公开(公告)号：US5216807A

公开(公告)日：1993-06-08

申请号：US832653

申请日：1992-02-11

申请人： Tetsuo Yoshizawa ,  Yoshimi Terayama ,  Hiroshi Kondo ,  Takashi Sakaki ,  Shunichi Haga ,  Yasuteru Ichida ,  Masaki Konishi

发明人： Tetsuo Yoshizawa ,  Yoshimi Terayama ,  Hiroshi Kondo ,  Takashi Sakaki ,  Shunichi Haga ,  Yasuteru Ichida ,  Masaki Konishi

IPC分类号： H01L21/48 ,  H01L23/498

CPC分类号： H01L23/49827 ,  H01L21/486 ,  H01L2224/16 ,  H01L2924/01004 ,  H01L2924/01014 ,  H01L2924/0102 ,  H01L2924/01025 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/3025 ,  Y10T29/49208

摘要： A method of producing an electrical connection member includes the steps of applying a carrier containing a light-sensitive resin onto a substrate member, forming holes in portions of the carrier to form a pattern and expose the substrate member in the holes, filling each hole in the carrier with an electrically conductive member, and removing the substrate member from the carrier. With this method, it is possible to easily produce electrical connection members in which high density electrical connecting portions can be provided and in which the reliability and security of electrical connections can be improved.

摘要翻译： 制造电连接部件的方法包括以下步骤：将含有感光树脂的载体施加到基板部件上，在载体的一部分上形成孔以形成图案，并将基板部件暴露在孔中， 所述载体具有导电构件，并且从所述载体移除所述基底构件。 利用这种方法，可以容易地制造可以提供高密度电连接部分并且可以提高电连接的可靠性和安全性的电连接构件。

公开(公告)号：US5283468A

公开(公告)日：1994-02-01

申请号：US43629

申请日：1993-04-08

申请人： Hiroshi Kondo ,  Yoshimi Terayama ,  Takashi Sakaki ,  Shunichi Haga ,  Tetsuo Yoshizawa ,  Yasuteru Ichida ,  Masaki Konishi

发明人： Hiroshi Kondo ,  Yoshimi Terayama ,  Takashi Sakaki ,  Shunichi Haga ,  Tetsuo Yoshizawa ,  Yasuteru Ichida ,  Masaki Konishi

IPC分类号： H01L21/68 ,  H01L23/10 ,  H01L23/498 ,  H01L25/065 ,  H01L23/16 ,  H01L39/02 ,  H01L23/48

CPC分类号： H01L21/568 ,  H01L21/6835 ,  H01L23/10 ,  H01L23/49827 ,  H01L24/96 ,  H01L25/0655 ,  H01L2221/68359 ,  H01L2224/16 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48465 ,  H01L2224/73253 ,  H01L24/45 ,  H01L24/48 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01025 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01041 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/0106 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/10329 ,  H01L2924/15787 ,  H01L2924/16152 ,  H01L2924/1627 ,  H01L2924/16315 ,  H01L2924/3025 ,  H01L2924/351

摘要： An electric circuit apparatus comprises an electrically connecting member including a holding body made of an electrically insulating material and a plurality of electrically conductive members embedded in the holding body. First end portions of the electrically conductive member extend through a first side of the holding body and second end portions of the electrically conductive member extend through the other side of the holding body. A plurality of electric circuit components are connected to the second end portions of the electrically conductive members.

摘要翻译： 电路装置包括电连接构件，其包括由电绝缘材料制成的保持体和嵌入保持体中的多个导电构件。 导电构件的第一端部延伸穿过保持体的第一侧，并且导电构件的第二端部延伸穿过保持体的另一侧。 多个电路部件连接到导电部件的第二端部。

公开(公告)号：US4926549A

公开(公告)日：1990-05-22

申请号：US358269

申请日：1989-05-30

申请人： Tetsuo Yoshizawa ,  Yoshimi Terayama ,  Hiroshi Kondo ,  Takashi Sakaki ,  Shunichi Haga ,  Yasuteru Ichida ,  Masaki Konishi

