公开(公告)号：US20230043191A1

公开(公告)日：2023-02-09

申请号：US17898421

申请日：2022-08-29

Applicant: Zvi Or-Bach ,  Brian Cronquist ,  Deepak Sekar

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak Sekar

IPC: H01L21/48 ,  H01L23/498 ,  H01L23/34 ,  H01L27/02 ,  H01L21/8234 ,  H01L27/06 ,  H01L27/098 ,  H01L23/522 ,  H01L23/367 ,  H01L27/092 ,  H01L25/00 ,  H01L23/60 ,  H01L25/065

Abstract: A method for producing a 3D semiconductor device: providing a first level with a first single crystal layer; forming control circuitry of first transistors in and/or on the first level with a first metal layer above; forming a second metal layer above the first metal layer; forming a third metal layer above the second metal layer; forming at least one second level on top of or above the third metal layer; performing additional processing steps to form a plurality of second transistors within the second level; forming a fourth and fifth metal layers above second level; a global power distribution grid includes fifth metal, and local power distribution grid includes the second metal layer, where the fifth metal layer thickness is at least 50% greater than the second metal layer thickness.

公开(公告)号：US08642416B2

公开(公告)日：2014-02-04

申请号：US13635436

申请日：2011-06-28

Applicant: Zvi Or-Bach ,  Deepak Sekar ,  Brian Cronquist ,  Ze'ev Wurman

Inventor： Zvi Or-Bach ,  Deepak Sekar ,  Brian Cronquist ,  Ze'ev Wurman

IPC: H01L21/822 ,  H01L21/8238

CPC classification number: H01L21/8221 ,  G11C16/0483 ,  G11C17/06 ,  G11C17/14 ,  G11C29/82 ,  H01L21/6835 ,  H01L21/76254 ,  H01L21/8238 ,  H01L21/84 ,  H01L21/845 ,  H01L23/36 ,  H01L23/481 ,  H01L23/5252 ,  H01L23/5286 ,  H01L23/535 ,  H01L23/544 ,  H01L24/16 ,  H01L24/32 ,  H01L24/48 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/18 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/0694 ,  H01L27/092 ,  H01L27/105 ,  H01L27/10873 ,  H01L27/10876 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1104 ,  H01L27/1108 ,  H01L27/112 ,  H01L27/11206 ,  H01L27/11803 ,  H01L29/42392 ,  H01L29/785 ,  H01L29/78696 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01066 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/12042 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1436 ,  H01L2924/1437 ,  H01L2924/1461 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/19107 ,  H01L2924/3011 ,  H01L2924/3025 ,  H03K17/687 ,  H03K19/0948 ,  H03K19/17704 ,  H03K19/17756 ,  H03K19/17764 ,  H03K19/17796 ,  H01L2924/00012 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

Abstract: A method for formation of a semiconductor device including a first wafer including a first single crystal layer comprising first transistors and first alignment mark, the method including: implanting to form a doped layer within a second wafer; forming a second mono-crystalline layer on top of the first wafer by transferring at least a portion of the doped layer using layer transfer step, and completing the formation of second transistors on the second mono-crystalline layer including a step of forming a gate dielectric followed by second transistors gate formation step, wherein the second transistors are horizontally oriented.

Abstract translation: 一种用于形成包括第一晶片的半导体器件的方法，所述第一晶片包括包括第一晶体管和第一对准标记的第一单晶层，所述方法包括：注入以在第二晶片内形成掺杂层; 通过使用层转移步骤转移至少一部分掺杂层，在第一晶片的顶部上形成第二单晶层，并且在第二单晶层上完成第二晶体管的形成，包括形成栅极电介质的步骤 随后是第二晶体管栅极形成步骤，其中第二晶体管是水平取向的。

公开(公告)号：US08557632B1

公开(公告)日：2013-10-15

申请号：US13441923

申请日：2012-04-09

Applicant: Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/44 ,  H01L21/48 ,  H01L21/50

CPC classification number: H01L23/481 ,  H01L21/743 ,  H01L23/34 ,  H01L23/50 ,  H01L23/544 ,  H01L27/0207 ,  H01L27/0623 ,  H01L27/0688 ,  H01L27/088 ,  H01L27/0886 ,  H01L27/10802 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/11526 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/11807 ,  H01L27/2436 ,  H01L27/249 ,  H01L29/1066 ,  H01L29/66272 ,  H01L29/66704 ,  H01L29/66825 ,  H01L29/66901 ,  H01L29/732 ,  H01L29/7841 ,  H01L29/808 ,  H01L2224/16225 ,  H01L2224/73253 ,  H01L2924/12032 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/16152 ,  H01L2924/00

Abstract: A method to process an Integrated Circuit device including processing a first layer of first transistors, then processing a first metal layer overlaying the first transistors and providing at least one connection to the first transistors, then processing a second metal layer overlaying the first metal layer, then processing a second layer of second transistors overlaying the second metal layer, wherein the second metal layer is connected to provide power to at least one of the second transistors.

