公开(公告)号：US09741528B2

公开(公告)日：2017-08-22

申请号：US14724681

申请日：2015-05-28

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Michael Albiez ,  Stefan Meyer ,  Daniel Kirsten ,  Stewart Bean ,  Erik Essers

IPC: H01J37/18 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/18 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/10 ,  H01J2237/188 ,  H01J2237/2605

Abstract: Disclosed is a charged particle optical apparatus, which includes a particle optical arrangement, configured to define a particle beam path for inspecting an object. The object is accommodated in a pressure-controlled interior of a specimen chamber during the inspection of the object. The charged particle optical apparatus further includes a differential pressure module having a differential pressure aperture. A positioning arm is arranged in the specimen chamber for selectively position the differential pressure module within the pressure-controlled interior of the specimen chamber into an operating position in which the particle beam path passes through the differential pressure aperture. The selective positioning includes an advancing movement of the differential pressure module toward the primary particle beam path. The advancing movement is transmitted to the differential pressure module by a track-guided movement of the positioning arm.

公开(公告)号：US20170213691A1

公开(公告)日：2017-07-27

申请号：US15218512

申请日：2016-07-25

Applicant: FEI Company

Inventor： Pleun Dona ,  Luigi Mele

IPC: H01J37/16 ,  H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/022 ,  H01J2237/2003 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: Presented is a holder assembly for cooperating with a nanoreactor and an electron microscope. The holder assembly has a distal end for holding the nanoreactor. The volume has a fluid inlet and outlet. The holder assembly has fluid supply and outlet tubes which in working are connected to the fluid inlet and outlet of the nanoreactor. In working, the connection between the fluid inlet and outlet and the respective supply and outlet tubes are sealed by sealing elements. The holder assembly has a recess which, when the nanoreactor is attached and the holder is inserted into the evacuated portion of an electron microscope, forms a sealed pre-vacuum volume between the holder and the nanoreactor, with the pre-vacuum volume being evacuated via a pre-vacuum channel such that any fluid leakage is pumped away and does not enter the evacuated part of the electron microscope.

公开(公告)号：US09633816B2

公开(公告)日：2017-04-25

申请号：US14715432

申请日：2015-05-18

Applicant: FEI Company

Inventor： Toby Shanley ,  John Scott ,  Milos Toth

IPC: H01J37/244 ,  H01J37/18 ,  H01J37/22 ,  H01J37/28

CPC classification number: H01J37/18 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/182 ,  H01J2237/2448 ,  H01J2237/2605 ,  H01J2237/2608 ,  H01J2237/2801 ,  H01J2237/2806

Abstract: Charged particle beam imaging and measurement systems are provided using gas amplification with an improved imaging gas. The system includes a charged particle beam source for directing a charged particle beam to work piece, a focusing lens for focusing the charged particles onto the work piece, and an electrode for accelerating secondary electrons generated from the work piece irradiation by the charged practice beam, or another gas cascade detection scheme. The gas imaging is performed in a high pressure scanning electron microscope (HPSEM) chamber for enclosing the improved imaging gas including CH3CH2OH (ethanol) vapor. The electrode accelerates the secondary electrons though the CH3CH2OH to ionize the CH3CH2OH through ionization cascade to amplify the number of secondary electrons for detection. An optimal configuration is provided for use of the improved imaging gas, and techniques are provided to conduct imaging studies of organic liquids and solvents, and other CH3CH2OH-based processes.

公开(公告)号：US09524850B2

公开(公告)日：2016-12-20

申请号：US13769040

申请日：2013-02-15

Applicant: FEI Company ,  Delft University of Technology

Inventor： Hendrik Willem Zandbergen ,  Pleun Dona ,  Gerardus Nicolaas Anne van Veen

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/022 ,  H01J2237/2001 ,  H01J2237/2003 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: A holder assembly comprises a first and a separable second part, the first part detachable from the second part, the first part comprising a tube and an environmental cell interface and the second part comprising an electron microscope interface, as a result of which the first part can be cleaned at high temperatures without exposing the second part to said high temperature.By forming the holder assembly from detachable parts, one part can be cleaned by heating it to a high temperature of, for example, 1000° C., clogging in the tubes can be removed by reduction of carbon, while keeping the other part (often comprising mechanical fittings, ball bearing, sliders, or such like) cool. The cleaning can be enhanced by blowing, for example, oxygen or hydrogen through the tubes.

