Microelectronic encapsulation methods and equipment
    6.
    发明授权
    Microelectronic encapsulation methods and equipment 失效
    微电子封装方法和设备

    公开(公告)号:US5766987A

    公开(公告)日:1998-06-16

    申请号:US532235

    申请日:1995-09-22

    IPC分类号: H01L21/56 H01L21/44

    CPC分类号: H01L21/565 H01L2924/0002

    摘要: Microelectronic assemblies such as semiconductor chip assemblies are encapsulated. During encapsulation, the terminals carried by a dielectric layer in each assembly, and the bottom surface of the semiconductor chip in each assembly are protected by covering layers. The covering layers confine the liquid encapsulant and prevent contamination of the terminals and chip bottom surfaces. The encapsulation process may be conducted by using a tilting fixture. The liquid encapsulant and the assemblies are placed into the fixture, the fixture is closed and evacuated, and the encapsulant is then poured onto the assemblies while maintaining the fixture under vacuum. The fixture is then pressurized and maintained under pressure during cure of the encapsulant.

    摘要翻译: 诸如半导体芯片组件的微电子组件被封装。 在封装期间,每个组件中由介电层承载的端子和每个组件中的半导体芯片的底表面由覆盖层保护。 覆盖层限制液体密封剂,并防止端子和芯片底面的污染。 封装过程可以通过使用倾斜夹具进行。 将液体密封剂和组件放入固定装置中,将固定装置关闭并抽真空,然后将密封剂倒入组件上,同时将固定装置保持在真空状态。 然后将固定装置加压并在密封剂固化期间保持压力。

    System for encapsulating microelectronic devices
    7.
    发明授权
    System for encapsulating microelectronic devices 失效
    用于封装微电子器件的系统

    公开(公告)号:US5932254A

    公开(公告)日:1999-08-03

    申请号:US12079

    申请日:1998-01-22

    IPC分类号: H01L21/56 B29C45/14

    CPC分类号: H01L21/565 H01L2924/0002

    摘要: A fixture for encapsulating microelectronic devices includes a structure defining a device-receiving pocket and a well communicating with the pocket so that the passage and well define an interior space whereby the pocket is disposed above the well when the structure is in a first orientation and the well is disposed above the pocket when the structure is in a second orientation. The fixture also includes an element for sealing the interior space and a port for connecting the sealed interior space to an evacuation device.

    摘要翻译: 用于封装微电子器件的固定器包括限定器件接收凹部和与凹穴连通的阱的结构,使得通道和阱限定内部空间,由此当结构处于第一取向时口袋设置在阱上方,并且 当结构处于第二方向时,井被设置在口袋上方。 固定装置还包括用于密封内部空间的元件和用于将密封的内部空间连接到排气装置的端口。