公开(公告)号：US08414980B2

公开(公告)日：2013-04-09

申请号：US12545664

申请日：2009-08-21

申请人： Tien-Hsiang Hsueh ,  Mien-Win Wu ,  Chi-Fong Ai

发明人： Tien-Hsiang Hsueh ,  Mien-Win Wu ,  Chi-Fong Ai

IPC分类号： C08J7/18

CPC分类号： B05D3/142 ,  C08J7/18 ,  C08J2427/12 ,  D06M10/025 ,  D06M14/18 ,  D06M14/22 ,  D06M14/26 ,  D06M14/28 ,  D06M14/32 ,  D06M14/34 ,  D06M2200/11 ,  D06M2200/12

摘要： A method of fabricating hydrophobic and oleophobic polymer fabric through two stages of modification using atmospheric plasmas including (a) moving a substrate into an atmospheric plasma area, generating an atmospheric filamentary discharge plasma with a first plasma working gas to obtain a first rough surface of said substrate, (b) exposing plasma treated substrate to air to obtain highly active peroxide on said first rough surface of said substrate, (c) immersing said substrate in a solution of fluorocarbon compound and processing a first stage of graft of a fluorocarbon monomer or oligomer on said substrate to obtain a grafted fluorocarbon monomer or oligomer layer on said first rough surface of said substrate, (d) processing a second stage of graft a fluorocarbon functional group to said grafted fluorocarbon monomer or oligomer layer by generating a carbon tetrafluoride plasma from a second plasma working gas and irradiating said carbon tetrafluoride plasma on said grafted fluorocarbon monomer or oligomer layer; and (e) curing and drying said substrate.

摘要翻译： 一种通过使用大气等离子体的两个阶段的修饰制造疏水和疏油聚合物织物的方法，包括：（a）将基底移动到大气等离子体区域，用第一等离子体工作气体产生大气丝状放电等离子体，以获得所述 （b）将等离子体处理的基板暴露于空气中以在所述基板的所述第一粗糙表面上获得高活性过氧化物，（c）将所述基材浸入氟碳化合物溶液中，并处理氟碳单体或低聚物的第一接枝段 在所述基板上在所述基板的所述第一粗糙表面上获得接枝的碳氟单体或低聚物层，（d）通过从所述基板上生成碳氟化合物单体或低聚物层， 第二等离子体工作气体，并且在所述接枝的氟碳上照射所述四氟化碳等离子体 单体或低聚物层; 和（e）固化和干燥所述基材。

公开(公告)号：US20110045200A1

公开(公告)日：2011-02-24

申请号：US12545664

申请日：2009-08-21

申请人： Tien-Hsiang Hsueh ,  Mien-Win Wu ,  Chi-Fong Ai

发明人： Tien-Hsiang Hsueh ,  Mien-Win Wu ,  Chi-Fong Ai

IPC分类号： C08J7/18

CPC分类号： B05D3/142 ,  C08J7/18 ,  C08J2427/12 ,  D06M10/025 ,  D06M14/18 ,  D06M14/22 ,  D06M14/26 ,  D06M14/28 ,  D06M14/32 ,  D06M14/34 ,  D06M2200/11 ,  D06M2200/12

摘要： The present invention fabricates a hydrophobic and oleophobic polymer fabric through two stages of modification using atmospheric plasmas. The modified fabric has a rough surface and a fluorocarbon functional group having the lowest surface free energy. The fabric has a grafted fluorocarbon monomer layer to enhance the graft efficiency of the fluorocarbon functional groups and its wash fastness. The atmospheric plasmas can be mass produced and less expensively. Hence, the present invention can rapidly modify surfaces of polymeric materials with low cost and good environment protection.

摘要翻译： 本发明通过使用大气等离子体的两个修改阶段制造疏水和疏油聚合物织物。 改性织物具有粗糙表面和具有最低表面自由能的氟碳官能团。 织物具有接枝的氟碳单体层，以提高碳氟化合物官能团的接枝效率及其耐洗牢度。 大气等离子体可以批量生产，而且成本较低。 因此，本发明可以以低成本和良好的环境保护快速地改变聚合物材料的表面。

公开(公告)号：US20080060579A1

公开(公告)日：2008-03-13

申请号：US11510824

申请日：2006-08-28

申请人： Cheng-Chang Hsieh ,  Mien-Win Wu ,  Chi-Fong Ai

发明人： Cheng-Chang Hsieh ,  Mien-Win Wu ,  Chi-Fong Ai

IPC分类号： C23C16/00

CPC分类号： H01J37/32825 ,  H01J37/32009 ,  H01J37/32348 ,  H01J37/32587

摘要： A dielectric barrier discharge uses three electrodes at an atmospheric pressure. A wide discharge gap can be used and an enhanced plasma density can be achieved so that thick materials can be processed and its processing speed can also be greatly improved.

