公开(公告)号：US12191626B1

公开(公告)日：2025-01-07

申请号：US17444273

申请日：2021-08-02

Applicant: KYOCERA SLD Laser, Inc.

Inventor： Melvin McLaurin

IPC: H01S5/02 ,  H01L21/78 ,  H01L29/20 ,  H01L29/778 ,  H01L29/861 ,  H01L29/872 ,  H01L33/00 ,  H01L33/24 ,  H01L33/32 ,  H01L33/62 ,  H01S5/00 ,  H01S5/02255 ,  H01S5/028 ,  H01S5/183 ,  H01S5/42

Abstract: Horizontal Cavity Surface Emitting Lasers (HCSELs) with angled facets may be fabricated by a chemical or physical etching process, and the epitaxially grown semiconductor device layers may be transferred through a selective etch and release process from their original epitaxial substrate to a carrier wafer.

公开(公告)号：US20230238777A1

公开(公告)日：2023-07-27

申请号：US18095891

申请日：2023-01-11

Applicant: KYOCERA SLD Laser, Inc.

Inventor： Melvin McLaurin ,  James W. Raring ,  Alexander Sztein ,  Po Shan Hsu

IPC: H01S5/343 ,  H01S5/22 ,  H01S5/02 ,  H01S5/20 ,  H01S5/32 ,  H01S5/00

CPC classification number: H01S5/34333 ,  H01S5/22 ,  H01S5/0215 ,  H01S5/0217 ,  H01S5/2081 ,  H01S5/3211 ,  H01S5/32025 ,  H01S5/3202 ,  H01S5/0087 ,  H01S5/2009 ,  H01S5/4043

Abstract: A method for manufacturing a laser diode device includes providing a substrate having a surface region and forming epitaxial material overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active layer region. The epitaxial material is patterned to form a plurality of dice, each of the dice corresponding to at least one laser device, characterized by a first pitch between a pair of dice, the first pitch being less than a design width. Each of the plurality of dice are transferred to a carrier wafer such that each pair of dice is configured with a second pitch between each pair of dice, the second pitch being larger than the first pitch.

公开(公告)号：US11710944B2

公开(公告)日：2023-07-25

申请号：US17477016

申请日：2021-09-16

Applicant: KYOCERA SLD Laser, Inc.

Inventor： Melvin McLaurin ,  Alexander Sztein ,  Po Shan Hsu ,  Eric Goutain ,  James W. Raring ,  Paul Rudy ,  Vlad Novotny

IPC: H01S5/0234 ,  H01L23/00 ,  H01S5/40 ,  H01L33/00 ,  H01S5/323 ,  H01S5/02 ,  H01S5/22

CPC classification number: H01S5/4093 ,  H01L24/83 ,  H01L24/95 ,  H01L33/0045 ,  H01L33/0075 ,  H01S5/0203 ,  H01S5/0217 ,  H01S5/0234 ,  H01S5/32341 ,  H01L2224/16225 ,  H01L2224/48091 ,  H01L2224/48465 ,  H01L2924/00014 ,  H01L2924/16152 ,  H01S5/0216 ,  H01S5/2201 ,  H01S5/4025 ,  H01L2224/48091 ,  H01L2924/00014 ,  H01L2224/48465 ,  H01L2224/48091 ,  H01L2924/00 ,  H01L2924/00014 ,  H01L2224/45099

Abstract: A multi-wavelength light emitting device is manufactured by forming first and second epitaxial materials overlying first and second surface regions. The first and second epitaxial materials are patterned to form a plurality of first and second epitaxial dice. At least one of the first plurality of epitaxial dice and at least one of the second plurality of epitaxial dice are transferred from first and second substrates, respectively, to a carrier wafer by selectively etching a release region, separating from the substrate each of the epitaxial dice that are being transferred, and selectively bonding to the carrier wafer each of the epitaxial dice that are being transferred. The transferred first and second epitaxial dice are processed on the carrier wafer to form a plurality of light emitting devices capable of emitting at least a first wavelength and a second wavelength.

公开(公告)号：US11502753B2

公开(公告)日：2022-11-15

申请号：US17401118

申请日：2021-08-12

Applicant: KYOCERA SLD Laser, Inc.

