公开(公告)号：US20170140898A1

公开(公告)日：2017-05-18

申请号：US15348761

申请日：2016-11-10

申请人： Sumitomo Heavy Industries Ion Technology Co., Ltd.

发明人： Hiroshi Kawaguchi

IPC分类号： H01J37/32 ,  B08B9/08

CPC分类号： H01J37/3244 ,  B08B9/08 ,  H01J37/08 ,  H01J37/3178 ,  H01J37/32357 ,  H01J37/32412 ,  H01J37/32422 ,  H01J37/32614 ,  H01J37/32862 ,  H01J2237/022 ,  H01J2237/0492 ,  H01J2237/055 ,  H01J2237/3365

摘要： An ion generator includes an ion source control unit that controls a gas supply unit and a plasma excitation source in accordance with a current ion source condition and a new ion source condition to be employed subsequent to the current ion source condition, a retention time obtaining unit that obtains retention time for the current ion source condition, and a pre-treatment condition setting unit that sets a pre-treatment condition defining a pre-treatment for forming a surface layer region suitable for the new ion source condition on a plasma chamber inner wall based on the current ion source condition, the retention time, and the new ion source condition. The ion source control unit is configured to control the gas supply unit and the plasma excitation source in accordance with the pre-treatment condition when the current ion source condition is changed to the new ion source condition.

公开(公告)号：US09308546B2

公开(公告)日：2016-04-12

申请号：US13824867

申请日：2012-06-05

申请人： Yusuke Yasunaga ,  Akihiro Goto ,  Hiroyuki Teramoto ,  Nobuyuki Sumi

发明人： Yusuke Yasunaga ,  Akihiro Goto ,  Hiroyuki Teramoto ,  Nobuyuki Sumi

IPC分类号： B05C11/00 ,  H01J37/32 ,  H05H1/46

CPC分类号： B05C11/00 ,  H01J37/3255 ,  H01J37/32577 ,  H01J37/32614 ,  H01J37/32825 ,  H05H1/46 ,  H05H2001/4682

摘要： A discharge surface treatment apparatus generates a pulsed discharge between poles, that is, between a discharge electrode and a workpiece, and the discharge electrode is obtained by compression-molding of any one of a metal powder, a powder of a metal compound, and a powder of ceramics or a mixture thereof. The apparatus forms a film made of an electrode material or the like on a workpiece surface by thermal energy due to the discharge. The apparatus includes: a capacitor that is connected to any one of the discharge electrode and the workpiece at one end; and a parallel circuit of a resistor and a diode, which is provided between another one of the discharge electrode and the workpiece and another end of the capacitor via a connection line.

摘要翻译： 放电表面处理装置在两极之间，即放电电极和工件之间产生脉冲放电，放电电极通过压缩成型金属粉末，金属化合物粉末和 陶瓷粉或其混合物。 该装置由于放电而通过热能在工件表面上形成由电极材料等制成的膜。 该装置包括：在一端连接到放电电极和工件中的任何一个的电容器; 以及通过连接线设置在放电电极和工件的另一个和电容器的另一端之间的电阻器和二极管的并联电路。

公开(公告)号：US20160099134A1

公开(公告)日：2016-04-07

申请号：US14786226

申请日：2014-04-17

申请人： PLANSEE SE

发明人： MATTHIAS PERL ,  PETER POLCIK ,  CONRAD POLZER ,  STEFAN SCHLICHTHERLE ,  GEORG STRAUSS

IPC分类号： H01J37/34 ,  C23C14/35 ,  C23C14/34

CPC分类号： H01J37/3405 ,  C21B2100/44 ,  C21B2100/60 ,  C21B2100/62 ,  C21B2100/66 ,  C21C5/305 ,  C21C5/562 ,  C21C5/567 ,  C23C14/325 ,  C23C14/3407 ,  C23C14/35 ,  H01J37/32055 ,  H01J37/32614 ,  H01J37/32669 ,  H01J37/3417 ,  Y02P10/216

摘要： An arc evaporation coating source includes a target made of a coating material to be vapor-deposited, a ferromagnetic yoke for influencing the vapor deposition of the coating material to be vapor-deposited and at least one permanent-magnetic body for influencing the vapor deposition of the coating material to be vapor-deposited. The ferromagnetic yoke is disposed in contact with the target. The permanent-magnetic body is fastened to the target by the ferromagnetic yoke.