发明人： Tetsuo Yoshizawa ,  Yoshimi Terayama ,  Hiroshi Kondo ,  Takashi Sakaki ,  Shunichi Haga ,  Yasuteru Ichida ,  Masaki Konishi

IPC分类号： H01R43/00 ,  G01R1/073 ,  H01L21/48 ,  H01L21/60 ,  H01L23/498

CPC分类号： H01L23/49827 ,  H01L21/486 ,  H01L2224/16 ,  H01L2924/01004 ,  H01L2924/01014 ,  H01L2924/0102 ,  H01L2924/01025 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/3025 ,  Y10T29/49208

摘要： A method of producing electrical connection members includes the steps of forming a carrier on a first electrically conductive member, etching holes in portions of the carrier to expose first electrically conductive member in the holes, and etching the portions of the first electrically conductive member which are exposed in the respective holes to form recesses in the first electrically conductive member so that each of the recesses has a diameter larger than the diameter of a corresponding one of the holes. The respective holes formed in the carrier are filled with second electrically conductive members, and then the first electrically conductive member is removed from the carrier. With this method, it is possible to easily produce electrical connection members in which high density electrical connecting portions can be provided and in which the reliability and security of electrical connections can be improved.

公开(公告)号：US5197892A

公开(公告)日：1993-03-30

申请号：US677379

申请日：1991-03-27

申请人： Tetsuo Yoshizawa ,  Yoshimi Tarayama ,  Hiroshi Kondo ,  Takashi Sakaki ,  Shunichi Haga ,  Yasuteru Ichida ,  Masaki Konishi

发明人： Tetsuo Yoshizawa ,  Yoshimi Tarayama ,  Hiroshi Kondo ,  Takashi Sakaki ,  Shunichi Haga ,  Yasuteru Ichida ,  Masaki Konishi

IPC分类号： H01L23/29 ,  H01L23/498 ,  H01L23/552 ,  H05K3/32

CPC分类号： H01L23/552 ,  H01L23/295 ,  H01L23/49827 ,  H01L2224/16 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/32225 ,  H01L2224/32245 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2924/01004 ,  H01L2924/01014 ,  H01L2924/0102 ,  H01L2924/01025 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/01327 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/3025 ,  H05K3/321

摘要： An electric circuit device comprises an electric connecting member comprising a support member made of an electrically insulating material and a plurality of electrically conductive members buried in the support member and being isolated from one another. The ends of one side of the electrically conductive members are exposed at one surface of the support member, and the ends on the other side of the electrically conductive members are exposed at another surface of the support member. A first electric circuit component has connecting regions connected to the one set of ends of the electrically conductive members, and a second electric circuit component has connecting regions connected to the other set of ends of the electrically conductive members. Some of the electrically conductive members can be arranged in a zigzag pattern, and the pattern of the exposed ends of at least one electrically conductive member is wave-like or S-like.

摘要翻译： 电路装置包括电连接构件，电连接构件包括由电绝缘材料制成的支撑构件和埋在支撑构件中并彼此隔离的多个导电构件。 导电构件的一侧的端部在支撑构件的一个表面处露出，并且导电构件的另一侧上的端部在支撑构件的另一个表面处露出。 第一电路部件具有连接到导电构件的一组端部的连接区域，并且第二电路部件具有连接到导电构件的另一组端部的连接区域。 一些导电构件可以以锯齿形图案布置，并且至少一个导电构件的露出端的图案是波浪形或类似S形。

公开(公告)号：US5521520A

公开(公告)日：1996-05-28

申请号：US378933

申请日：1995-01-26

申请人： Tetsuo Yoshizawa ,  Toyohide Miyazaki ,  Hiroshi Kondo ,  Takashi Sakaki ,  Yoshimi Terayama ,  Yasuteru Ichida

发明人： Tetsuo Yoshizawa ,  Toyohide Miyazaki ,  Hiroshi Kondo ,  Takashi Sakaki ,  Yoshimi Terayama ,  Yasuteru Ichida