Abstract translation: 通过从可拆卸部件形成保持器组件，可以通过将其加热至例如1000℃的高温来清洁一部分，可以通过还原碳来除去管中的堵塞，同时保持另一部分（通常 包括机械配件，滚珠轴承，滑块等）冷却。 可以通过吹送例如通过管的氧气或氢气来提高清洁。

公开(公告)号：US20160155606A1

公开(公告)日：2016-06-02

申请号：US15014516

申请日：2016-02-03

Applicant: B-NANO LTD.

Inventor： Dov SHACHAL

IPC: H01J37/285 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J37/06 ,  H01J37/20 ,  H01J37/285 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

公开(公告)号：US09240305B2

公开(公告)日：2016-01-19

申请号：US14422186

申请日：2013-07-03

Applicant: Hitachi High-Technologies Corporation

Inventor： Yusuke Ominami ,  Hiroyuki Suzuki ,  Shinsuke Kawanishi ,  Masahiko Ajima

IPC: H01J37/26 ,  H01J37/20 ,  H01J37/16 ,  G01N23/02 ,  G01N21/01 ,  H01J37/18

CPC classification number: H01J37/20 ,  H01J37/18 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/16 ,  H01J2237/20 ,  H01J2237/2003 ,  H01J2237/20235 ,  H01J2237/20292 ,  H01J2237/2605 ,  H01J2237/2608

Abstract: All of the conventional charged particle beam devices are designed only for the observation at atmospheric pressure or in gas atmosphere at a pressure substantially equal to the atmospheric pressure, and there is no device enabling easy observation using a typical high-vacuum charged particle microscope at atmospheric pressure or in gas atmosphere at a pressure substantially equal to the atmospheric pressure. Such a conventional technique has another problem that the distance between the diaphragm and a sample cannot be controlled, and so it has a high risk of breakage of the diaphragm. Then, the device of the present invention includes a diaphragm configured to separate a space to place a sample therein so that pressure of the space to place the sample therein is kept larger than pressure of the interior of the enclosure, the diaphragm letting the primary charged particle beam transmit or pass therethrough and being removable; a contact prevention member configured to prevent a contact between the sample and the diaphragm; and an adjustment mechanism configured to let at least a part of the contact prevention member in an optical axis direction of the charged particle optic column.

Abstract translation: 所有常规的带电粒子束装置均设计用于在大气压力或气体大气压力基本等于大气压力下进行观察，并且不存在使用典型的高真空带电粒子显微镜在大气中容易观察的装置 压力或气体气氛中的压力基本上等于大气压力。 这种传统技术具有不能控制隔膜与样品之间的距离的问题，因此隔膜的破损风险高。 然后，本发明的装置包括隔膜，其被配置为分隔空间以将样品放置在其中，使得将样品放置在其中的空间的压力保持大于外壳内部的压力，所述隔膜使初级带电 粒子束传播或通过并可移除; 接触防止构件，被配置为防止样品与隔膜之间的接触; 以及调整机构，其构造成使所述接触防止部件的至少一部分沿所述带电粒子光学柱的光轴方向。

公开(公告)号：US20150348742A1

公开(公告)日：2015-12-03

申请号：US14724681

申请日：2015-05-28

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Michael Albiez ,  Stefan Meyer ,  Daniel Kirsten ,  Stewart Bean

IPC: H01J37/18 ,  H01J37/28 ,  H01J37/20

CPC classification number: H01J37/18 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/10 ,  H01J2237/188 ,  H01J2237/2605

Abstract: Disclosed is a charged particle optical apparatus, which includes a particle optical arrangement, configured to define a particle beam path for inspecting an object. The object is accommodated in a pressure-controlled interior of a specimen chamber during the inspection of the object. The charged particle optical apparatus further includes a differential pressure module having a differential pressure aperture. A positioning arm is arranged in the specimen chamber for selectively position the differential pressure module within the pressure-controlled interior of the specimen chamber into an operating position in which the particle beam path passes through the differential pressure aperture. The selective positioning includes an advancing movement of the differential pressure module toward the primary particle beam path. The advancing movement is transmitted to the differential pressure module by a track-guided movement of the positioning arm.

