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公开(公告)号:US11712745B2
公开(公告)日:2023-08-01
申请号:US17583483
申请日:2022-01-25
发明人: Michael Parker , Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号: B23K1/00 , B32B18/00 , B32B9/00 , B32B15/20 , C04B37/00 , B23K1/19 , B23K1/20 , B23K35/28 , B23K35/00 , C04B35/645 , B32B9/04 , F16B9/00 , B32B3/30 , B32B7/14 , H01L21/67 , H01L21/683 , H05B1/00 , H01L21/687 , B23K103/10
CPC分类号: B23K1/0008 , B23K1/0016 , B23K1/19 , B23K1/20 , B23K35/005 , B23K35/286 , B32B3/30 , B32B7/14 , B32B9/005 , B32B9/04 , B32B9/041 , B32B15/20 , B32B18/00 , C04B35/645 , C04B37/001 , C04B37/006 , F16B9/00 , H01L21/67103 , H01L21/6831 , H01L21/6833 , H01L21/68757 , H01L21/68785 , H05B1/00 , B23K2103/10 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/6581 , C04B2235/6582 , C04B2235/945 , C04B2237/121 , C04B2237/122 , C04B2237/126 , C04B2237/127 , C04B2237/34 , C04B2237/343 , C04B2237/348 , C04B2237/36 , C04B2237/365 , C04B2237/366 , C04B2237/368 , C04B2237/592 , C04B2237/61 , C04B2237/64 , C04B2237/66 , C04B2237/68 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C04B2237/76 , C04B2237/765 , C04B2237/80 , C04B2237/84 , Y10T403/46 , Y10T428/31504 , Y10T428/31678
摘要: A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining. The aluminum may be placed between two pieces and the assembly may be heated in the range of 770 C to 1200 C. The joining atmosphere may be non-oxygenated. After joining the exclusions in the electrode pattern may be machined by also machining through one of the plate layers. The machined exclusion slots may then be filled with epoxy or other material. An electrostatic chuck or other structure manufactured according to such methods.
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公开(公告)号:US20170259364A1
公开(公告)日:2017-09-14
申请号:US15419952
申请日:2017-01-30
发明人: Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号: B23K1/00
CPC分类号: B23K1/0008 , B23K1/0016 , B23K1/19 , B23K1/20 , B23K35/005 , B23K35/286 , B23K2103/10 , B32B3/30 , B32B7/14 , B32B9/005 , B32B9/04 , B32B9/041 , B32B15/20 , B32B18/00 , C04B35/645 , C04B37/001 , C04B37/006 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/6581 , C04B2235/6582 , C04B2235/945 , C04B2237/121 , C04B2237/122 , C04B2237/126 , C04B2237/127 , C04B2237/34 , C04B2237/343 , C04B2237/348 , C04B2237/36 , C04B2237/365 , C04B2237/366 , C04B2237/368 , C04B2237/592 , C04B2237/61 , C04B2237/64 , C04B2237/66 , C04B2237/68 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C04B2237/76 , C04B2237/765 , C04B2237/80 , C04B2237/84 , F16B9/00 , H01L21/67103 , H01L21/6831 , H05B1/00 , Y10T403/46 , Y10T428/31504 , Y10T428/31678
摘要: A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
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公开(公告)号:US20170036285A1
公开(公告)日:2017-02-09
申请号:US15065500
申请日:2016-03-09
发明人: Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号: B23K1/00 , B32B18/00 , B32B15/20 , H01L21/683 , B23K1/19 , B23K35/28 , H01L21/67 , B32B7/14 , B32B3/30
