Piezoelectric actuator, liquid ejection head, method for manufacturing the same, and image forming apparatus
    65.
    发明专利
    Piezoelectric actuator, liquid ejection head, method for manufacturing the same, and image forming apparatus 有权
    压电致动器,液体喷射头,其制造方法和图像形成装置

    公开(公告)号:JP2007227408A

    公开(公告)日:2007-09-06

    申请号:JP2005359276

    申请日:2005-12-13

    Inventor: MITA TAKESHI

    Abstract: PROBLEM TO BE SOLVED: To provide a piezoelectric actuator in which preferable liquid ejection is achieved by preventing diffusion of metal elements contained in a substrate into a piezoelectric element, thereby ensuring performance and reliability of the piezoelectric element; and to provide a method for manufacturing a liquid ejection head, a liquid ejection head, and an image forming apparatus. SOLUTION: Ferrite-based heat resistant SUS containing 18 wt.% or more of Cr and 2.5 wt.% or more of Al is applied to a vibration plate 56. When it is heat-treated at 900-1,100°C, a metal oxide film 66 composed of a chromium oxide film 62 and an aluminum oxide film 64 is deposited on the surface of the vibration plate 56. Even if a piezoelectric element 58 is formed on the metal oxide film 66 and annealed at 600-800°C, diffusion of iron contained in the vibration plate 56 is prevented into the piezoelectric element 58. Furthermore, the vibration plate 56 is prevented from warping by matching the coefficient of linear expansion between the vibration plate 56 and the piezoelectric element 58. COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种压电致动器,其中通过防止包含在基板中的金属元素扩散到压电元件中来实现优选的液体喷射,从而确保压电元件的性能和可靠性; 并且提供一种用于制造液体喷射头,液体喷射头和图像形成装置的方法。 解决方案:将含有18重量%以上的Cr和2.5重量%以上的Al的铁素体系耐热SUS施加到振动板56.当在900-1100℃下进行热处理时, 由氧化铬膜62和氧化铝膜64组成的金属氧化物膜66沉积在振动板56的表面上。即使在金属氧化物膜66上形成压电元件58并在600-800°退火 C中,防止振动板56中所含的铁的扩散进入压电元件58.此外,通过使振动板56与压电元件58之间的线性膨胀系数匹配,防止了振动板56翘曲。 版权所有(C)2007,JPO&INPIT

    Outer electrode forming method
    67.
    发明专利
    Outer electrode forming method 有权
    外电极形成方法

    公开(公告)号:JP2006156811A

    公开(公告)日:2006-06-15

    申请号:JP2004347049

    申请日:2004-11-30

    Abstract: PROBLEM TO BE SOLVED: To provide a method of forming outer electrodes of an electronic component which stably forms the electrodes. SOLUTION: The outer electrode forming method comprises a step of coating the side face 30a of a chip 30 constituting the electronic component with conductor paste 20 in the opposite direction to the side face 30a to form the electrode 301a, a step of coating the opposite side face 30b of the chip 30 to the side face 30a with conductive paste 20 in the opposite direction to the side face 30b to form the electrode 301b, a step of forming an electrode 301c on the adjacent bottom of the chip 30 to the side faces 30a, 30b to tie an electrode 301a and the electrode 301b, and a step of drying the chip 30 to form an outer electrode 301 composed of electrodes 301a, 301b and 301c. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 解决的问题:提供一种形成电极的电子部件的外部电极的形成方法。 解决方案:外电极形成方法包括以与侧面30a相反的方向将导体膏20涂覆构成电子部件的芯片30的侧面30a以形成电极301a的步骤,涂覆步骤 芯片30的与侧面30a的相对侧面30b与导电膏20朝向侧面30b的相反方向形成电极301b,在芯片30的相邻底部上形成电极301c的步骤 侧面30a,30b连接电极301a和电极301b,以及干燥芯片30以形成由电极301a,301b和301c组成的外部电极301的步骤。 版权所有(C)2006,JPO&NCIPI

