Nitride ceramics to mount aluminum nitride seed for sublimation growth
    71.
    发明授权
    Nitride ceramics to mount aluminum nitride seed for sublimation growth 有权
    氮化硅陶瓷用于安装氮化铝种子用于升华生长

    公开(公告)号:US07087112B1

    公开(公告)日:2006-08-08

    申请号:US10725869

    申请日:2003-12-02

    IPC分类号: C30B29/38

    CPC分类号: C30B29/403 C30B23/00

    摘要: An apparatus and method for fabricating a mount for an aluminum nitride (AlN) seed for single crystal aluminum nitride growth is provided. A holder having a proximal base and wall portions extending therefrom is fabricated from crystal growth crucible material, and defines an internal cavity. An AlN seed is placed within the holder, and placed within a nitrogen atmosphere at a temperature at or exceeding the melting point of a suitable material capable of forming a nitride ceramic by nitridation, such as aluminum. Pellets fabricated from this material are dropped into the holder and onto the seed, so that they melt and react with the nitrogen atmosphere to form a nitride ceramic. The seed is effectively molded in-situ with the ceramic, so that the ceramic and holder forms a closely conforming holder for the seed, suitable for single crystal AlN growth.

    摘要翻译: 提供了一种用于制造用于单晶氮化铝生长的氮化铝(AlN)种子的安装件的装置和方法。 具有近端基部和从其延伸的壁部分的保持器由晶体生长坩埚材料制成,并且限定内部空腔。 将AlN种子放置在保持器内,并且在氮气气氛中放置在能够通过氮化形成氮化物陶瓷的合适材料的熔点或超过其熔点的温度,例如铝。 将由该材料制成的颗粒滴入保持器和种子上,使其熔融并与氮气气氛反应形成氮化物陶瓷。 种子与陶瓷有效地原位成型,使得陶瓷和保持器形成适合于单晶AlN生长的种子的紧密配合的保持器。

    Method for polishing a substrate surface
    77.
    发明授权
    Method for polishing a substrate surface 有权
    抛光基材表面的方法

    公开(公告)号:US07323414B2

    公开(公告)日:2008-01-29

    申请号:US11363816

    申请日:2006-02-28

    IPC分类号: H01L21/461 H01L21/302

    摘要: According to one aspect of the invention, an improved process for preparing a surface of substrate is provided wherein the surface of the substrate is prepared for a chemical mechanical polishing (CMP) process, the CMP process is performed on the surface of the substrate, and the surface of the substrate is finished to clear the substrate surface of any active ingredients from the CMP process. Also, an improved substrate produced by the method is provided. According to one aspect of the invention, particular polishing materials and procedures may be used that allow for increased quality of AlN substrate surfaces.

    摘要翻译: 根据本发明的一个方面,提供了一种用于制备衬底表面的改进方法,其中衬底的表面准备用于化学机械抛光(CMP)工艺,在衬底的表面上进行CMP工艺,以及 完成基材的表面以从CMP工艺中清除任何活性成分的基材表面。 此外,提供了通过该方法制备的改进的基板。 根据本发明的一个方面,可以使用允许增加AlN衬底表面质量的特定抛光材料和程序。