Abstract:
A pattern detection method and apparatus thereof for inspecting with high resolution a micro fine defect of a pattern on an inspected object and a semiconductor substrate manufacturing method and system for manufacturing semiconductor substrates such as semiconductor wafers with a high yield. A micro fine pattern on the inspected object is inspected by irradiating an annular-looped illumination through an objective lens onto a wafer mounted on a stage, the wafer having micro fine patterns thereon. The illumination light may be circularly or elliptically polarized and controlled according to an image detected on the pupil of the objective lens and image signals are obtained by detecting a reflected light from the wafer. The image signals are compared with reference image signals and a part of the pattern showing inconsistency is detected as a defect so that simultaneously, a micro fine defect or defects on the micro fine pattern are detected with high resolution. Further, process conditions of a manufacturing line are controlled by analyzing a cause of defect and a factor of defect which occurs on the pattern.
Abstract:
A method of photometric in vitro determination of at least one blood gas parameter in a sample of whole blood. The whole blood sample is obtained by connecting an at least partially transparent sample container to an in vivo locality and transferring whole blood into the sample container, then breaking the connection. The sample container is arranged in an optical system which has a radiation source and a means for detecting radiation to locate the sample container between the radiation source and the radiation detection means. Radiation is transmitted to the sample from the radiation source and radiation emitted from the sample is transmitted to the radiation detection means. The detected radiation is used to determine the blood gas parameter of the sample. A system for use in this method has a radiation source, a radiation detection means, an at least partially transparent sample container, and a sample container station.
Abstract:
An apparatus and method is provided for identifying a diffusely-reflecting material, such as a textile fabric. A light source transmits radiation onto the unknown material, and a detector receives radiation diffusely reflected by the unknown material, and generates signals indicative of diffuse-reflection characteristics of the unknown material. A processor is coupled to the detector, and includes diffuse-reflection data on a plurality of reference materials. The processor compares the diffuse-reflection characteristics of the unknown material based on the signals of the detector to the reference data, and by a process of elimination, identifies the unknown material.
Abstract:
A sampling device for photometric determination of the content of an analyte in a sample of whole blood has at least one measuring chamber having two wall parts, at least one wall part being locally transparent, at least one wall part being sufficiently deformable to facilitate displacement of the whole blood sample from the measuring chamber. The measuring chamber also contains a transparent body having a radiation transmission characteristic dependent upon the concentration of a predetermined analyte in the whole blood sample. The sample device is employed in an analyzer for photometric determination of the content of an analyte in a sample of whole blood and in a method of photometric in vitro determination of the content of an analyte in a sample of whole blood. In the method, a sample of whole blood is transferred directly from an in vivo locality to the sampling device, the measuring chamber therein is deformed in a controlled manner to substantially drain the whole blood from the measuring chamber, radiation is transmitted through the substantially drained measuring chamber, detected, and the analyte content determined.
Abstract:
A method and apparatus is described for optically scanning a field of view, the field of view including at least part of an organ as exposed during surgery, and for identifying and classifying areas of tumor within the field of view. The apparatus obtains a spectrum at each pixel of the field of view, and classifies pixels with a kNN-type or neural network classifier previously trained on samples of tumor and organ classified by a pathologist. Embodiments use statistical parameters extracted from each pixel and neighboring pixels. Results are displayed as a color-encoded map of tissue types to the surgeon. In variations, the apparatus provides light at one or more fluorescence stimulus wavelengths and measures the fluorescence light spectrum emitted from tissue corresponding to each stimulus wavelength. The measured emitted fluorescence light spectra are further used by the classifier to identify tissue types in the field of view.
Abstract:
Systems and methods for measuring a target in a sample, the target being capable of generating an emitted light in response to an excitation light. In an example system, an excitation light source generates the excitation light along an excitation optical path. An attenuation filter arrangement selectively adds an attenuation filter to the excitation optical path. The attenuation filter attenuates the excitation light by a corresponding attenuation factor. The excitation light exits the attenuation filter arrangement along the excitation optical path to illuminate the sample. A light energy detector receives the emitted light generated in response to the excitation light, and outputs a measured signal level corresponding to an emitted light level. If the light energy detector indicates an overflow, signal measurement is repeated with attenuation filters of increasing attenuation factors until the measured signal level does not overflow.
Abstract:
A cartridge and cartridge system for use in an apparatus for analyzing a sample are provided. The cartridge has one or more light sources and/or optical systems and other components that are specific for a certain type of application such as fluorescence, absorbance, or luminescence. The light source, optical systems, and other components for a specific application are housed in a single cartridge. The system has a plurality of cartridges for different applications for a multimode instrument. The cartridges are removably engaged with the apparatus in a “plug-in” format such that one cartridge may be removed from the apparatus and another cartridge may be easily installed.
Abstract:
A method and a machine for balancing vehicle wheels with weights (18), the method comprising stages of: using a video camera (5, 6, 206) to frame a portion of a surface of a hub (101) of a wheel on which a weight (18) is to be applied, locating, in images of the hub (101) taken by the camera (5, 6, 206), at least a balancing plane (E1, E2) which is perpendicular to a rotation axis (A) of the wheel, piloting at least a pick-up device (8, 9, 209) such as to direct the at least a pick-up device (8, 9, 209) onto a point (P1, P2) of the hub (101) belonging to the balancing plane (E1, E2), detecting, by means of the pick-up device (8, 9, 209) characteristic geometric parameters of the hub (101) at the balancing plane (E1, E2), measuring an imbalance of the wheel, calculating, by means of an electronic calculator (4, 204) an entity of at least a weight (18) to be applied to the hub (101) at the balancing plane (E1, E2), and also calculating an angular position (T1, T2) of the weight (18) in the balancing plane (E1, E2).
Abstract:
In an optical property measuring method and an optical property measuring apparatus, a spectral transmittance characteristic of a reference colored layer prepared as a reference is corrected based on a measured spectral reflection characteristic of a colored layer, and the spectral reflection characteristic of the reference colored layer. With this arrangement, information on the measured spectral transmittance characteristic of the colored layer can be obtained with sufficient precision in conformity with a printing condition of a sample to be measured. Thus, colorimetry of a printed color of a fluorescent sample i.e. a colored surface on a fluorescent substrate can be accurately performed by using the corrected spectral transmittance characteristic of the reference colored layer.
Abstract:
A method and apparatus are provided for the determination of carotenoid antioxidants and similar chemical compounds in biological tissue such as living skin. The method and apparatus provide a noninvasive, rapid, accurate, and safe determination of carotenoid levels which in turn can provide diagnostic information of the antioxidant status of tissue. Reflection spectroscopy is used to measure the concentrations of carotenoids and similar substances in tissue. White light is directed upon the area of tissue that is of interest. A small fraction of diffusively scattered light is collected and measured. The tissue is pressured to temporarily squeeze blood out of the measured tissue volume while the reflection spectrum is continuously monitored, displayed, and analyzed in near real time. After an optimal time period of typically 15 seconds, the influence of the dominating hemoglobin and oxyhemoglobin tissue absorptions on the reflection spectra are minimized.