公开(公告)号：US09441948B2

公开(公告)日：2016-09-13

申请号：US11502330

申请日：2006-08-09

申请人： Benjamin J. Vakoc ,  Seok-Hyun Yun ,  Guillermo J. Tearney ,  Brett Eugene Bouma

发明人： Benjamin J. Vakoc ,  Seok-Hyun Yun ,  Guillermo J. Tearney ,  Brett Eugene Bouma

IPC分类号： G01B9/02 ,  G01N21/21 ,  G01N21/47 ,  A61B5/00 ,  G01J3/45 ,  G01J9/02 ,  G01N21/27

CPC分类号： G01B9/02044 ,  A61B5/0059 ,  A61B5/0066 ,  G01B9/02004 ,  G01B9/02072 ,  G01B9/02081 ,  G01B9/02091 ,  G01B2290/45 ,  G01B2290/70 ,  G01J3/45 ,  G01J2009/0265 ,  G01N21/21 ,  G01N21/274 ,  G01N21/4795

摘要： Apparatus, method and storage medium which can provide at least one first electro-magnetic radiation to a sample and at least one second electromagnetic radiation to a reference, such that the first and/or second electromagnetic radiations have a spectrum which changes over time. In addition, a first polarization component of at least one third radiation associated with the first radiation can be combined with a second polarization component of at least one fourth radiation associated with the second radiation with one another. The first and second polarizations may be specifically controlled to be at least approximately orthogonal to one another.

摘要翻译： 可以向样品提供至少一个第一电磁辐射和至少一个第二电磁辐射至参考物的装置，方法和存储介质，使得第一和/或第二电磁辐射具有随时间变化的光谱。 此外，与第一辐射相关联的至少一个第三辐射的第一偏振分量可以与与第二辐射相关联的至少一个第四辐射的第二偏振分量彼此组合。 可以将第一和第二偏振特别地控制为至少大致彼此正交。

公开(公告)号：US09377290B2

公开(公告)日：2016-06-28

申请号：US14256361

申请日：2014-04-18

申请人： THE GENERAL HOSPITAL CORPORATION

发明人： Seok-Hyun Yun ,  Brett Eugene Bouma ,  Guillermo J. Tearney ,  Johannes Fitzgerald De Boer

IPC分类号： G01B9/02 ,  A61B5/00 ,  G01J3/02 ,  G01J3/453 ,  G01N21/47 ,  G02B27/48 ,  G01J9/02 ,  H01S3/08 ,  H01S3/105 ,  H01S5/14

CPC分类号： H01S5/5045 ,  A61B5/0059 ,  A61B5/0066 ,  A61B5/7257 ,  G01B9/02002 ,  G01B9/02004 ,  G01B9/02043 ,  G01B9/02075 ,  G01B9/02081 ,  G01B9/02083 ,  G01B9/02084 ,  G01B9/0209 ,  G01B9/02091 ,  G01B2290/45 ,  G01B2290/70 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0264 ,  G01J3/453 ,  G01J9/0215 ,  G01N21/4795 ,  G02B6/3604 ,  G02B26/12 ,  G02B27/48 ,  G02F1/093 ,  G02F1/11 ,  H01S3/0071 ,  H01S3/0078 ,  H01S3/08009 ,  H01S3/08063 ,  H01S3/105 ,  H01S3/1068 ,  H01S5/0071 ,  H01S5/0078 ,  H01S5/1025 ,  H01S5/14 ,  H01S5/141 ,  H01S5/146

摘要： An apparatus and method are provided. In particular, a radiation can be provided which includes at least one first electro-magnetic radiation directed to a sample and at least one second electro-magnetic radiation directed to a reference, whereas a frequency of the radiation varies over time. An interference between at least one third radiation associated with the first radiation(s) and at least one fourth radiation associated with the second radiation(s) can be detected to generate an electrical first signal. A second signal associated with at least one phase of at least one frequency component of the electrical first signal can be obtained. Further, comparison data can be generated by comparing the second signal to at least one particular information.

摘要翻译： 提供了一种装置和方法。 特别地，可以提供辐射，其包括指向样品的至少一个第一电磁辐射和指向参考的至少一个第二电磁辐射，而辐射的频率随时间变化。 可以检测到与第一辐射相关联的至少一个第三辐射与与第二辐射相关联的至少一个第四辐射之间的干扰，以产生电的第一信号。 可以获得与电第一信号的至少一个频率分量的至少一个相位相关联的第二信号。 此外，可以通过将第二信号与至少一个特定信息进行比较来生成比较数据。

公开(公告)号：US09323284B2

公开(公告)日：2016-04-26

申请号：US13124305

申请日：2009-10-14

申请人： Mark Foster ,  Alexander Gaeta ,  David Geraghty ,  Michal Lipson ,  Reza Salem ,  Amy Foster