摘要翻译： 电介质阻挡放电在大气压下使用三个电极。 可以使用宽的放电间隙，并且可以实现增强的等离子体密度，使得可以处理厚的材料并且还可以极大地改善其加工速度。

公开(公告)号：US20070154650A1

公开(公告)日：2007-07-05

申请号：US11320609

申请日：2005-12-30

申请人： Mien-Win Wu ,  Cheng-Chang Hsieh ,  Chi-Fong Ai ,  Kuo-Chuan Cheng ,  Tien-Hsiang Hsuch

发明人： Mien-Win Wu ,  Cheng-Chang Hsieh ,  Chi-Fong Ai ,  Kuo-Chuan Cheng ,  Tien-Hsiang Hsuch

IPC分类号： B05D3/00 ,  H05H1/24 ,  C23C16/00 ,  B29C71/04

CPC分类号： H01J37/32825 ,  B29C59/14 ,  H01J37/32348 ,  H01J37/3244 ,  H01J37/3277 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2240/10

摘要： Abstract of the disclosure The present invention provides a method and an apparatus for a glow discharge plasma surface treatment of flexible sheet materials under atmospheric pressure. The apparatus comprises electrodes, a single plasma-gas flow channel, uniform gas inlet-and-outlet devices, gas-seal devices for the horizontal movements of sheet materials and reel devices, so as to attain an uniform distribution of plasma gases in the gap between electrodes. As a result, not only a great amount of expensive plasma gas is saved, but also an uniform glow discharge plasma is generated at the lowest input power to obtain a good quality of uniform plasma treatment with continuous processing and high production.

摘要翻译： 发明内容本发明提供一种用于在大气压下对柔性片材进行辉光放电等离子体表面处理的方法和装置。 该装置包括电极，单个等离子体气体流动通道，均匀的气体入口和出口装置，用于片材和卷轴装置的水平运动的气体密封装置，以便获得等离子体气体在间隙中的均匀分布 电极之间。 结果，不仅节省了大量昂贵的等离子体气体，而且在最低输入功率下产生均匀的辉光放电等离子体，以通过连续加工和高产量获得均匀等离子体处理的良好质量。

公开(公告)号：US20120255492A1

公开(公告)日：2012-10-11

申请号：US13080874

申请日：2011-04-06

申请人： Mien-Win Wu ,  Ding-Guey Tsai ,  Hwei-Lang Chang ,  Deng-Lain Lin ,  Cheng-Chang Hsieh ,  Chi-Fong Ai

发明人： Mien-Win Wu ,  Ding-Guey Tsai ,  Hwei-Lang Chang ,  Deng-Lain Lin ,  Cheng-Chang Hsieh ,  Chi-Fong Ai

IPC分类号： C23C16/513 ,  C23C16/458 ,  C23C16/50 ,  C23C16/453

CPC分类号： C23C16/545 ,  C23C16/0245 ,  C23C16/4401 ,  C23C16/45512 ,  C23C16/45565 ,  C23C16/50 ,  C23C16/513 ,  H01J37/32366 ,  H01J37/3244 ,  H01J37/32449 ,  H01J37/32568 ,  H01J37/32761 ,  H01J37/32825 ,  H01J37/32853

摘要： An apparatus provides large area atmospheric pressure plasma enhanced chemical vapor deposition without contaminations in its electrode assembly and deposited films. The apparatus consists of a large area vertical planar nitrogen plasma activation electrode assembly and its high voltage power supply, a large area vertical planar nitrogen plasma deposition electrode assembly and its high voltage power supply, a long-line uniform precursor jet apparatus, a roll-to-roll apparatus for substrate movement, and a sub-atmospheric pressure deposition chamber and its pumping apparatus. Not only can the deposited film contaminations in the electrode assembly interior and the debris of the deposited films from exterior of the electrode assembly and the air aerosols in the deposition chamber be completely prevented, but a large area roll-to-roll uniform deposition can also be achieved to meet a roll-to-roll continuous production, so as to achieve improved film quality, increased production throughput and reduced manufacturing cost.

