Connection, configuration, and production of a buried semiconductor layer
    99.
    发明授权
    Connection, configuration, and production of a buried semiconductor layer 有权
    掩埋半导体层的连接,配置和生产

    公开(公告)号:US07339237B2

    公开(公告)日:2008-03-04

    申请号:US11261246

    申请日:2005-10-28

    申请人: Thorsten Meyer

    发明人: Thorsten Meyer

    摘要: A power transistor has a semiconductor volume including a plurality of transistor cells connected in parallel, a laterally oriented, highly conductive semiconductor layer buried below the transistor cells in the semiconductor volume, and at least one connection, via which the buried semiconductor layer can be contact-connected from the top side of the power transistor. At least one connection is formed within a trench extending from the top side of the power transistor towards the buried semiconductor layer.

    摘要翻译: 功率晶体管具有包括并联连接的多个晶体管单元的半导体体积,埋在半导体体积中的晶体管单元下面的横向取向的高导电半导体层,以及至少一个连接,通过该至少一个连接,埋入的半导体层可以通过其接触 从功率晶体管的顶端连接。 在从功率晶体管的顶侧向掩埋半导体层延伸的沟槽内形成至少一个连接。