Inventor： Melvin McLaurin ,  James W. Raring ,  Paul Rudy ,  Vlad Novotny

IPC: H04B10/116 ,  H01S5/343 ,  G02B27/09 ,  H04B10/50 ,  H01S5/40 ,  H01S5/02251 ,  H01S5/00 ,  H01S5/22 ,  H04B10/572 ,  H01L33/00 ,  H04B10/564 ,  H04B10/524 ,  H04B10/60 ,  H01S5/02212 ,  H01S5/02 ,  H01S5/10 ,  H01S5/32 ,  H01S5/02216 ,  H01S5/20 ,  H01S5/026 ,  H01S5/042 ,  H04B10/114 ,  H01S5/02326 ,  H01S5/02345

Abstract: A smart light source configured for visible light communication. The light source includes a controller comprising a modem configured to receive a data signal and generate a driving current and a modulation signal based on the data signal. Additionally, the light source includes a light emitter configured as a pump-light device to receive the driving current for producing a directional electromagnetic radiation with a first peak wavelength in the ultra-violet or blue wavelength regime modulated to carry the data signal using the modulation signal. Further, the light source includes a pathway configured to direct the directional electromagnetic radiation and a wavelength converter optically coupled to the pathway to receive the directional electromagnetic radiation and to output a white-color spectrum. Furthermore, the light source includes a beam shaper configured to direct the white-color spectrum for illuminating a target of interest and transmitting the data signal.

公开(公告)号：US20220255623A1

公开(公告)日：2022-08-11

申请号：US17667303

申请日：2022-02-08

Applicant: KYOCERA SLD Laser, Inc.

Inventor： Melvin McLaurin ,  James W. Raring ,  Paul Rudy ,  Vlad Novotny

IPC: H04B10/116 ,  H01S5/343 ,  G02B27/09 ,  H04B10/50 ,  H01S5/40 ,  H01S5/02251 ,  H01S5/00

Abstract: A packaged integrated white light source configured for illumination and communication or sensing comprises one or more laser diode devices. An output facet configured on the laser diode device outputs a laser beam of first electromagnetic radiation with a first peak wavelength. The first wavelength from the laser diode provides at least a first carrier channel for a data or sensing signal.

公开(公告)号：US20220252726A1

公开(公告)日：2022-08-11

申请号：US17690200

申请日：2022-03-09

Applicant: KYOCERA SLD Laser, Inc.

Inventor： James W. Raring ,  Melvin McLaurin ,  Paul Rudy ,  Vlad Novotny

IPC: G01S17/10 ,  G01S17/89 ,  G01S7/481 ,  F21K9/64 ,  H01S5/00 ,  H01S5/024 ,  F21V29/70 ,  G01S7/487 ,  H01S5/02212 ,  H01S5/343 ,  H01S5/40 ,  G01S17/86 ,  G01S17/931 ,  H01S5/02251 ,  H01S5/02325

Abstract: A distance detecting system for use in mobile machines comprises a gallium and nitrogen containing laser diode disposed within a light of a mobile machine. The gallium and nitrogen containing laser diode is configured to emit a first light with a first peak wavelength. A wavelength conversion member is configured to produce a white light. A first sensing light signal is based on the first peak wavelength. One or more optical elements are configured to direct at least partially the white light to illuminate one or more target objects or areas and to transmit respectively the first sensing light signal for sensing at least one remote point. A detector is configured to detect reflected signals of the first sensing light signal to determine coordinates of the at least one remote point.

公开(公告)号：US20210376928A1

公开(公告)日：2021-12-02

申请号：US17401118

申请日：2021-08-12

Applicant: KYOCERA SLD Laser, Inc.

Inventor： Melvin McLaurin ,  James W. Raring ,  Paul Rudy ,  Vlad Novotny

IPC: H04B10/116 ,  H01S5/343 ,  G02B27/09 ,  H04B10/50 ,  H01S5/40 ,  H01S5/02251 ,  H01S5/00

Abstract: A smart light source configured for visible light communication. The light source includes a controller comprising a modem configured to receive a data signal and generate a driving current and a modulation signal based on the data signal. Additionally, the light source includes a light emitter configured as a pump-light device to receive the driving current for producing a directional electromagnetic radiation with a first peak wavelength in the ultra-violet or blue wavelength regime modulated to carry the data signal using the modulation signal. Further, the light source includes a pathway configured to direct the directional electromagnetic radiation and a wavelength converter optically coupled to the pathway to receive the directional electromagnetic radiation and to output a white-color spectrum. Furthermore, the light source includes a beam shaper configured to direct the white-color spectrum for illuminating a target of interest and transmitting the data signal.

公开(公告)号：US12126143B2

公开(公告)日：2024-10-22

申请号：US17320856

申请日：2021-05-14

Applicant: KYOCERA SLD Laser, Inc.