摘要翻译： 一种装置在其电极组件和沉积膜中提供大面积的大气压等离子体增强化学气相沉积而没有污染。 该装置由大面积垂直平面氮等离子体激活电极组件及其高压电源，大面积垂直平面氮等离子体沉积电极组件及其高压电源，长线均匀前驱体喷射装置， 用于基板移动的滚动装置和次大气压力沉积室及其抽吸装置。 不仅可以完全防止电极组件内部的沉积膜污染物和电极组件外部沉积膜的碎屑和沉积室中的空气气溶胶，而且大面积的卷对卷均匀沉积也可以 实现卷对卷连续生产，从而达到提高胶片质量，提高生产量和降低制造成本的目的。

公开(公告)号：US20100225234A1

公开(公告)日：2010-09-09

申请号：US11896620

申请日：2007-09-04

申请人： Ching-Pei Tseng ,  Cheng-Chang Hsieh ,  Chi-Fong Ai ,  Chia-Cheng Lee ,  Tien-Hsiang Hsueh ,  Chun-Han Wang

发明人： Ching-Pei Tseng ,  Cheng-Chang Hsieh ,  Chi-Fong Ai ,  Chia-Cheng Lee ,  Tien-Hsiang Hsueh ,  Chun-Han Wang

IPC分类号： H05H1/24

CPC分类号： H05H1/46 ,  H01J37/32596 ,  H01J37/32724

摘要： A hollow-cathode plasma generator includes a plurality of hollow cathodes joined together and connected to a power supply for generating plasma in vacuum. Each of the hollow cathodes includes at least one fillister defined therein, a fin formed on a side of the fillister, an air-circulating tunnel in communication with the fillister and a coolant-circulating tunnel defined therein. The fillister is used to contain working gas. The fin receives negative voltage from the power supply for ionizing the working gas to generate the plasma and spread the plasma in a single direction. The working gas travels into the fillister from the air-circulating tunnel. The coolant-circulating tunnel is used to circulate coolant for cooling the hollow cathode.

摘要翻译： 中空阴极等离子体发生器包括多个连接在一起的中空阴极，并连接到用于在真空中产生等离子体的电源。 每个中空阴极包括限定在其中的至少一个填充器，形成在填充器一侧的翅片，与填充器连通的空气循环隧道和限定在其中的冷却剂循环通道。 灌装机用于容纳工作气体。 翅片从电源接收负电压，用于电离工作气体以产生等离子体并且在单个方向上扩散等离子体。 工作气体从空气循环通道进入灌装机。 冷却剂循环隧道用于循环冷却剂以冷却空心阴极。

公开(公告)号：US08062964B2

公开(公告)日：2011-11-22

申请号：US12853232

申请日：2010-08-09

申请人： Wen-Fa Tsai ,  Jyong-Fong Liao ,  Yen-Yu Chen ,  Chee Wee Liu ,  Chi-Fong Ai

发明人： Wen-Fa Tsai ,  Jyong-Fong Liao ,  Yen-Yu Chen ,  Chee Wee Liu ,  Chi-Fong Ai

IPC分类号： H01L21/26

CPC分类号： H01L31/1868 ,  Y02E10/50 ,  Y02P70/521

摘要： The present disclosure passivates solar cell defects. Plasma immersion ion implantation (PIII) is used to repair the defects during or after making the solar cell. Hydrogen ion is implanted into absorption layer with different sums of energy to fill gaps of defects or surface recombination centers. Thus, solar cell defects are diminished and carriers are transferred with improved photovoltaic conversion efficiency.

