公开(公告)号：US20180164432A1

公开(公告)日：2018-06-14

申请号：US15880261

申请日：2018-01-25

Applicant: Cornell University

Inventor： Amit Lal ,  Serhan Ardanuc ,  Jason T. Hoople ,  Justin C. Kuo

IPC: G01S15/02 ,  B81B3/00 ,  G01S7/521 ,  G06N3/063 ,  G06K9/00 ,  G01S15/89 ,  H01H1/00 ,  G01S7/52

CPC classification number: G06N3/04 ,  B81B3/0021 ,  B81B2201/018 ,  B81B2201/0214 ,  B81B2201/0285 ,  B81B2203/04 ,  G01S7/52079 ,  G01S7/521 ,  G01S15/02 ,  G01S15/8925 ,  G06K9/0002 ,  G06N3/0635 ,  H01H1/0094 ,  H01J49/025

Abstract: Techniques, systems, and devices are described for implementing for implementing computation devices and artificial neurons based on nanoelectromechanical (NEMS) systems. In one aspect, a nanoelectromechanical system (NEMS) based computing element includes: a substrate; two electrodes configured as a first beam structure and a second beam structure positioned in close proximity with each other without contact, wherein the first beam structure is fixed to the substrate and the second beam structure is attached to the substrate while being free to bend under electrostatic force. The first beam structure is kept at a constant voltage while the other voltage varies based on an input signal applied to the NEMS based computing element.

公开(公告)号：US09658087B1

公开(公告)日：2017-05-23

申请号：US14705944

申请日：2015-05-06

Applicant: The United States of America, as Represented by the Secretary of the Air Force

Inventor： Jeffrey W. Baur ,  Matthew R. Maschmann ,  Gregory J. Ehlert ,  Benjamin T. Dickinson ,  David M. Phillips

IPC: G01F1/56

CPC classification number: G01F1/56 ,  B81B2201/0285 ,  B81B2201/0292 ,  B81C1/00206

Abstract: A method for making an artificial hair sensor, comprising the steps of: (a) depositing an electrode at each end of a microcapillary having an inside surface; (b) coating a structural fiber with alumina; (c) placing the alumina coated structural fiber inside the microcapillary, wherein part of the alumina coated structural fiber is in a spaced annular relationship with the microcapillary inside surface and part of the fiber extends outside the microcapillary; (d) placing the microcapillary and alumina coated structural fiber inside a heated furnace chamber; and, (e) injecting a vaporized catalyst into the heated furnace chamber. The vaporized catalyst may be a solution of ferrocene in xylene. The microcapillary may be made of glass.

公开(公告)号：US20160117015A1

公开(公告)日：2016-04-28

申请号：US14839604

申请日：2015-08-28

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Marco Veneri ,  Stefano Bosco ,  Alessandro Morcelli

IPC: G06F3/044 ,  G06F3/043 ,  G06F3/041

CPC classification number: G06F3/044 ,  B81B7/0058 ,  B81B2201/0285 ,  B81B2207/012 ,  G01H11/06 ,  G06F3/0412 ,  G06F3/0433 ,  H01L2224/48137

Abstract: A microelectromechanical vibration sensor includes: a first chamber; a second chamber; a semiconductor membrane between the first chamber and the second chamber; a reference electrode, capacitively coupled to the membrane; and a package structure, which encapsulates and insulates acoustically from the outside world the first chamber, the second chamber, and the membrane.

Abstract translation: 微机电振动传感器包括：第一室; 第二个房间 第一室和第二室之间的半导体膜; 电容耦合到膜的参比电极; 以及封装结构，其从外界在声学上封装并绝缘第一腔室，第二腔室和膜。

公开(公告)号：US20160075549A1

公开(公告)日：2016-03-17

申请号：US14854746

申请日：2015-09-15

Applicant: Seiko Epson Corporation

Inventor： Shinya Aoki

IPC: B81B3/00

CPC classification number: B81B3/0086 ,  B81B2201/0285 ,  B81B2203/04

Abstract: A physical quantity detection device includes a semiconductor element and a physical quantity detection vibrator element a portion of which overlaps the semiconductor element in a plan view of the semiconductor element. The physical quantity detection vibrator element includes a drive portion including a drive electrode, and a detection portion. At least a partial region of the drive electrode does not overlap the semiconductor element in the plan view of the semiconductor element.

