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36 条记录 (耗时 0.031 秒)

    Switch array
    22.
    发明授权
    Switch array 失效
    开关阵列

    公开(公告)号：US07994443B2

    公开(公告)日：2011-08-09

    申请号：US11886856

    申请日：2006-03-20

    申请人： Masato Hayashi ,  Masami Yakabe ,  Tetsuya Hasebe ,  Muneo Harada ,  Katsuya Okumura

    发明人： Masato Hayashi ,  Masami Yakabe ,  Tetsuya Hasebe ,  Muneo Harada ,  Katsuya Okumura

    IPC分类号： H01H1/00 ,  H01H9/00

    CPC分类号： H01H1/0036 ,  B81B3/0054 ,  B81B2201/014 ,  B81B2203/053 ,  H01H1/24 ,  H01H37/46 ,  H01H67/22 ,  H01H2001/0042 ,  H01H2037/008

    摘要： A first wiring layer 16 is disposed on an insulating film 14 on the lower surface of an upper substrate 15, while a second wiring layer 13three-dimensionally crossing the first wiring layer 16 is provided on the insulating film 12 on a lower substrate 11. A cantilever 17 has one end connected to the first wiring layer 16 and the other end opposed to the second wiring layer 13 with a space therebetween. A thermoplastic sheet 19 is arranged on the upper substrate 15 so as to cover the through-hole 18. The thermoplastic sheet 19 is pressed by a heated pin 20 against the cantilever 17 and deformed so as to maintain the connection between the cantilever 17and the second wiring layer 13, and therefore close the switch 10.

    摘要翻译： 第一布线层16设置在上基板15的下表面上的绝缘膜14上，而在下基板11上的绝缘膜12上设置与第一布线层16三维交叉的第二布线层13。 悬臂17的一端与第一配线层16连接，另一端与第二配线层13相对置，而其间具有间隔。 热塑片19布置在上基板15上以覆盖通孔18.热塑片19被加热的销20压靠在悬臂17上并变形，从而保持悬臂17和第二个之间的连接 布线层13，因此闭合开关10。

    CHROMATOGRAPHY COLUMN AND MANUFACTURING METHOD OF THE SAME
    23.
    发明申请
    CHROMATOGRAPHY COLUMN AND MANUFACTURING METHOD OF THE SAME 审中-公开
    色谱柱及其制造方法

    公开(公告)号：US20100032357A1

    公开(公告)日：2010-02-11

    申请号：US12377274

    申请日：2007-08-14

    申请人： Tomofumi Kiyomoto ,  Muneo Harada ,  Hiroyuki Moriyama ,  Katsuya Okumura

    发明人： Tomofumi Kiyomoto ,  Muneo Harada ,  Hiroyuki Moriyama ,  Katsuya Okumura

    IPC分类号： B01D15/08 ,  B44C1/22

    CPC分类号： G01N30/6095 ,  G01N30/52 ,  G01N2030/525

    摘要： A high separation efficiency column 10 for chromatography and a manufacturing method thereof are provided. The column 10 for chromatography includes a first substrate 11 having a plurality of pillars 22 formed on one surface thereof and a second substrate 12 bonded to the one surface of the first substrate 11 and constituting a flow path 13 together with the plurality of pillars 22 formed on the first substrate. At least a surface of each pillar is formed in a porous shape.

    摘要翻译： 提供了用于色谱法的高分离效率柱10及其制造方法。 用于层析的柱10包括：第一基板11，其具有在其一个表面上形成的多个柱22;以及第二基板12，其与第一基板11的一个表面接合，并与形成的多个柱22一起构成流路13 在第一基板上。 每个柱的至少一个表面形成为多孔形状。

    Pattern forming apparatus and method of manufacturing pattern forming apparatus
    24.
    发明申请
    Pattern forming apparatus and method of manufacturing pattern forming apparatus 审中-公开
    图案形成装置和图案形成装置的制造方法

    公开(公告)号：US20060255182A1

    公开(公告)日：2006-11-16

    申请号：US11411983

    申请日：2006-04-27

    申请人： Katsuya Okumura ,  Manabu Yabe ,  Yasuyuki Koyagi ,  Muneo Harada ,  Tomofumi Kiyomoto