IPC分类号： H01L21/66 ,  G01R1/04 ,  G01R1/02

CPC分类号： G01R1/04 ,  H01L2224/29339 ,  H01L2224/32245 ,  H01L2224/45144 ,  H01L2224/48247 ,  H01L2224/48465 ,  H01L2224/73265 ,  H01L24/45 ,  H01L24/73 ,  H01L2924/12042 ,  H01L2924/181

摘要： A method for checking a part to be measured, by using an electric connection member having a holder made of electrically insulative material and a plurality of electrically conductive members embedded within the holder with being insulated from each other, both ends of the electrically conductive members being exposed on both surfaces of the holder in such a manner that the both ends are flush with or protruded from the both surfaces of the holder; an electric circuit member having connection portions; and a measured part having connection portions. At least one of the ends of the electrically conductive members exposed on one surface of the holder is electrically connected to one of the connection portions of the electric circuit member and at least one of the ends of the electrically conductive members exposed on the other surface of the holder is electrically connected to one of the connection portions of the measured part. The electric feature and/or system feature of the measured part are measured by using the electric circuit member. The measurements are effected by repeatedly using the same electrically conductive member contributing to the electrical connection for the electric connection member, by plural times.

摘要翻译： 一种用于通过使用具有由电绝缘材料制成的保持器的电连接构件和嵌入在保持器内的多个导电构件彼此绝缘来检查待测量部件的方法，所述导电构件的两端为 暴露在保持器的两个表面上，使得两端与保持器的两个表面齐平或突出; 具有连接部分的电路部件; 以及具有连接部的被测量部。 暴露在保持器的一个表面上的导电构件的至少一个端部电连接到电路构件的一个连接部分，并且导电构件的端部中的至少一个暴露在另一个表面上 保持器电连接到测量部分的一个连接部分。 测量部件的电气特征和/或系统特征通过使用电路部件来测量。 通过重复使用有助于电连接构件的电连接的相同导电构件多次来实现测量。

公开(公告)号：US5058800A

公开(公告)日：1991-10-22

申请号：US358639

申请日：1989-05-30

申请人： Tetsuo Yoshizawa ,  Hiroshi Kondo ,  Takashi Sakaki ,  Masaaki Imaizumi ,  Hideyuki Nishida ,  Yasuteru Ichida ,  Masaki Konishi

发明人： Tetsuo Yoshizawa ,  Hiroshi Kondo ,  Takashi Sakaki ,  Masaaki Imaizumi ,  Hideyuki Nishida ,  Yasuteru Ichida ,  Masaki Konishi

IPC分类号： H01L21/00 ,  H01R4/02 ,  H05K3/32 ,  H05K3/34

CPC分类号： H01L21/67138 ,  H01R4/02 ,  H01L2224/83222 ,  H01L2924/01079 ,  H01L2924/01327 ,  H01L2924/1815 ,  H05K3/321 ,  H05K3/3494

摘要： A method of making an electric circuit device by connecting first and second electrical circuit components through an electrical connecting member. The method comprises effecting internal heating such as supersonic heating, high-frequency induction heating, high-frequency dielectric heating or microwave heating at first connecting regions between the connecting portions of the first electrical circuit component and the first ends of the electrically conductive members of the electrical connecting member. The same internal heating may also be effected at second connecting regions between the connecting portions of the second electrical circuit component and the second ends of the electrically conductive members of the electrical connecting member. In consequence, alloying takes place in first and second connecting regions so as to connect the first and second electrical circuit components through the electrical connecting member.

公开(公告)号：US5606263A

公开(公告)日：1997-02-25

申请号：US620393

申请日：1996-03-22

申请人： Tetsuo Yoshizawa ,  Masaaki Imaizumi ,  Hideyuki Nishida ,  Hiroshi Kondo ,  Takashi Sakaki ,  Yasuteru Ichida ,  Masaki Konishi

发明人： Tetsuo Yoshizawa ,  Masaaki Imaizumi ,  Hideyuki Nishida ,  Hiroshi Kondo ,  Takashi Sakaki ,  Yasuteru Ichida ,  Masaki Konishi

IPC分类号： G01R1/073

CPC分类号： G01R1/07307

摘要： An electrical circuit member comprises an electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material and a plurality of electroconductive members embedded at predetermined intervals within said holding member, each of said plurality of electroconductive members being insulated with said electrically insulating material and also having the ends of said electroconductive member exposed on both surfaces of said holding member; and an electrical circuit part, said electrical circuit part having connecting portions to be connected to said electroconductive member or said wiring pattern exposed on both surfaces of said holding member, and being connected to at least one surface of said holding member.

