Semiconductor device having LDD-type source/drain regions and fabrication method thereof
    61.
    发明授权
    Semiconductor device having LDD-type source/drain regions and fabrication method thereof 有权
    具有LDD型源极/漏极区域的半导体器件及其制造方法

    公开(公告)号:US07388264B2

    公开(公告)日:2008-06-17

    申请号:US10948883

    申请日:2004-09-24

    IPC分类号: H01L29/06

    摘要: A semiconductor device having LDD-type source/drain regions and a method of fabricating the same are provided. The semiconductor device includes at least a pair of gate patterns disposed on a semiconductor substrate and LDD-type source/drain regions disposed at both sides of the gate patterns. The substrate having the gate patterns and the LDD-type source/drain regions is covered with a conformal etch stop layer. The etch stop layer is covered with an interlayer insulating layer. The LDD-type source/drain region is exposed by a contact hole that penetrates the interlayer insulating layer and the etch stop layer. The method of forming the LDD-type source/drain regions and the etch stop layer includes forming low-concentration source/drain regions at both sides of the gate patterns and forming the conformal etch stop layer on the substrate having the low-concentration source/drain regions. Gate spacers are then formed on the sidewalls of the gate patterns. Using the gate patterns and the gate spacers as implantation masks, impurity ions are implanted into the semiconductor substrate to form high-concentration source/drain regions. The spacers are then selectively removed. An interlayer insulating layer is formed on the substrate where the spacers are removed.

    摘要翻译: 提供具有LDD型源极/漏极区域的半导体器件及其制造方法。 半导体器件包括设置在半导体衬底上的至少一对栅极图案和设置在栅极图案两侧的LDD型源极/漏极区域。 具有栅极图案和LDD型源极/漏极区域的衬底被保形蚀刻停止层覆盖。 蚀刻停止层被层间绝缘层覆盖。 LDD型源极/漏极区域通过穿透层间绝缘层和蚀刻停止层的接触孔露出。 形成LDD型源极/漏极区域和蚀刻停止层的方法包括在栅极图案的两侧形成低浓度源极/漏极区域,并在具有低浓度源/漏极区域的衬底上形成保形蚀刻停止层, 漏区。 然后在栅极图案的侧壁上形成栅极间隔物。 使用栅极图案和栅极间隔物作为注入掩模,将杂质离子注入到半导体衬底中以形成高浓度源极/漏极区域。 然后选择性地去除间隔物。 在基板上形成层间绝缘层,其中隔离物被去除。

    Liquid Crystal Display Device and Method for Fabricating the Same
    62.
    发明申请
    Liquid Crystal Display Device and Method for Fabricating the Same 有权
    液晶显示装置及其制造方法

    公开(公告)号:US20080001883A1

    公开(公告)日:2008-01-03

    申请号:US11618664

    申请日:2006-12-29

    IPC分类号: G09G3/36

    摘要: A liquid crystal display (LCD) device includes an array substrate; a gate line formed on the array substrate; a data line formed on the array substrate crossing the gate lines; a thin film transistor formed on the array substrate, the thin film transistor being formed at an intersection between the gate line and the data line; a pixel electrode formed on the array substrate and connected to the thin film transistor; an insulating interlayer formed on an entire surface of the array substrate; a common electrode formed on the insulating interlayer and having a plurality of slits; a metal line formed on the insulating interlayer overlapping the data line and the common electrode; a color filter substrate attached to the array substrate; and a liquid crystal layer formed between the array substrate and the color filter substrate.

