System for encapsulating microelectronic devices
    9.
    发明授权
    System for encapsulating microelectronic devices 失效
    用于封装微电子器件的系统

    公开(公告)号:US5932254A

    公开(公告)日:1999-08-03

    申请号:US12079

    申请日:1998-01-22

    IPC分类号: H01L21/56 B29C45/14

    CPC分类号: H01L21/565 H01L2924/0002

    摘要: A fixture for encapsulating microelectronic devices includes a structure defining a device-receiving pocket and a well communicating with the pocket so that the passage and well define an interior space whereby the pocket is disposed above the well when the structure is in a first orientation and the well is disposed above the pocket when the structure is in a second orientation. The fixture also includes an element for sealing the interior space and a port for connecting the sealed interior space to an evacuation device.

    摘要翻译: 用于封装微电子器件的固定器包括限定器件接收凹部和与凹穴连通的阱的结构,使得通道和阱限定内部空间,由此当结构处于第一取向时口袋设置在阱上方,并且 当结构处于第二方向时,井被设置在口袋上方。 固定装置还包括用于密封内部空间的元件和用于将密封的内部空间连接到排气装置的端口。