    Wiring circuit board
    68.
    发明专利
    Wiring circuit board 有权
    接线电路板

    公开(公告)号:JP2006120863A

    公开(公告)日:2006-05-11

    申请号:JP2004307265

    申请日:2004-10-21

    Abstract: PROBLEM TO BE SOLVED: To provide a wiring circuit board including a terminal with molten metal surely located on the terminal to be accurately connectable with an external terminal. SOLUTION: A base insulation layer 3 is formed on a support substrate 2. A conductor pattern 4 is formed on the base insulation layer 3, so that it integrally includes a plurality of wires 4a, 4b, 4c and 4d, each magnetic head connection terminal 7 and each external connection terminal 8, and a first through hole 9 is formed on the external connection terminal 8. Then, after a cover insulation layer 10 is formed, a third through hole 20 is formed on the support substrate 2, and a second through hole 19 is formed on the base insulation layer 3 so that they communicate with the first through hole 9, respectively. Thus, when each external connection terminal 8 is to be connected with an external terminal 23, it can be connected while checking the location of a solder ball 21 through the respective through holes. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种布线电路板,其包括具有可靠地位于端子上的熔融金属的端子,以能够与外部端子精确地连接。 解决方案:基底绝缘层3形成在支撑基板2上。导体图案4形成在基底绝缘层3上,使得其整体地包括多根电线4a,4b,4c和4d,每个磁性 头连接端子7和每个外部连接端子8以及第一通孔9形成在外部连接端子8上。然后,在形成覆盖绝缘层10之后,在支撑基板2上形成第三通孔20, 并且在基底绝缘层3上形成第二通孔19,使得它们分别与第一通孔9连通。 因此,当每个外部连接端子8与外部端子23连接时,可以通过各个通孔检查焊球21的位置来连接。 版权所有(C)2006,JPO&NCIPI

    Manufacturing method for liquid jet head
    69.
    发明专利
    Manufacturing method for liquid jet head 有权
    液体喷射头制造方法

    公开(公告)号:JP2006102942A

    公开(公告)日:2006-04-20

    申请号:JP2004287893

    申请日:2004-09-30

    Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method for a liquid jet head which can surely prevent discharge defects such as nozzle clogging caused by foreign matters. SOLUTION: The manufacturing method includes a process of forming piezoelectric elements via a diaphragm at one face side of a passage forming substrate and also forming through-holes by removing the diaphragm of a region which becomes a communication part; a process of sealing the through-holes by a predetermined metal layer by forming the metal layer at a surface of the piezoelectric element side of the passage forming substrate, and at the same time of forming lead electrodes by patterning the metal layer of regions corresponding to the piezoelectric elements; a process of joining a reservoir forming substrate with a reservoir part formed therein to the one face side of the passage forming substrate; a process of forming pressure generation chambers and the communication part by wet etching the passage forming substrate from the other face side until the diaphragm and the metal layer are exposed; and a process of making the reservoir part and the communication part communicate with each other by removing the metal layer by etching. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种能够可靠地防止由异物引起的喷嘴堵塞等排出缺陷的液体喷射头的制造方法。 解决方案:制造方法包括在通路形成基板的一个正面侧通过隔膜形成压电元件的工序,通过除去成为连通部的区域的隔膜,形成贯通孔的工序; 通过在通路形成用基板的压电元件侧的表面形成金属层,通过规定的金属层来密封贯通孔的工序,在形成引线电极的同时,形成与 压电元件; 将储存器形成基板与形成在其中的储存部接合到通道形成基板的一个面侧的工序; 通过从另一面侧湿式蚀刻通道形成基板直到膜片和金属层露出来形成压力产生室和连通部的工艺; 以及通过蚀刻去除金属层,使储存部和连通部彼此连通的工序。 版权所有(C)2006,JPO&NCIPI

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