INTEGRATED CIRCUIT COMPRISING A CLOCK TREE CELL
    442.
    发明申请
    INTEGRATED CIRCUIT COMPRISING A CLOCK TREE CELL 有权
    包含时钟细胞的集成电路

    公开(公告)号:US20140176228A1

    公开(公告)日:2014-06-26

    申请号:US14134081

    申请日:2013-12-19

    Abstract: The invention relates to an integrated circuit comprising: a first semiconductor well (60); a plurality of standard cells (66), each standard cell comprising a first field-effect transistor in FDSOI technology comprising a first semiconductor ground plane located immediately on the first well; and a clock tree cell (30) contiguous with the standard cells, the clock tree cell comprising a second field-effect transistor in FDSOI technology, which transistor comprises a second semiconductor ground plane located immediately on the first well (60), so as to form a p-n junction with this first well. The integrated circuit comprises an electrical power supply network (51) able to apply separate electrical biases directly to the first and second ground planes.

    Abstract translation: 本发明涉及一种集成电路,包括:第一半导体阱(60); 多个标准单元(66),每个标准单元包括FDSOI技术中的第一场效应晶体管,其包括位于第一阱上的第一半导体接地平面; 以及与所述标准单元相邻的时钟树单元(30),所述时钟树单元包括FDSOI技术中的第二场效应晶体管,所述晶体管包括位于所述第一阱(60)上的第二半导体接地平面,以便 与第一口井形成一个pn结。 集成电路包括能够将分离的电偏压直接施加到第一和第二接地层的电力供应网络(51)。

    FINFET DEVICE WITH SILICIDED SOURCE-DRAIN REGIONS AND METHOD OF MAKING SAME USING A TWO STEP ANNEAL
    444.
    发明申请
    FINFET DEVICE WITH SILICIDED SOURCE-DRAIN REGIONS AND METHOD OF MAKING SAME USING A TWO STEP ANNEAL 审中-公开
    具有硅源排水区域的FINFET器件及使用两步法制备相同方法

    公开(公告)号:US20140106529A1

    公开(公告)日:2014-04-17

    申请号:US14051174

    申请日:2013-10-10

    Abstract: A thermal annealing flow process includes the steps of: depositing a metal or metal alloy on a silicon semiconductor structure, performing a first annealing of a rapid thermal anneal (RTA) type to produce a metal rich phase in a portion of the silicon semiconductor structure, removing unreacted metal or metal alloy and performing a second annealing as a millisecond annealing at a temperature that is below a melt temperature of the silicon material present in the silicon semiconductor structure.

    Abstract translation: 热退火流程包括以下步骤:在硅半导体结构上沉积金属或金属合金,执行快速热退火(RTA)型的第一退火以在硅半导体结构的一部分中产生富金相, 去除未反应的金属或金属合金,并在低于硅半导体结构中存在的硅材料的熔融温度的温度下进行第二退火作为毫秒退火。

    Method for creating a photolithography mask
    446.
    发明授权
    Method for creating a photolithography mask 有权
    创建光刻掩模的方法

    公开(公告)号:US08656320B2

    公开(公告)日:2014-02-18

    申请号:US13937633

    申请日:2013-07-09

    Inventor: Christian Gardin

    Abstract: A method for creating a photolithography mask from a set of initial mask cells arranged to form an initial mask. The set includes first and second initial mask cells having a mask element in common within an initial region of the initial mask. The method includes a creation of a first modified mask cell and of a second modified mask cell including OPC processing operations, a comparison of the position of the mask element in common between the first modified mask cell and the second modified mask cell, and if the result of the comparison is greater than a threshold, a creation of a new mask region including an optical proximity correction processing operation on the initial region, and a creation of the photolithography mask from the new mask region.

    Abstract translation: 一种从布置成形成初始掩模的一组初始掩模单元创建光刻掩模的方法。 该组包括在初始掩模的初始区域内具有共同的掩模元件的第一和第二初始掩模单元。 该方法包括创建第一修改屏蔽单元和包括OPC处理操作的第二修改屏蔽单元,比较第一修改屏蔽单元和第二修改屏蔽单元之间共同的掩模元件的位置,以及如果 比较结果大于阈值,创建包括初始区域上的光学邻近校正处理操作的新掩模区域,以及从新掩模区域创建光刻掩模。

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