Methods for manufacturing enhancement-mode HEMTs with self-aligned field plate
    52.
    发明授权
    Methods for manufacturing enhancement-mode HEMTs with self-aligned field plate 有权
    具有自对准场板的增强型HEMT的制造方法

    公开(公告)号:US08168486B2

    公开(公告)日:2012-05-01

    申请号:US12823060

    申请日:2010-06-24

    申请人: François Hébert

    发明人: François Hébert

    IPC分类号: H01L29/778

    摘要: Various embodiments of the disclosure include the formation of enhancement-mode (e-mode) gate injection high electron mobility transistors (HEMT). Embodiments can include GaN, AlGaN, and InAlN based HEMTs. Embodiments also can include self-aligned P-type gate and field plate structures. The gates can be self-aligned to the source and drain, which can allow for precise control over the gate-source and gate-drain spacing. Additional embodiments include the addition of a GaN cap structure, an AlGaN buffer layer, AlN, recess etching, and/or using a thin oxidized AlN layer. In manufacturing the HEMTs according to present teachings, selective epitaxial growth (SEG) and epitaxial lateral overgrowth (ELO) can both be utilized to form gates.

    摘要翻译: 本公开的各种实施例包括形成增强型(e模式)栅极注入高电子迁移率晶体管(HEMT)。 实施例可以包括GaN,AlGaN和基于InAlN的HEMT。 实施例还可以包括自对准P型门和场板结构。 栅极可以与源极和漏极自对准,这可以精确控制栅极源极和栅极 - 漏极间隔。 另外的实施例包括添加GaN帽结构,AlGaN缓冲层,AlN,凹陷蚀刻和/或使用薄的氧化AlN层。 在根据本教导制造HEMT时,可以利用选择性外延生长(SEG)和外延横向过度生长(ELO)来形成栅极。

    Charged balanced devices with shielded gate trench

    公开(公告)号:US07893488B2

    公开(公告)日:2011-02-22

    申请号:US12321435

    申请日:2009-01-21

    申请人: François Hébert

    发明人: François Hébert

    IPC分类号: H01L29/66

    摘要: This invention discloses a semiconductor power device disposed on a semiconductor substrate includes a plurality of deep trenches with an epitaxial layer filling said deep trenches and a simultaneously grown top epitaxial layer covering areas above a top surface of said deep trenches over the semiconductor substrate. A plurality of trench MOSFET cells disposed in said top epitaxial layer with the top epitaxial layer functioning as the body region and the semiconductor substrate acting as the drain region whereby a super-junction effect is achieved through charge balance between the epitaxial layer in the deep trenches and regions in the semiconductor substrate laterally adjacent to the deep trenches. Each of the trench MOSFET cells further includes a trench gate and a gate-shielding dopant region disposed below and substantially aligned with each of the trench gates for each of the trench MOSFET cells for shielding the trench gate during a voltage breakdown.

    MULTILAYER INDUCTOR
    59.
    发明申请
    MULTILAYER INDUCTOR 有权
    多层电感器

    公开(公告)号:US20110012701A1

    公开(公告)日:2011-01-20

    申请号:US12891105

    申请日:2010-09-27

    IPC分类号: H01F5/00 H01F7/06

    摘要: A multilayer inductor is disclosed. The multilayer inductor includes a bottom magnetic layer having an external conductive pattern formed on a bottom surface thereof for connection to a substrate such as a printed circuit board. The bottom external conductive pattern includes signal/power contacts and first and second inductor electrodes. A top magnetic layer includes a top external conductive pattern having signal/power contacts and inductor electrode contacts. An inductor conductive pattern formed on the top surfaces of intermediate magnetic layers disposed between the top and bottom magnetic layers are electrically coupled to each other by means of through holes to form a spiral inductor element. The spiral inductor element is coupled to the first inductor electrode by means of a through hole formed in the bottom magnetic layer and to the second inductor electrode by means of power conductive traces formed on side surfaces of the multilayer inductor. Flux density reducing layers may be inserted directly above the bottom magnetic layer and directly below the top magnetic layer. Signal/power conductive traces formed on side surfaces of the multilayer inductor provide signal/power routing between the top magnetic layer signal/power contacts and the bottom magnetic layer signal/power contacts. The top external conductive pattern accommodates a semiconductor chip in a flip chip configuration.

    摘要翻译: 公开了一种多层电感器。 多层电感器包括底部磁性层,其具有形成在其底表面上的外部导电图案,用于连接到诸如印刷电路板的基板。 底部外部导电图案包括信号/电源触点和第一和第二电感器电极。 顶部磁性层包括具有信号/功率触点和电感器电极触点的顶部外部导电图案。 形成在设置在顶部和底部磁性层之间的中间磁性层的顶表面上的电感器导电图案通过通孔彼此电耦合以形成螺旋形电感器元件。 螺旋电感器元件通过形成在底部磁性层中的通孔和形成在多层电感器的侧表面上的电力导电迹线耦合到第一电感器电极。 磁通密度降低层可以直接插入底部磁性层的正上方,并且直接位于顶部磁性层的正下方。 形成在多层电感器的侧表面上的信号/电力导电迹线提供顶层磁层信号/电源触点和底部磁层信号/电源触点之间的信号/功率布线。 顶部外部导电图案以倒装芯片配置容纳半导体芯片。

    Multilayer inductor
    60.
    发明授权
    Multilayer inductor 有权
    多层电感

    公开(公告)号:US07843303B2

    公开(公告)日:2010-11-30

    申请号:US12315703

    申请日:2008-12-08

    摘要: A multilayer inductor is disclosed. The multilayer inductor includes a bottom magnetic layer having an external conductive pattern formed on a bottom surface thereof for connection to a substrate such as a printed circuit board. The bottom external conductive pattern includes signal/power contacts and first and second inductor electrodes. A top magnetic layer includes a top external conductive pattern having signal/power contacts and inductor electrode contacts. An inductor conductive pattern formed on the top surfaces of intermediate magnetic layers disposed between the top and bottom magnetic layers are electrically coupled to each other by means of through holes to form a spiral inductor element. The spiral inductor element is coupled to the first inductor electrode by means of a through hole formed in the bottom magnetic layer and to the second inductor electrode by means of power conductive traces formed on side surfaces of the multilayer inductor. Flux density reducing layers may be inserted directly above the bottom magnetic layer and directly below the top magnetic layer. Signal/power conductive traces formed on side surfaces of the multilayer inductor provide signal/power routing between the top magnetic layer signal/power contacts and the bottom magnetic layer signal/power contacts. The top external conductive pattern accommodates a semiconductor chip in a flip chip configuration.

    摘要翻译: 公开了一种多层电感器。 多层电感器包括底部磁性层,其具有形成在其底表面上的外部导电图案,用于连接到诸如印刷电路板的基板。 底部外部导电图案包括信号/电源触点和第一和第二电感器电极。 顶部磁性层包括具有信号/功率触点和电感器电极触点的顶部外部导电图案。 形成在设置在顶部和底部磁性层之间的中间磁性层的顶表面上的电感器导电图案通过通孔彼此电耦合以形成螺旋形电感器元件。 螺旋电感器元件通过形成在底部磁性层中的通孔和形成在多层电感器的侧表面上的电力导电迹线耦合到第一电感器电极。 磁通密度降低层可以直接插入底部磁性层的正上方,并且直接位于顶部磁性层的正下方。 形成在多层电感器的侧表面上的信号/电力导电迹线提供顶层磁层信号/电源触点和底部磁层信号/电源触点之间的信号/功率布线。 顶部外部导电图案以倒装芯片配置容纳半导体芯片。