Abstract translation: 一种处理集成电路器件的方法，包括处理第一层第一晶体管，然后处理覆盖第一晶体管的第一金属层，并提供与第一晶体管的至少一个连接，然后处理覆盖第一金属层的第二金属层， 然后处理覆盖第二金属层的第二晶体管的第二层，其中第二金属层被连接以向第二晶体管中的至少一个提供功率。

公开(公告)号：US08536023B2

公开(公告)日：2013-09-17

申请号：US12951913

申请日：2010-11-22

Applicant: Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/78

CPC classification number: H01L21/76254 ,  H01L23/562 ,  H01L29/785 ,  H01L2224/131 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2924/10253 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/00 ,  H01L2924/014

Abstract: A method of manufacturing semiconductor wafers, the method including: providing a donor wafer including a semiconductor substrate; performing a lithography step and processing the donor wafer; and performing at least two subsequent steps of layer transfer out of the donor wafer, each layer transfer step producing a transferred layer, where each of the transferred layers had been affected by the lithography step, and where each of the transferred layer includes a plurality of transistors with side gates, and where the layer transfer includes an ion-cut, the ion-cut including an ion implant thru the transistors.

Abstract translation: 一种制造半导体晶片的方法，所述方法包括：提供包括半导体衬底的施主晶片; 执行光刻步骤并处理施主晶片; 并且执行从所述施主晶片进行层传送的至少两个后续步骤，每个层转移步骤产生转移层，其中所述转移层中的每一个都受到光刻步骤的影响，并且其中每个转移层包括多个 具有侧栅的晶体管，并且其中层转移包括离子切割，离子切割包括通过晶体管的离子注入。

公开(公告)号：US08405420B2

公开(公告)日：2013-03-26

申请号：US12859665

申请日：2010-08-19

Applicant: Zvi Or-Bach ,  Brian Cronquist ,  Israel Beinglass ,  J. L. de Jong ,  Deepak C. Sekar

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Israel Beinglass ,  J. L. de Jong ,  Deepak C. Sekar

IPC: H01L25/00

CPC classification number: H01L21/8221 ,  G03F9/7076 ,  G03F9/7084 ,  H01L21/76254 ,  H01L21/84 ,  H01L23/481 ,  H01L23/544 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/105 ,  H01L27/10876 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1108 ,  H01L27/112 ,  H01L27/11517 ,  H01L27/11551 ,  H01L27/11807 ,  H01L27/11898 ,  H01L27/1203 ,  H01L29/78 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2924/00011 ,  H01L2924/01322 ,  H01L2924/12032 ,  H01L2924/1301 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/15311 ,  H01L2924/3011 ,  H01L2924/00 ,  H01L2224/80001

Abstract: A system includes a semiconductor device. The semiconductor device includes a first single crystal silicon layer comprising first transistors, first alignment marks, and at least one metal layer overlying the first single crystal silicon layer, wherein the at least one metal layer comprises copper or aluminum more than other materials; and a second single crystal silicon layer overlying the at least one metal layer. The second single crystal silicon layer comprises a plurality of second transistors arranged in substantially parallel bands. Each of a plurality of the bands comprises a portion of the second transistors along an axis in a repeating pattern.

Abstract translation: 系统包括半导体器件。 半导体器件包括第一单晶硅层，其包括第一晶体管，第一对准标记和覆盖在第一单晶硅层上的至少一个金属层，其中所述至少一个金属层比其它材料包括铜或铝; 以及覆盖所述至少一个金属层的第二单晶硅层。 第二单晶硅层包括以基本平行的带布置的多个第二晶体管。 多个频带中的每一个包括沿着重复图案的轴的第二晶体管的一部分。

公开(公告)号：US20120306082A1

公开(公告)日：2012-12-06

申请号：US13571614

申请日：2012-08-10

Applicant: Deepak Sekar ,  Zvi Or-Bach ,  Brian Cronquist

Inventor： Deepak Sekar ,  Zvi Or-Bach ,  Brian Cronquist

IPC: H01L23/50

CPC classification number: H01L23/3677 ,  H01L23/481 ,  H01L27/0688 ,  H01L27/11807 ,  H01L27/12 ,  H01L29/785 ,  H01L2027/11812 ,  H01L2027/11874 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A device, including: a first layer of first transistors, overlaid by at least one interconnection layer, wherein the interconnection layer includes metals such as copper or aluminum; a second layer including second transistors, the second layer overlaying the interconnection layer, wherein the second layer is less than about 0.4 micron thick; and a connection path connecting the second transistors to the interconnection layer, wherein the connection path includes at least one through-layer via, and the through-layer via includes material whose co-efficient of thermal expansion is within about 50 percent of the second layer coefficient of thermal expansion.