发明人： Mark Foster ,  Alexander Gaeta ,  David Geraghty ,  Michal Lipson ,  Reza Salem ,  Amy Foster

IPC分类号： G01J9/00 ,  G06E3/00 ,  G01J11/00 ,  G01J9/02 ,  G02B27/46

CPC分类号： G06E3/003 ,  G01J9/00 ,  G01J11/00 ,  G01J2009/0226 ,  G02B27/46

摘要： There is set forth in one embodiment an apparatus and method for imparting a phase shift to an input waveform for output of a converted waveform. In one embodiment, a phase shift can be provided by four wave mixing of an input waveform and a pump pulse. In one embodiment, there is set forth an apparatus and method for generating a high resolution time domain representation of an input waveform comprising: dispersing the input waveform to generate a dispersed input waveform; subjecting the dispersed input waveform to four wave mixing by combining the dispersed input waveform with a dispersed pump pulse to generate a converted waveform; and presenting the converted waveform to a detector unit. In one embodiment a detector unit can include a spectrometer (spectrum analyzer) for recording of the converted waveform and output of a record representing the input waveform.

摘要翻译： 在一个实施例中提出了一种用于向输入波形施加相移以输出转换波形的装置和方法。 在一个实施例中，可以通过输入波形和泵浦脉冲的四次波混合来提供相移。 在一个实施例中，提出了一种用于产生输入波形的高分辨率时域表示的装置和方法，包括：分散输入波形以产生分散的输入波形; 通过将分散的输入波形与分散的泵浦脉冲组合来对分散的输入波形进行四波混频以产生转换的波形; 并将转换的波形呈现给检测器单元。 在一个实施例中，检测器单元可以包括用于记录转换的波形的光谱仪（频谱分析仪）和表示输入波形的记录的输出。

公开(公告)号：US09291444B2

公开(公告)日：2016-03-22

申请号：US13265436

申请日：2010-03-30

申请人： Shinya Matsuda ,  Satoru Hirose

发明人： Shinya Matsuda ,  Satoru Hirose

IPC分类号： G01J3/45 ,  G01B9/02 ,  G01J3/02 ,  G01J3/453 ,  G01J9/02 ,  G01M11/02 ,  G02B26/00

CPC分类号： G01B9/02024 ,  G01B9/02044 ,  G01B9/02057 ,  G01B9/02097 ,  G01B2290/35 ,  G01J3/02 ,  G01J3/021 ,  G01J3/4535 ,  G01J9/02 ,  G01M11/025 ,  G01M11/0271 ,  G02B26/001

摘要： Provided is an inexpensive, high performance, compact, and energy saving light reflection mechanism comprising a first moving portion having a reflecting surface on the front surface, a supporting portion which supports the first moving portion, a first beam and a translating beam which couple the first moving portion and the supporting portion in the form of cantilever beam above and below the supporting portion, and a drive portion which moves the first moving portion, wherein a large amplitude can be obtained by small energy when the first moving portion is forced into resonance vibration in the direction perpendicular to the first reflecting surface. Also provided is an optical interferometer and a spectral analyzer.

摘要翻译： 提供了一种廉价的，高性能，紧凑且节能的光反射机构，其包括：在前表面上具有反射表面的第一移动部分，支撑第一移动部分的支撑部分，第一光束和平移光束， 第一移动部分和在支撑部分上方和下方的悬臂梁形式的支撑部分以及移动第一移动部分的驱动部分，其中当第一移动部分被迫进入共振时可以通过小的能量获得大的振幅 在垂直于第一反射面的方向振动。 还提供了光学干涉仪和光谱分析仪。

公开(公告)号：US20160011055A1

公开(公告)日：2016-01-14

申请号：US14791825

申请日：2015-07-06

申请人： MITUTOYO CORPORATION

发明人： Kazuhiko Kawasaki

IPC分类号： G01J9/02

CPC分类号： G01J9/04 ,  G02F2203/54 ,  H01S3/1305

摘要： To measure the frequency of a laser, the frequency of a beat signal that is generated by the interference between an optical frequency comb, used as the reference of measurement, and the laser to be measured is measured. In such a laser frequency measurement using the optical frequency comb, at least one of a repetition frequency and a CEO frequency of the optical frequency comb is changed so that the frequency of the beat signal becomes a predetermined value, and the frequency of the beat signal is measured, so that the frequency of the laser is measured. This allows measurement of the frequency of laser having large frequency variation and low stability.