CPC分类号: C04B37/006 , B23K1/0008 , B23K1/0016 , B23K1/19 , B23K1/20 , B23K35/005 , B23K35/286 , B23K2103/10 , B32B3/30 , B32B7/14 , B32B9/005 , B32B9/04 , B32B9/041 , B32B15/20 , B32B18/00 , C04B35/645 , C04B37/001 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/6581 , C04B2235/6582 , C04B2235/945 , C04B2237/121 , C04B2237/122 , C04B2237/126 , C04B2237/127 , C04B2237/34 , C04B2237/343 , C04B2237/348 , C04B2237/36 , C04B2237/365 , C04B2237/366 , C04B2237/368 , C04B2237/592 , C04B2237/61 , C04B2237/64 , C04B2237/66 , C04B2237/68 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C04B2237/76 , C04B2237/765 , C04B2237/80 , C04B2237/84 , F16B9/00 , H01L21/67103 , H01L21/6831 , H05B1/00 , Y10T403/46 , Y10T428/31504 , Y10T428/31678
摘要: A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
摘要翻译: 一种用于将陶瓷片与密封接头接合的方法,包括在两片之间钎焊连续的接合材料层。 接合材料的润湿和流动通过接合材料的选择,接合温度,温度时间,接合气氛等因素来控制。 陶瓷片可以是氮化铝,并且可以在受控气氛下用铝合金钎焊。 接头材料适于随后在衬底处理期间承受处理腔室内的环境,以及可在加热器或静电吸盘的轴内看到的氧化气氛。
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公开(公告)号:US09269525B2
公开(公告)日:2016-02-23
申请号:US14360706
申请日:2012-11-22
申请人: PLANSEE SE
CPC分类号: H01J35/108 , B23K1/0008 , B23K1/19 , B23K35/005 , B23K35/32 , B23K35/325 , B23K2103/16 , C04B37/026 , C04B2235/6562 , C04B2235/6581 , C04B2235/661 , C04B2237/122 , C04B2237/126 , C04B2237/127 , C04B2237/36 , C04B2237/363 , C04B2237/365 , C04B2237/366 , C04B2237/368 , C04B2237/38 , C04B2237/385 , C04B2237/403 , C04B2237/52 , C04B2237/55 , C04B2237/62 , C04B2237/708 , C04B2237/72 , H01J1/36 , H01J1/44 , H01J35/10 , H01J2235/083
摘要: A high-temperature-resistant composite body is formed by joining over an area of a first, nonmetallic section via a bonding solder layer to a second, metallic section composed of Mo, an Mo-based alloy, W or a W-based alloy. A first arrangement composed of the first section, a first Zr solder and an intermediate layer is firstly soldered together in a first soldering step. A second arrangement of the resulting partial composite body, a second solder adjoining the intermediate layer and the second section is subsequently soldered together in a second soldering step. The intermediate layer at least 90 atom % of at least one of the elements Ta, Nb, W. The second solder is formed by precisely one material selected from Ti, Ti-based solder combination, V-based solder combination, Zr or Zr-based solder combination and it melts at a lower temperature than the first Zr solder in the second arrangement.
摘要翻译: 通过接合焊料层将第一非金属部分的区域接合到由Mo,Mo基合金,W或W基合金构成的第二金属部分上,形成耐高温复合体。 在第一焊接步骤中首先将由第一部分,第一Zr焊料和中间层构成的第一布置在一起。 所得部分复合体的第二布置,邻接中间层和第二部分的第二焊料随后在第二焊接步骤中焊接在一起。 中间层至少为90原子%的元素Ta,Nb,W中的至少一种。第二焊料通过精确地选自Ti,Ti基焊料组合,V族焊料组合,Zr或Zr- 并且在第二配置中在比第一Zr焊料更低的温度下熔化。
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公开(公告)号:US08920079B2
公开(公告)日:2014-12-30
申请号:US12922655
申请日:2009-03-27
申请人: Kimihiro Ozaki , Keizo Kobayashi , Hideki Moriguchi , Tomoyuki Ishida , Akihiko Ikegaya , Nobuyuki Kitagawa
发明人: Kimihiro Ozaki , Keizo Kobayashi , Hideki Moriguchi , Tomoyuki Ishida , Akihiko Ikegaya , Nobuyuki Kitagawa
IPC分类号: B24D3/00 , B23K1/19 , B23K1/00 , B23K35/30 , B23K35/00 , C23C16/00 , B23K35/32 , B23K20/16 , B23K20/02 , E21B10/26
