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    System and method for controlling charge-up in an electron beam apparatus
    101.
    发明授权
    System and method for controlling charge-up in an electron beam apparatus 有权
    用于控制电子束装置中的电荷的系统和方法

    公开(公告)号：US08907281B2

    公开(公告)日：2014-12-09

    申请号：US14081465

    申请日：2013-11-15

    Applicant: Hermes Microvision, Inc.

    Inventor： Weiming Ren ,  Zhongwei Chen

    IPC: H01J37/26 ,  H01J37/14 ,  H01J37/29

    CPC classification number: H01J37/026 ,  H01J37/14 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/0045 ,  H01J2237/0262 ,  H01J2237/1405 ,  H01J2237/2801 ,  H01J2237/2803

    Abstract: The present invention provides means and corresponding embodiments to control charge-up in an electron beam apparatus, which can eliminate the positive charges soon after being generated on the sample surface within a frame cycle of imaging scanning. The means are to let some or all of secondary electrons emitted from the sample surface return back to neutralize positive charges built up thereon so as to reach a charge balance within a limited time period. The embodiments use control electrodes to generate retarding fields to reflect some of secondary electrons with low kinetic energies back to the sample surface.

    Abstract translation: 本发明提供了用于控制电子束装置中的充电的装置和相应的实施例，其可以在成像扫描的帧周期内在样品表面上产生后不久就消除正电荷。 该方法是使从样品表面发射的二次电子的一些或全部返回到中和积聚在其上的正电荷，从而在有限的时间段内达到电荷平衡。 这些实施例使用控制电极产生延迟场，以将具有低动能的一些二次电子反射回样品表面。

    Charged Particle Beam Device
    102.
    发明申请
    Charged Particle Beam Device 有权
    带电粒子束装置

    公开(公告)号：US20140124666A1

    公开(公告)日：2014-05-08

    申请号：US14126792

    申请日：2012-04-16

    Applicant: Yuko Sasaki ,  Hiroyuki Ito

    Inventor： Yuko Sasaki ,  Hiroyuki Ito

    IPC: H01J37/05 ,  H01J37/26

    CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/26 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/2446 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2801 ,  H01J2237/2806

    Abstract: Provided is a charged particle beam device to improve energy solution of its energy filter. In one embodiment, a charged particle beam device includes a deflector to deflect charged particles emitted from a sample to an energy filter, and a change in brightness value with the change of voltage applied to the energy filter is found for each of a plurality of deflection conditions for the deflector, and a deflection condition such that a change in the brightness value satisfies a predetermined condition is set as the deflection condition for the deflector.

    Abstract translation: 提供了一种用于改善其能量过滤器的能量解决方案的带电粒子束装置。 在一个实施例中，带电粒子束装置包括偏转器，用于将从样品发射的带电粒子偏转到能量滤波器，并且针对多个偏转中的每一个发现随施加到能量滤波器的电压变化而引起的亮度值的变化 偏转器的条件以及使得亮度值的变化满足预定条件的偏转条件被设定为偏转器的偏转状态。

    Electron Microscope and Method of Adjusting the Same
    103.
    发明申请
    Electron Microscope and Method of Adjusting the Same 有权
    电子显微镜及其调整方法

    公开(公告)号：US20130327938A1

    公开(公告)日：2013-12-12

    申请号：US13915725

    申请日：2013-06-12

    Applicant: JEOL Ltd.

    Inventor： Yuji Kohno

    IPC: H01J37/22

    CPC classification number: H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0206 ,  H01J2237/0209 ,  H01J2237/06341 ,  H01J2237/24514 ,  H01J2237/24528 ,  H01J2237/2801 ,  H01J2237/2826

    Abstract: An electron microscope is offered which has a detector and a noise canceling circuit whose offset can be easily adjusted if any information about the offset of the detector is not available. Also, a method of adjusting this microscope is offered. The method of adjusting the electron microscope (1) starts with measuring the output voltage from a preamplifier (20) at given timing while blocking the electron beam transmitted through a sample (14) from hitting the detector (15) (step S140). An offset voltage to be set into the noise canceling circuit (30) is calculated based on the measured output voltage from the preamplifier (20) (step S150). The calculated offset voltage is set into the noise canceling circuit (30) (step S160).

    Abstract translation: 提供具有检测器和噪声消除电路的电子显微镜，如果没有关于检测器的偏移的信息不可用，则可以容易地调整其偏移。 此外，还提供了一种调整该显微镜的方法。 调整电子显微镜（1）的方法从在给定时刻测量来自前置放大器（20）的输出电压开始，同时阻挡透过样品（14）的电子束撞击检测器（15）（步骤S140）。 基于来自前置放大器（20）的测量输出电压计算要设置到噪声消除电路（30）中的偏移电压（步骤S150）。 将计算出的偏移电压设定在噪声消除电路（30）中（步骤S160）。

    Sample carrier comprising a deformable strip of material folded back upon itself and sample holder
    105.
    发明授权
    Sample carrier comprising a deformable strip of material folded back upon itself and sample holder 有权
    样品载体包括折叠在其自身和样品架上的可变形材料条