摘要翻译： 电弧蒸发涂覆源包括由待气相沉积的涂层材料制成的靶，用于影响待气相沉积的涂层材料的气相沉积的铁磁轭和用于影响气相沉积的至少一个永久磁体 要蒸镀的涂料。 铁磁轭被设置成与靶接触。 永磁体通过铁磁轭固定到靶上。

公开(公告)号：US20160093477A1

公开(公告)日：2016-03-31

申请号：US14497077

申请日：2014-09-25

申请人： Apple Inc.

发明人： Matthew S. Rogers

IPC分类号： H01J37/32 ,  C23C14/00 ,  C23C16/455 ,  C23C16/50 ,  C23C16/458 ,  C23C14/34 ,  H01J37/34

CPC分类号： H01J37/32596 ,  C23C14/0021 ,  C23C14/0036 ,  C23C14/3407 ,  C23C14/3464 ,  C23C14/542 ,  C23C16/455 ,  C23C16/458 ,  C23C16/50 ,  C23C16/52 ,  C23C28/04 ,  G02B1/113 ,  H01J37/32403 ,  H01J37/32541 ,  H01J37/32614 ,  H01J37/3417 ,  H01J37/342 ,  H01J37/3423 ,  H01J37/3435 ,  H01J2237/006 ,  H01J2237/081 ,  H01J2237/327 ,  H01J2237/3321

摘要： Methods and systems for depositing a thin film are disclosed. The methods and systems can be used to deposit a film having a uniform thickness on a substrate surface that has a non-planar three-dimensional geometry, such as a curved surface. The methods involve the use of a deposition source that has a shape in accordance with the non-planar three-dimensional geometry of the substrate surface. In some embodiments, multiple layers of films are deposited onto each other forming multi-layered coatings. In some embodiments, the multi-layered coatings are antireflective (AR) coatings for windows or lenses.

摘要翻译： 公开了用于沉积薄膜的方法和系统。 方法和系统可以用于在具有非平面三维几何形状（例如弯曲表面）的衬底表面上沉积具有均匀厚度的膜。 这些方法涉及使用具有根据衬底表面的非平面三维几何形状的形状的沉积源。 在一些实施例中，将多层膜沉积到彼此上形成多层涂层。 在一些实施例中，多层涂层是用于窗户或透镜的抗反射（AR）涂层。

公开(公告)号：US20160038907A1

公开(公告)日：2016-02-11

申请号：US14547747

申请日：2014-11-19

申请人： The George Washington University

发明人： Michael Keidar ,  Alexey SHASHURIN

IPC分类号： B01J19/08 ,  C01B31/04

CPC分类号： B01J19/088 ,  B01J19/08 ,  B01J2219/0809 ,  B01J2219/0822 ,  B01J2219/083 ,  B01J2219/0839 ,  B01J2219/0875 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/184 ,  C01B32/186 ,  H01J37/32614 ,  H01J2329/0444

摘要： A system and method for producing graphene includes a discharge assembly and a substrate assembly. The discharge assembly includes a cathode and an anode, which in one embodiment are offset from each other. The anode produces a flux stream that is deposited onto a substrate. A collection device removes the deposited material from the rotating substrate. The flux stream can be a carbon vapor, with the deposited flux being graphene.

