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公开(公告)号：US20180102271A1
公开(公告)日：2018-04-12
申请号：US15782249
申请日：2017-10-12
IPC分类号： H01L21/683 , H01L27/15 , G02F1/1333 , G02F1/1335 , H01L27/12 , H01L33/62
CPC分类号： H01L27/1266 , G02F1/133305 , G02F1/133603 , H01L21/6835 , H01L27/1214 , H01L27/153 , H01L33/0079 , H01L33/62 , H01L51/003 , H01L2221/68318 , H01L2221/68386
摘要： The present invention provides a manufacturing technique of a semiconductor device and a display device using a peeling process, in which a transfer process can be conducted with a good state in which a shape and property of an element before peeling are kept. Further, the present invention provides a manufacturing technique of more highly reliable semiconductor devices and display devices with high yield without complicating the apparatus and the process for manufacturing. According to the present invention, an organic compound layer including a photocatalyst substance is formed over a first substrate having a light-transmitting property, an element layer is formed over the organic compound layer including a photocatalyst substance, the organic compound layer including a photocatalyst substance is irradiated with light which has passed through the first substrate, and the element layer is peeled from the first substrate.
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公开(公告)号：US20180011569A1
公开(公告)日：2018-01-11
申请号：US15698901
申请日：2017-09-08
发明人： Yasuhiro JINBO , Kenichi OKAZAKI
IPC分类号： G06F3/044 , G06F3/01 , H01L51/52 , H01L31/02 , H01L31/0203 , H01L31/042 , H01L51/00 , H01L27/32
CPC分类号： G06F3/044 , G06F3/012 , G06F3/013 , G06F2203/04112 , H01L27/323 , H01L27/3251 , H01L27/3276 , H01L31/02005 , H01L31/0203 , H01L31/042 , H01L51/0096 , H01L51/5203 , H01L51/524 , H01L51/5253 , H01L2251/301 , H01L2251/303 , H01L2251/5338 , H01L2924/0002 , Y02E10/549 , H01L2924/00
摘要： A functional panel is provided. The functional panel includes a first substrate, a second substrate, a bonding layer, a functional element, a protective layer, and a terminal. The bonding layer is positioned between the first and second substrates. The functional element is surrounded by the first substrate, the second substrate, and the bonding layer. The terminal is electrically connected to the functional element and provided not to overlap with one of the first and second substrates. The protective layer is provided to be in contact with side surfaces of the first and second substrates and an exposed surface of the bonding layer. A surface of the terminal is partly exposed without being covered with the protective layer. The surface of the terminal partly includes a material having a lower ionization tendency than hydrogen.
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公开(公告)号：US20160332826A1
公开(公告)日：2016-11-17
申请号：US15219930
申请日：2016-07-26
发明人： Masakatsu OHNO , Kohei YOKOYAMA , Satoru IDOJIRI , Hisao IKEDA , Yasuhiro JINBO , Hiroki ADACHI , Yoshiharu HIRAKATA , Shingo EGUCHI
IPC分类号： B65G49/06 , H01L51/56 , H01L27/32 , B65H3/08 , B32B37/00 , B65H35/00 , B65H16/00 , B32B43/00 , B32B17/06 , H01L51/52 , B65H3/48
CPC分类号： B65G49/068 , B32B17/06 , B32B37/025 , B32B38/10 , B32B43/006 , B32B2457/00 , B32B2457/14 , B32B2457/20 , B65G49/069 , B65G2249/04 , B65H3/0816 , B65H3/48 , B65H16/00 , B65H35/0006 , H01L21/673 , H01L21/67333 , H01L21/67715 , H01L21/68 , H01L27/3244 , H01L51/5237 , H01L51/56 , H01L2221/68318 , H01L2227/323 , Y10T29/53091 , Y10T29/5317 , Y10T156/1121 , Y10T156/1137 , Y10T156/1158 , Y10T156/1184 , Y10T156/1917 , Y10T156/1922 , Y10T156/1939 , Y10T156/1967
摘要： An apparatus for supplying a support having a clean surface is provided. Alternatively, an apparatus for manufacturing a stack including a support and a remaining portion of a processed member whose one surface layer is separated is provided. A positioning portion, a slit formation portion, and a peeling portion are included. The positioning portion is provided with a first transfer mechanism of a stacked film including a support and a separator and a table for fixing the stacked film. The slit formation portion is provided with a cutter that can form a slit which does not pass through the separator. The peeling portion is provided with a second transfer mechanism and a peeling mechanism extending the separator and then peeling the separator. In addition, a pretreatment portion activating a support surface is included.
