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    Systems and Methods for the Production of Highly Tetrahedral Amorphous Carbon Coatings
    233.
    发明申请
    Systems and Methods for the Production of Highly Tetrahedral Amorphous Carbon Coatings 有权
    用于生产高四面体非晶碳涂层的系统和方法

    公开(公告)号：US20090162572A1

    公开(公告)日：2009-06-25

    申请号：US12333861

    申请日：2008-12-12

    Applicant: Vijayen Veerasamy ,  Manfred Weiler ,  Eric Li

    Inventor： Vijayen Veerasamy ,  Manfred Weiler ,  Eric Li

    IPC: H05H1/24 ,  C23C16/26

    CPC classification number: H01J37/32357 ,  C03C17/22 ,  C03C2217/282 ,  C03C2218/151 ,  C23C16/26 ,  C23C16/486 ,  G11B5/72 ,  G11B5/8408 ,  H01J27/18 ,  H01J37/08 ,  H01J37/32091 ,  H01J2237/0815 ,  Y10T428/1164 ,  Y10T428/24355 ,  Y10T428/265 ,  Y10T428/30 ,  Y10T428/31678

    Abstract: The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.

    Abstract translation: 本发明提供用于沉积改进的类金刚石碳材料的系统和方法，特别是用于生产磁记录介质。 本发明的类金刚石碳材料是高度四面体的，即具有大量在金刚石晶格内发现的sp 3碳 - 碳键。 该材料也是无定形的，提供短距离顺序与远程障碍的组合，并且可以以基本上低于已知无定形碳涂层材料的厚度超薄且连续的膜沉积。 本发明的碳保护涂层通常将被氢化。 在用于沉积这些材料的优选方法中，电容耦合形成来自致密的感应电离等离子体的高度均匀的选择性激励的离子流。 这种感应电离通过相对较慢的移动（或“准静态”）磁场增强，这促进了共振电离和离子束均匀化。

    Techniques for providing a ribbon-shaped gas cluster ion beam
    234.
    发明授权
    Techniques for providing a ribbon-shaped gas cluster ion beam 有权
    提供带状气体簇离子束的技术

    公开(公告)号：US07547900B2

    公开(公告)日：2009-06-16

    申请号：US11615290

    申请日：2006-12-22

    Applicant: Anthony Renau ,  Joseph C. Olson ,  Jonathan Gerald England

    Inventor： Anthony Renau ,  Joseph C. Olson ,  Jonathan Gerald England

    IPC: G21K5/04 ,  G21K5/10 ,  H01J37/317

    CPC classification number: H01J27/026 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/006 ,  H01J2237/0812 ,  H01J2237/15

    Abstract: Techniques for providing a ribbon-shaped gas cluster ion beam are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for providing a ribbon-shaped gas cluster ion beam. The apparatus may comprise at least one nozzle configured to inject a source gas at a sufficient speed into a low-pressure vacuum space to form gas clusters. The apparatus may also comprise at least one ionizer that causes at least a portion of the gas clusters to be ionized. The apparatus may further comprise a beam-shaping mechanism that forms a ribbon-shaped gas cluster ion beam based on the ionized gas clusters.

    Abstract translation: 公开了提供带状气体簇离子束的技术。 在一个特定的示例性实施例中，可以将技术实现为用于提供带状气体簇离子束的装置。 该装置可以包括至少一个喷嘴，其构造成以足够的速度将源气体注入到低压真空空间中以形成气体团。 该装置还可以包括使至少一部分气体簇被离子化的至少一个离子发生器。 该装置还可以包括基于离子化气体簇形成带状气体团簇离子束的束形成机构。

    Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production
    235.
    发明授权
    Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production 失效
    具有高四面体无定形碳保护层的记录介质及其生产方法

    公开(公告)号：US07544397B2

    公开(公告)日：2009-06-09

    申请号：US10773796

    申请日：2004-02-06

    Applicant: Vijayen Veerasamy ,  Manfred Weiler ,  Eric Li

    Inventor： Vijayen Veerasamy ,  Manfred Weiler ,  Eric Li

    IPC: C23C14/06 ,  C23C14/22 ,  C23C16/26 ,  C23C16/50 ,  H05H1/16 ,  H05H1/24 ,  C23C14/48 ,  C23C14/46 ,  C23C16/27

    CPC classification number: H01J37/32357 ,  C03C17/22 ,  C03C2217/282 ,  C03C2218/151 ,  C23C16/26 ,  C23C16/486 ,  G11B5/72 ,  G11B5/8408 ,  H01J27/18 ,  H01J37/08 ,  H01J37/32091 ,  H01J2237/0815 ,  Y10T428/1164 ,  Y10T428/24355 ,  Y10T428/265 ,  Y10T428/30 ,  Y10T428/31678

    Abstract: The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.