CPC分类号: B23K1/19 , B22F7/064 , B23B2226/125 , B23B2226/315 , B23B2240/08 , B23K1/0004 , B23K11/16 , B23K11/3009 , B23K20/021 , B23K20/16 , B23K35/005 , B23K35/3033 , B23K35/3046 , B23K35/325 , B23K2101/20 , B23K2103/18 , C22C26/00 , C22C29/06 , C23C16/00 , Y10T407/26 , Y10T407/27 , Y10T428/30 , Y10T428/31678
摘要: There is provided a joined product suitable as a cutting tool that is fit for high-speed cutting, CVD coating process and the like, and does not cause a reduction in joint strength of a joining layer even if a high temperature exceeding a temperature at which a brazing filler forms the liquid phase is reached during cutting. Specifically, the joined product includes a cemented carbide sintered compact serving as a first material to be joined and a cBN sintered compact or a diamond sintered compact serving as a second material to be joined. The first material to be joined and the second material to be joined are joined by a joining material that does not form a liquid phase at a temperature lower than 1000° C. and that is placed between the first material to be joined and the second material to be joined. The joining is performed by resistance heating and pressing at a pressure of 0.1 to 200 MPa.
摘要翻译: 提供了适合作为高速切割,CVD涂覆工艺等的切削工具的接合产品,并且即使超过其中的温度的高温也不会导致接合层的接合强度降低 钎焊填料在切割过程中达到液相。 具体而言,接合体包括作为第一接合材料的硬质合金烧结体和作为第二接合材料的cBN烧结体或金刚石烧结体。 要接合的第一材料和待接合的第二材料通过在低于1000℃的温度下不形成液相的接合材料接合,并且被放置在待接合的第一材料和第二材料之间 加入。 通过电阻加热和压力为0.1〜200MPa进行接合。
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公开(公告)号:US20140321905A1
公开(公告)日:2014-10-30
申请号:US14361539
申请日:2012-11-19
发明人: Takashi Arai
IPC分类号: B23K1/19
CPC分类号: B23K1/19 , B23K1/0018 , B23K35/002 , B23K35/004 , B23K35/005 , B23K35/0222 , B23K35/3033 , B23K2101/001 , B23K2103/24 , B32B15/013 , C21D2211/004 , C21D2211/008 , C22C14/00 , C22C38/00 , C22C38/18 , C22C38/22 , C22C38/38 , C22C38/40 , F01D5/026 , F01D5/063 , F02B39/00 , F05D2220/40 , F05D2230/23 , F05D2230/236 , Y10T403/479
摘要: Provided is joint part capable of suppressing diffusion of carbon and nitrogen contained in the steel member to the TiAl-based alloy member and suppressing formation of voids, titanium carbide or a nitride due to diffusion of carbon and nitrogen contained in the steel member, and thereby suppressing decrease in the brazing strength. A joint part comprises a steel member containing alloy elements including C and Cr, a TiAl-based alloy member, and a Ni-based brazing filler metal via which the steel member and the TiAl-based alloy member are joined to each other, wherein the steel member has a carbide and a nitride each forming a bond with at least one of the alloy elements at least on a side of a boundary with the Ni-based brazing filler metal, and diffusion of C and N to the Ni-based brazing filler metal adjacent to the TiAl-based alloy member is suppressed by the carbide and the nitride. The joint part may be a turbine body 1 comprising a turbine wheel 2 and a shaft 3, and a structural steel material of the shaft 3 is structural steel material containing 0.30 to 0.45 wt % of C and 0.85 to 1.25 wt % of Cr, or a martensitic stainless steel material containing at most 15 wt % of C and 11.5 to 13 wt % of Cr.