摘要翻译： 为了测量激光的频率，测量由用作测量参考的光学频率梳与被测量的激光之间的干涉产生的拍频信号的频率。 在使用光频梳的这种激光频率测量中，改变光频梳的重复频率和CEO频率中的至少一个，使得拍频信号的频率变为预定值，并且拍频信号的频率 被测量，从而测量激光的频率。 这允许测量具有大频率变化和低稳定性的激光器的频率。

公开(公告)号：US20150378098A1

公开(公告)日：2015-12-31

申请号：US14768239

申请日：2013-11-19

申请人： NEC CORPORATION

发明人： Takashi MATSUMOTO

IPC分类号： G02B6/126 ,  G02B6/122 ,  G02B6/293 ,  G01J9/02

CPC分类号： G02B6/126 ,  G01J9/02 ,  G01J2009/0288 ,  G02B6/122 ,  G02B6/1228 ,  G02B6/29352 ,  G02B6/2938 ,  G02B2006/12097 ,  G02B2006/121

摘要： Provided are a polarization beam splitter and an optical device with high productivity. A polarization beam splitter (PBS) according to an exemplary embodiment of the present invention includes: a demultiplexer (11) that is formed of a rib waveguide (50) and demultiplexes input light into first input light and second input light; a multiplexer (14) that is formed of the rib waveguide (50) and multiplexes the first input light and the second input light that are obtained by demultiplexing the input light by the demultiplexer (11); a first arm waveguide (12) that is formed of a channel waveguide (51) and guides the first input light to the multiplexer (11); and a second arm waveguide (13) that is formed of the channel waveguide (51), generates a phase difference in the first input light propagating through the first arm waveguide, and guides the second input light to the multiplexer (14).

摘要翻译： 提供了一种具有高生产率的偏振分束器和光学装置。 根据本发明的示例性实施例的偏振分束器（PBS）包括：解复用器（11），其由肋波导（50）形成，并且将输入光解复用为第一输入光和第二输入光; 多路复用器（14），其由所述肋波导（50）形成，并且通过由所述解复用器（11）解复用所输入的光而获得的所述第一输入光和所述第二输入光进行多路复用; 第一臂波导（12），其由通道波导（51）形成并将第一输入光引导到多路复用器（11）; 以及由通道波导（51）形成的第二臂波导（13），在通过第一臂波导传播的第一输入光中产生相位差，并将第二输入光引导到多路复用器（14）。

公开(公告)号：US09091534B2

公开(公告)日：2015-07-28

申请号：US13795998

申请日：2013-03-12

申请人： CANON KABUSHIKI KAISHA

发明人： Hitoshi Iijima ,  Atsushi Maeda

IPC分类号： H04N7/18 ,  A61B3/14 ,  G01B9/02 ,  G01B11/24 ,  G01M11/02 ,  G01J9/00 ,  G01J9/02

CPC分类号： G01B11/2441 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/70 ,  G01J2009/002 ,  G01J2009/0203 ,  G01M11/025 ,  G01M11/0271 ,  Y10T29/49826

摘要： To eliminate influence of undesirable light component from an object when measuring optical characteristics such as shape and wavefront aberration of the object, light from light source (101) is separated by polarization beam splitter (103) into measuring light (L1) that irradiates and travels via the object (108) and is condensed on image plane (P) through microlenses (114a) of microlens array (114), and reference light (L2) that does not irradiate the object and is guided to the image plane by reference light optical system (109). A computer (113) acquires picked-up images sequentially from CCD image sensor (116) arranged on the image plane while changing optical path length of the reference light by movable stage (117), extracts interference light spots generated through interference between signal light component and the reference light from the picked-up images, calculates positions of the interference light spots, and calculates deviation amounts of positions from predetermined reference positions.

摘要翻译： 为了在测量物体的形状和波面象差等光学特性时，消除来自物体的不良光分量的影响，来自光源（101）的光被偏振分束器（103）分离成照射和行进的测量光（L1） 通过物体（108）通过微透镜阵列（114）的微透镜（114a）在像平面（P）上聚焦，并且通过参考光学光学被引导到图像平面的参考光（L2）不被照射到物体 系统（109）。 计算机（113）在通过移动台（117）改变参考光的光程长度的同时，从布置在图像平面上的CCD图像传感器（116）顺序地获取拾取图像，提取通过信号光分量 和来自拾取图像的参考光，计算干涉光斑的位置，并计算出与预定基准位置的偏移量。

公开(公告)号：US20150204729A1

公开(公告)日：2015-07-23

申请号：US14565703

申请日：2014-12-10

申请人： Lasertec Corporation

发明人： Haruhiko KUSUNOSE ,  Kiwamu TAKEHISA

IPC分类号： G01J9/02 ,  G01B9/02

CPC分类号： G01J9/02 ,  G01B9/02041 ,  G01B9/02049 ,  G01B9/02098 ,  G01B2290/30 ,  G01J9/0215 ,  G01J2009/0219 ,  G01N21/45 ,  G03F1/26 ,  G03F1/84

