AVALANCHE PHOTODIODES AND METHODS OF MAKING THE SAME

    公开(公告)号:US20240006548A1

    公开(公告)日:2024-01-04

    申请号:US17822451

    申请日:2022-08-26

    摘要: An exemplary embodiment of the present disclosure provides an avalanche photodiode (APD), comprising: a p-doped substrate; a first n-doped region; an n-doped epitaxial region; a plurality of n-doped wells; and a first p-doped region. The first n-doped region can be positioned above at least a portion of the p-doped substrate. The n-doped epitaxial region can be positioned above at least a portion of the first n-doped region. The plurality of n-doped wells can be positioned within the first n-doped epitaxial region. The first p-doped region can be positioned above the n-doped epitaxial region and the plurality of n-doped wells.

    Photodetector
    28.
    发明授权

    公开(公告)号:US11769849B2

    公开(公告)日:2023-09-26

    申请号:US17422005

    申请日:2020-01-14

    发明人: Kotaro Takeda

    摘要: The present invention is to provide a GePD, the optical sensitivity of which is independent from a temperature, and to achieve a photodetector in which heat applied from heaters is constant even when a plurality of GePDs are provided and in which a temperature and sensitivity of each of the GePDs are the same. The photodetector includes germanium photoreceivers including a silicon substrate, a lower clad layer, a silicon core layer, a silicon waveguide layer, a germanium layer, an upper clad layer, and electrodes. In the photodetector, two or more germanium photoreceivers are arranged adjacent to each other on the silicon substrate, and the photodetector includes resistors embedded in the upper clad layer to cover or surround respective germanium layers of the two or more germanium photoreceivers arranged adjacent to each other, the resistors being made of a metal or a metal compound.