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    Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected
    31.
    发明申请
    Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected 失效
    半导体基板的制造方法以及检查被检体的图案的缺陷的方法和装置

    公开(公告)号：US20020154303A1

    公开(公告)日：2002-10-24

    申请号：US10098478

    申请日：2002-03-18

    Inventor： Shunji Maeda ,  Yasuhiko Nakayama ,  Minoru Yoshida ,  Hitoshi Kubota ,  Kenji Oka

    IPC: G01N021/88

    CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/95615 ,  G01N2201/0618 ,  G01N2201/0634

    Abstract: A pattern detection method and apparatus thereof for inspecting with high resolution a micro fine defect of a pattern on an inspected object and a semiconductor substrate manufacturing method and system for manufacturing semiconductor substrates such as semiconductor wafers with a high yield. A micro fine pattern on the inspected object is inspected by irradiating an annular-looped illumination through an objective lens onto a wafer mounted on a stage, the wafer having micro fine patterns thereon. The illumination light may be circularly or elliptically polarized and controlled according to an image detected on the pupil of the objective lens and image signals are obtained by detecting a reflected light from the wafer. The image signals are compared with reference image signals and a part of the pattern showing inconsistency is detected as a defect so that simultaneously, a micro fine defect or defects on the micro fine pattern are detected with high resolution. Further, process conditions of a manufacturing line are controlled by analyzing a cause of defect and a factor of defect which occurs on the pattern.

    Abstract translation: 一种用于以高分辨率检查被检查物体上的图案的微细缺陷的图案检测方法及其装置以及以高产率制造半导体晶片等半导体基板的半导体基板的制造方法和系统。 通过将通过物镜的环形照明照射到安装在台架上的晶片上，检查被检查物体上的微细图案，晶片上具有微细精细图案。 照明光可以根据在物镜的光瞳上检测到的图像而被圆形或椭圆偏振并且被控制，并且通过检测来自晶片的反射光来获得图像信号。 将图像信号与参考图像信号进行比较，并且检测出显示不一致的图案的一部分作为缺陷，从而同时以高分辨率检测微细微图案或微细图案上的缺陷。 此外，通过分析缺陷的原因和在图案上发生的缺陷因素来控制生产线的工艺条件。

    Method for identifying a diffusely-reflecting material
    33.
    发明授权
    Method for identifying a diffusely-reflecting material 失效
    用于识别漫反射材料的方法

    公开(公告)号：US5475201A

    公开(公告)日：1995-12-12

    申请号：US1380

    申请日：1993-02-25

    Applicant: John N. Pike

    Inventor： John N. Pike

    IPC: G01N21/35 ,  D06F75/26 ,  G01J3/12 ,  G01J3/28 ,  G01J3/46 ,  G01N21/47 ,  H05B1/02

    CPC classification number: G01N21/474 ,  D06F75/26 ,  G01J2003/1239 ,  G01J3/2803 ,  G01N21/35 ,  G01N2201/0618

    Abstract: An apparatus and method is provided for identifying a diffusely-reflecting material, such as a textile fabric. A light source transmits radiation onto the unknown material, and a detector receives radiation diffusely reflected by the unknown material, and generates signals indicative of diffuse-reflection characteristics of the unknown material. A processor is coupled to the detector, and includes diffuse-reflection data on a plurality of reference materials. The processor compares the diffuse-reflection characteristics of the unknown material based on the signals of the detector to the reference data, and by a process of elimination, identifies the unknown material.

    Abstract translation: 提供了一种用于识别诸如织物之类的漫反射材料的装置和方法。 光源将辐射传递到未知材料上，并且检测器接收由未知材料漫反射的辐射，并产生指示未知材料的漫反射特性的信号。 处理器耦合到检测器，并且在多个参考材料上包括漫反射数据。 处理器将基于检测器的信号的未知材料的漫反射特性与参考数据进行比较，并通过消除过程识别未知材料。

    DYNAMIC SIGNAL EXTENSION IN OPTICAL DETECTION SYSTEMS
    36.
    发明申请
    DYNAMIC SIGNAL EXTENSION IN OPTICAL DETECTION SYSTEMS 有权
    光学检测系统中的动态信号扩展