Inventor： Melvin McLaurin ,  James W. Raring

IPC: H01S5/343 ,  H01S5/02 ,  H01S5/0234 ,  H01S5/042 ,  H01S5/22 ,  H01S5/323 ,  H01S5/20 ,  H01S5/30

CPC classification number: H01S5/34333 ,  H01S5/0206 ,  H01S5/021 ,  H01S5/0213 ,  H01S5/0215 ,  H01S5/0216 ,  H01S5/0217 ,  H01S5/0218 ,  H01S5/0234 ,  H01S5/0425 ,  H01S5/22 ,  H01S5/2214 ,  H01S5/222 ,  H01S5/32308 ,  H01S5/04254 ,  H01S5/2009 ,  H01S5/2031 ,  H01S5/30 ,  H01S2301/173

Abstract: Methods for fabricating ultraviolet laser diode devices include providing substrate members comprising gallium and nitrogen or aluminum and nitrogen, forming an epitaxial material overlying a surface region of the substrate members, patterning the epitaxial material to form epitaxial mesa regions, depositing a bond media on at least one of the epitaxial mesa regions, bonding the bond media on at least one of the epitaxial mesa regions to a handle substrate, subjecting the sacrificial layer to an energy source to initiate release of the substrate member and transfer the at least one of the epitaxial mesa regions to the handle substrate, and processing the at least one of the epitaxial mesa regions to form the ultraviolet laser diode device.

公开(公告)号：US11949212B2

公开(公告)日：2024-04-02

申请号：US17131132

申请日：2020-12-22

Applicant: KYOCERA SLD Laser, Inc.

Inventor： Melvin McLaurin ,  James W. Raring

IPC: H01L33/00 ,  C30B29/40 ,  H01L21/02 ,  H01L21/784 ,  H01L33/12 ,  H01L33/32 ,  H01S5/02 ,  H01S5/02345 ,  H01S5/042 ,  H01S5/22 ,  H01S5/343

CPC classification number: H01S5/34333 ,  C30B29/406 ,  H01L21/02389 ,  H01L21/0254 ,  H01L21/0262 ,  H01L21/02631 ,  H01L21/02647 ,  H01L21/784 ,  H01L33/0045 ,  H01L33/0075 ,  H01L33/0093 ,  H01L33/12 ,  H01L33/32 ,  H01S5/0217 ,  H01S5/02345 ,  H01S5/0425 ,  H01S5/22 ,  H01S2304/02 ,  H01S2304/04

Abstract: The present disclosure provides a method and structure for producing large area gallium and nitrogen engineered substrate members configured for the epitaxial growth of layer structures suitable for the fabrication of high performance semiconductor devices. In a specific embodiment the engineered substrates are used to manufacture gallium and nitrogen containing devices based on an epitaxial transfer process wherein as-grown epitaxial layers are transferred from the engineered substrate to a carrier wafer for processing. In a preferred embodiment, the gallium and nitrogen containing devices are laser diode devices operating in the 390 nm to 425 nm range, the 425 nm to 485 nm range, the 485 nm to 550 nm range, or greater than 550 nm.

公开(公告)号：US11862939B1

公开(公告)日：2024-01-02

申请号：US17843104

申请日：2022-06-17

Applicant: KYOCERA SLD Laser, Inc.

Inventor： James W. Raring ,  Melvin McLaurin ,  Paul Rudy ,  Po Shan Hsu ,  Alexander Sztein

IPC: H01S5/343 ,  H01S5/02 ,  H01S5/323 ,  H01S5/22 ,  H01S5/042 ,  H01S5/0234 ,  H01S5/20 ,  H01S5/30

CPC classification number: H01S5/34333 ,  H01S5/021 ,  H01S5/0206 ,  H01S5/0213 ,  H01S5/0215 ,  H01S5/0216 ,  H01S5/0217 ,  H01S5/0218 ,  H01S5/0234 ,  H01S5/0425 ,  H01S5/22 ,  H01S5/222 ,  H01S5/2214 ,  H01S5/32308 ,  H01S5/04253 ,  H01S5/04254 ,  H01S5/2009 ,  H01S5/2031 ,  H01S5/30 ,  H01S2301/173 ,  H01S2302/00

Abstract: An intermediate ultraviolet laser diode device includes a gallium and nitrogen containing substrate member comprising a surface region, a release material overlying the surface region, an n-type gallium and nitrogen containing material; an active region overlying the n-type gallium and nitrogen containing material; a p-type gallium and nitrogen containing material; a first transparent conductive oxide material overlying the p-type gallium and nitrogen containing material; and an interface region overlying the first transparent conductive oxide material.