EMBEDDING MAGNETIC MATERIAL IN A CORED OR CORELESS SEMICONDUCTOR PACKAGE

    公开(公告)号:US20190355675A1

    公开(公告)日:2019-11-21

    申请号:US15982652

    申请日:2018-05-17

    申请人: Intel Corporation

    摘要: Techniques for fabricating a semiconductor package having magnetic materials embedded therein are described. For one technique, fabrication of package includes: forming a pad and a conductive line on a build-up layer; forming a raised pad structure on the build-up layer, the raised pad comprising a pillar structure on the pad; encapsulating the conductive line and the raised pad structure in a magnetic film comprising one or more magnetic fillers; planarizing a top surface of the magnetic film until top surfaces of the raised pad structure and the magnetic film are co-planar; depositing a primer layer on the top surfaces; removing one or more portions of the primer layer above the raised pad structure to create an opening; and forming a via in the opening on the raised pad structure. The primer layer may comprise one or more of a build-up layer, a photoimageable dielectric layer, and a metal mask.