Abstract translation: 公开了一种带电粒子光学装置，其包括粒子光学装置，其被配置为限定用于检查物体的粒子束路径。 在检查物体期间，物体被容纳在样本室的压力控制的内部。 带电粒子光学装置还包括具有差压孔的差压模块。 定位臂设置在试样室中，用于将压差模块选择性地定位在试样室的受压控制的内部中，使得其中的粒子束路径穿过差压孔。 选择性定位包括差压模块朝向初级粒子束路径的前进运动。 前进运动通过定位臂的轨道引导运动传递到差压模块。

公开(公告)号：US20150041647A1

公开(公告)日：2015-02-12

申请号：US14455802

申请日：2014-08-08

Applicant: FEI Company

Inventor： Peter Christiaan Tiemeijer ,  Stan Johan Pieter Konings ,  Alexander Henstra

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/147

CPC classification number: H01J37/261 ,  H01J37/147 ,  H01J37/22 ,  H01J37/26 ,  H01J37/263 ,  H01J2237/006 ,  H01J2237/2605 ,  H01J2237/262

Abstract: An environmental transmission electron microscope (ETEM) suffers from gas-induced resolution deterioration. Inventors conclude that the deterioration is due to ionization of gas in the sample chamber of the ETEM, and propose to use an electric field in the sample chamber to remove the ionized gas, thereby diminishing the gas-induced resolution deterioration. The electric field need not be a strong field, and can be caused by, for example, biasing the sample with respect to the sample chamber. A bias voltage of 100 V applied via voltage source is sufficient for a marked improvement the gas-induced resolution deterioration. Alternatively an electric field perpendicular to the optical axis can be used, for example by placing an electrically biased wire or gauze off-axis in the sample chamber.

Abstract translation: 环境透射电子显微镜（ETEM）遭受气体分解劣化。 发明人得出结论，劣化是由于ETEM的样品室中的气体的离子化，并且提出使用样品室中的电场来除去电离气体，从而减少气体诱导的分辨率劣化。 电场不需要是强场，并且可以由例如相对于样品室偏置样品而引起。 通过电压源施加的100V的偏置电压足以显着改善气体诱导的分辨率劣化。 或者，可以使用垂直于光轴的电场，例如通过将电偏置的线或纱布离轴放置在样品室中。

公开(公告)号：US08779358B2

公开(公告)日：2014-07-15

申请号：US13449392

申请日：2012-04-18

Applicant: Dov Shachal

Inventor： Dov Shachal

IPC: G01N23/00

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

公开(公告)号：US20130221217A1

公开(公告)日：2013-08-29

申请号：US13877710

申请日：2011-09-16

Applicant: Masamichi Shiono ,  Masako Nishimura ,  Mami Konomi ,  Susumu Kuwabata

Inventor： Masamichi Shiono ,  Masako Nishimura ,  Mami Konomi ,  Susumu Kuwabata

IPC: G01N23/22

CPC classification number: G01N23/2202 ,  G01N1/2813 ,  G01N23/2251 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2605

Abstract: A micro sample floating on the surface of an ionic liquid is observed by scanning electron microscopy without the sample being covered with the ionic liquid. A floating or hydrophobic sample is floated on the surface of a hydrophilic ionic liquid aqueous solution to prevent the micro sample from being covered with the ionic liquid. A hydrophobic ionic liquid is used for hydrophilic samples. With the use of an ionic liquid aqueous solution of low viscosity and large flowability, the micro sample is allowed to freely aggregate, disperse, and align on the surface of the ionic liquid, and to refloat even when settled in the ionic liquid. For easy observation with a scanning electron microscope, the ionic liquid aqueous solution is dried to lower the flowability of the ionic liquid aqueous solution, after the form of the micro sample has stabilized and before electron microscope observation.

Abstract translation: 通过扫描电子显微镜观察漂浮在离子液体表面上的微量样品，而样品不被离子液体覆盖。 漂浮或疏水的样品漂浮在亲水离子液体水溶液的表面上，以防止微量样品被离子液体覆盖。 疏水性离子液体用于亲水样品。 通过使用低粘度和大流动性的离子液体水溶液，允许微量样品在离子液体的表面上自由聚集，分散和排列，并且即使在沉降在离子液体中时也进行再混合。 为了容易地用扫描电子显微镜观察，离子液体水溶液被干燥以降低离子液体水溶液的流动性，在微量样品的形式稳定之后并且在电子显微镜观察之前。