Semiconductor device and method of fabricating the same
    15.
    发明授权
    Semiconductor device and method of fabricating the same 有权
    半导体装置及其制造方法

    公开(公告)号:US09190404B2

    公开(公告)日:2015-11-17

    申请号:US13949289

    申请日:2013-07-24

    Abstract: Provided are a semiconductor device and a method of fabricating the same. The device may include a transistor on a substrate comprising a gate insulating pattern, a gate electrode and an impurity region, a shared contact plug electrically connected to the gate electrode and the impurity region, and an etch-stop layer between side surfaces of the gate electrode and the shared contact. The shared contact plug may include a first conductive pattern electrically connected to the first impurity region and a second conductive pattern electrically connected to the gate electrode, and a top surface of the first conductive pattern may be higher than a top surface of the gate electrode.

    Abstract translation: 提供半导体器件及其制造方法。 器件可以包括在包括栅极绝缘图案,栅极电极和杂质区域的衬底上的晶体管,电连接到栅极电极和杂质区域的共用接触插塞以及栅极侧表面之间的蚀刻停止层 电极和共用触点。 共享接触插头可以包括电连接到第一杂质区域的第一导电图案和电连接到栅电极的第二导电图案,并且第一导电图案的顶表面可以高于栅电极的顶表面。

    Semiconductor device and a method of manufacturing the semiconductor device

    公开(公告)号:US12243754B2

    公开(公告)日:2025-03-04

    申请号:US17517304

    申请日:2021-11-02

    Abstract: Provided is a semiconductor device. The semiconductor device comprises a first active pattern extending in a first direction on a substrate, a second active pattern which extends in the first direction and is adjacent to the first active pattern in a second direction different from the first direction, a field insulating film placed between the first active pattern and the second active pattern, a first gate structure which crosses the first active pattern, extends in the second direction, and includes a first gate electrode and a first gate spacer, a second gate structure which crosses the second active pattern, extends in the second direction, and includes a second gate electrode and a second gate spacer, a gate separation structure placed on the field insulating film between the first gate structure and the second gate structure.

    Semiconductor device and method for fabricating the same

    公开(公告)号:US12148749B2

    公开(公告)日:2024-11-19

    申请号:US17502554

    申请日:2021-10-15

    Inventor: Cheol Kim

    Abstract: A semiconductor device including a substrate, first and second active patterns, each including first and second side walls, a field insulation layer surrounding side walls of each of the first and second active patterns, a first dam between the first and second active patterns and having a lower surface lower than an upper surface of the field insulation layer, a second dam spaced apart from the first side wall of the first active pattern and having a lower surface lower than the upper surface of the field insulation layer, a first gate electrode on the first dam between the first and second active patterns, a second gate electrode spaced apart from the first gate electrode, and a first gate cut spaced apart from each of the first side walls of each of the first and second active patterns and intersecting each of the first and second gate electrodes.

    SEMICONDUCTOR DEVICE
    19.
    发明申请

    公开(公告)号:US20220406775A1

    公开(公告)日:2022-12-22

    申请号:US17713834

    申请日:2022-04-05

    Abstract: A semiconductor device includes first and second active regions parallel to each other and respectively extending in a first direction, an isolation layer between the first and second active regions, a first line structure and a second line structure overlapping the first and second active regions and the isolation layer, parallel to each other, and extending in a second direction, a first source/drain region on the first active region, and a second source/drain region on the second active region. The first line structure includes a first gate structure, a second gate structure, and a first insulating separation pattern between the first and second gate structures. The second line structure includes a third gate structure, a fourth gate structure, and a second insulating separation pattern between the third and fourth gate structures. The first and second insulating separation patterns are spaced apart from each other. The first insulating separation pattern has first and second side surfaces opposing each other, and third and fourth side surfaces opposing each other. At least one of the first and second side surfaces and at least one of the third and fourth side surfaces have different side profiles.

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