摘要翻译： 电路构件包括电连接构件，所述电连接构件具有保持构件，所述保持构件包括电绝缘材料和在所述保持构件内以预定间隔嵌入的多个导电构件，所述多个导电构件中的每一个与所述电气绝缘材料绝缘 绝缘材料，并且还使所述导电构件的端部暴露在所述保持构件的两个表面上; 和电路部分，所述电路部分具有连接到所述导电部件或暴露在所述保持部件的两个表面上的所述布线图形的连接部分，并连接到所述保持部件的至少一个表面。

公开(公告)号：US5967804A

公开(公告)日：1999-10-19

申请号：US597383

申请日：1996-02-08

申请人： Tetsuo Yoshizawa ,  Hideyuki Nishida ,  Masaaki Imaizumi ,  Yasuteru Ichida ,  Masaki Konishi ,  Hiroshi Kondo ,  Takashi Sakaki

发明人： Tetsuo Yoshizawa ,  Hideyuki Nishida ,  Masaaki Imaizumi ,  Yasuteru Ichida ,  Masaki Konishi ,  Hiroshi Kondo ,  Takashi Sakaki

IPC分类号： H01L21/60 ,  H01L23/14 ,  H01L23/15 ,  H01L23/31 ,  H01L23/495 ,  H01L23/498 ,  H01R9/09

CPC分类号： H01L24/83 ,  H01L23/145 ,  H01L23/15 ,  H01L23/315 ,  H01L23/49531 ,  H01L23/49827 ,  H01L23/49866 ,  H01L24/29 ,  H01L24/32 ,  H01L2224/16225 ,  H01L2224/29101 ,  H01L2224/29111 ,  H01L2224/29139 ,  H01L2224/2919 ,  H01L2224/29499 ,  H01L2224/32245 ,  H01L2224/45015 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/48465 ,  H01L2224/49171 ,  H01L2224/73253 ,  H01L2224/73265 ,  H01L2224/8319 ,  H01L2224/83439 ,  H01L2224/838 ,  H01L24/45 ,  H01L24/48 ,  H01L24/49 ,  H01L2924/00015 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01025 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01033 ,  H01L2924/01041 ,  H01L2924/01042 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01076 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/0132 ,  H01L2924/01327 ,  H01L2924/014 ,  H01L2924/0665 ,  H01L2924/0781 ,  H01L2924/15174 ,  H01L2924/15312 ,  H01L2924/1532 ,  H01L2924/15738 ,  H01L2924/1576 ,  H01L2924/16152 ,  H01L2924/181 ,  H01L2924/20752 ,  H01L2924/3025 ,  H01L2924/351

摘要： An electrical connecting member for use in an electrical connection for connecting a first electrical circuit component on a side thereof and a second electrical circuit component on another side thereof, said electrical connecting member comprising: a plurality of layers each layer having a plurality of conductive members and an insulative holder for holding said plurality of conductive members, wherein said plurality of conductive members are arranged such that each conductive member has one end exposed on one surface of said layer and another end exposed on another surface of said layer, and makes electric contact with at least one of a conductive member immediately below and a conductive member immediately above, but does not contact conductive members laterally offset thereof, and wherein said conductive members have diameters that are substantially equal to each other, between said one surface of said layer and said another surface of said layer; and said plurality of layers are stacked such that said plurality of conductive members in one layer are connected with said plurality of conductive members in another layer, and are held by said insulative holder with a different pitch shifted slightly from said plurality of conductive members in another layer. It is a further object to provide an electrical member and an electrical circuit device which employ such an electrical connecting member.

