Solenoid inductor in a substrate
    146.
    发明授权

    公开(公告)号:US09806144B2

    公开(公告)日:2017-10-31

    申请号:US14079488

    申请日:2013-11-13

    CPC classification number: H01L28/10 H01F17/0013 H01F41/041 H01F2017/0053

    Abstract: Some implementations provide an integrated device (e.g., semiconductor device) that includes a substrate and an inductor in the substrate. In some implementations, the inductor is a solenoid inductor. The inductor includes a set of windings. The set of windings has an inner perimeter. The set of windings includes a set of interconnects and a set of vias. The set of interconnects and the set of vias are located outside the inner perimeter of the set of windings. In some implementations, the set of windings further includes a set of capture pads. The set of interconnects is coupled to the set of vias through the set of capture pads. In some implementations, the set of windings has an outer perimeter. The set of pads is coupled to the set of interconnects such that the set of pads is at least partially outside the outer perimeter of the set of windings.

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