公开(公告)号：US07368017B2

公开(公告)日：2008-05-06

申请号：US10734704

申请日：2003-12-12

申请人： Fred C. Redeker ,  John Boyd ,  Yezdi Dordi ,  William Thie ,  Bob Maraschin

发明人： Fred C. Redeker ,  John Boyd ,  Yezdi Dordi ,  William Thie ,  Bob Maraschin

IPC分类号： B05C3/02

CPC分类号： H01L21/7684 ,  C23C18/06 ,  C23C18/1216 ,  C23C18/1225 ,  C23C18/1291 ,  C23C18/14 ,  H01L21/288

摘要： Broadly speaking, the present invention provides a method and an apparatus for planarizing a semiconductor wafer (“wafer”). More specifically, the present invention provides for depositing a planarizing layer over the wafer, wherein the planarizing layer serves to fill recessed areas present on a surface of the wafer. A planar member is positioned over and proximate to a top surface of the wafer. Positioning of the planar member serves to entrap electroless plating solution between the planar member and the wafer surface. Radiant energy is applied to the wafer surface to cause a temperature increase at an interface between the wafer surface and the electroless plating solution. The temperature increase in turn causes plating reactions to occur at the wafer surface. Material deposited through the plating reactions forms a planarizing layer that conforms to a planarity of the planar member.

摘要翻译： 广义而言，本发明提供了一种用于平面化半导体晶片（“晶片”）的方法和装置。 更具体地，本发明提供了在晶片上沉积平坦化层，其中平坦化层用于填充存在于晶片表面上的凹陷区域。 平面构件定位在晶片的顶表面上方并靠近晶片的顶表面。 平面构件的定位用于在平面构件和晶片表面之间夹带化学镀溶液。 辐射能量被施加到晶片表面以在晶片表面和化学镀溶液之间的界面处引起温度升高。 温度升高又会导致电镀反应发生在晶片表面。 通过电镀反应沉积的材料形成符合平面构件平坦度的平坦化层。

公开(公告)号：US07211292B1

公开(公告)日：2007-05-01

申请号：US10868417

申请日：2004-06-15

申请人： Leonid V. Budaragin

发明人： Leonid V. Budaragin

IPC分类号： B05D3/02

CPC分类号： C23C18/1216 ,  C23C18/1291 ,  C23C26/00 ,  Y02T50/67 ,  Y10T428/12007 ,  Y10T428/265

摘要： The method is disclosed for coating or impregnating a metal cutting tool with a metal oxide. The method includes the steps of applying a liquid metal carboxylate composition, or a solution thereof, to a substrate material, and exposing the metal cutting tool to an environment that will cause vaporization or dissipation of any excess carboxylic acids in the liquid metal carboxylate composition and conversion of the metal carboxylates to metal oxides.

摘要翻译： 公开了用金属氧化物涂覆或浸渍金属切削工具的方法。 该方法包括以下步骤：将液态金属羧酸盐组合物或其溶液施加到基底材料上，并将金属切削工具暴露于将导致液态金属羧酸盐组合物中任何过量羧酸蒸发或消散的环境;以及 金属羧酸盐转化为金属氧化物。

公开(公告)号：US20060246216A1

公开(公告)日：2006-11-02

申请号：US11332494

申请日：2006-01-13

申请人： Gye-Won Hong ,  Hee-Gyon Lee ,  Sang-Im Yoo ,  Jai-Moo Yoo

发明人： Gye-Won Hong ,  Hee-Gyon Lee ,  Sang-Im Yoo ,  Jai-Moo Yoo

IPC分类号： B05D5/12 ,  B05D3/02

CPC分类号： H01L39/2425 ,  C01G3/006 ,  C01P2002/72 ,  C01P2006/40 ,  C04B35/4508 ,  C04B35/6264 ,  C04B35/6325 ,  C04B2235/3215 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/3227 ,  C04B2235/3229 ,  C23C18/1216 ,  C23C18/1254 ,  C23C18/1291 ,  C23C18/1295

