SEMICONDUCTOR DEVICES WITH FLEXIBLE SPACER
    5.
    发明公开

    公开(公告)号:US20240047285A1

    公开(公告)日:2024-02-08

    申请号:US17883153

    申请日:2022-08-08

    CPC classification number: H01L23/14 H01L21/52

    Abstract: A semiconductor device assembly includes a semiconductor die, a substrate, and a spacer directly coupled to the substrate. The spacer includes a flexible main body and a support structure embedded in the flexible main body, wherein the support structure has a higher stiffness than the flexible main body. The spacer carries the semiconductor die. The flexible main body of the spacer mitigates the effects of thermomechanical stress, for example caused by a mismatch between the coefficient of thermal expansion of the semiconductor die and the substrate. The embedded support structure provides strength needed to support the semiconductor die during assembly.

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