    Abstract translation: 本发明提供用于沉积改进的类金刚石碳材料的系统和方法，特别是用于生产磁记录介质。 本发明的类金刚石碳材料是高度四面体的，即具有大量在金刚石晶格内发现的sp 3碳 - 碳键。 该材料也是无定形的，提供短距离顺序与远程障碍的组合，并且可以以基本上低于已知无定形碳涂层材料的厚度超薄且连续的膜沉积。 本发明的碳保护涂层通常将被氢化。 在用于沉积这些材料的优选方法中，电容耦合形成来自致密的感应电离等离子体的高度均匀的选择性激励的离子流。 这种感应电离通过相对较慢的移动（或“准静态”）磁场增强，这促进了共振电离和离子束均匀化。

    CHARGED PARTICLE SOURCE WITH AUTOMATED TIP FORMATION
    236.
    发明申请
    CHARGED PARTICLE SOURCE WITH AUTOMATED TIP FORMATION 有权
    充电颗粒源自动提示形成

    公开(公告)号：US20090121160A1

    公开(公告)日：2009-05-14

    申请号：US12253042

    申请日：2008-10-16

    Applicant: Dieter Winkler ,  Udo Weigel ,  Stefan Grimm

    Inventor： Dieter Winkler ,  Udo Weigel ,  Stefan Grimm

    IPC: G01J1/00

    CPC classification number: H01J37/073 ,  H01J27/26 ,  H01J37/08 ,  H01J37/265 ,  H01J37/304 ,  H01J2237/06341 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/30466 ,  H01J2237/30477 ,  H01J2237/31749

    Abstract: A charged particle beam device is described. The device includes an emitter unit including an emitter tip; a voltage supply unit adapted for providing a stable voltage to generate a stable extraction field at the emitter tip; a pulsed voltage supply member adapted for providing a pulsed voltage to generate a pulsed extraction field on top of the stable extraction field; a measuring unit for measuring an emitter characteristic; and a control unit adapted for receiving a signal from the measuring unit and for control of the pulsed voltage supply member.

    Abstract translation: 描述带电粒子束装置。 该装置包括发射器单元，其包括发射极尖端; 电压供应单元，适于提供稳定的电压以在发射极尖端处产生稳定的提取场; 脉冲电压供应构件，其适于提供脉冲电压以在所述稳定提取场的顶部产生脉冲提取场; 用于测量发射极特性的测量单元; 以及控制单元，适于接收来自测量单元的信号并用于控制脉冲电压供应构件。

    Systems and methods for the production of highly tetrahedral amorphous carbon coatings
    238.
    发明授权
    Systems and methods for the production of highly tetrahedral amorphous carbon coatings 失效
    用于生产高四面体无定形碳涂层的系统和方法

    公开(公告)号：US07513215B2

    公开(公告)日：2009-04-07

    申请号：US11463577

    申请日：2006-08-09

    Applicant: Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

    Inventor： Veerasamy Vijayen ,  Manfred Weiler ,  Eric Li

    IPC: C23C16/00

    CPC classification number: H01J37/32357 ,  C03C17/22 ,  C03C2217/282 ,  C03C2218/151 ,  C23C16/26 ,  C23C16/486 ,  G11B5/72 ,  G11B5/8408 ,  H01J27/18 ,  H01J37/08 ,  H01J37/32091 ,  H01J2237/0815 ,  Y10T428/1164 ,  Y10T428/24355 ,  Y10T428/265 ,  Y10T428/30 ,  Y10T428/31678

    Abstract: The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon-carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.

    Abstract translation: 本发明提供用于沉积改进的类金刚石碳材料的系统和方法，特别是用于生产磁记录介质。 本发明的类金刚石碳材料是高度四面体的，即具有大量在金刚石晶格内发现的sp 3碳 - 碳键。 该材料也是无定形的，提供短距离顺序与远程障碍的组合，并且可以以基本上低于已知无定形碳涂层材料的厚度超薄且连续的膜沉积。 本发明的碳保护涂层通常将被氢化。 在用于沉积这些材料的优选方法中，电容耦合形成来自致密的感应电离等离子体的高度均匀的选择性激励的离子流。 这种感应电离通过相对较慢的移动（或“准静态”）磁场增强，这促进了共振电离和离子束均匀化。

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