SUPPORT MECHANISM AND VACUUMM COATING MACHINE USING THE SAME
    113.
    发明申请
    SUPPORT MECHANISM AND VACUUMM COATING MACHINE USING THE SAME 审中-公开
    支持机构和VACUUMM涂布机使用相同

    公开(公告)号:US20130125811A1

    公开(公告)日:2013-05-23

    申请号:US13372066

    申请日:2012-02-13

    Applicant: Juin-Hong LIN

    Inventor: Juin-Hong LIN

    CPC classification number: C23C14/044 C23C14/50 H01J2237/2007

    Abstract: A support mechanism includes a base plate, a plurality of mounting members and a plurality of adjusting members. The base plate defines a plurality of receiving holes, and each mounting member is received in one receiving hole. The adjusting members adjustably engage with the mounting members and resist on the base plate, and the plurality of adjusting members are capable of adjusting the height and tilt angle of the mounting members. The present invention further discloses a vacuum coating machine using the support mechanism.

    Abstract translation: 支撑机构包括基板,多个安装构件和多个调节构件。 基板限定多个接收孔,并且每个安装构件容纳在一个接收孔中。 调节构件与安装构件可调节地接合并抵抗在基板上,并且多个调节构件能够调节安装构件的高度和倾斜角度。 本发明还公开了一种使用该支撑机构的真空镀膜机。

    Method For Forming Thin Film And Apparatus Therefor
    115.
    发明申请
    Method For Forming Thin Film And Apparatus Therefor 审中-公开
    薄膜形成方法及其设备

    公开(公告)号:US20110297089A1

    公开(公告)日:2011-12-08

    申请号:US13211901

    申请日:2011-08-17

    CPC classification number: C23C16/509 H01L31/1804 Y02E10/547 Y02P70/521

    Abstract: A plurality of antenna elements, each of which has first and second linear conductors whose first ends are electrically interconnected are formed. The antenna elements are arranged in plane in such a way that the first and second linear conductors are alternated and separated from one another at regular intervals, thereby forming one or more array antennas which are disposed in a chamber. The second ends of the first linear conductors are connected to a high-frequency power supply, and the second ends of the second linear conductors are connected to ground. A plurality of substrates are parallel placed on both sides of the array antennas at distances approximate to the distances between the linear conductors. A film is formed by introducing an ingredient gas into the chamber.

    Abstract translation: 形成有多个天线元件,每个天线元件具有第一和第二线性导体,其第一端电互连。 天线元件布置在平面中,使得第一和第二线性导体以规则的间隔彼此交替和分离,从而形成设置在腔室中的一个或多个阵列天线。 第一线性导体的第二端连接到高频电源,第二线性导体的第二端连接到地。 多个基板平行地放置在阵列天线的两侧,距离线性导体之间的距离近似。 通过将成分气体引入室中形成膜。

    PAINT SHOP AND METHOD OF OPERATING A PAINT SHOP
    116.
    发明申请
    PAINT SHOP AND METHOD OF OPERATING A PAINT SHOP 有权
    涂料店和操作摊铺方法

    公开(公告)号:US20110274827A1

    公开(公告)日:2011-11-10

    申请号:US13163316

    申请日:2011-06-17

    Abstract: In a paint plant which comprises at least one spray-painting device incorporating at least one application unit for painting workpieces and in particular motor vehicle bodies with a fluid paint, in order to enable the fluid paint overspray i.e. the paint particles which are not adhering to the workpieces that are to be painted and which are picked up and carried along in an air flow passing through the application area of the paint shop, to be re-separated from this air flow and also to enable the cleansed air flow to be returned to the application area in an air re-circulating system or else expelled into the environment of the plant, the paint shop comprises a device for separating fluid paint overspray from a stream of crude gas that contains overspray particles wherein this device comprises at least one filter element for separating the overspray from the stream of crude gas.

    Abstract translation: 在包括至少一个喷涂装置的油漆装置中,该装置至少包括一个用于对工件进行喷涂的施加单元,特别是具有流体油漆的机动车体,以便能够使流体油漆过喷,即不粘附于油漆颗粒 要被喷涂并且在通过涂料车间的涂覆区域的空气流中被携带并被携带的工件将被从该空气流中重新分离,并且还使清洁的气流返回到 空气再循环系统中的应用区域或排出到工厂的环境中,油漆车间包括用于从含有过度喷射颗粒的原油流中分离流体油漆过喷的装置,其中该装置包括至少一个过滤元件 用于将过量喷射与粗气流分离。

    APPARATUS AND METHOD FOR TREATING SUBSTRATE
    118.
    发明申请
    APPARATUS AND METHOD FOR TREATING SUBSTRATE 审中-公开
    用于处理基板的装置和方法

    公开(公告)号:US20110239937A1

    公开(公告)日:2011-10-06

    申请号:US13053870

    申请日:2011-03-22

    Abstract: A substrate treating apparatus and method include a load lock chamber providing a space where a process is performed. While a boat supporting the substrate is positioned in the load lock chamber, a cooling member cools an inside of the load lock chamber at different temperatures according to area or region in a vertical direction of the load lock chamber.

    Abstract translation: 基板处理装置和方法包括提供执行处理的空间的装载锁定室。 当支撑基板的船舶位于负载锁定室中时,冷却部件根据负载锁定室的垂直方向上的区域或区域在不同的温度下冷却负载锁定室的内部。

    METHOD AND APPARATUS FOR FORMING OPTICAL FILM, AND OPTICAL ARTICLE
    119.
    发明申请
    METHOD AND APPARATUS FOR FORMING OPTICAL FILM, AND OPTICAL ARTICLE 审中-公开
    用于形成光学膜的方法和装置,以及光学文章

    公开(公告)号:US20110203519A1

    公开(公告)日:2011-08-25

    申请号:US13097854

    申请日:2011-04-29

    CPC classification number: G02B1/111 C03C17/001 C03C17/02 C03C2218/116

    Abstract: An apparatus for forming an optical film on an optical substrate is provided. The apparatus may include a rotatable jig for fixedly holding the optical substrate, an apparatus for rotating the jig, and a nozzle for dispensing a coating solution containing an optical-film-forming component onto the optical substrate. A rotation speed of the jig may be 8,000 rpm or more, and a deviation of rotation axis of the jig may be 50 μm or less.

    Abstract translation: 提供了一种在光学基板上形成光学膜的装置。 该装置可以包括用于固定保持光学基板的旋转夹具,用于旋转夹具的装置,以及用于将含有光学膜形成部件的涂布溶液分配到光学基板上的喷嘴。 夹具的旋转速度可以为8000rpm以上,夹具的旋转轴的偏差可以为50μm以下。

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