    公开(公告)号：US20130119277A1

    公开(公告)日：2013-05-16

    申请号：US13737279

    申请日：2013-01-09

    Applicant: Molecular Devices, LLC

    Inventor： Josef J. Atzler ,  Bernhard Schinwald

    IPC: G01N21/64

    CPC classification number: G01N21/64 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/0256 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/427 ,  G01J3/4406 ,  G01N21/6408 ,  G01N21/6428 ,  G01N21/6445 ,  G01N21/645 ,  G01N21/763 ,  G01N2021/1738 ,  G01N2021/6415 ,  G01N2021/6419 ,  G01N2021/6441 ,  G01N2021/6482 ,  G01N2201/024 ,  G01N2201/0618 ,  G01N2201/062 ,  G01N2201/0621 ,  G01N2201/0692 ,  G01N2201/0696

    Abstract: Systems and methods for measuring a target in a sample, the target being capable of generating an emitted light in response to an excitation light. In an example system, an excitation light source generates the excitation light along an excitation optical path. An attenuation filter arrangement selectively adds an attenuation filter to the excitation optical path. The attenuation filter attenuates the excitation light by a corresponding attenuation factor. The excitation light exits the attenuation filter arrangement along the excitation optical path to illuminate the sample. A light energy detector receives the emitted light generated in response to the excitation light, and outputs a measured signal level corresponding to an emitted light level. If the light energy detector indicates an overflow, signal measurement is repeated with attenuation filters of increasing attenuation factors until the measured signal level does not overflow.

    Abstract translation: 用于测量样本中的目标的系统和方法，所述目标能够响应于激发光产生发射的光。 在示例性系统中，激发光源沿着激发光路产生激发光。 衰减滤波器装置选择性地将衰减滤波器添加到激励光路。 衰减滤波器通过相应的衰减因子衰减激发光。 激发光沿着激发光路离开衰减滤光器装置以照亮样品。 光能检测器接收响应于激发光产生的发射光，并且输出与发射的光级相对应的测量信号电平。 如果光能检测器指示溢出，则使用增加衰减因子的衰减滤波器重复信号测量，直到测量信号电平不会溢出。

    Method and a machine for balancing vehicle wheels
    38.
    发明授权
    Method and a machine for balancing vehicle wheels 有权
    方法和平衡车轮的机器

    公开(公告)号：US08113049B2

    公开(公告)日：2012-02-14

    申请号：US12439434

    申请日：2007-05-08

    Applicant: Remo Corghi

    Inventor： Remo Corghi

    IPC: G01M1/16

    CPC classification number: G01N21/255 ,  G01B11/2522 ,  G01N21/85 ,  G01N2201/0221 ,  G01N2201/0224 ,  G01N2201/0618 ,  G01N2201/0692 ,  G01N2201/0694 ,  G01N2201/0696 ,  G06T7/521

    Abstract: A method and a machine for balancing vehicle wheels with weights (18), the method comprising stages of: using a video camera (5, 6, 206) to frame a portion of a surface of a hub (101) of a wheel on which a weight (18) is to be applied, locating, in images of the hub (101) taken by the camera (5, 6, 206), at least a balancing plane (E1, E2) which is perpendicular to a rotation axis (A) of the wheel, piloting at least a pick-up device (8, 9, 209) such as to direct the at least a pick-up device (8, 9, 209) onto a point (P1, P2) of the hub (101) belonging to the balancing plane (E1, E2), detecting, by means of the pick-up device (8, 9, 209) characteristic geometric parameters of the hub (101) at the balancing plane (E1, E2), measuring an imbalance of the wheel, calculating, by means of an electronic calculator (4, 204) an entity of at least a weight (18) to be applied to the hub (101) at the balancing plane (E1, E2), and also calculating an angular position (T1, T2) of the weight (18) in the balancing plane (E1, E2).

    Abstract translation: 一种用于平衡车轮与重物（18）的方法和机器，所述方法包括以下步骤：使用摄像机（5,6,206）来构成车轮的轮毂（101）的表面的一部分，其中轮 将重量（18）应用于定位在由照相机（5,60）取下的轮毂（101）的图像中，至少一个垂直于旋转轴线的平衡面（E1，E2） A），至少引导拾取装置（8,9,209），以将至少一个拾取装置（8,9,209）引导到所述至少一个拾取装置（1）的点（P1，P2）上， 通过所述拾取装置（8,9,209）检测所述轮毂（101）在所述平衡面（E1，E2）处的特征几何参数，所述轮毂（101）属于所述平衡平面（E1，E2） 测量车轮的不平衡，借助于电子计算器（4,204）计算要在平衡平面（E1，E2）处施加到轮毂（101）的至少一个重量（18）的实体， 并计算重量（18）在t中的角位置（T1，T2） 他平衡平面（E1，E2）。

