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公开(公告)号:US20180257099A1
公开(公告)日:2018-09-13
申请号:US15905977
申请日:2018-02-27
Applicant: Tokyo Electron Limited
Inventor: Fumihiro Miyazaki , Kazuhito Miyazaki , Norihide Sagara , Wataru Yoshitomi , Koutarou Onoue
CPC classification number: B05C5/0208 , B05C11/00 , B05C13/00 , B05D1/26 , H01L21/6715 , H01L21/67259 , H01L21/681
Abstract: A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.
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公开(公告)号:US09991032B2
公开(公告)日:2018-06-05
申请号:US14946155
申请日:2015-11-19
Applicant: RALEC ELECTRONIC CORPORATION
Inventor: Wan-Ping Wang
CPC classification number: H01C17/006 , B05C11/00 , B05D1/32 , B05D5/00 , H01C7/006 , H01C7/06 , H01C17/08 , H01C17/28
Abstract: A method for manufacturing a thin film chip resistor device includes the steps of: disposing a magnetic fixing member on a first surface of a substrate, and disposing a magnetic shadow mask on a second surface of the substrate opposite to the first surface, such that the magnetic shadow mask detachably and fixedly contacts the second surface of the substrate by virtue of an attractive magnetic force between the magnetic fixing member and the magnetic shadow mask; and depositing at least one resistor unit on the second surface of the substrate with the use of the magnetic shadow mask, the resistor unit including two separated first electrode elements and a resistor element that electrically interconnects the first electrode elements.
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公开(公告)号:US09863755B2
公开(公告)日:2018-01-09
申请号:US14527128
申请日:2014-10-29
Applicant: Nordson Corporation
Inventor: Floriana Suriawidjaja , Todd S. Weston
CPC classification number: G01B11/026 , B05B12/124 , B05C5/0225 , B05C11/00 , B05C11/1002 , B05C11/1015 , G01B11/0608 , G01B11/14 , G01C15/004 , Y10T29/49
Abstract: Apparatus and methods of determining a position of a height sensor in a dispensing system. The dispensing system includes a dispenser, height sensor, camera, and a calibration device configured to receive a signal from the height sensor. The calibration device may include an optical sensor that generates an alignment signal in response to receiving light from the height sensor and/or a fiducial that causes the height sensor to generate the alignment signal in response to a detected height change. The alignment signal is used to automatically determine the position at which the height sensor is aligned with the calibration device. The position of the height sensor relative to a camera is determined by aligning the camera with the calibration device and recording its position. The recorded coordinates of the camera are compared to the coordinates of the height sensor when the height sensor is automatically aligned with the calibration device.
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公开(公告)号:US20170225188A1
公开(公告)日:2017-08-10
申请号:US15329359
申请日:2015-07-17
Applicant: MUSASHI ENGINEERING, INC.
Inventor: Kazumasa Ikushima
CPC classification number: B05C11/11 , B05C5/00 , B05C5/02 , B05C5/0212 , B05C11/00 , B05C13/00 , F16L19/04 , F16L37/24
Abstract: A syringe attachment/detachment mechanism enables a syringe to be easily attached to and detached from a discharge device without causing twisting of a tube, and enabling the syringe and an adapter to be fixedly held in a desired orientation. In the syringe attachment/detachment mechanism and the device provided with the mechanism, the mechanism being adapted for a discharge device to which a syringe including an attachment part and an upper connection part is attached through screwing, the attachment part includes an inner cylindrical portion having a small-diameter opening, an outer cylindrical portion surrounding the inner cylindrical portion, and a screw portion. The attachment/detachment mechanism includes a support member including a cylindrical insertion portion into which the inner cylindrical portion is inserted, and having a channel formed therein for communication between the small-diameter opening and a nozzle of the discharge device. A rotation member includes a screw portion.
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65.
公开(公告)号:US09675990B2
公开(公告)日:2017-06-13
申请号:US14360396
申请日:2012-12-21
Applicant: Hexcel Composites Limited
Inventor: John Ellis , Andrea Caballero
IPC: B05C11/00 , G01R35/00 , B29C70/50 , G01N27/90 , G01N29/06 , G01N29/07 , G01N29/44 , B32B41/00 , B29C70/54 , G01N33/44
CPC classification number: B05C11/00 , B29C70/50 , B29C70/54 , B32B41/00 , B32B2310/028 , G01N27/90 , G01N29/0663 , G01N29/07 , G01N29/4472 , G01N33/442 , G01N2291/0231 , G01R35/00 , Y02P80/40
Abstract: A method of controlling a process for the manufacture of a multicomponent sheet material having a desired pre-determined parameter comprising applying an acoustic or an electromagnetic signal to interact with the sheet material whereby the interaction modifies the applied signal, detecting the modified signal, comparing the modified signal or data derived from it with data relating to the pre-determined parameter and modifying at least one step of the process whereby the data relating to the modified signal is modified towards the data relating to the pre-determined parameter.