摘要： There is provided a method of fabricating a precursor solution for a metal organic deposition method using a superconducting oxide as a starting material, the method including dispersing a superconducting material powder in a TFA acid aqueous solution and heating them to dissolve the powder in the TFA solution; increasing a temperature of a hot substrate if the powder is completely dissolved, and the solution is clear, and continuously heating until the solution is vaporized and is in a viscous jelly state; stopping the heating if the solution loses its flowing property completely, and cooling the solution; and dissolving the compound in the jelly state, hardened at a room temperature, into an organic solvent, to provide metal organic deposition solution for coating. There is also provided a method of fabricating a thin film-typed superconductor using a metal organic deposition method, the method including dispersing a superconducting material powder in a TFA acid aqueous solution and heating them to dissolve the powder in the TFA solution; increasing a temperature of a hot substrate if the powder is completely dissolved, and the solution is clear, and continuously heating until the solution is vaporized and is in a viscous jelly state; stopping the heating if the solution loses its flowing property completely, and cooling the solution; dissolving the compound in the jelly state, hardened at a room temperature, into an organic solvent, to provide a superconducting material powder-TFA precursor solution; after forming a textured oxide buffer layer on a textured metal substrate, or forming a textured oxide template on a metal substrate and forming an oxide buffer layer thereon, dropping the superconducting material powder-TFA precursor solution on the single crystal metal substrate so as to deposit a thin film; and drying it to form the thin film; and applying a calcination heat treatment on the thin film to provide the thin film with a superconducting property. In the method of fabricating a thin film superconducting conductor using REBa2Cu3O7-x (RE=rare earth elements such as Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, etc. or mixture thereof), a precursor solution is fabricated by dissolving REBa2Cu3O7-x (RE=rare earth elements such as Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, etc. or mixture thereof) group of oxide into TFA acid aqueous solution, and using the precursor solution, the superconducting conductor can be provided more easily with a lower price than a conventional precursor solution.

公开(公告)号：US06537845B1

公开(公告)日：2003-03-25

申请号：US09942536

申请日：2001-08-30

申请人： Brian E. McCandless ,  William N. Shafarman

发明人： Brian E. McCandless ,  William N. Shafarman

IPC分类号： H01L2100

CPC分类号： H01L31/1836 ,  C23C6/00 ,  C23C18/1204 ,  C23C18/1225 ,  C23C18/1291 ,  C23C26/02 ,  H01L21/0237 ,  H01L21/02422 ,  H01L21/02485 ,  H01L21/02491 ,  H01L21/02502 ,  H01L21/02551 ,  H01L21/02557 ,  H01L21/02562 ,  H01L21/02568 ,  H01L21/02628 ,  H01L31/073 ,  H01L31/0749 ,  Y02E10/541 ,  Y02E10/543 ,  Y02P70/521

摘要： A chemical surface deposition process for forming an ultra-thin semiconducting film of Group IIB-VIA compounds onto a substrate. This process eliminates particulates formed by homogeneous reactions in bath, dramatically increases the utilization of Group IIB species, and results in the formation of a dense, adherent film for thin film solar cells. The process involves applying a pre-mixed liquid coating composition containing Group IIB and Group VIA ionic species onto a preheated substrate. Heat from the substrate causes a heterogeneous reaction between the Group IIB and VIA ionic species of the liquid coating composition, thus forming a solid reaction product film on the substrate surface.

摘要翻译： 用于在基底上形成IIB-VIA族化合物的超薄半导体膜的化学表面沉积工艺。 该方法消除了在浴中均匀反应形成的微粒，大大提高了IIB族的利用率，并导致薄膜太阳能电池形成致密的粘附膜。 该方法包括将含有IIB族和VIA族VIA离子物质的预混合液体涂料组合物施加到预热的基底上。 来自基材的热量导致液体涂料组合物的IIB族和VIA族离子物质之间的非均相反应，从而在基材表面上形成固体反应产物膜。

公开(公告)号：US06413883B1

公开(公告)日：2002-07-02

申请号：US09243254

申请日：1999-02-03

申请人： Shinichiro Hayashi ,  Larry D. McMillan ,  Carlos A. Paz de Araujo

发明人： Shinichiro Hayashi ,  Larry D. McMillan ,  Carlos A. Paz de Araujo

IPC分类号： H01L2131

CPC分类号： C23C18/1216 ,  C23C18/1291 ,  C23C18/14 ,  H01L21/02197 ,  H01L21/02282 ,  H01L21/02348 ,  H01L21/31691

摘要： A plurality of liquids, the flow of each controlled by a volumetric flowrate controller, are mixed in a mixer to form a final precursor that is misted and then deposited on a substrate. A physical property of precursor liquid is adjusted by adjusting the volumetric flowrate controllers, so that when precursor is applied to substrate and treated, the resulting thin film of solid material has a smooth and planar surface. Typically the physical property is the viscosity of the precursor, which is selected to be relatively low, in the range of 1-2 centipoise.