摘要翻译: 提供了能够抑制钢构件中所含的碳氮的扩散到TiAl基合金构件并抑制由于钢构件中包含的碳和氮的扩散而导致的空隙,碳化钛或氮化物的形成的接合部, 抑制钎焊强度的降低。 接合部包括包含C和Cr的合金元素的钢构件,TiAl基合金构件和Ni基钎料,钢构件和TiAl基合金构件通过该Ni基钎料彼此接合,其中 钢构件具有碳化物和氮化物,其至少在与Ni基钎料的边界一侧与至少一个合金元素形成结合,并且将C和N扩散到Ni基钎料 与TiAl基合金构件相邻的金属被碳化物和氮化物抑制。 接头部分可以是包括涡轮机叶轮2和轴3的涡轮机体1,轴3的结构钢材料是含有0.30-0.45重量%的C和0.85-1.25重量%的Cr的结构钢材料,或者 含有至多15重量%C和11.5〜13重量%Cr的马氏体不锈钢材料。
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公开(公告)号:US08727203B2
公开(公告)日:2014-05-20
申请号:US12883447
申请日:2010-09-16
申请人: Aiguo Wang , Daniel E. Lawrynowicz , Haitong Zeng , Naomi Murray , Balaji Prabhu
发明人: Aiguo Wang , Daniel E. Lawrynowicz , Haitong Zeng , Naomi Murray , Balaji Prabhu
CPC分类号: B23K20/021 , A61L27/06 , A61L27/306 , A61L27/56 , B22F7/004 , B22F2999/00 , B23K15/0086 , B23K26/32 , B23K26/34 , B23K35/005 , B23K35/0244 , B23K2103/14 , C22C14/00 , Y02P10/295 , Y10T428/12771 , Y10T428/12806 , B22F3/1055 , B22F3/15 , B23K20/00 , B22F3/1103
摘要: A method of manufacturing an orthopaedic implant device having a porous outer surface is described. In one embodiment, the implant device includes a porous layer, an intermediate layer, and a solid substrate. The porous layer is preferably bonded to the intermediate layer by cold isostatic pressing. The intermediate layer is preferably bonded by vacuum welding to the solid substrate such that the porous layer forms at least a portion of the outer surface of the orthopaedic implant device. Preferably, a diffusion bond is created between the bonded intermediate layer and the solid substrate by hot isostatic pressing. In another embodiment, a porous layer is created on an outer surface of a solid layer by selective melting. Preferably, the solid layer is bonded to the solid substrate such that the porous layer forms at least a portion of the outer surface of the orthopaedic implant device.
摘要翻译: 描述了一种制造具有多孔外表面的矫形植入装置的方法。 在一个实施例中,植入装置包括多孔层,中间层和固体基底。 多孔层优选通过冷等静压来结合到中间层。 中间层优选通过真空焊接粘结到固体基底上,使得多孔层形成整形外科植入装置的外表面的至少一部分。 优选地,通过热等静压法在接合的中间层和固体基材之间产生扩散接合。 在另一个实施方案中,通过选择性熔融在固体层的外表面上形成多孔层。 优选地,固体层结合到固体基质上,使得多孔层形成整形外科植入装置的外表面的至少一部分。
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公开(公告)号:US08679207B2
公开(公告)日:2014-03-25
申请号:US12224283
申请日:2007-03-30
CPC分类号: B23K9/04 , B02C2210/02 , B22F2998/00 , B23K35/005 , B23K35/24 , B23K35/302 , B23K35/3033 , B23K35/3046 , B23K35/3053 , B23K35/308 , B23K35/327 , C22C29/06 , Y10T428/24413 , Y10T428/24992 , Y10T428/2982 , Y10T428/2991 , B22F1/025
摘要: Disclosed is a wear-resistant particle which can be substantially uniformly dispersed in a molten pool. Specifically disclosed is a wear-resistant particle (13) which is dispersed in a matrix metal for improving wear resistance thereof. The wear-resistant particle is characterized by being composed of a material containing a first hard material and a second hard material while having a particle diameter of 0.2-9 mm. The wear-resistant particle is further characterized in that the material consists of 60-96% by volume of a carbide and the balance of a metal.
