Low loss glass ceramic composition with modifiable dielectric constant
    21.
    发明授权
    Low loss glass ceramic composition with modifiable dielectric constant 失效
    具有可变介电常数的低损耗玻璃陶瓷组合物

    公开(公告)号:US06171988B2

    公开(公告)日:2001-01-09

    申请号:US09364844

    申请日:1999-07-30

    IPC分类号: C03C3078

    摘要: The dielectric constant of low loss tangent glass-ceramic compositions, such as cordierite-based glass ceramics, is modified over a range by selective addition of high dielectric constant ceramics, such as titanates, tantalates and carbides and metals, such as copper. The low loss tangent is retained or improved over a range of frequencies, and the low CTE of the glass-ceramic is maintained. BaTiO3, SrTiO3 and Ta2O5 produce the most effective results.

    摘要翻译: 通过选择性地添加高介电常数陶瓷,例如钛酸盐,钽酸盐,碳化物和金属如铜,可以在一定范围内改变低损耗相切玻璃 - 陶瓷组合物的介电常数,例如堇青石系玻璃陶瓷。 在一定范围的频率范围内保持或改善低损耗角正切,保持玻璃陶瓷的低CTE。 BaTiO3,SrTiO3和Ta2O5产生最有效的结果。

    Edge seal technology for low dielectric/porous substrate processing
    23.
    发明授权
    Edge seal technology for low dielectric/porous substrate processing 失效
    用于低介电/多孔基材加工的边缘密封技术

    公开(公告)号:US5489465A

    公开(公告)日:1996-02-06

    申请号:US254327

    申请日:1994-06-03

    IPC分类号: B32B18/00 H01L23/12

    摘要: A sealed composite ceramic structure is formed by first forming a plurality of composite green sheets. Each of the green sheets is a composite structure comprising a central portion of partially densifiable material and an outer portion of fully densifiable material. Next, top and bottom green sheets of fully densifiable material are formed. The greensheets are then stacked to form a laminated structure in the following order: the bottom green sheet, the plurality of composite green sheets, and the top green sheet. The substrate laminate is sintered to form the sealed structure having a porous central portion. The composite structure has particular application to ceramic substrates for mounting semiconductor devices requiring low dielectric constant substrates, but the structure also has applications in fluid processing using porous laminated structures. In both applications, the creation of a porous ceramic body with solid, sealed edges and/or external surfaces hold significant advantages.

    摘要翻译: 通过首先形成多个复合生片形成密封复合陶瓷结构体。 每片生坯是由部分致密材料的中心部分和完全致密材料的外部组成的复合结构。 接下来,形成完全致密材料的顶部和底部生片。 然后按以下顺序堆放毛坯以形成层压结构:底部生片,多个复合生片和顶生片。 将基板层压体烧结以形成具有多孔中心部分的密封结构。 该复合结构特别适用于要求低介电常数衬底的半导体器件的陶瓷衬底,但该结构也可用于使用多孔层压结构的流体处理中。 在这两种应用中,创建具有固体,密封边缘和/或外部表面的多孔陶瓷体具有显着的优点。

    Method for forming a perovskite thin film using a sputtering method with a fully oxidized perovskite target
    26.
    发明授权
    Method for forming a perovskite thin film using a sputtering method with a fully oxidized perovskite target 失效
    使用具有完全氧化的钙钛矿靶的溅射法形成钙钛矿薄膜的方法

    公开(公告)号:US06210545B1

    公开(公告)日:2001-04-03

    申请号:US09447626

    申请日:1999-11-23

    IPC分类号: C23C1434

    摘要: An inventive method for forming a thin film comprises the steps of preparing a sputter-target of a material which is fully oxidized and crystallized to a perovskite structure, sputter-depositing a thin film on top of a sample with the target in an inert gas atmosphere, and annealing the thin film in non-oxygen ambient. With the use of such a target, it is possible to reduce the negative ion effect during the sputter deposition and to eliminate the presence of oxygen during the annealing process.

    摘要翻译: 用于形成薄膜的本发明的方法包括以下步骤:制备完全氧化并结晶成钙钛矿结构的材料的溅射靶,在惰性气体气氛中用靶溅射沉积样品顶部的薄膜 ,并在非氧环境中退火薄膜。 通过使用这样的靶,可以减少在溅射沉积期间的负离子效应,并且消除退火过程中氧的存在。

    Gas panel seal glass
    29.
    发明授权
    Gas panel seal glass 失效
    燃气面板密封玻璃

    公开(公告)号:US4478947A

    公开(公告)日:1984-10-23

    申请号:US505025

    申请日:1983-06-21

    申请人: Robert A. Rita

    发明人: Robert A. Rita

    IPC分类号: C03C3/14 C03C8/24 C03C3/12

    CPC分类号: C03C3/142 C03C8/245

    摘要: A non-crystallizing sealing glass composition is described consisting essentially of from about 75.50 to 84.00 wt. % lead oxide, from about 11.25 to 14.25 wt. % boron oxide, an additional component selected from the group consisting of up to 3.10 wt. % zinc oxide and up to 9.33 wt. % bismuth oxide; other compositions could include up to 0.88 wt. % tin oxide, and up to 1.51 wt. % germainium oxide. The glass compositions include .beta.-eucryptite in an amount sufficient to provide a coefficient of expansion of about 83.5 to 71.5.times.10.sup.-7 .degree. C..sup.-1 (about 13.5 to 17.0 wt %); the glass is particularly useful in sealing a gas panel.

    摘要翻译: 描述了非结晶密封玻璃组合物,其基本上由约75.50至84.00重量% %氧化铅,约11.25至14.25重量% %氧化硼,另外的组分选自由高达3.10wt。 %氧化锌和高达9.33wt。 氧化铋 其它组合物可以包括高达0.88wt。 氧化锡,和至多1.51重量%。 %氧化锗。 玻璃组合物包括足够提供约83.5至71.5×10-7℃-1(约13.5至17.0重量%)的膨胀系数的β-锂辉石; 该玻璃在密封气体面板中特别有用。