摘要翻译： 用于生产石墨烯的系统和方法包括排出组件和基底组件。 放电组件包括阴极和阳极，其在一个实施例中彼此偏移。 阳极产生沉积在基底上的通量流。 收集装置从旋转基板去除沉积的材料。 助熔剂流可以是碳蒸气，沉积的助焊剂是石墨烯。

公开(公告)号：US09165749B2

公开(公告)日：2015-10-20

申请号：US11747999

申请日：2007-05-14

申请人： Siegfried Krassnitzer ,  Jürg Hagmann ,  Juergen Gwehenberger

发明人： Siegfried Krassnitzer ,  Jürg Hagmann ,  Juergen Gwehenberger

IPC分类号： C23C14/56 ,  C23C14/32 ,  H01J37/32 ,  H01J37/34

CPC分类号： H01J37/3266 ,  C23C14/325 ,  C23C14/564 ,  H01J37/32055 ,  H01J37/32614 ,  H01J37/345 ,  H01J37/3452 ,  H01J37/3458

摘要： The invention relates to an arc source with a target (1) having a target front face (2) for the vacuum vaporization of the target material, a target backside with a cooling plate (4), a central target region (Z) as well as a target margin. The arc source further comprises a magnet configuration (8, 9) with an inner magnet system (8) and/or an outer magnet system (9) for the generation of a magnetic field in the proximity of the target front face. At least one of the magnet systems (8) is herein radially poled and effects alone or in connection with the particular other magnet system that the field lines of the magnetic field extend here substantially parallel to the target front face (2).

摘要翻译： 本发明涉及一种具有目标物（1）的电弧源，目标物（1）具有用于目标材料的真空蒸发的目标正面（2），具有冷却板（4）的目标背面，中心目标区域（Z）） 作为目标边际。 电弧源还包括具有用于在目标正面附近产生磁场的内磁体系统（8）和/或外磁体系统（9）的磁体构造（8,9）。 磁体系统（8）中的至少一个在本文中是径向极化的，并且单独地或与特定的其它磁体系统结合，磁场的场线在这里基本上平行于目标前表面（2）延伸。

公开(公告)号：US09153422B2

公开(公告)日：2015-10-06

申请号：US13564031

申请日：2012-08-01

申请人： Mariusz Warzyszynski ,  Jonathan Webster

发明人： Mariusz Warzyszynski

IPC分类号： H01J37/32 ,  H01J37/34 ,  C23C14/35 ,  C23C14/32

CPC分类号： H01J37/3458 ,  C23C14/325 ,  C23C14/35 ,  H01J37/32055 ,  H01J37/32614 ,  H01J37/34 ,  H01J37/3408 ,  H01J37/345 ,  H01J37/3452 ,  H01J37/3455

摘要： The invention relates to a method and an apparatus for applying metallic, ceramic or composite thin film coatings onto parts, components and tools (e.g. gas turbine engine compressor blades or cutting tools) by a cathodic arc deposition technique. The method and the apparatus allows for a continually changing structure of the applied film by nanoimplanting atoms, molecules, compounds or other chemical species and structures of different materials thus coating a substrate during a single process. Furthermore, during the same process it allows for creating a coating with specific parameters as required. For instance: hardness, smoothness, corrosion resistance, erosion resistance.

摘要翻译： 本发明涉及通过阴极电弧沉积技术将金属，陶瓷或复合薄膜涂层施加到零件，部件和工具（例如燃气涡轮发动机压缩机叶片或切割工具）上的方法和装置。 该方法和设备允许通过纳米植入原子，分子，化合物或其他化学物质和不同材料的结构，从而在单一过程中涂覆基底，从而持续改变施加膜的结构。 此外，在相同的过程中，它允许根据需要创建具有特定参数的涂层。 例如：硬度，光滑度，耐腐蚀性，耐腐蚀性。

公开(公告)号：US20150114828A1

公开(公告)日：2015-04-30

申请号：US14068436

申请日：2013-10-31

申请人： General Electric Company

发明人： Scott Andrew Weaver

IPC分类号： C23C14/32

CPC分类号： C23C14/325 ,  C23C14/046 ,  H01J37/32055 ,  H01J37/32394 ,  H01J37/32614

摘要： A system for use in coating an interior surface of an object is provided. The system includes a vacuum chamber enclosure defining an interior cavity configured to receive the object, an anode positioned within the interior cavity of the vacuum chamber enclosure, and a cathode positioned within the interior cavity of said vacuum chamber enclosure such that a space between the anode and the cathode is at least partially defined by the interior surface of the object. At least a portion of the cathode vaporizes when current is supplied thereto such that vaporized cathode material coats the interior surface of the object.