摘要翻译： 本公开钝化太阳能电池缺陷。 在制造太阳能电池期间或之后，使用等离子体浸没离子注入（PIII）来修复缺陷。 将氢离子注入到具有不同的能量之和的吸收层中以填充缺陷或表面复合中心的间隙。 因此，太阳能电池缺陷减少，并且载流子随着光伏转换效率的提高而被转移。

公开(公告)号：US20110053351A1

公开(公告)日：2011-03-03

申请号：US12853232

申请日：2010-08-09

申请人： Wen-Fa Tsai ,  Jyong-Fong Liao ,  Yen-Yu Chen ,  Chee Wee Liu ,  Chi-Fong Ai

发明人： Wen-Fa Tsai ,  Jyong-Fong Liao ,  Yen-Yu Chen ,  Chee Wee Liu ,  Chi-Fong Ai

IPC分类号： H01L21/30

CPC分类号： H01L31/1868 ,  Y02E10/50 ,  Y02P70/521

摘要： The present disclosure passivates solar cell defects. Plasma immersion ion implantation (PIII) is used to repair the defects during or after making the solar cell. Hydrogen ion is implanted into absorption layer with different sums of energy to fill gaps of defects or surface recombination centers. Thus, solar cell defects are diminished and carriers are transferred with improved photovoltaic conversion efficiency.

摘要翻译： 本公开钝化太阳能电池缺陷。 在制造太阳能电池期间或之后，使用等离子体浸没离子注入（PIII）来修复缺陷。 将氢离子注入到具有不同的能量之和的吸收层中以填充缺陷或表面复合中心的间隙。 因此，太阳能电池缺陷减少，并且载流子随着光伏转换效率的提高而被转移。

公开(公告)号：US20100075510A1

公开(公告)日：2010-03-25

申请号：US12237902

申请日：2008-09-25

申请人： Der-Jun JAN ,  Chi-Fong Ai

发明人： Der-Jun JAN ,  Chi-Fong Ai

IPC分类号： H01L21/31

CPC分类号： H01L21/31604 ,  C23C16/405 ,  C23C16/515 ,  H01L21/02186 ,  H01L21/0228 ,  H01L21/3141

摘要： A method for pulsed plasma deposition of titanium dioxide film is revealed. The method includes the steps of: (1) set a substrate into a chamber and the chamber is pumped down to a certain vacuum level. (2) Introduce titanium tetraisopropoxide gas and gas containing oxygen into the chamber and a RF (radio frequency) pulse power supply is turned on to create a glow discharge for generating pulsed plasma. (3) A layer of titanium dioxide film is deposited on the substrate by the pulsed plasma. The TiO2 film is deposited on a substrate such as plastic substrate at low temperature according to the method so that the heat-resistant and conductive requirements of conventional substrates are removed.

摘要翻译： 揭示了二氧化钛膜脉冲等离子体沉积的方法。 该方法包括以下步骤：（1）将衬底设置到腔室中，并将腔室泵送到一定的真空度。 （2）将四异丙醇钛气体和含氧气体引入室内，接通RF（射频）脉冲电源，产生用于产生脉冲等离子体的辉光放电。 （3）通过脉冲等离子体在基板上沉积一层二氧化钛膜。 根据该方法，TiO 2膜在低温下沉积在诸如塑料基板的基板上，从而去除常规基板的耐热和导电要求。

公开(公告)号：US20080047826A1

公开(公告)日：2008-02-28

申请号：US11508236

申请日：2006-08-23

申请人： Chi-Ting Lin ,  Der-Jun Jan ,  Chi-Fong Ai

发明人： Chi-Ting Lin ,  Der-Jun Jan ,  Chi-Fong Ai

IPC分类号： C23C14/00

CPC分类号： C23C14/0036 ,  C23C14/088 ,  H01M8/0217 ,  H01M2008/1293

摘要： A protective coating is formed on a stainless interconnecting plate used in solid oxide fuel cell (SOFC). With the protective coating, a contact resistance of the plate is effectively lowered. Anode and cathode of SOFC are also prevented from being poisoned by chromium diffusion from the plate. Therefore, after a long time of use under a high temperature, a degradation rate for power generating of SOFC is reduced; and, thus, a working hour is prolonged. Hence, the SOFC can be mass-produced and large-scaled.

摘要翻译： 在固体氧化物燃料电池（SOFC）中使用的不锈钢互连板上形成保护涂层。 通过保护涂层，板的接触电阻被有效地降低。 还防止了SOFC的阳极和阴极被来自板的铬扩散而中毒。 因此，在高温下长时间使用后，SOFC发电的降解率降低; 因此，工作时间延长。 因此，SOFC可以批量生产和大规模生产。