Method for improved die release of a semiconductor device from a wafer
    3.
    发明授权
    Method for improved die release of a semiconductor device from a wafer 失效
    用于从晶片改进半导体器件脱模的方法

    公开(公告)号:US06544898B2

    公开(公告)日:2003-04-08

    申请号:US09891105

    申请日:2001-06-25

    IPC分类号: H01L2100

    CPC分类号: B81C1/00873 B81C2201/014

    摘要: A microelectromechanical (MEMS) device and a method of fabricating a MEMS device are provided. The method of fabricating the MEMS device includes the steps of: etching a die release trench in a primary handle layer of a wafer having the handle layer, an etch-stop layer disposed on the primary handle layer, and a device layer disposed on the etch-stop layer; patterning a release trench in the device layer that is aligned with the release trench in the primary handle layer; temporarily attaching an additional handle layer to the primary handle layer; etching the device layer to define a structure in the device layer; removing the etch-stop layer; and removing the additional handle layer to release the die.

    摘要翻译: 提供了一种微机电(MEMS)器件和MEMS器件的制造方法。 制造MEMS器件的方法包括以下步骤:蚀刻具有手柄层的晶片的主手柄层中的裸片释放沟槽,设置在主手柄层上的蚀刻停止层以及设置在蚀刻上的器件层 停留层 图案化在与主手柄层中的释放沟槽对准的器件层中的释放沟槽; 临时附加手柄层到主手柄层; 蚀刻器件层以限定器件层中的结构; 去除蚀刻停止层; 并移除附加手柄层以释放模具。

    Fiber optic switch package and a method of assembling a fiber optic switch package
    4.
    发明授权
    Fiber optic switch package and a method of assembling a fiber optic switch package 失效
    光纤开关封装和组装光纤开关封装的方法

    公开(公告)号:US06470111B2

    公开(公告)日:2002-10-22

    申请号:US09768926

    申请日:2001-01-24

    IPC分类号: G02B626

    摘要: A fiber optic switch package and method of assembling the same with improved protection of the fibers and simple assembly. A fiber support device has passages that receive optic fibers and help align those fibers with respect to an optic switch component. In addition, the fibers that extend into the interior of the fiber support device are isolated from strains that may occur on the fibers that extend external to the fiber support device.

    摘要翻译: 一种光纤开关封装及其组装方法,具有改进的纤维保护和简单组装。 纤维支撑装置具有接收光纤的通道,并帮助光纤相对于光开关部件对准这些光纤。 此外,延伸到纤维支撑装置内部的纤维与在纤维支撑装置外部延伸的纤维上可能发生的应变隔离。

    Method for testing a ball grid array semiconductor device and a device
for such testing
    6.
    发明授权
    Method for testing a ball grid array semiconductor device and a device for such testing 失效
    用于测试球栅阵列半导体器件的方法和用于这种测试的器件

    公开(公告)号:US5731709A

    公开(公告)日:1998-03-24

    申请号:US592256

    申请日:1996-01-26

    IPC分类号: G01R1/04 G01R31/02

    摘要: A ball grid array semiconductor device (30) includes a plurality of conductive balls (36) and a plurality of conductive castellations (18) around its periphery as redundant electrical connections to a semiconductor die (12). During testing of the device in a test socket (50), the conductive castellations are contacted by test contacts (54). The test contacts do not come in physical contact with the conductive balls. As a result, when testing is performed at elevated temperatures near the melting point of the conductive balls, the conductive balls are not deformed by the test contacts, thereby eliminating cosmetic-defects. Additionally, the absence of physical contact between the conductive balls and the test contacts during testing reduces the likelihood that conductive balls will inadvertently fuse to the test socket or create solder build-up on the test contacts.