摘要翻译： 提供了一种用于涂覆物体内表面的系统。 该系统包括限定被配置为接收物体的内部空腔的真空室外壳，位于真空室外壳的内部空腔内的阳极和位于所述真空室外壳的内部空腔内的阴极，使得阳极 并且阴极至少部分地由物体的内表面限定。 当电流被提供给阴极时，阴极的至少一部分蒸发，使得汽化的阴极材料涂覆在物体的内表面上。

公开(公告)号：US20140076718A1

公开(公告)日：2014-03-20

申请号：US13617005

申请日：2012-09-14

申请人： Vladimir Gorokhovsky ,  William Grant ,  Edward W. Taylor ,  David Humenik ,  Klaus Brondum

发明人： Vladimir Gorokhovsky ,  William Grant ,  Edward W. Taylor ,  David Humenik ,  Klaus Brondum

IPC分类号： C23C14/32 ,  C23C14/35

CPC分类号： H01J37/3438 ,  C23C14/0641 ,  C23C14/22 ,  C23C14/32 ,  C23C14/325 ,  C23C14/3471 ,  C23C14/3478 ,  C23C14/35 ,  C23C14/354 ,  C23C14/355 ,  H01J37/32055 ,  H01J37/32614 ,  H01J37/32917 ,  H01J37/32935 ,  H01J37/3405 ,  H01J37/3408 ,  H01J37/3417 ,  H01J49/12

摘要： A coating system includes a vacuum chamber and a coating assembly positioned within the vacuum chamber. The coating assembly includes a vapor source that provides material to be coated onto a substrate, a substrate holder to hold substrates to be coated such that the substrates are positioned in front of the vapor source, a cathode chamber assembly, and a remote anode. The cathode chamber assembly includes a cathode, an optional primary anode and a shield which isolates the cathode from the vacuum chamber. The shield defines openings for transmitting an electron emission current from the cathode into the vacuum chamber. The vapor source is positioned between the cathode and the remote anode while the remote anode is coupled to the cathode.

摘要翻译： 涂覆系统包括真空室和位于真空室内的涂层组件。 涂层组件包括提供要涂覆到基底上的材料的蒸汽源，用于保持待涂覆的基底的基底保持器，使得基底位于蒸气源的前面，阴极室组件和远程阳极。 阴极室组件包括阴极，可选的主阳极和隔离真空室的阴极。 屏蔽件限定用于将电子发射电流从阴极传输到真空室中的开口。 蒸气源位于阴极和远程阳极之间，而远程阳极耦合到阴极。

公开(公告)号：US20130032469A1

公开(公告)日：2013-02-07

申请号：US13564031

申请日：2012-08-01

申请人： Jonathan Webster

发明人： Mariusz Warzyszynski

IPC分类号： C23C14/24 ,  B82Y40/00

CPC分类号： H01J37/3458 ,  C23C14/325 ,  C23C14/35 ,  H01J37/32055 ,  H01J37/32614 ,  H01J37/34 ,  H01J37/3408 ,  H01J37/345 ,  H01J37/3452 ,  H01J37/3455

摘要： The invention relates to a method and an apparatus for applying metallic, ceramic or composite thin film coatings onto parts, components and tools (e.g. gas turbine engine compressor blades or cutting tools) by a cathodic arc deposition technique. The method and the apparatus allows for a continually changing structure of the applied film by nanoimplanting atoms, molecules, compounds or other chemical species and structures of different materials thus coating a substrate during a single process. Furthermore, during the same process it allows for creating a coating with specific parameters as required. For instance: hardness, smoothness, corrosion resistance, erosion resistance.

摘要翻译： 本发明涉及通过阴极电弧沉积技术将金属，陶瓷或复合薄膜涂层施加到零件，部件和工具（例如燃气涡轮发动机压缩机叶片或切割工具）上的方法和装置。 该方法和设备允许通过纳米植入原子，分子，化合物或其他化学物质和不同材料的结构，从而在单一过程中涂覆基底，从而持续改变涂膜的结构。 此外，在相同的过程中，它允许根据需要创建具有特定参数的涂层。 例如：硬度，光滑度，耐腐蚀性，耐腐蚀性。