    公开(公告)号：US08011259B2

    公开(公告)日：2011-09-06

    申请号：US12786974

    申请日：2010-05-25

    Applicant: Pleun Dona

    Inventor： Pleun Dona

    IPC: B01L3/00 ,  G21K5/10

    CPC classification number: H01J37/20 ,  H01J2237/2801

    Abstract: The invention relates to a composite structure of a sample carrier 20 and a sample holder 30 for use in a TEM, for example. The sample carrier is hereby separately embodied from the sample holder. Although such compositions are already known, the known compositions are very fragile constructions. The sample carrier according to the invention can be formed from a strip of metal, and is a simple and cheap element. Using resilient force, it clamps onto or into the sample holder. The portion of the sample holder to which the sample carrier couples also has a simple form. The sample carrier can couple to the sample holder in vacuum using a coupling tool.

    Abstract translation: 本发明涉及例如用于TEM的样品载体20和样品保持器30的复合结构。 样品载体在此独立于样品架。 虽然这些组合物是已知的，但是已知的组合物是非常脆弱的结构。 根据本发明的样品载体可以由金属条形成，并且是简单且便宜的元件。 使用弹性力，它夹在样品架上或进入样品架。 样品载体耦合的样品架的部分也具有简单的形式。 样品载体可以使用耦合工具在真空中耦合到样品架。

    INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE
    107.
    发明申请
    INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE 有权
    界面，用于观察非真空环境中的对象和扫描电子显微镜的方法

    公开(公告)号：US20100140470A1

    公开(公告)日：2010-06-10

    申请号：US12446757

    申请日：2007-10-23

    Applicant: Dov Shachal

    Inventor： Dov Shachal

    IPC: G01N23/225 ,  F16J15/02

    CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

    Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

    Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受所述真空环境和所述非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

    Sample carrier and sample holder
    108.
    发明申请
    Sample carrier and sample holder 有权
    样品载体和样品架

    公开(公告)号：US20080250881A1

    公开(公告)日：2008-10-16

    申请号：US11807876

    申请日：2007-05-29

    Applicant: Pleun Dona

    Inventor： Pleun Dona

    IPC: B01L3/00

    CPC classification number: H01J37/20 ,  H01J2237/2801

    Abstract: The invention relates to a composite structure of a sample carrier 20 and a sample holder 30 for use in a TEM, for example. The sample carrier is hereby separately embodied from the sample holder. Although such compositions are already known, the known compositions are very fragile constructions. The sample carrier according to the invention can be formed from a strip of metal, and is a simple and cheap element. Using resilient force, it clamps onto or into the sample holder. The portion of the sample holder to which the sample carrier couples also has a simple form. The sample carrier can couple to the sample holder in vacuum using a coupling tool.

    Abstract translation: 本发明涉及例如用于TEM的样品载体20和样品保持器30的复合结构。 样品载体在此独立于样品架。 虽然这些组合物是已知的，但是已知的组合物是非常脆弱的结构。 根据本发明的样品载体可以由金属条形成，并且是简单且便宜的元件。 使用弹性力，它夹在样品架上或进入样品架。 样品载体耦合的样品架的部分也具有简单的形式。 样品载体可以使用耦合工具在真空中耦合到样品架。

    Single stage charged particle beam energy width reduction system for charged particle beam system
    110.
    发明申请
    Single stage charged particle beam energy width reduction system for charged particle beam system 有权
    用于带电粒子束系统的单级带电粒子束能量减小系统

    公开(公告)号：US20070158561A1

    公开(公告)日：2007-07-12

    申请号：US10571345

    申请日：2004-09-02

    Applicant: Jurgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio ,  Gerald Schonecker

    Inventor： Jurgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio ,  Gerald Schonecker

    IPC: G21K7/00

    CPC classification number: H01J37/153 ,  H01J49/288 ,  H01J49/466 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/2801

    Abstract: The present invention provides a charged particle beam device. The device comprises a first lens (101; 510) generating a crossover a second lens (102; 512) positioned after the crossover and a element acting in a focusing and dispersive manner in an x-z-plane with a center of the element having essentially same z-position as the crossover. Further, a multipole element, which acts in the x-z-plane and a y-z-plane is provided. A first charged particle selection element and a second charged particle selection element are used for selecting a portion of the charged particles. Thereby, e.g. the energy width of the charged particle beam can be reduced.

    Abstract translation: 本发明提供一种带电粒子束装置。 所述装置包括产生交叉的第一透镜（101; 510），所述第二透镜位于所述交叉之后，所述第二透镜（102; 512）位于所述交叉之后，并且所述元件以聚焦和分散方式作用在xz平面中，所述元件的中心具有基本相同 z位置作为交叉。 此外，提供了作用于x-z平面和y-z平面的多极元件。 第一带电粒子选择元件和第二带电粒子选择元件用于选择一部分带电粒子。 因此，例如 可以减少带电粒子束的能量宽度。

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