    摘要翻译: 球栅阵列半导体器件(30)包括围绕其周边的多个导电球(36)和多个导电堰(18),作为到半导体管芯(12)的冗余电连接。 在测试插座(50)中测试设备期间,导电蓖耳体被测试触点(54)接触。 测试触点不会与导电球物理接触。 结果,当在导电球的熔点附近的高温下进行测试时,导电球不会被测试触点变形,从而消除了美观缺陷。 另外,在测试期间导电球和测试触点之间不存在物理接触会降低导电球将不经意地融合到测试插座或在测试触点上产生焊料积聚的可能性。

    Pad array carrier IC device using flexible tape
    9.
    发明授权
    Pad array carrier IC device using flexible tape 失效
    垫阵列载体IC器件采用软磁带

    公开(公告)号:US5045921A

    公开(公告)日:1991-09-03

    申请号:US457002

    申请日:1989-12-26

    摘要: An electronic pad array carrier IC device for mounting on a printed circuit board (PCB) or flex circuit substrate has a thin, flexible "tape" substrate having a plurality of traces. The substrate may be a polyimide or other material that can withstand relatively large lateral mechanical displacement. An integrated circuit die is mounted in proximity with or on the substrate and electrical connections between the integrated circuit chip and the traces are made by any conventional means. The substrate traces are provided at their outer ends with solder balls or pads for making connections to the PCB. A package body covers the die, which body may be optionally used to stand off the package a set distance from the PCB so that the solder balls will form the proper concave structure. Alternatively, a carrier structure may be provided around the periphery of the substrate to add rigidity during handling, testing and mounting, but which may also provide the stand-off function. The thin, flexible substrate can absorb a relatively large lateral or even vertical mechanical displacement over a rather large package area that may accommodate as few as 20 or as many 500 or more connections. The substrate may be optionally transparent or translucent to permit inspection of the bonds after mounting to the PCB. The PCB or flex circuit may also be transparent or translucent for bond inspection purposes. The solder pads or balls may be joined to a via through the substrate at least partially filled with electrically conductive material to permit back side testing of the carrier before or after mounting of the package to the PCB. Additionally, a heat sink structure may be directly bonded to the die in the pad array carrier IC device.

    摘要翻译: 用于安装在印刷电路板(PCB)或柔性电路基板上的电子焊盘阵列载体IC器件具有具有多个迹线的薄的,柔性的“带”衬底。 衬底可以是聚酰亚胺或能承受相对大的横向机械位移的其他材料。 集成电路管芯安装在衬底附近或衬底上,并且集成电路芯片和迹线之间的电连接通过任何常规方式制成。 衬底迹线在其外端设置有用于连接到PCB的焊球或焊盘。 封装体覆盖模具,该主体可以可选地用于将封装与PCB隔开一定距离,使得焊球将形成适当的凹形结构。 或者,可以在基板的周边周围设置载体结构,以在处理,测试和安装期间增加刚性,但是也可以提供隔离功能。 薄的柔性基底可以在相当大的封装区域上吸收相对较大的侧向或甚至垂直的机械位移,其可以容纳少至20个或多于500个或更多个连接。 衬底可以是任选的透明或半透明的,以允许在安装到PCB之后检查焊接。 PCB或柔性电路也可以是透明或半透明的,用于粘合检查目的。 焊盘或球可以通过至少部分地填充有导电材料的基板连接到通孔,以允许在将封装安装到PCB之前或之后的载体的背侧测试。 此外,散热器结构可以直接接合到焊盘阵列载体IC器件中的管芯。

    Fiber optic switch package and method of assembling a fiber optic switch package for redirecting fiber path
    10.
    发明授权
    Fiber optic switch package and method of assembling a fiber optic switch package for redirecting fiber path 失效
    光纤开关封装和组装光纤开关封装的方法,用于重新定向光纤路径

    公开(公告)号:US06549693B2

    公开(公告)日:2003-04-15

    申请号:US09808637

    申请日:2001-03-14

    IPC分类号: G02B626

    摘要: A fiber optic switch package and method of assembling the same with improved protection of the fibers and simple assembly. The package redirects or bends optical fibers of a 2×2 or 1×2 MEMS optical switch in the package so that instead of exiting the package from four ends, the fibers exit the package from two ends. By exiting the package from two ends, real estate on a printed circuit board is conserved and packages can be located closer to other packages on a printed circuit board.

    摘要翻译: 一种光纤开关封装及其组装方法,具有改进的纤维保护和简单组装。 该封装将2x2或1x2 MEMS光开关的光纤重定向或弯曲在封装中,从而不是从四端离开封装,而是从两端退出封装。 通过从两端退出封装,印刷电路板上的空间被保存,并且封装可以更靠近印刷电路板上的其它封装。