摘要翻译: 公开了可以基本上均匀地分散在熔池中的耐磨颗粒。 具体公开了一种分散在基质金属中以提高其耐磨性的耐磨颗粒(13)。 耐磨颗粒的特征在于由含有第一硬质材料和第二硬质材料的材料构成,同时具有0.2-9mm的粒径。 耐磨颗粒的特征还在于该材料由60-96体积%的碳化物和余量的金属组成。
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9.
公开(公告)号:US08563142B2
公开(公告)日:2013-10-22
申请号:US13248132
申请日:2011-09-29
CPC分类号: B23K1/0018 , B23K1/19 , B23K35/005 , B23K35/007 , B23K35/0238 , B23K35/30 , B23K35/3033 , B23K35/32 , B23K35/40 , B23K2101/001 , C22C19/03 , C22C19/05 , Y10T428/12222 , Y10T428/12438 , Y10T428/12535 , Y10T428/12611 , Y10T428/12944
摘要: A dual brazing alloy element for a materially integral connection of a ceramic surface to a metallic surface includes a first layer having a Ni-based brazing alloy with a Ni content of at least 50% by weight and having at least one component configured to lower a melting point of the Ni-based brazing alloy selected from the group consisting of Si, B, Mn, Sn and Ge. A second layer includes an active brazing alloy material having a total content of 1-15% by weight of at least one active element selected from the group consisting of Ti, Hf, Zr and V.
摘要翻译: 用于将陶瓷表面与金属表面实质整体连接的双钎焊合金元件包括具有Ni含量至少为50重量%的Ni基钎焊合金的第一层,并且具有至少一个构件以降低 从由Si,B,Mn,Sn和Ge组成的组中选择的Ni基钎焊合金的熔点。 第二层包括总含量为选自Ti,Hf,Zr和V的至少一种活性元素的总含量为1-15重量%的活性钎焊合金材料。
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10.
公开(公告)号:US20120213659A1
公开(公告)日:2012-08-23
申请号:US13504888
申请日:2010-09-30
申请人: Erwin Bayer , Karl-Hermann Richter
发明人: Erwin Bayer , Karl-Hermann Richter
CPC分类号: B22F3/1055 , B22F2998/00 , B22F2999/00 , B23K26/32 , B23K26/342 , B23K35/005 , B23K35/007 , B23K35/0244 , B23K2101/001 , B23K2103/14 , B23K2103/26 , B23K2103/52 , B32B18/00 , C04B35/16 , C04B2235/6026 , C04B2235/665 , C04B2237/341 , C30B29/52 , Y02P10/295 , B22F3/003 , B22F2207/15
摘要: A method for producing a component of a turbomachine is disclosed. The method includes a) layer-by-layer deposition of a powder component material onto a component platform in a region of a buildup and joining zone, where the deposition takes place in accordance with layer information of the component to be produced; b) local layer-by-layer fusion or sintering of the powder component material by energy supplied in the region of the buildup and joining zone, where the buildup and joining zone is heated to a temperature just below a melting point of the powder component material; c) layer-by-layer lowering of the component platform by a predefined layer thickness; and d) repetition of steps a) to c) until the component is finished. A device for producing a component of a turbomachine is also disclosed.
摘要翻译: 公开了一种涡轮机组件的制造方法。 该方法包括:a)在堆积和接合区域的区域中将粉末成分材料逐层沉积到部件平台上,其中根据要生产的部件的层信息进行沉积; b)通过在积聚和接合区域的区域供应的能量对粉末成分材料进行局部逐层融合或烧结,其中将积聚和接合区域加热到刚好低于粉末组分材料熔点的温度 ; c)将组件平台逐层降低预定层厚度; 和d)重复步骤a)至c)直到组分完成。 还公开了一种用于生产涡轮机的部件的装置。
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