    摘要翻译: 液晶显示器(LCD)装置包括阵列基板; 形成在阵列基板上的栅极线; 形成在与栅极线交叉的阵列基板上的数据线; 形成在所述阵列基板上的薄膜晶体管,所述薄膜晶体管形成在所述栅极线与所述数据线之间的交点处; 形成在阵列基板上并连接到薄膜晶体管的像素电极; 形成在所述阵列基板的整个表面上的绝缘夹层; 形成在所述绝缘中间层上并具有多个狭缝的公共电极; 形成在绝缘层上的与数据线和公共电极重叠的金属线; 附着到阵列基板的滤色器基板; 以及形成在阵列基板和滤色器基板之间的液晶层。

    In-plane switching liquid crystal display device and method

    公开(公告)号:US20060274248A1

    公开(公告)日:2006-12-07

    申请号:US11239002

    申请日:2005-09-30

    IPC分类号: G02F1/1343

    CPC分类号: G02F1/134363 G02F1/133528

    摘要: An in-plane switching liquid crystal display device includes a first substrate, a second substrate spaced apart from the first substrate, a liquid crystal layer between the first and second substrates, a first polarizer at an outer surface of the first substrate, the first polarizer including a first polarization film and first inner and outer supporting film at both sides of the first polarization film, the first inner supporting film adjacent to the first substrate and having a retardation within a range of about −10 nm to about +10 nm, and a second polarizer at an outer surface of the second substrate, the second polarizer including a second polarization film and second inner and outer supporting film at both sides of the second polarization film, the second inner supporting film adjacent to the second substrate.

    Use of multiple etching steps to reduce lateral etch undercut
    68.
    发明申请
    Use of multiple etching steps to reduce lateral etch undercut 有权
    使用多个蚀刻步骤来减少横向蚀刻底切

    公开(公告)号:US20050170646A1

    公开(公告)日:2005-08-04

    申请号:US10772932

    申请日:2004-02-04

    摘要: In integrated circuit fabrication, an etch is used that has a lateral component. For example, the etch may be isotropic. Before the isotropic etch of a layer (160), another etch of the same layer is performed. This other etch can be anisotropic. This etch attacks a portion (160X2) of the layer adjacent to the feature to be formed by the isotropic etch. That portion is entirely or partially removed by the anisotropic etch. Then the isotropic etch mask (420) is formed to extend beyond the feature over the location of the portion subjected to the anisotropic etch. If that portion was removed entirely, then the isotropic etch mask may completely seal off the feature to be formed on the side of that portion, so the lateral etching will not occur. If that portion was removed only partially, then the lateral undercut will be impeded because the passage to the feature under the isotropic etch mask will be narrowed.

    摘要翻译: 在集成电路制造中,使用具有侧向分量的蚀刻。 例如,蚀刻可以是各向同性的。 在层(160)的各向同性蚀刻之前,执行相同层的另一蚀刻。 这种其他蚀刻可以是各向异性的。 该蚀刻攻击通过各向同性蚀刻形成的与特征相邻的层的部分(160×2)。 该部分被各向异性蚀刻完全或部分地去除。 然后,各向同性蚀刻掩模(420)被形成为延伸超过经过各向异性蚀刻的部分的位置的特征。 如果完全去除该部分,则各向同性蚀刻掩模可以完全密封要在该部分侧面上形成的特征,因此不会发生横向蚀刻。 如果该部分仅部分被去除,则横向底切将被阻碍,因为在各向同性蚀刻掩模下的特征的通过将变窄。

    Erasing method in non-volatile memory device
    70.
    发明授权
    Erasing method in non-volatile memory device 有权
    非易失性存储器件中的擦除方法

    公开(公告)号:US06724661B2

    公开(公告)日:2004-04-20

    申请号:US10090902

    申请日:2002-05-31

    IPC分类号: G11C1604

    CPC分类号: G11C16/14

    摘要: A method for performing an erase operation in a memory cell. A first voltage and a second voltage are applied to the source and drain regions, respectively, for a predetermined erase time; and the first and second voltages are switched with each other between the source and drain regions at least one time for the erase time. Thereby, hole is easily injected to the source and drain regions and a channel lateral surface, and a uniform and high-speed erase operation is archived.

    摘要翻译: 一种在存储单元中执行擦除操作的方法。 分别在源极和漏极区域施加第一电压和第二电压达预定的擦除时间; 并且第一和第二电压在源极和漏极区之间彼此切换至少一次以用于擦除时间。 因此,孔容易地注入到源极和漏极区域以及沟道横向表面,并且存储均匀且高速的擦除操作。