摘要翻译： 将多个液体，每个由体积流量控制器控制的流量在混合器中混合以形成被雾化并随后沉积在基底上的最终前体。 通过调节体积流量控制器来调节前体液体的物理性质，使得当将前体施加到基底并进行处理时，所得到的固体材料薄膜具有平滑和平坦的表面。 通常，物理性质是前体的粘度，其被选择为相对较低，在1-2厘泊的范围内。

公开(公告)号：US06372666B1

公开(公告)日：2002-04-16

申请号：US09379866

申请日：1999-08-24

申请人： Teresa Ramos ,  Douglas M. Smith ,  James Drage ,  Rick Roberts

发明人： Teresa Ramos ,  Douglas M. Smith ,  James Drage ,  Rick Roberts

IPC分类号： B05D306

CPC分类号： H01L21/31695 ,  C23C18/06 ,  C23C18/1212 ,  C23C18/122 ,  C23C18/1275 ,  C23C18/1291 ,  C23C18/1295 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/02343 ,  H01L21/76828 ,  H01L21/76829

摘要： A process for forming a nanoporous silica dielectric coating on a substrate. A substrate containing a deposited film is suspended within a sealable hotplate, while remaining free of contact with the hotplate. The hotplate is sealed and an inert gas is flowed across the substrate. The hotplate is heated to a temperature of from about 350° C. or higher, and the substrate is forced to contact the heated hotplate. The substrate is heated for a time that sufficiently removes outgassing remnants from the resultant nanoporous dielectric coating.

摘要翻译： 一种在衬底上形成纳米多孔二氧化硅电介质涂层的方法。 将含有沉积膜的基材悬浮在可密封的热板内，同时不与电热板接触。 电热板被密封，惰性气体流过基板。 将加热板加热至约350℃或更高的温度，并且将基板强制接触加热的热板。 将基底加热一段时间，以充分去除所得纳米多孔介电涂层的除气残余物。

公开(公告)号：US20020041928A1

公开(公告)日：2002-04-11

申请号：US08824418

申请日：1997-03-26

发明人： LEONID V. BUDARAGIN

IPC分类号： B05D003/02

CPC分类号： C23C18/1216 ,  C23C18/1291 ,  C23C26/00 ,  Y02T50/67 ,  Y02T50/6765 ,  Y10T428/12007 ,  Y10T428/265

摘要： The method is disclosed for coating or impregnating a substrate with a metal oxide. The method includes the steps of applying a liquid metal carboxylate composition, or a solution thereof, to a substrate material, and exposing the substrate material to an environment that will cause vaporization or dissipation of any excess carboxylic acids in the liquid metal carboxylate composition and conversion of the metal carboxylates to metal oxides.

摘要翻译： 公开了用金属氧化物涂覆或浸渍衬底的方法。 该方法包括以下步骤：将液态金属羧酸盐组合物或其溶液施加到基底材料上，并将基底材料暴露于将导致液态金属羧酸盐组合物中任何过量的羧酸蒸发或消散的环境中，并且转化 的金属羧酸盐与金属氧化物反应。

公开(公告)号：US06174213B1

公开(公告)日：2001-01-16

申请号：US09388038

申请日：1999-09-01

申请人： Carlos A. Paz de Araujo ,  Jolanta Celinska ,  Joseph D. Cuchiaro ,  Jeffrey W. Bacon ,  Larry D. McMillan ,  Akihiro Matsuda ,  Gota Kano ,  Yoshio Yamaguchi ,  Tatsuo Morita ,  Hideo Nagai

发明人： Carlos A. Paz de Araujo ,  Jolanta Celinska ,  Joseph D. Cuchiaro ,  Jeffrey W. Bacon ,  Larry D. McMillan ,  Akihiro Matsuda ,  Gota Kano ,  Yoshio Yamaguchi ,  Tatsuo Morita ,  Hideo Nagai

IPC分类号： B05D722

CPC分类号： C03C17/3417 ,  C03C17/253 ,  C03C2217/21 ,  C03C2217/211 ,  C03C2217/24 ,  C03C2217/244 ,  C23C18/1216 ,  C23C18/1225 ,  C23C18/1275 ,  C23C18/1283 ,  C23C18/1291

摘要： Metal organic precursor compounds are dissolved in an organic solvent to form a nonaqueous liquid precursor. The liquid precursor is applied to the inner envelope surface of a fluorescent lamp and heated to form a metal oxide thin film layer. The metal oxide thin film layer may be a conductor, a protective layer or provide other functions. The films have a thickness of from 20 nm to 500 nm. A conductive layer comprising tin-antimony oxide with niobium dopant may be fabricated to have a differential resistivity profile by selecting a combination of precursor composition and annealing temperatures.