    Optical property measuring method and optical property measuring apparatus
    39.
    发明授权
    Optical property measuring method and optical property measuring apparatus 失效
    光学性能测量方法和光学性能测量仪器

    公开(公告)号：US07675620B2

    公开(公告)日：2010-03-09

    申请号：US11999273

    申请日：2007-12-05

    Applicant: Kenji Imura

    Inventor： Kenji Imura

    IPC: G01J3/00 ,  G01J3/46

    CPC classification number: G01N21/643 ,  G01N21/251 ,  G01N21/59 ,  G01N21/645 ,  G01N33/346 ,  G01N2021/3155 ,  G01N2021/6491 ,  G01N2201/0618 ,  G01N2201/062 ,  G01N2201/065 ,  G01N2201/0696

    Abstract: In an optical property measuring method and an optical property measuring apparatus, a spectral transmittance characteristic of a reference colored layer prepared as a reference is corrected based on a measured spectral reflection characteristic of a colored layer, and the spectral reflection characteristic of the reference colored layer. With this arrangement, information on the measured spectral transmittance characteristic of the colored layer can be obtained with sufficient precision in conformity with a printing condition of a sample to be measured. Thus, colorimetry of a printed color of a fluorescent sample i.e. a colored surface on a fluorescent substrate can be accurately performed by using the corrected spectral transmittance characteristic of the reference colored layer.

    Abstract translation: 在光学特性测量方法和光学特性测量装置中，基于测量的着色层的光谱反射特性校正作为基准准备的参考着色层的光谱透射率特性，并且参考着色层的光谱反射特性 。 利用这种布置，可以以与要测量的样品的打印条件一致的足够的精度获得关于着色层的测量的光谱透射率特性的信息。 因此，可以通过使用校正的参考着色层的光谱透射率特性来精确地进行荧光样品的印刷色，即荧光基板上的着色表面的比色。

    NONINVASIVE MEASUREMENT OF CAROTENOIDS IN BIOLOGICAL TISSUE
    40.
    发明申请
    NONINVASIVE MEASUREMENT OF CAROTENOIDS IN BIOLOGICAL TISSUE 有权
    生物组织中非生物活性测定

    公开(公告)号：US20090306521A1

    公开(公告)日：2009-12-10

    申请号：US12134667

    申请日：2008-06-06

    Applicant: Igor V. Ermakov ,  Werner Gellerman

    Inventor： Igor V. Ermakov ,  Werner Gellerman

    IPC: A61B6/00 ,  A61B5/103

    CPC classification number: A61B5/0075 ,  A61B5/0053 ,  A61B5/443 ,  G01N21/4785 ,  G01N21/65 ,  G01N2021/4709 ,  G01N2021/4742 ,  G01N2021/4757 ,  G01N2021/656 ,  G01N2201/0221 ,  G01N2201/0618

    Abstract: A method and apparatus are provided for the determination of carotenoid antioxidants and similar chemical compounds in biological tissue such as living skin. The method and apparatus provide a noninvasive, rapid, accurate, and safe determination of carotenoid levels which in turn can provide diagnostic information of the antioxidant status of tissue. Reflection spectroscopy is used to measure the concentrations of carotenoids and similar substances in tissue. White light is directed upon the area of tissue that is of interest. A small fraction of diffusively scattered light is collected and measured. The tissue is pressured to temporarily squeeze blood out of the measured tissue volume while the reflection spectrum is continuously monitored, displayed, and analyzed in near real time. After an optimal time period of typically 15 seconds, the influence of the dominating hemoglobin and oxyhemoglobin tissue absorptions on the reflection spectra are minimized.

    Abstract translation: 提供了一种方法和装置，用于测定生物组织如活皮中的类胡萝卜素抗氧化剂和类似化合物。 该方法和装置提供无创，快速，准确和安全的类胡萝卜素水平的测定，这又可以提供组织的抗氧化状态的诊断信息。 反射光谱法用于测量组织中类胡萝卜素和类似物质的浓度。 白光指向感兴趣的组织区域。 收集并测量一小部分漫射散射光。 对组织进行加压以暂时将血液挤出测量的组织体积，同时连续监测，显示和近实时分析反射光谱。 在最佳时间段通常为15秒后，主要血红蛋白和氧合血红蛋白组织吸收对反射光谱的影响最小化。

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