摘要： The present invention is directed to the provision of an interferometer and a phase shift amount measuring apparatus that can precisely operate in the EUV region. The interferometer according to the invention comprises an illumination source for generating an illumination beam, an illumination system for projecting the illumination beam emitted from the illumination source onto a sample, and an imaging system for directing the reflected beam by the sample onto a detector. The illumination system includes a first diffraction grating for producing a first and second diffraction beams which respectively illuminate two areas on the sample where are shifted from each other by a given distance, and the imaging system includes a second grating for diffracting the first and second diffraction beams reflected by the sample to produce a third and fourth diffraction beams which are shifted from each other by a given distance.

摘要翻译： 本发明涉及提供一种能够在EUV区域中精确地工作的干涉仪和相移量测量装置。 根据本发明的干涉仪包括用于产生照明光束的照明源，用于将从照明源发射的照射光束投射到样本上的照明系统，以及用于将由样品引导到检测器的反射光束的成像系统。 照明系统包括：第一衍射光栅，用于产生第一和第二衍射光束，其分别照射样品上彼此偏移给定距离的两个区域，并且成像系统包括用于衍射第一和第二衍射的第二光栅 由样品反射的光束以产生彼此偏移给定距离的第三和第四衍射光束。

公开(公告)号：US20150185454A1

公开(公告)日：2015-07-02

申请号：US14490806

申请日：2014-09-19

申请人： Carl Zeiss Microscopy GmbH

发明人： Thomas KALKBRENNER ,  Ingo Kleppe ,  Helmut Lippert ,  Ralf Netz

IPC分类号： G02B21/00 ,  G01J9/02 ,  G02B21/02 ,  G02B6/06 ,  G02B26/08

CPC分类号： G02B21/008 ,  G01J9/02 ,  G02B6/06 ,  G02B21/0032 ,  G02B21/0072 ,  G02B21/0076 ,  G02B21/0084 ,  G02B21/025 ,  G02B26/0816 ,  G02B26/0833 ,  G02B27/58

摘要： A microscope for high resolution scanning microscopy of a sample, having:an illumination device for the purpose of illuminating the sample, an imaging device for the purpose of scanning at least one point or linear spot over the sample and of imaging the point or linear spot into a diffraction-limited, static single image below am imaging scale in a detection plane. A detector device for detecting the single image in the detection plane for various scan positions, with a spatial resolution which, taking into account the imaging scale in at least one dimension/measurement, is at least twice as high as a full width at half maximum of the diffraction-limited single image. The amplitude and/or phase of a wavefront influenced by the sample is detected with spatial resolution by means for wavefront detection, and wherein the influence of the sample on the phase is determined by means of a wavefront sensor.

摘要翻译： 用于样品的高分辨率扫描显微镜的显微镜，具有：用于照亮样品的照明装置，用于扫描样品上至少一个点或线性斑点并成像点或线性斑点的成像装置 在检测平面内成像低于成像尺度的衍射极限静态单一图像。 用于检测用于各种扫描位置的检测平面中的单个图像的检测器装置，其具有考虑到至少一个维度/测量中的成像刻度的空间分辨率至少为半高的全宽度的两倍 的衍射极限单图像。 通过用于波前检测的方式通过空间分辨率来检测受样本影响的波前的幅度和/或相位，并且其中样本对相位的影响通过波前传感器确定。

公开(公告)号：US09063002B2

公开(公告)日：2015-06-23

申请号：US13747235

申请日：2013-01-22

申请人： California Institute of Technology

发明人： James Kent Wallace

IPC分类号： G01B9/02 ,  G01J1/20 ,  G01J9/02 ,  G01J9/00

CPC分类号： G01J9/0215 ,  G01J9/00 ,  G01J9/02 ,  G01J2009/0226

摘要： Hybrid sensors comprising Shack-Hartmann Wavefront Sensor (S-HWFS) and Zernike Wavefront Sensor (Z-WFS) capabilities are presented. The hybrid sensor includes a Z-WFS optically arranged in-line with a S-HWFS such that the combined wavefront sensor operates across a wide dynamic range and noise conditions. The Z-WFS may include the ability to introduce a dynamic phase shift in both transmissive and reflective modes.

摘要翻译： 提出了包括Shack-Hartmann波前传感器（S-HWFS）和Zernike波前传感器（Z-WFS）功能的混合传感器。 混合传感器包括与S-HWFS成线性配置的Z-WFS，使得组合的波前传感器在宽动态范围和噪声条件下工作。 Z-WFS可以包括在透射和反射模式中引入动态相移的能力。