    发明人： Katsuya Okumura ,  Manabu Yabe ,  Yasuyuki Koyagi ,  Muneo Harada ,  Tomofumi Kiyomoto

    IPC分类号： B05B1/26 ,  B05B1/34

    CPC分类号： B41J2/1609 ,  B05C5/007 ,  B05C5/0212 ,  B05C5/027 ,  B41J2/1628 ,  B41J2/1631 ,  H01J9/242

    摘要： Using a silicon single crystal with (100) plane orientation as a base material, a pectinate portion having a slope portion and a patterning material guiding groove is formed through photolithography process. A liquid reservoir for keeping a patterning material common to tooth portions of the pectinate portion is formed in the same step as a step for forming the guiding grooves. In forming slope portion, anisotropic wet etching allows easy and accurate formation of a slope portion with (111) plane orientation to (100) plane orientation, by taking advantage of differences in speed due to the plane orientations. In addition, by forming a groove portion using anisotropic dry etching, the patterning material guiding groove having a perpendicular sidewall reaching the slope portion may be formed at high accuracy. A pattern forming apparatus with high accuracy and low cost is provided.

    摘要翻译： 使用具有（100）面取向的硅单晶作为基材，通过光刻工艺形成具有倾斜部分和图案形成材料引导槽的果胶部分。 在与用于形成导向槽的步骤相同的步骤中形成用于保持图形材料的共同于图形部分的牙齿部分的图案材料的液体储存器。 在形成斜坡部分时，通过利用由于平面取向的速度差异，各向异性湿蚀刻允许容易且准确地形成具有（111）面取向到（100）面取向的斜面部分。 此外，通过使用各向异性干蚀刻形成槽部，可以高精度地形成具有到达斜面部的垂直侧壁的图案形成材料导向槽。 提供了一种高精度，低成本的图案形成装置。

    Vibration wave detecting method and vibration wave detector
    25.
    发明授权
    Vibration wave detecting method and vibration wave detector 失效
    振动波检测方法和振动波检测器

    公开(公告)号：US6079274A

    公开(公告)日：2000-06-27

    申请号：US316586

    申请日：1999-05-21

    申请人： Shigeru Ando ,  Muneo Harada

    发明人： Shigeru Ando ,  Muneo Harada

    IPC分类号： G01H1/06 ,  G01H11/08 ,  G01H11/00

    CPC分类号： G01H11/08 ,  G01H1/06

    摘要： A vibration wave detector in which: a plurality of resonator beams, each having a different length and being allowed to resonate at a specific frequency, are provided; a piezoresistor is installed in each resonator beam; and the piezoresistors are parallel-connected so that vibration is converted to an electric signal by the piezoresistors so as to output the sum of vibration waveforms at the respective resonator beams. It is possible to control a gain of a specific frequency band by changing a voltage to be applied to the parallel circuit or changing the resistance value of each piezoresistor.

    摘要翻译： 一种振动波检测器，其特征在于：提供多个具有不同长度并被允许以特定频率谐振的谐振器束; 每个谐振器梁中安装一个压敏电阻; 并且压电电阻器并联连接，从而通过压阻电阻器将振动转换成电信号，以输出各个谐振器波束的振动波形之和。 可以通过改变施加到并联电路的电压或改变每个压敏电阻器的电阻值来控制特定频带的增益。

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    26.
    发明申请
    FILM FORMING APPARATUS AND FILM FORMING METHOD 有权
    薄膜成型装置和薄膜成型方法

    公开(公告)号：US20110039420A1

    公开(公告)日：2011-02-17

    申请号：US12934165

    申请日：2009-03-16

    申请人： Ken Nakao ,  Muneo Harada

    发明人： Ken Nakao ,  Muneo Harada

    IPC分类号： H01L21/47 ,  C23C16/00 ,  C23C16/44 ,  C23C16/46

    CPC分类号： C23C14/12 ,  B05D1/60 ,  B05D3/0473 ,  B05D3/0493 ,  C23C14/243 ,  H01L21/02126 ,  H01L21/02312 ,  H01L21/312

    摘要： A wall surface of a film forming container is heated to or above a vaporization temperature of a material monomer, which is used to form an organic film, by using an external heater formed along the wall surface of the film forming container, substrates are heated to a thermal polymerization reaction temperature by using an internal heater that is disposed apart from the external heater and near a substrate-supporting container in which the substrates are received, and the organic film is formed through thermal polymerization occurring on the substrates by supplying the material monomer into the film forming container.

