NORMAL TEMPERATURE BONDING DEVICE AND NORMAL TEMPERATURE BONDING METHOD
    22.
    发明公开
    NORMAL TEMPERATURE BONDING DEVICE AND NORMAL TEMPERATURE BONDING METHOD 审中-公开
    常温结合装置和常温结合法

    公开(公告)号:EP2883644A1

    公开(公告)日:2015-06-17

    申请号:EP13835075.6

    申请日:2013-07-30

    Abstract: The purpose of the present invention is to suppress adhering of impurities to substrates and intermediate layers during normal temperature bonding of substrates. This normal temperature bonding device is provided with: a vacuum vessel (1); a first holding mechanism (3a) that holds a first substrate (4); a second holding mechanism (3b) that holds a second substrate (4); a beam source (6) that outputs an activated beam that irradiates surfaces to be bonded of the first substrate (4) and the second substrate (4); and a pressure bonding mechanism (5) that aligns and bonds the surfaces to be bonded of both substrates (4) to which a target material has been made to adhere. At least one of the vacuum vessel (1), the first and second holding mechanisms (3a, 3b), the beam source (6) and the pressure bonding mechanism (5) is formed from or covered with a first material that is not easily sputtered by the activated beam (6) or that does not inhibit the function of devices formed by bonding the two substrates (4) even when present on the surfaces to be bonded.

    Abstract translation: 本发明的目的是在衬底的正常温度粘合期间抑制杂质粘附到衬底和中间层。 该常温接合装置具备:真空容器(1); 保持第一基板(4)的第一保持机构(3a); 保持第二基板(4)的第二保持机构(3b); 光源(6),其输出照射第一基板(4)和第二基板(4)的被粘接面的激活光; 以及压接机构(5),其对准并粘接已粘贴有目标材料的两基板(4)的被粘接面。 真空容器(1),第一和第二保持机构(3a,3b),束源(6)和压力粘合机构(5)中的至少一个由不容易形成的第一材料形成或用第一材料覆盖 (6)溅射,或者即使存在于待粘合的表面上也不会抑制通过粘合两个基板(4)而形成的装置的功能。

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