摘要翻译： 一种用于电连接的电连接构件，用于连接其一侧上的第一电路部件和在其另一侧上的第二电路部件，所述电连接构件包括：多个层，每层具有多个导电构件 以及用于保持所述多个导电构件的绝缘保持器，其中所述多个导电构件布置成使得每个导电构件具有在所述层的一个表面上暴露的一端，而在所述层的另一表面上暴露的另一端，并且进行电接触 其中紧邻在下方的导电部件中的至少一个和紧接在上方的导电部件，但不接触横向偏移的导电部件，并且其中所述导电部件具有在所述层的所述一个表面和 所述层的另一表面; 并且所述多个层被堆叠，使得一层中的所述多个导电构件与另一层中的所述多个导电构件连接，并且由所述绝缘保持器以与另一层中的所述多个导电构件稍微偏移的不同节距保持 层。 另一个目的是提供一种使用这种电连接构件的电气构件和电路装置。

公开(公告)号：US5392361A

公开(公告)日：1995-02-21

申请号：US137804

申请日：1993-10-19

申请人： Masaaki Imaizumi ,  Eiji Nishimori ,  Yasuteru Ichida ,  Naoki Ayata

发明人： Masaaki Imaizumi ,  Eiji Nishimori ,  Yasuteru Ichida ,  Naoki Ayata

IPC分类号： G03F9/00 ,  G01B11/00 ,  G06T7/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/68 ,  G06K9/00

CPC分类号： G03F9/70 ,  G06T7/0042 ,  G06T2207/30148 ,  Y10S706/90

摘要： A mark position detecting method and apparatus, suitably usable in a semiconductor device manufacturing exposure apparatus, called a stepper, prints images of a pattern of a reticle upon different shot areas on a semiconductor wafer, and aligns the reticle and the wafer. In this method, fuzzy reasoning is made by using, for example, a membership function which empirically represents the relationship between a mark signal and an alignment result. By using a conclusion of the fuzzy reasoning, the position of the mark is detected. Thus, the alignment accuracy can be improved significantly.

摘要翻译： 称为步进机的适用于半导体装置制造曝光装置的标记位置检测方法和装置在半导体晶片上的不同拍摄区域上印刷标线图案，并对准标线片和晶片。 在该方法中，通过使用例如经验地表示标记信号和对准结果之间的关系的隶属函数来进行模糊推理。 通过使用模糊推理的结论，检测到标记的位置。 因此，可以显着提高对准精度。

公开(公告)号：US5847451A

公开(公告)日：1998-12-08

申请号：US721793

申请日：1996-09-25

申请人： Toru Ohtaki ,  Yasuteru Ichida ,  Yasushi Takeuchi

发明人： Toru Ohtaki ,  Yasuteru Ichida ,  Yasushi Takeuchi

IPC分类号： H01L23/12 ,  H01L23/64 ,  H05K1/00 ,  H05K1/02 ,  H05K1/16 ,  H05K3/34 ,  H05K3/46 ,  H01L23/48 ,  H01L23/34 ,  H01L29/00 ,  H01L29/053

CPC分类号： H01L23/642 ,  H01L23/645 ,  H05K1/0233 ,  H05K1/165 ,  H01L2224/49175 ,  H01L2224/4943 ,  H01L24/48 ,  H01L24/49 ,  H01L2924/00014 ,  H01L2924/19041 ,  H01L2924/30107 ,  H01L2924/3011 ,  H01L2924/3025 ,  H05K1/0298 ,  H05K1/162 ,  H05K2201/09263 ,  H05K2201/093 ,  H05K2201/09336 ,  H05K2201/09663 ,  H05K2201/09772 ,  H05K2201/1006 ,  H05K2201/10689 ,  H05K3/3421 ,  Y10S257/924

摘要： In a multi-layered printed circuit board on which an LSI having a plurality of power supply pins and a plurality of signal pins is mounted, and a grid array package which adopts the printed circuit board, some or all of the plurality of power supply pins are connected to a power supply pattern via an inductance pattern, thereby reducing generation of radiation noise.

摘要翻译： 在其上安装有多个电源引脚和多个信号引脚的LSI的多层印刷电路板和采用该印刷电路板的栅格阵列封装中，多个电源引脚中的一些或全部 通过电感图案连接到电源图案，从而减少辐射噪声的产生。