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公开(公告)号：US20160243812A1
公开(公告)日：2016-08-25
申请号：US15147020
申请日：2016-05-05
发明人： Kayo KUMAKURA , Tomoya AOYAMA , Akihiro CHIDA , Kohei YOKOYAMA , Masakatsu OHNO , Satoru IDOJIRI , Hisao IKEDA , Hiroki ADACHI , Yoshiharu HIRAKATA , Shingo EGUCHI , Yasuhiro JINBO
CPC分类号： B32B43/006 , B26D1/04 , B26D2001/006 , B32B38/10 , B32B2457/00 , G02B6/00 , H01L21/67092 , H01L27/1248 , H01L27/3258 , H01L27/3262 , H01L51/56 , H01L2221/68327 , H01L2227/323 , H01L2251/5338 , Y10T156/1126 , Y10T156/1132 , Y10T156/1168 , Y10T156/1184 , Y10T156/1933 , Y10T156/1944 , Y10T156/1961 , Y10T156/1967
摘要： A processing apparatus of a stack is provided. The stack includes two substrates attached to each other with a gap provided between their end portions. The processing apparatus includes a fixing mechanism that fixes part of the stack, a plurality of adsorption jigs that fix an outer peripheral edge of one of the substrates of the stack, and a wedge-shaped jig that is inserted into a corner of the stack. The plurality of adsorption jigs include a mechanism that allows the adsorption jigs to move separately in a vertical direction and a horizontal direction. The processing apparatus further includes a sensor sensing a position of the gap between the end portion in the stack. A tip of the wedge-shaped jig moves along a chamfer formed on an end surface of the stack. The wedge-shaped jig is inserted into the gap between the end portions in the stack.
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公开(公告)号：US20150323823A1
公开(公告)日：2015-11-12
申请号：US14711275
申请日：2015-05-13
IPC分类号： G02F1/1368 , G02F1/1333 , G02F1/1343 , G02F1/1365
CPC分类号： G02F1/1368 , G02F1/133345 , G02F1/134363 , G02F1/13439 , G02F1/1365 , H01L27/1214 , H01L27/1229 , H01L27/1251 , H01L27/1255 , H01L29/04 , H01L29/78648 , Y10T428/24331
摘要： A display device of which frame can be narrowed and of which display characteristics are excellent is provided. In a display device including a switch portion or a buffer portion, a logic circuit portion, and a pixel portion, the pixel portion includes a first inverted staggered TFT and a pixel electrode which is connected to a wiring of the first inverted staggered TFT, the switch portion or the buffer portion includes a second inverted staggered TFT in which a first insulating layer, a semiconductor layer, and a second insulating layer are interposed between a first gate electrode and a second gate electrode, the logic circuit portion includes an inverter circuit including a third inverted staggered thin film transistor and a fourth inverted staggered thin film transistor, and the first to the fourth inverted staggered thin film transistors have the same polarity. The inverter circuit may be an EDMOS circuit.
摘要翻译： 提供了一种可以缩小框架并且显示特性优异的显示装置。 在包括开关部分或缓冲部分，逻辑电路部分和像素部分的显示装置中，像素部分包括连接到第一反交错TFT的布线的第一反交错TFT和像素电极， 开关部分或缓冲部分包括其中第一绝缘层，半导体层和第二绝缘层插入在第一栅电极和第二栅电极之间的第二反交错TFT，所述逻辑电路部分包括逆变器电路，包括 第三反交错薄膜晶体管和第四反交错薄膜晶体管，并且第一至第四反交错薄膜晶体管具有相同的极性。 逆变器电路可以是EDMOS电路。
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36.发明公开公开(公告)号：US20240224734A1
公开(公告)日：2024-07-04
申请号：US18555903
申请日：2022-04-12
发明人： Yasuhiro JINBO , Toshikazu OHNO , Shiyuu NUMATA
CPC分类号： H10K59/874 , H10K50/19 , H10K71/60
摘要： A highly reliable display apparatus is provided. The display apparatus includes a first light-emitting device, a second light-emitting device, and an inorganic insulating layer. The first light-emitting device includes a first pixel electrode, a first light-emitting layer over the first pixel electrode, and a common electrode over the first light-emitting layer. The second light-emitting device includes a second pixel electrode, a second light-emitting layer over the second pixel electrode, and the common electrode over the second light-emitting layer. The inorganic insulating layer covers side surfaces of the first pixel electrode, the second pixel electrode, the first light-emitting layer, and the second light-emitting layer. The hydrogen concentration and the carbon concentration in the inorganic insulating layer are each preferably sufficiently low.
