Method and apparatus for wavelength tuning of optically pumped vertical cavity surface emitting lasers
    74.
    发明授权
    Method and apparatus for wavelength tuning of optically pumped vertical cavity surface emitting lasers 失效
    光泵浦垂直腔表面发射激光器的波长调谐方法和装置

    公开(公告)号:US06717964B2

    公开(公告)日:2004-04-06

    申请号:US09898191

    申请日:2001-07-02

    IPC分类号: H01S310

    摘要: A tunable vertical cavity surface emitting laser (VCSEL) is formed by providing a gap in its laser cavity that can be adjusted to vary the gap distance therein to change the resonance of the cavity and the wavelength of photons that are generated. A pump laser provides a pump source of photons that are coupled into the laser cavity of the vertical cavity surface emitting laser. The vertical cavity surface emitting laser is coupled to a piezo-electric submount to form the gap in the laser cavity. The gap distance is adjusted to tune the vertical cavity surface emitting laser around its center wavelength by applying a voltage (i.e., an electric field) across the piezo-electric submount which causes mechanical stress therein. Alternate embodiments are disclosed including a joined unit of elements to form the tunable vertical cavity surface emitting laser as well as a system of elements to form the tunable vertical cavity surface emitting laser.

    摘要翻译: 通过在其激光腔中提供间隙来形成可调谐的垂直腔表面发射激光器(VCSEL),该间隙可被调节以改变其中的间隙距离,以改变空腔的共振和产生的光子的波长。 泵浦激光器提供耦合到垂直腔表面发射激光器的激光腔中的光子泵浦源。 垂直腔表面发射激光器耦合到压电底座以在激光腔中形成间隙。 通过在其中引起机械应力的压电基座上施加电压(即,电场)来调节间隙距离以调整垂直腔表面发射激光器围绕其中心波长。 公开了另外的实施例,其包括用于形成可调谐垂直腔表面发射激光器的元件的连接单元以及用于形成可调谐垂直腔表面发射激光器的元件系统。

    Electrically pumped long-wavelength VCSEL and methods of fabrication
    75.
    发明授权
    Electrically pumped long-wavelength VCSEL and methods of fabrication 失效
    电泵浦长波长VCSEL和制造方法

    公开(公告)号:US06489175B1

    公开(公告)日:2002-12-03

    申请号:US10026846

    申请日:2001-12-18

    IPC分类号: H01L2100

    摘要: A method of fabricating a vertical cavity surface emitting laser comprising the steps of epitaxially growing a first DBR positioned on a substrate wherein the first DBR is epitaxially grown using MOCVD. The substrate is orientated in an off-axis crystallographic direction which increases the radiative efficiency. A first cladding layer is positioned on the first DBR and an active region is epitaxially grown on the first cladding layer wherein the active region is epitaxially grown using plasma assisted MBE. A second DBR is epitaxially grown on the second cladding layer wherein the second DBR is epitaxially grown using MOCVD. The active region is epitaxially grown using plasma assisted MBE to increase the mole fraction of nitrogen (N) incorporation. The DBR's are grown using MOCVD to improve the electrical performance.

    摘要翻译: 一种制造垂直腔表面发射激光器的方法,包括以下步骤:外延生长位于衬底上的第一DBR,其中使用MOCVD外延生长第一DBR。 基板在偏轴结晶方向取向,这提高了辐射效率。 第一覆层位于第一DBR上,并且在第一覆层上外延生长有源区,其中使用等离子体辅助MBE外延生长有源区。 在第二覆层上外延生长第二DBR,其中使用MOCVD外延生长第二DBR。 使用等离子体辅助MBE外延生长活性区域以增加氮(N)掺入的摩尔分数。 使用MOCVD生长DBR以提高电气性能。

    VCSEL having polarization control and method of making same
    76.
    发明授权
    VCSEL having polarization control and method of making same 失效
    具有偏振控制的VCSEL及其制造方法

    公开(公告)号:US5995531A

    公开(公告)日:1999-11-30

    申请号:US963624

    申请日:1997-11-04

    摘要: A vertical cavity surface emitting laser with polarization control includes a first stack of distributed Bragg reflectors positioned on a substrate with an active region including a first cladding region and a second cladding region positioned on opposite sides of an active area overlying the first stack of distributed Bragg reflectors A second stack of distributed Bragg reflectors is positioned on the active region. The second stack has an ion implantation region formed to control and define a lasing threshold of the laser. The second stack further is formed into a ridge with the ridge being etched into the ion implantation region to form an elongated shape so as to polarize light emitted by the second stack of distributed Bragg reflectors

    摘要翻译: 具有偏振控制的垂直腔表面发射激光器包括位于衬底上的分布式布拉格反射器的第一叠层,其具有有源区域,该有源区域包括第一覆层区域和位于覆盖分布布拉格的第一堆叠层的有源区域相对侧上的第二覆盖区域 反射器第二层分布式布拉格反射器位于有源区上。 第二堆叠具有形成为控制和限定激光器的激光阈值的离子注入区域。 第二堆叠进一步形成为脊,其中脊被蚀刻到离子注入区域中以形成细长形状,以便使由分布布拉格反射器的第二堆叠发射的光偏振