Abstract translation: 物理量检测装置包括在半导体元件的平面图中半导体元件和物理量检测振动器元件的一部分与半导体元件重叠。 物理量检测振动器元件包括驱动部分，其包括驱动电极和检测部分。 在半导体元件的平面图中，驱动电极的至少一部分区域不与半导体元件重叠。

公开(公告)号：US20140367806A1

公开(公告)日：2014-12-18

申请号：US14305259

申请日：2014-06-16

Applicant: Seiko Epson Corporation

Inventor： Satoru TANAKA

IPC: B81B3/00 ,  B81B7/00

CPC classification number: B81B3/0097 ,  B81B7/0006 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0285

Abstract: A functional element includes a first electrode section, a second electrode section, a first wiring line connected to the first electrode section, and a second wiring line connected to the second electrode section, the first wiring line is provided with at least one first intersecting section intersecting with a wiring line other than the second wiring line, the second wiring line includes at least one second intersecting section intersecting with a wiring line other than the first wiring line, and a difference between a number of the first intersecting sections and a number of the second intersecting sections satisfies a condition one of equal to and lower than 50% with respect to larger one of the number of the first intersecting sections and the number of the second intersecting sections.

Abstract translation: 功能元件包括第一电极部分，第二电极部分，连接到第一电极部分的第一布线和连接到第二电极部分的第二布线，第一布线设置有至少一个第一相交部分 与第二布线以外的布线相交，第二布线包括与第一布线以外的布线交叉的至少一个第二交叉部，第一相交部的数量与第 第二交叉部分相对于第一交叉部分的数量和第二交叉部分的数量中的较大的一个满足等于或小于50％的条件一。

公开(公告)号：US08715514B2

公开(公告)日：2014-05-06

申请号：US13434622

申请日：2012-03-29

Applicant: Jae Woo Lee ,  Kang Ho Park ,  Jong Dae Kim

Inventor： Jae Woo Lee ,  Kang Ho Park ,  Jong Dae Kim

IPC: B44C1/22 ,  C23F1/00 ,  B81C1/00 ,  H04R3/00

CPC classification number: B81C1/00182 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2201/0285 ,  H04R3/00 ,  H04R19/005 ,  H04R31/00 ,  H04R2201/003

Abstract: Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufacturing are reduced due to the simplified manufacturing process, the manufacturing throughput is improved, and since durability of the MEMS microphone is improved, system stability against the external environment is improved.

Abstract translation: 提供了一种微机电系统（MEMS）麦克风及其制造方法。 与使用上基板工艺和下基板工艺的常规技术相比，制造工艺简化。 由于制造过程中可能发生的缺陷由于简化的制造过程而降低，所以提高了制造生产能力，并且由于提高了MEMS麦克风的耐久性，提高了对外部环境的系统稳定性。

公开(公告)号：US08359923B2

公开(公告)日：2013-01-29

申请号：US12926970

申请日：2010-12-21

Applicant: Tameharu Ohta ,  Tetsuo Fujii ,  Masanobu Azukawa ,  Takeshi Ito ,  Itaru Ishii

Inventor： Tameharu Ohta ,  Tetsuo Fujii ,  Masanobu Azukawa ,  Takeshi Ito ,  Itaru Ishii

IPC: G01P15/125

CPC classification number: G01C19/56 ,  B81B7/0058 ,  B81B2201/0235 ,  B81B2201/0285 ,  G01D18/00 ,  G01P15/08 ,  H01L2224/48247 ,  H05K13/00 ,  Y10T29/49002 ,  Y10T29/49117 ,  Y10T29/49826

Abstract: A physical quantity sensor includes a sensor portion, a casing, and a vibration isolator. The casing includes a supporting portion with a supporting surface that is located to face an end surface of the sensor portion. The vibration isolator is located between the end surface of the sensor portion and the supporting surface of the casing to join the sensor portion to the casing. The vibration isolator reduces a relative vibration between the sensor portion and the casing.

