Method of processing a semiconductor wafer such as to make prototypes and related apparatus
    195.
    发明授权
    Method of processing a semiconductor wafer such as to make prototypes and related apparatus 有权
    处理半导体晶片的方法,例如制造原型和相关装置

    公开(公告)号:US09377678B2

    公开(公告)日:2016-06-28

    申请号:US14084773

    申请日:2013-11-20

    Inventor: Alan Lee Xi Ge

    CPC classification number: G03F1/00 G03F1/42 G03F1/50 G03F7/70283 G03F7/70425

    Abstract: A method of processing a semiconductor wafer may include providing a rotatably alignable photolithography mask that includes different mask images. Each mask image may be in a corresponding different mask sector. The method may also include performing a series of exposures with the rotatably alignable photolithography mask at different rotational alignments with respect to the semiconductor wafer so that the different mask images produce at least one working semiconductor wafer sector, and at least one non-working semiconductor wafer sector.

    Abstract translation: 一种处理半导体晶片的方法可以包括提供包括不同掩模图像的可旋转对准的光刻掩模。 每个掩模图像可以在相应的不同的掩模扇区中。 该方法还可以包括使用相对于半导体晶片的不同旋转对准的可旋转对准的光刻掩模执行一系列曝光,使得不同的掩模图像产生至少一个工作半导体晶片扇区,以及至少一个非工作半导体晶片 部门。

    Durable miniature gas composition detector having fast response time
    196.
    发明授权
    Durable miniature gas composition detector having fast response time 有权
    耐久的微型气体成分检测器具有快速响应时间

    公开(公告)号:US09234876B2

    公开(公告)日:2016-01-12

    申请号:US13853805

    申请日:2013-03-29

    Abstract: A miniature oxygen sensor makes use of paramagnetic properties of oxygen gas to provide a fast response time, low power consumption, improved accuracy and sensitivity, and superior durability. The miniature oxygen sensor disclosed maintains a sample of ambient air within a micro-channel formed in a semiconductor substrate. O2 molecules segregate in response to an applied magnetic field, thereby establishing a measureable Hall voltage. Oxygen present in the sample of ambient air can be deduced from a change in Hall voltage with variation in the applied magnetic field. The magnetic field can be applied either by an external magnet or by a thin film magnet integrated into a gas sensing cavity within the micro-channel. A differential sensor further includes a reference element containing an unmagnetized control sample. The miniature oxygen sensor is suitable for use as a real-time air quality monitor in consumer products such as smart phones.

    Abstract translation: 微型氧传感器利用氧气的顺磁特性提供快速的响应时间,低功耗,提高的精度和灵敏度以及优异的耐久性。 所公开的微型氧传感器在半导体衬底中形成的微通道内保持环境空气样品。 O 2分子响应于施加的磁场而分离,从而建立可测量的霍尔电压。 环境空气样品中存在的氧气可以从施加磁场变化的霍尔电压变化推导出来。 磁场可以由外部磁体或集成到微通道内的气体感测腔中的薄膜磁体施加。 差分传感器还包括含有非磁化控制样品的参考元件。 微型氧传感器适用于智能手机等消费类产品中的实时空气质量监控。

    FLEXIBLE ELECTROCHEMICAL MICRO-SENSOR
    199.
    发明申请
    FLEXIBLE ELECTROCHEMICAL MICRO-SENSOR 有权
    柔性电化学微传感器

    公开(公告)号:US20150253276A1

    公开(公告)日:2015-09-10

    申请号:US14200828

    申请日:2014-03-07

    CPC classification number: A61B5/1473 A61B5/14532 A61B5/1468 G01N27/3272

    Abstract: A universal electrochemical micro-sensor can be used either as a biosensor or an environmental sensor. Because of its small size and flexibility, the micro-sensor is suitable for continuous use to monitor fluids within a live subject, or as an environmental monitor. The micro-sensor can be formed on a reusable glass carrier substrate. A flexible polymer backing, together with a set of electrodes, forms a reservoir that contains an electrolytic fluid chemical reagent. During fabrication, the glass carrier substrate protects the fluid chemical reagent from degradation. A conductive micromesh further contains the reagent while allowing partial exposure to the ambient biological or atmospheric environment. The micromesh density can be altered to accommodate fluid reagents having different viscosities. Flexibility is achieved by attaching a thick polymer tape and peeling away the micro-sensor from the glass carrier substrate. The final structure is thereby transferred to the polymer tape, providing a flexible product.

    Abstract translation: 通用电化学微传感器可用作生物传感器或环境传感器。 由于其微小的尺寸和灵活性,微型传感器适用于连续使用,以监测活体内的流体,或作为环境监测器。 微传感器可以形成在可重复使用的玻璃载体基板上。 柔性聚合物背衬与一组电极一起形成包含电解液化学试剂的储存器。 在制造过程中,玻璃载体衬底保护流体化学试剂不被降解。 导电微胶粒还含有试剂,同时允许部分暴露于环境生物或大气环境。 可以改变微孔密度以适应具有不同粘度的流体试剂。 柔性通过附加厚的聚合物带并将微传感器从玻璃载体基底上剥离来实现。 由此将最终结构转移到聚合物带上,提供柔性产品。

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