Abstract translation: 一种器件，包括：由至少一个互连层覆盖的第一晶体管层，其中所述互连层包括诸如铜或铝的金属; 包括第二晶体管的第二层，所述第二层覆盖所述互连层，其中所述第二层小于约0.4微米厚; 以及将所述第二晶体管连接到所述互连层的连接路径，其中所述连接路径包括至少一个通孔，并且所述贯通层通孔包括其热膨胀系数在所述第二层的约50％内的材料 热膨胀系数。

公开(公告)号：US20120248595A1

公开(公告)日：2012-10-04

申请号：US13492395

申请日：2012-06-08

Applicant: Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist ,  Israel Beinglass ,  Ze'ev Wurman ,  Paul Lim

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist ,  Israel Beinglass ,  Ze'ev Wurman ,  Paul Lim

IPC: H01L23/36

CPC classification number: H01L21/6835 ,  G11C8/16 ,  H01L21/743 ,  H01L21/76254 ,  H01L21/76898 ,  H01L21/8221 ,  H01L21/823828 ,  H01L21/84 ,  H01L23/3677 ,  H01L23/481 ,  H01L23/5252 ,  H01L24/13 ,  H01L24/16 ,  H01L24/45 ,  H01L24/48 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/50 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/10802 ,  H01L27/10873 ,  H01L27/10876 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1108 ,  H01L27/112 ,  H01L27/11206 ,  H01L27/11526 ,  H01L27/11529 ,  H01L27/11551 ,  H01L27/11573 ,  H01L27/11578 ,  H01L27/11807 ,  H01L27/11898 ,  H01L27/1203 ,  H01L27/1214 ,  H01L27/1266 ,  H01L29/4236 ,  H01L29/66272 ,  H01L29/66621 ,  H01L29/66825 ,  H01L29/66833 ,  H01L29/66901 ,  H01L29/78 ,  H01L29/7841 ,  H01L29/7843 ,  H01L29/7881 ,  H01L29/792 ,  H01L2221/68368 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2224/131 ,  H01L2224/16145 ,  H01L2224/16146 ,  H01L2224/16227 ,  H01L2224/16235 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45124 ,  H01L2224/45147 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2224/73265 ,  H01L2224/81005 ,  H01L2224/83894 ,  H01L2225/06513 ,  H01L2225/06541 ,  H01L2924/00011 ,  H01L2924/01002 ,  H01L2924/01004 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01029 ,  H01L2924/01046 ,  H01L2924/01066 ,  H01L2924/01068 ,  H01L2924/01077 ,  H01L2924/01078 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/12032 ,  H01L2924/12033 ,  H01L2924/12036 ,  H01L2924/12042 ,  H01L2924/1301 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/15311 ,  H01L2924/1579 ,  H01L2924/16152 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01L2924/00014 ,  H01L2924/014 ,  H01L2924/00015 ,  H01L2924/00 ,  H01L2224/80001 ,  H01L2224/16225 ,  H01L2924/00012

Abstract: A method of manufacturing a semiconductor device, the method including, providing a first monocrystalline layer including semiconductor regions, overlaying the first monocrystalline layer with an isolation layer, transferring a second monocrystalline layer comprising semiconductor regions to overlay the isolation layer, wherein the first monocrystalline layer and the second monocrystalline layer are formed from substantially different crystal materials; and subsequently etching the second monocrystalline layer as part of forming at least one transistor in the second monocrystalline layer.

公开(公告)号：US20120028436A1

公开(公告)日：2012-02-02

申请号：US13246391

申请日：2011-09-27

Applicant: Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist ,  Israel Beinglass ,  Jan Lodewijk de Jong

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist ,  Israel Beinglass ,  Jan Lodewijk de Jong

IPC: H01L21/027

CPC classification number: G11C17/14 ,  H01L21/76254 ,  H01L21/8221 ,  H01L21/84 ,  H01L23/36 ,  H01L23/481 ,  H01L23/5252 ,  H01L23/544 ,  H01L24/45 ,  H01L24/48 ,  H01L25/0657 ,  H01L25/18 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/0694 ,  H01L27/092 ,  H01L27/105 ,  H01L27/10873 ,  H01L27/10876 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1104 ,  H01L27/1108 ,  H01L27/112 ,  H01L27/11206 ,  H01L27/11803 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/32145 ,  H01L2224/45124 ,  H01L2224/45147 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00011 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01066 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/12036 ,  H01L2924/1301 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/181 ,  H01L2924/3011 ,  H01L2924/3025 ,  H03K17/687 ,  H03K19/0948 ,  H03K19/17704 ,  H03K19/17756 ,  H03K19/17764 ,  H03K19/17796 ,  H01L2924/00 ,  H01L2224/80001 ,  H01L2224/05599 ,  H01L2924/00012

Abstract: A method of manufacturing a semiconductor wafer, the method including: providing a base wafer including a semiconductor substrate, metal layers and first alignment marks; transferring a monocrystalline layer on top of the metal layers, wherein the monocrystalline layer includes second alignment marks; and performing a lithography using at least one of the first alignment marks and at least one of the second alignment marks.