    摘要翻译： 通过使用沿着成膜容器的壁面形成的外部加热器将成膜容器的壁面加热至或高于用于形成有机膜的材料单体的蒸发温度，将基板加热至 通过使用与外部加热器隔离的内部加热器和接收基板的基板支撑容器附近的内部加热器，形成热聚合反应温度，并且通过在基板上进行热聚合而形成有机膜，所述热聚合通过供给材料单体 进入成膜容器。

    CHROMATOGRAPHY DETECTOR
    27.
    发明申请
    CHROMATOGRAPHY DETECTOR 审中-公开
    色谱检测器

    公开(公告)号：US20090314065A1

    公开(公告)日：2009-12-24

    申请号：US12441608

    申请日：2008-05-08

    申请人： Tomofumi Kiyomoto ,  Muneo Harada ,  Katsuyuki Ono

    发明人： Tomofumi Kiyomoto ,  Muneo Harada ,  Katsuyuki Ono

    IPC分类号： G01N30/60 ,  G01N30/64 ,  G01N30/74

    CPC分类号： G01N30/6095 ,  G01N30/6004

    摘要： A chromatography detector 11 includes a base substrate having a main surface 12a and a column flow path 15 formed on the main surface 12a, and a substrate block 13 and 14, which has a detection space 18 communicating with an outlet of the column flow path 15 and is stacked on the main surface 12a of the base substrate 12 so as to close a top surface of the column flow path 15.

    摘要翻译： 色谱检测器11包括具有形成在主表面12a上的主表面12a和柱流路15的基底基板和具有与柱流路15的出口连通的检测空间18的基板块13和14 并且堆叠在基底基板12的主表面12a上，以封闭柱流路15的顶面。

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    29.
    发明申请
    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 有权
    制造半导体器件的方法

    公开(公告)号：US20130089983A1

    公开(公告)日：2013-04-11

    申请号：US13643102

    申请日：2011-04-04

    申请人： Kippei Sugita ,  Kenji Matsuda ,  Hiroyuki Hashimoto ,  Muneo Harada

    发明人： Kippei Sugita ,  Kenji Matsuda ,  Hiroyuki Hashimoto ,  Muneo Harada

    IPC分类号： H01L21/283

    CPC分类号： H01L21/283 ,  H01L21/0206 ,  H01L21/02063 ,  H01L21/31058 ,  H01L21/31138 ,  H01L21/76826 ,  H01L21/76828 ,  H01L21/76831 ,  H01L21/76898

    摘要： The method includes forming a hole penetrating from one surface of a substrate to an electrode formed on the other surface of the substrate; forming an organic insulating film in the hole; removing at least a part of the organic insulating film formed in a bottom portion of the hole and not the organic insulating film formed on a side wall portion of the hole, to expose the electrode; cleaning an exposed surface of the electrode by using plasma of an inert gas; filling a conductive metal in the hole; removing at least a part of a surface of the organic insulating film by the reaction of oxygen plasma; and annealing the substrate in a dysoxidative atmosphere.

    摘要翻译： 该方法包括形成从衬底的一个表面穿透到形成在衬底的另一个表面上的电极的孔; 在孔中形成有机绝缘膜; 除去形成在孔的底部的有机绝缘膜的至少一部分，而不是形成在孔的侧壁部上的有机绝缘膜，以露出电极; 通过使用惰性气体的等离子体清洁电极的暴露表面; 在孔中填充导电金属; 通过氧等离子体的反应去除有机绝缘膜的至少一部分表面; 并在氧化性气氛中退火底物。