Abstract translation: 物理量传感器包括传感器部分，壳体和隔振器。 壳体包括具有支撑表面的支撑部分，支撑表面位于传感器部分的端表面上。 隔振器位于传感器部分的端面和壳体的支撑表面之间，以将传感器部分接合到壳体。 隔振器减小传感器部分和壳体之间的相对振动。

公开(公告)号：US20100314617A1

公开(公告)日：2010-12-16

申请号：US12788522

申请日：2010-05-27

Applicant: Daisuke Ito

Inventor： Daisuke Ito

IPC: H01L29/24 ,  H01L21/36

CPC classification number: B81C1/00111 ,  B81B2201/0214 ,  B81B2201/0235 ,  B81B2201/0285 ,  B81B2201/0292 ,  B81B2203/0361 ,  B82Y10/00 ,  B82Y40/00 ,  C30B25/00 ,  C30B29/16 ,  C30B29/60 ,  H01G9/058 ,  H01G9/155 ,  H01G11/46 ,  H01L29/0665 ,  H01L29/0676 ,  H01L29/22 ,  H01L29/24 ,  H01L29/66439 ,  H01L29/66462 ,  H01L29/775 ,  Y02E60/13

Abstract: A vanadium dioxide nanowire grown long and thin along a [110] direction is disclosed.

Abstract translation: 公开了沿[110]方向生长长而薄的二氧化钒纳米线。

公开(公告)号：US20100307246A1

公开(公告)日：2010-12-09

申请号：US12801405

申请日：2010-06-08

Applicant: Tetsuo Fujii ,  Hisanori Yokura ,  Hirofumi Higuchi

Inventor： Tetsuo Fujii ,  Hisanori Yokura ,  Hirofumi Higuchi

IPC: G01P15/00 ,  H01L21/02 ,  H01L29/84

CPC classification number: H01L27/1203 ,  B81B2201/025 ,  B81B2201/0257 ,  B81B2201/0285 ,  B81B2201/047 ,  B81C1/00182 ,  G01C19/5755 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  H01L21/84

Abstract: A semiconductor dynamic quantity sensor has a substrate including a semiconductor substrate, an insulation layer on a main surface of the semiconductor substrate, and a semiconductor layer on the insulation layer. The main surface has a projection that is trapezoidal or triangular in cross section. The semiconductor layer is divided by a through hole into a movable portion. A tip of the projection is located directly below the movable portion and spaced from the movable portion by a predetermined distance in a thickness direction of the substrate. A width of the tip of the projection is less than a width of the movable portion in a planar direction of the substrate. The distance between the tip of the projection and the movable portion is equal to a thickness of the insulation layer.

Abstract translation: 半导体动态量传感器具有包括半导体衬底，半导体衬底的主表面上的绝缘层和绝缘层上的半导体层的衬底。 主表面具有横截面为梯形或三角形的突起。 半导体层由通孔分割成可动部。 突出部的尖端位于可动部的正下方，与基板的厚度方向与可动部隔开预定的距离。 突起的尖端的宽度小于基板的平面方向上的可动部的宽度。 突起的尖端和可动部之间的距离等于绝缘层的厚度。

公开(公告)号：US07723901B2

公开(公告)日：2010-05-25

申请号：US11363395

申请日：2006-02-27

Applicant: Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Kazuo Takahashi ,  Eiji Nakashio

Inventor： Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Kazuo Takahashi ,  Eiji Nakashio

IPC: H01L41/08

CPC classification number: B81B3/0067 ,  B81B2201/0285 ,  B81B2203/0118 ,  G01C19/5663 ,  G01P15/0802

Abstract: A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and a vibrating element mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a plurality of terminals, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order. Furthermore, a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.

Abstract translation: 振动陀螺传感器包括：支撑基板，其上形成有多个焊盘的布线图案;以及安装在支撑基板的表面上的振动元件。 所述振动元件包括基部，所述基部具有安装面，多个端子和从所述基部的一个侧面以悬臂方式一体地突出的振动器部，并且具有与所述基板的安装面共面的面向基板的表面 的基础部分。 振子部具有依次形成在面向基板的表面上的第一电极层，压电层和第二电极层。 此外，在振动部的基端形成有加强部，使得振动部的截面积朝向基部逐渐增大。