Optical waveguide and method for making the same
    7.
    发明授权
    Optical waveguide and method for making the same 失效
    光波导及其制作方法

    公开(公告)号:US4691983A

    公开(公告)日:1987-09-08

    申请号:US660144

    申请日:1984-10-12

    摘要: Optical waveguide and the method for making the same, in which a semiconductor laser diode and an optical isolator are formed on one substrate in a monolithic manner. At the moment, a semiconductor laser diode is made by a III-V compound semiconductor crystal, such as GaAs, InP, etc., and an optical isolator is made of iron garnet to fabricate these in monolithic, and this invention was established by developing the technology to monocrystallize at least a small part of the garnet film containing no iron which is deposited on the semiconductor substrate and to use this as the seed crystal for the said phase epitaxial growth of the iron garnet film which forms the iron garnet optical waveguide.

    摘要翻译: 光波导及其制造方法,其中半导体激光二极管和光隔离器以单片方式形成在一个基板上。 此时,半导体激光二极管由GaAs,InP等III-V族化合物半导体晶体制成,光隔离器由铁石榴石制成,以单片制造,本发明是通过开发 将沉积在半导体衬底上的不含铁的石榴石薄膜的至少一部分单晶化并将其用作形成铁石榴石光波导的铁石榴石膜的所述相外延生长的晶种的技术。