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公开(公告)号：US20240186160A1
公开(公告)日：2024-06-06
申请号：US18281619
申请日：2022-03-28
发明人： Shunpei YAMAZAKI , Ryota HODO , Yasuhiro JINBO , Kenichi OKAZAKI
IPC分类号： H01L21/67 , C23C14/02 , C23C14/06 , C23C14/24 , C23C14/34 , C23C14/56 , C23C14/58 , C23C16/02 , C23C16/40 , C23C16/455 , C23C16/54 , C23C16/56 , G03F7/00 , G03F7/38
CPC分类号： H01L21/67236 , C23C14/021 , C23C14/0652 , C23C14/24 , C23C14/34 , C23C14/568 , C23C14/5873 , C23C16/0236 , C23C16/0245 , C23C16/403 , C23C16/45544 , C23C16/54 , C23C16/56 , G03F7/0035 , G03F7/38 , G03F7/7075 , H01L21/67167 , H01L21/6719 , H01L21/67207
摘要： Manufacturing equipment in which processes from processing to sealing of an organic compound film can be successively performed is provided. A patterning process of a light-emitting device and a sealing process that is performed to prevent the surface and side surface of an organic layer from being exposed to the air can be performed successively, whereby a minute light-emitting device with high luminance and high reliability can be formed. Moreover, the manufacturing equipment can be incorporated in in-line manufacturing equipment where apparatuses are arranged in the order of processes for a light-emitting device, resulting in high throughput manufacturing.
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38.发明公开公开(公告)号：US20240179935A1
公开(公告)日：2024-05-30
申请号：US18283511
申请日：2022-03-30
发明人： Shunpei YAMAZAKI , Ryota HODO , Yasuhiro JINBO , Kenichi OKAZAKI
CPC分类号： H10K50/13 , H10K50/19 , H10K71/13 , H10K71/233 , H10K71/60
摘要： A display device with high display quality and high reliability is provided. The display device includes a first light-emitting element, a second light-emitting element positioned to be adjacent to the first light-emitting element, a first protective layer, a second protective layer, and an insulating layer. The first light-emitting element includes a first pixel electrode, a first EL layer, and a common electrode. The second light-emitting element includes a second pixel electrode, a second EL layer, and the common electrode. The first EL layer is provided over the first pixel electrode, and the second EL layer is provided over the second pixel electrode. The first protective layer includes a region overlapping with a side surface of the first pixel electrode, a side surface of the second pixel electrode, a side surface of the first EL layer, and a side surface of the second EL layer. The insulating layer is provided over the first protective layer, and the second protective layer is provided over the insulating layer. The common electrode is provided over the first EL layer, over the second EL layer, and over the second protective layer.
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公开(公告)号：US20240113207A1
公开(公告)日：2024-04-04
申请号：US18539700
申请日：2023-12-14
发明人： Shunpei YAMAZAKI , Naoki OKUNO , Yasuhiro JINBO
IPC分类号： H01L29/66 , H01L21/02 , H01L27/12 , H01L29/417 , H01L29/786 , H10B12/00
CPC分类号： H01L29/66969 , H01L21/02345 , H01L21/02565 , H01L27/1207 , H01L27/1225 , H01L27/124 , H01L27/1255 , H01L29/41733 , H01L29/78648 , H01L29/7869 , H10B12/00
摘要： A semiconductor device having favorable electrical characteristics is provided. A first oxide is formed over a substrate; a first insulator is formed over the first oxide; an opening reaching the first oxide is formed in the first insulator; a first oxide film is deposited in contact with the first oxide and the first insulator in the opening; a first insulating film is deposited over the first oxide film; microwave treatment is performed from above the first insulating film; heat treatment is performed on one or both of the first insulating film and the first oxide; a first conductive film is deposited over the first insulating film; and part of the first oxide film, part of the first insulating film, and part of the first conductive film are removed until a top surface of the first insulator is exposed, so that a second oxide, a second insulator, and a first conductor are formed. The microwave treatment is performed using a gas containing oxygen under reduced pressure, and the heat treatment is performed under reduced pressure.
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公开(公告)号：US20240088172A1
公开(公告)日：2024-03-14
申请号：US18512392
申请日：2023-11-17
发明人： Shunpei YAMAZAKI , Yoshiharu HIRAKATA , Takashi HAMADA , Kohei YOKOYAMA , Yasuhiro JINBO , Tetsuji ISHITANI , Daisuke KUBOTA
IPC分类号： H01L27/12 , G02F1/1333 , G02F1/1335 , G02F1/1339 , G02F1/1362 , G02F1/1368 , H01L29/786 , H10K50/842
CPC分类号： H01L27/1262 , G02F1/133345 , G02F1/133512 , G02F1/1339 , G02F1/136213 , G02F1/1368 , H01L27/1218 , H01L27/1225 , H01L27/1255 , H01L29/78648 , H10K50/8426 , H10K50/8428 , H10K50/844
摘要： A display device in which a peripheral circuit portion has high operation stability is provided. The display device includes a first substrate and a second substrate. A first insulating layer is provided over a first surface of the first substrate. A second insulating layer is provided over a first surface of the second substrate. The first surface of the first substrate and the first surface of the second substrate face each other. An adhesive layer is provided between the first insulating layer and the second insulating layer. A protective film in contact with the first substrate, the first insulating layer, the adhesive layer, the second insulating layer, and the second substrate is formed in the vicinity of a peripheral portion of the first substrate and the second substrate.
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