Abstract translation: 一种制造半导体晶片的方法，所述方法包括：提供包括半导体衬底，金属层和第一对准标记的基底晶片; 在所述金属层的顶部上转移单晶层，其中所述单晶层包括第二对准标记; 以及使用所述第一对准标记和所述第二对准标记中的至少一个来执行光刻。

公开(公告)号：US08058137B1

公开(公告)日：2011-11-15

申请号：US13083802

申请日：2011-04-11

Applicant: Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist ,  Israel Beinglass ,  Jan Lodewijk de Jong

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist ,  Israel Beinglass ,  Jan Lodewijk de Jong

IPC: H01L21/336 ,  H01L21/8234 ,  H01L21/76

CPC classification number: H01L27/088 ,  G11C17/14 ,  H01L21/76254 ,  H01L21/8221 ,  H01L21/8226 ,  H01L21/84 ,  H01L23/481 ,  H01L23/5252 ,  H01L23/528 ,  H01L23/53214 ,  H01L23/53228 ,  H01L23/544 ,  H01L24/14 ,  H01L24/45 ,  H01L24/48 ,  H01L25/0657 ,  H01L25/18 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/0694 ,  H01L27/092 ,  H01L27/105 ,  H01L27/10873 ,  H01L27/10876 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1108 ,  H01L27/112 ,  H01L27/11206 ,  H01L27/11803 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/32145 ,  H01L2224/45124 ,  H01L2224/45147 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06527 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00011 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01066 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/12036 ,  H01L2924/12042 ,  H01L2924/1301 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15788 ,  H01L2924/181 ,  H01L2924/3011 ,  H01L2924/3025 ,  H03K17/687 ,  H03K19/0948 ,  H03K19/177 ,  H01L2924/00 ,  H01L2224/80001 ,  H01L2224/05599 ,  H01L2924/00012

Abstract: A method of manufacturing a semiconductor wafer, the method including: providing a base wafer including a semiconductor substrate, metal layers and first alignment marks; transferring a monocrystalline layer on top of the metal layers, wherein the monocrystalline layer includes second alignment marks; and performing a lithography using at least one of the first alignment marks in a first direction and at least one of the second alignment marks in a second direction.

Abstract translation: 一种制造半导体晶片的方法，所述方法包括：提供包括半导体衬底，金属层和第一对准标记的基底晶片; 在所述金属层的顶部上转移单晶层，其中所述单晶层包括第二对准标记; 以及使用第一方向上的第一对准标记中的至少一个和第二对准标记中的至少一个沿第二方向进行光刻。

公开(公告)号：US07986042B2

公开(公告)日：2011-07-26

申请号：US12849272

申请日：2010-08-03

Applicant: Zvi Or-Bach ,  Brian Cronquist ,  Israel Beinglass ,  Jan Lodewijk de Jong ,  Deepak C. Sekar

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Israel Beinglass ,  Jan Lodewijk de Jong ,  Deepak C. Sekar

IPC: H01L23/58 ,  H01L23/528 ,  H01L21/98

CPC classification number: H01L27/08 ,  H01L21/26506 ,  H01L21/26513 ,  H01L21/76254 ,  H01L21/8221 ,  H01L21/84 ,  H01L23/481 ,  H01L23/544 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/105 ,  H01L27/10876 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1108 ,  H01L27/112 ,  H01L27/11807 ,  H01L27/11898 ,  H01L27/1203 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45124 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2924/00011 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/1301 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/15311 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01L2924/00 ,  H01L2224/80001

Abstract: A semiconductor device comprising: a first single crystal silicon layer comprising first transistors, first alignment marks, and at least one metal layer overlying the first single crystal silicon layer, wherein the at least one metal layer comprises copper or aluminum more than other materials; and a second single crystal silicon layer overlying the at least one metal layers; wherein the second single crystal silicon layer comprises a plurality of second transistors arranged in substantially parallel bands wherein each of a plurality of the bands comprises a portion of the second transistors along an axis in a repeating pattern.

Abstract translation: 一种半导体器件，包括：包含第一晶体管，第一对准标记和覆盖在第一单晶硅层上的至少一个金属层的第一单晶硅层，其中所述至少一个金属层比其它材料包括铜或铝; 以及覆盖所述至少一个金属层的第二单晶硅层; 其中所述第二单晶硅层包括以基本上平行的带布置的多个第二晶体管，其中所述多个所述带中的每一个包括沿重复图案的轴的所述第二晶体管的一部分。