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公开(公告)号:US20170058850A1
公开(公告)日:2017-03-02
申请号:US15245246
申请日:2016-08-24
Applicant: Gu-Hwan LEE
Inventor: Gu-Hwan LEE
CPC classification number: F02M61/18 , B05B1/3046 , B05B1/3405 , B05B1/3442 , B05C5/0225 , B05C11/00 , B05C11/1034 , F02M61/162 , F02M69/041
Abstract: The present invention relates to a dispenser nozzle for high pressure injection, of which injection pressure and efficiency are largely improved and the product lifespan is increased, and in which a tappet 100 has a leading end portion 101 formed in a conical shape, and a nozzle 110 includes a funnel-shaped accommodation part 111 formed for maintaining a predetermined gap G from an outer circumferential surface of the leading end portion 101 of the tappet 100, a funnel groove 112 formed in the center of a bottom surface 111a of the funnel-shaped accommodation part 111 such that the leading end portion 101 of the tappet 100 is inserted into the funnel groove 112 by a predetermined length, and an injection hole 113 penetratingly formed in the center of the funnel groove 112.
Abstract translation: 本发明涉及一种用于高压注射的分注喷嘴,其喷射压力和效率大大提高并且产品寿命增加,并且其中挺杆100具有形成为圆锥形的前端部分101和喷嘴 110包括形成为用于从挺杆100的前端部101的外周表面保持预定间隙G的漏斗形容纳部111,形成在漏斗形状的底面111a的中心的漏斗槽112 挺杆100的前端部101被插入到漏斗槽112中预定长度的入口部111和贯通地形成在漏斗槽112的中心的喷射孔113。
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公开(公告)号:US09575407B2
公开(公告)日:2017-02-21
申请号:US14272782
申请日:2014-05-08
Applicant: CANON KABUSHIKI KAISHA
Inventor: Hiroshi Sato
CPC classification number: G03F7/0002 , B05C9/10 , B05C9/12 , B05C11/00 , B05C11/1021 , B05D3/067 , B05D3/12 , B29C59/002 , B82Y10/00 , B82Y40/00 , H01L21/3105 , H01L22/20
Abstract: The imprint apparatus of the present invention includes a holding unit configured to hold a mold; a particle inspection unit configured to inspect whether or not particle is present on an imprint area, in which the resin pattern is formed, of the substrate; a dispenser configured to apply an uncured resin to the imprint area; a movable unit configured to move the imprint area with respect to the holding unit; and a controller. The movable unit is capable of moving the imprint area to each of an inspection position by means of the inspection unit, an application position by means of the dispenser, and a contacting position by means of the holding unit. Also, the controller causes the inspection unit to perform inspection of the imprint area in association with the movement of the imprint area by means of the movable unit.
Abstract translation: 本发明的压印装置包括:保持单元,其构造成保持模具; 粒子检查单元,被配置为检查在所述基板的形成树脂图案的印模区域上是否存在颗粒; 分配器,被配置为将未固化的树脂施加到所述压印区域; 可移动单元,其构造成相对于所述保持单元移动所述压印区域; 和控制器。 可移动单元能够通过检查单元,借助于分配器的施加位置和通过保持单元的接触位置将压印区域移动到检查位置。 此外,控制器使得检查单元通过可移动单元与压印区域的移动相关联地执行对压印区域的检查。
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68.
公开(公告)号:US20160289839A1
公开(公告)日:2016-10-06
申请号:US15185177
申请日:2016-06-17
Applicant: SCREEN Semiconductor Solutions Co., Ltd.
