SPLIT-GATE FLASH MEMORY CELL WITH IMPROVED CONTROL GATE CAPACITIVE COUPLING, AND METHOD OF MAKING SAME

    公开(公告)号:US20220293756A1

    公开(公告)日:2022-09-15

    申请号:US17346524

    申请日:2021-06-14

    Abstract: A method of forming a memory device that includes forming a first insulation layer, a first conductive layer, and a second insulation layer on a semiconductor substrate, forming a trench in the second insulation layer to expose the upper surface of the first conductive layer, performing an oxidation process and a sloped etch process to reshape the upper surface to a concave shape, forming a third insulation layer on the reshaped upper surface, forming a conductive spacer on the third insulation layer, removing portions of the first conductive layer leaving a floating gate under the conductive spacer with the reshaped upper surface terminating at a side surface at a sharp edge, and forming a word line gate laterally adjacent to and insulated from the floating gate. The conductive spacer includes a lower surface that faces and matches the shape of the reshaped upper surface.

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