摘要翻译： 将金属有机前体化合物溶解在有机溶剂中以形成非水性液体前体。 将液体前体施加到荧光灯的内包络面上并加热形成金属氧化物薄膜层。 金属氧化物薄膜层可以是导体，保护层或提供其他功能。 膜的厚度为20nm至500nm。 可以通过选择前体组合物和退火温度的组合来制造包含具有铌掺杂剂的锡 - 锑氧化物的导电层以具有差分电阻率分布。

公开(公告)号：US06120840A

公开(公告)日：2000-09-19

申请号：US942964

申请日：1997-10-03

申请人： Partha P. Paul ,  Stuart T. Schwab

发明人： Partha P. Paul ,  Stuart T. Schwab

IPC分类号： C04B35/56 ,  C04B35/58 ,  C04B35/80 ,  C23C18/12 ,  B05D3/02 ,  B32B7/10

CPC分类号： C04B35/5622 ,  C04B35/5603 ,  C04B35/5607 ,  C04B35/58 ,  C04B35/58078 ,  C04B35/806 ,  C23C18/1204 ,  C23C18/1208 ,  C23C18/1291

摘要： The present invention provides a method for making a ceramic matrix composite comprising forming an infiltrated fiber reinforcement by infiltrating a plurality of plies of a fibrous material with a precursor polymer which decomposes to a substantially pure product selected from the group consisting of a refractory metal carbide and a refractory metal boride, and exposing the infiltrated fiber reinforcement to conditions effective to cure the precursor polymer and to decompose the precursor polymer to said substantially pure product.

摘要翻译： 本发明提供了一种制备陶瓷基质复合材料的方法，包括通过将多个纤维材料层与前体聚合物一起浸渗形成渗透的纤维增强剂，所述前体聚合物分解成基本上纯的产物，所述产物选自耐火金属碳化物和 耐火金属硼化物，并将渗透的纤维增强物暴露于有效固化前体聚合物并将前体聚合物分解成所述基本上纯的产物的条件。

公开(公告)号：US4242374A

公开(公告)日：1980-12-30

申请号：US31421

申请日：1979-04-19

申请人： Joseph L. Sansregret

发明人： Joseph L. Sansregret

IPC分类号： C01G1/02 ,  C01B17/20 ,  C01B19/04 ,  C03C17/22 ,  C04B41/50 ,  C04B41/85 ,  C23C18/12 ,  C23C26/00 ,  C30B25/02 ,  H01L31/032 ,  H01L31/04 ,  H01L31/074 ,  H01L31/18

CPC分类号： C04B41/85 ,  C03C17/22 ,  C04B41/009 ,  C04B41/50 ,  C23C18/1204 ,  C23C18/1245 ,  C23C18/1291 ,  C23C26/00 ,  H01L31/032 ,  H01L31/074 ,  H01L31/18 ,  H01L31/1828 ,  C03C2217/287 ,  C03C2218/112 ,  C03C2218/32 ,  Y02E10/543 ,  Y02P20/134 ,  Y10S438/93

摘要： A low cost chemical spray deposition of metal and mixed metal chalcogenides is accomplished by spray depositing an oxide film from a mixture of a salt of the metal in solution with a water soluble hydrocarbon and water solvent. This oxide film is subjected to a heat treatment in the presence of a chalcogenide gas to induce an ion exchange process transforming the metal oxide or mixed metal oxide into the chalcogenide films of the present invention.The deposition process is used to provide efficient selective absorbing surfaces for a solar thermal energy converter. The process may further be employed to produce a thin film photovoltaic device for converting light energy into electricity.

摘要翻译： 通过从溶液中的金属盐与水溶性烃和水溶剂的混合物喷射沉积氧化物膜，实现金属和混合金属硫族化物的低成本化学喷涂沉积。 在硫族化物气体的存在下对该氧化膜进行热处理，以诱导将金属氧化物或混合金属氧化物转化为本发明的硫族化物膜的离子交换工艺。 沉积过程用于为太阳能热能转换器提供有效的选择性吸收表面。 该方法可以进一步用于制造用于将光能转换成电的薄膜光伏器件。