a cold cathode comprising a substrate and a cover layer with a diamond-containing material consisting of nano-crystalline diamond having a Raman spectrum with three lines, i.e. at K=1334.+-.4 cm.sup.-1 with a half-width value of 12.+-.6 cm.sup.-1, at K=1140.+-.20 cm.sup.-1 and at K=1470.+-.20 cm.sup.-1, the cold cathode exhibits a low extraction field strength, a stable emission at pressures below 10.sup.-4 mbar, a steep current-voltage characteristic and stable emission currents in excess of 1 microampere/mm.sup.2. The electron emission of the component demonstrates a long-time stability, and a constant intensity of the electron beam across its cross-section.

Abstract translation: 在具有冷阴极的电子发射部件中，包括基底和具有含金刚石材料的覆盖层，所述金刚石材料由具有三条线的拉曼光谱的纳米晶体金刚石组成，即在K = 1334 +/- 4cm -1处， 在K = 1140 +/- 20cm -1处，在K = 1470 +/- 20cm -1处的半值宽度为12 +/- 6cm -1，冷阴极表现出较低的提取场强， 在低于10-4毫巴的压力下稳定发射，电流电压特性曲线陡峭，发射电流稳定在1微安/毫米2以上。 元件的电子发射表现出长时间的稳定性，电子束横截面的恒定强度。

公开(公告)号：US6078133A

公开(公告)日：2000-06-20

申请号：US28797

申请日：1998-02-25

Applicant: Eric P. Menu ,  John Song ,  Bernard F. Coll

Inventor： Eric P. Menu ,  John Song ,  Bernard F. Coll

IPC: C23C14/06 ,  C23C14/54 ,  C23C16/34 ,  H01J1/30 ,  H01J1/304 ,  H01J3/02 ,  H01J9/02 ,  H01J1/02

CPC classification number: C23C16/342 ,  C23C14/0605 ,  C23C14/548 ,  H01J3/022 ,  H01J9/025 ,  H01J2201/30457 ,  H01J2201/319

Abstract: An amorphous multi-layered structure (100, 200) is formed by a method including the steps of: i) positioning a deposition substrate (101) in a physical vapor deposition apparatus, (300, 400, 500) ii) ionizing a precursor of a multi-phase material within the physical vapor deposition apparatus (300, 400, 500) iv) modulating the total ion impinging energy of the ions to deposit layers having predetermined properties corresponding to the total ion impinging energy values.

Abstract translation: 通过包括以下步骤的方法形成非晶多层结构（100,200）：i）将沉积基板（101）定位在物理气相沉积设备中（300,400,500），ii）将前体 在物理气相沉积装置（300,400,500）内的多相材料，iv）调节离子的总离子冲击能量以沉积具有对应于总离子冲击能量值的预定特性的层。

公开(公告)号：US6008502A

公开(公告)日：1999-12-28

申请号：US945877

申请日：1997-11-03

Applicant: Masahiro Deguchi ,  Akio Hiraki ,  Toshimichi Ito ,  Akimitsu Hatta ,  Nobuhiro Eimori ,  Makoto Kitabatake

Inventor： Masahiro Deguchi ,  Akio Hiraki ,  Toshimichi Ito ,  Akimitsu Hatta ,  Nobuhiro Eimori ,  Makoto Kitabatake

IPC: H01J1/312 ,  H01L29/06 ,  H01L29/12

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J2201/30457

Abstract: The present invention provides an electron emitting device for efficiently emitting electron beams by applying a forward bias to an MIS, pn, and a pin structure using a diamond layer so as to supply electrons from an electron supply layer to a p-type diamond layer. Furthermore, the present invention provides a method for easily and efficiently performing important production processes for producing a highly efficient electron emitting device having a diamond layer and controlling a surface state of the diamond layer. A multi-layer structure including an electrode layer, an electron supply layer and a diamond layer is used as the structure thereof. Alternatively, the electron affinity state of the surface of the diamond layer is arbitrarily controlled by a method such as ultraviolet ray irradiation.

Abstract translation: PCT No.PCT / JP97 / 01031 Sec。 371日期：1997年11月3日 102（e）日期1997年11月3日PCT 1997年3月26日PCT公布。 公开号WO97 / 36309 日期1997年10月2日本发明提供了一种电子发射器件，用于通过使用金刚石层向MIS，pn和引脚结构施加正向偏压来有效地发射电子束，以便将电子从电子供给层提供给p 型金刚石层。 此外，本发明提供了一种方法，用于容易且有效地执行用于制造具有金刚石层并控制金刚石层的表面状态的高效电子发射器件的重要生产方法。 使用包括电极层，电子供给层和金刚石层的多层结构作为其结构。 或者，通过紫外线照射等方法任意地控制金刚石层的表面的电子亲合性。