Inventor: Masahiko HARUMOTO , Tadashi MIYAGI , Yukihiko INAGAKI , Koji KANEYAMA
IPC: C23C16/56 , G03F7/32 , G03F7/20 , C23C16/02 , H01L21/033
CPC classification number: C23C16/56 , B05C11/00 , C23C16/0227 , G03F7/0002 , G03F7/162 , G03F7/20 , G03F7/3021 , G03F7/32 , H01J37/02 , H01L21/0335 , H01L21/0337 , H01L21/0338 , H01L21/67115 , H01L21/67126 , H01L21/6715 , H01L21/67178
Abstract: An underlayer is formed to cover the upper surface of a substrate and a guide pattern is formed on the underlayer. A DSA film constituted by two types of polymers is formed in a region on the underlayer where the guide pattern is not formed. Thermal processing is performed while a solvent is supplied to the DSA film on the substrate. Thus, a microphase separation of the DSA film occurs. As a result, patterns made of the one polymer and patterns made of another polymer are formed. Exposure processing and development processing are performed in this order on the DSA film after the microphase separation such that the patterns made of another polymer are removed.
Abstract translation: 形成底层以覆盖基板的上表面,并且在底层上形成引导图案。 在未形成引导图案的底层上的区域中形成由两种类型的聚合物构成的DSA膜。 在向基板上的DSA膜供给溶剂的同时进行热处理。 因此,发生DSA膜的微相分离。 结果,形成由一种聚合物制成的图案和由另一种聚合物制成的图案。 在微相分离之后,在DSA膜上依次进行曝光处理和显影处理,从而除去由另一种聚合物制成的图案。
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69.
公开(公告)号:US09393585B2
公开(公告)日:2016-07-19
申请号:US14533137
申请日:2014-11-05
Applicant: Yu-Cheng Huang
Inventor: Yu-Cheng Huang
IPC: B05C11/00 , B05C1/02 , B05C1/08 , A43D11/03 , A43D25/18 , B05C21/00 , B27G11/00 , C09J5/00 , B05D5/10
CPC classification number: B05C1/025 , A43D11/03 , A43D25/181 , B05C1/02 , B05C1/0813 , B05C1/0817 , B05C1/083 , B05C11/00 , B05C21/00 , B05D5/10 , B27G11/00 , C09J5/00
Abstract: An adhesive coating device is provided with an adhesive reservoir; two opposite adjustment rollers at bottom of the reservoir; a pattern roller between the adjustment rollers and having a pattern formed thereon; a resilient roller under the pattern roller; a roller member under the resilient roller; two pivotal, co-rotated links on a side of the reservoir and operatively connected to the adjustment rollers respectively; and a spring biased adjustment screw pivotably secured to an end of one link. Clockwise rotation of the adjustment screw rotates the links at different directions, thereby decreasing a gap between the pattern roller and each adjustment roller.
Abstract translation: 粘合剂涂布装置设置有粘合剂储存器; 储存器底部有两个相对的调节辊; 调节辊之间的图案辊,其上形成有图案; 在图案辊下方的弹性辊; 在弹性辊下方的辊构件; 两个枢转的,共同旋转的连接在容器的一侧并分别可操作地连接到调节辊; 以及可枢转地固定到一个连杆的端部的弹簧偏压调节螺钉。 调节螺钉的顺时针旋转使链节沿不同方向旋转,从而减小图案辊和每个调节辊之间的间隙。
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公开(公告)号:US20160129470A1
公开(公告)日:2016-05-12
申请号:US14900689
申请日:2014-06-17
Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
Inventor: Hideyuki TADA
CPC classification number: B05C11/00 , B05B13/041 , B05C5/0225 , B05C5/0254 , B05C5/0262 , B05C5/0295 , B05C9/04 , B05C11/02 , B05C11/1013 , B05C13/025 , B05D1/26
Abstract: In a coating apparatus, which coats an object to be coated with a viscous coating material while causing a moving part to move a flat nozzle that discharges the coating material, the nozzle includes a cylinder that applies predetermined pressing force F to the nozzle towards the object to be coated. The cylinder forms a gap (G) between the object to be coated and the nozzle by moving the nozzle in a direction away from the object to be coated to a position where discharge reaction force (R) is balanced with pressing force (F). The discharge reaction force (R) is generated when the nozzle discharges the coating material to the object to be coated.
Abstract translation: 在涂布装置中,其使涂覆有粘性涂料的物体同时使移动部件移动使排出涂料的扁平喷嘴,喷嘴包括将预定的按压力F施加到喷嘴朝向物体的气缸 被涂。 气缸通过使喷嘴沿远离被涂物体的方向移动到排出反作用力(R)与挤压力(F)平衡的位置,在被涂物体与喷嘴之间形成间隙(G)。 当喷嘴将涂料排出到待涂覆的物体时,产生排出反作用力(R)。
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